公开(公告)号：US09618452B2

公开(公告)日：2017-04-11

申请号：US14741629

申请日：2015-06-17

Applicant: National Central University

Inventor： Szu-Yu Chen ,  Poyu Su ,  Chiao-Sheng Lu ,  Yu John Hsu

IPC: G01N21/64 ,  G01J3/02 ,  G01J3/10 ,  G01J3/12 ,  G01J3/28

CPC classification number: G01N21/6458 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0267 ,  G01J3/04 ,  G01J3/06 ,  G01J3/10 ,  G01J3/12 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/4406 ,  G01J2003/2813 ,  G01J2003/282 ,  G01N2021/6421 ,  G01N2021/6423 ,  G01N2021/6476 ,  G01N2021/6478

Abstract: A fluorescence hyperspectral microscopy system featuring structured illumination and parallel recording includes a light projection sub-system, a detection sub-system, and an electrical controller. The light projection sub-system includes a digital light processing (DLP) module for generating linear excitation light, a first lens set, an optical path allocation element, and an objective lens. The detection sub-system includes a second lens set, a frequency-dividing reflection element, a two-dimensional light detector, and a light collection element. With the detection sub-system performing detection in conjunction with the light projection sub-system, and the electrical controller controlling the DLP module, a two-dimensional moving platform, and the two-dimensional light detector, the fluorescence hyperspectral microscopy system provides increased resolution and can obtain accurate information in spatial and spectral dimensions and hence a four-dimensional hyperspectral image of the object under detection.

公开(公告)号：US20160088711A1

公开(公告)日：2016-03-24

申请号：US14852069

申请日：2015-09-11

Applicant: Systech Electronics Limited

Inventor： Chun Sum NG ,  Siu On LEE

IPC: H05B37/02 ,  G01J1/42

CPC classification number: H05B37/0218 ,  G01J1/4204 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/505 ,  G01J2001/4252 ,  G01J2003/282 ,  H05B33/0863 ,  H05B37/0272 ,  Y02B20/46

Abstract: The present disclosure relates to an adaptable lighting system and a method for adaptive illumination. An example adaptable lighting system comprises an image sensor configured to acquire environmental information associated with a plurality of predetermined regions; a microcontroller configured to calculate an illumination algorithm based on the acquired environmental information, and to generate an adjustment command based on the calculation; and one or more lighting units configured to receive the adjustment command, and to adjust lighting output in accordance with the received adjustment command. An example method for adaptive illumination comprises acquiring, by an image sensor, environmental information associated with a plurality of predetermined regions; calculating, by a microcontroller, an illumination algorithm based on the acquired environmental information; generating, by the microcontroller, an adjustment command based on the calculation; and adjusting lighting output of one or more lighting units in accordance with the generated adjustment command.

Abstract translation: 本公开涉及适应性照明系统和适应照明方法。 示例适应性照明系统包括被配置为获取与多个预定区域相关联的环境信息的图像传感器; 微控制器，被配置为基于所获取的环境信息计算照明算法，并且基于该计算生成调整命令; 以及被配置为接收调整命令的一个或多个照明单元，并且根据接收到的调整命令来调整照明输出。 用于自适应照明的示例性方法包括：通过图像传感器获取与多个预定区域相关联的环境信息; 通过微控制器计算基于获取的环境信息的照明算法; 由微控制器产生基于该计算的调整命令; 以及根据所生成的调整指令调整一个或多个照明单元的照明输出。

公开(公告)号：US20150346029A1

公开(公告)日：2015-12-03

申请号：US14490948

申请日：2014-09-19

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sun Ho KIM ,  Yong Soo KIM ,  Jae Hun KIM ,  Min-Chul PARK ,  Young Tae BYUN ,  Min Ah SEO ,  Joon Mo AHN ,  Deok Ha WOO ,  Seok LEE ,  Taik Jin LEE ,  Young Min JHON

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/10

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

公开(公告)号：US09188485B1

公开(公告)日：2015-11-17

申请号：US14490948

申请日：2014-09-19

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Sun Ho Kim ,  Yong Soo Kim ,  Jae Hun Kim ,  Min-Chul Park ,  Young Tae Byun ,  Min Ah Seo ,  Joon Mo Ahn ,  Deok Ha Woo ,  Seok Lee ,  Taik Jin Lee ,  Young Min Jhon

IPC: G01D18/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

公开(公告)号：US20230392984A1

公开(公告)日：2023-12-07

申请号：US18203125

申请日：2023-05-30

Applicant: IMEC VZW

Inventor： Bruno FIGEYS ,  Robert GEHLHAAR ,  Jan GENOE

IPC: G01J3/28 ,  G01J3/02 ,  G01J4/04

CPC classification number: G01J3/2823 ,  G01J3/0224 ,  G01J3/0216 ,  G01J4/04 ,  G01J3/0229 ,  G01J3/2803 ,  G01J2003/2826 ,  G01J2003/282

Abstract: According to an aspect of the present inventive concept there is provided a device for polarization dependent imaging, comprising a detector comprising an array of light sensitive elements; a plurality of light propagating units, each comprising: a funnel element having a collecting end and a transmitting end, the funnel element being configured to collect light at the collecting end and propagate the light to the transmitting end; a waveguide having a receiving end and a distributing end, the waveguide being configured to receive the light from the transmitting end at the receiving end and propagate the light to the distributing end, wherein the waveguide is configured to propagate the light through the waveguide in dependence of polarization such that a distribution of the light at different locations of the distributing end is dependent on polarization of the light.

公开(公告)号：US20180017444A1

公开(公告)日：2018-01-18

申请号：US15517809

申请日：2015-10-08

Applicant: CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS

Inventor： Valerio PINI ,  Priscila MONTEIRO KOSAKA ,  Francisco Javier TAMAYO DE MIGUEL ,  Montserrat CALLEJA GOMEZ ,  Daniel RAMOS VEGA ,  Oscar MALVAR VIDAL ,  Jose Jaime RUZ MARTINEZ ,  Mario ENCINAR DEL POZO

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/12 ,  G01N21/27

CPC classification number: G01J3/2803 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/28 ,  G01J3/2823 ,  G01J2003/104 ,  G01J2003/106 ,  G01J2003/2813 ,  G01J2003/282 ,  G01J2003/2826 ,  G01N21/27 ,  G02B21/00

Abstract: The invention relates to a spectrophotometer, especially a spectrophotometer that can carry out simultaneous analysis at different points on the same sample (4), with a high spatial resolution and without requiring a mechanical system for physical scanning along the sample. This is obtained by the provision of means for processing the light received by the photodetectors (5), said processing means having a correlation wherein each of the photodetectors (5) corresponds to a spatial point on the sample (4).In the case of dark field applications, the present invention ensures the standardization of the data using the same measure.

公开(公告)号：US20170281007A1

公开(公告)日：2017-10-05

申请号：US15258253

申请日：2016-09-07

Applicant: Speclipse, Inc.

Inventor： Sung Hyun PYUN ,  Wanki MIN

IPC: A61B5/00 ,  G01J3/02 ,  G01J3/443 ,  G01J3/28

CPC classification number: A61B5/0077 ,  A61B5/0075 ,  A61B5/441 ,  A61B5/7246 ,  A61B5/7282 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0248 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/443 ,  G01J2003/282 ,  G06F19/00

Abstract: A disease diagnosis and skin age measurement apparatus includes: a first light collection unit; a second light collection unit; a spectrometer configured to measure a spectrum of the light which is collected by the second light collection unit; a spectrum data comparison unit for disease diagnosis configured to compare the spectrum measured by the spectrometer and reference spectrum data for disease diagnosis; a CCD; an image data comparison unit configured to compare the digital image converted by the CCD and a reference image; a disease diagnosis unit configured to determine whether there is a disease in the body tissue; and/or a spectrum data comparison unit for skin age measurement configured to measure skin age by comparing a spectrum measured by the spectrometer and reference spectrum data for skin age measurement, wherein the light projected onto the body tissue is collimate light.

公开(公告)号：US20160320305A1

公开(公告)日：2016-11-03

申请号：US14741629

申请日：2015-06-17

Applicant: National Central University

Inventor： Szu-Yu CHEN ,  Poyu SU ,  Chiao-Sheng LU ,  Yu John HSU

IPC: G01N21/64 ,  G01J3/28 ,  G01J3/12 ,  G01J3/02 ,  G01J3/10

CPC classification number: G01N21/6458 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0267 ,  G01J3/04 ,  G01J3/06 ,  G01J3/10 ,  G01J3/12 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/4406 ,  G01J2003/2813 ,  G01J2003/282 ,  G01N2021/6421 ,  G01N2021/6423 ,  G01N2021/6476 ,  G01N2021/6478

Abstract: A fluorescence hyperspectral microscopy system featuring structured illumination and parallel recording includes a light projection sub-system, a detection sub-system, and an electrical controller. The light projection sub-system includes a digital light processing (DLP) module for generating linear excitation light, a first lens set, an optical path allocation element, and an objective lens. The detection sub-system includes a second lens set, a frequency-dividing reflection element, a two-dimensional light detector, and a light collection element. With the detection sub-system performing detection in conjunction with the light projection sub-system, and the electrical controller controlling the DLP module, a two-dimensional moving platform, and the two-dimensional light detector, the fluorescence hyperspectral microscopy system provides increased resolution and can obtain accurate information in spatial and spectral dimensions and hence a four-dimensional hyperspectral image of the object under detection.

Abstract translation: 具有结构照明和并行记录的荧光高光谱显微系统包括光投影子系统，检测子系统和电控制器。 光投影子系统包括用于产生线性激发光的数字光处理（DLP）模块，第一透镜组，光路分配元件和物镜。 检测子系统包括第二透镜组，分频反射元件，二维光检测器和光收集元件。 通过检测子系统与光投影子系统进行检测，控制DLP模块的电气控制器，二维移动平台和二维光检测器，荧光高光谱显微系统提供更高的分辨率 并且可以在空间和光谱维度上获得准确的信息，并因此获得被检测物体的四维高光谱图像。

公开(公告)号：US08081244B2

公开(公告)日：2011-12-20

申请号：US12374308

申请日：2007-07-23

Applicant: Michael Golub ,  Menachem Nathan ,  Amir Averbuch

Inventor： Michael Golub ,  Menachem Nathan ,  Amir Averbuch

IPC: H04N3/14 ,  H04N5/335 ,  G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/2803 ,  G01J2003/282

Abstract: Digital cameras for spectrally imaging an object or scene comprise an imaging component, a fixed one-dimensional disperser and an image sensor having sensor pixels, the disperser and image sensor arranged with matching optical parameters and in a predetermined spatial relationship. Each sensor pixel detects multiplexed spectral information from at least two adjacent object points and the spectral information detected by each sensor pixel is demultiplexed and processed into spectral-spatial data to provide spectral images.

Abstract translation: 用于对物体或场景进行光谱成像的数码相机包括成像部件，固定一维分散器和具有传感器像素的图像传感器，分散器和图像传感器以匹配的光学参数和预定的空间关系布置。 每个传感器像素从至少两个相邻的对象点检测多路复用的光谱信息，并且由每个传感器像素检测的光谱信息被解复用并被处理成光谱空间数据以提供光谱图像。

公开(公告)号：US20110007311A1

公开(公告)日：2011-01-13

申请号：US12920624

申请日：2009-02-21

Applicant: Nico Correns

Inventor： Nico Correns

IPC: G01J3/30 ,  G01J3/28

CPC classification number: G01J3/2889 ,  G01J9/00 ,  G01J2003/282

Abstract: The present invention relates to a solution for time-resolved spectroscopy, wherein the sample to be analyzed is illuminated by a modulated light source, and the spectrum reflected therefrom is recorded in a time-resolved manner and evaluated. In the method according to the invention for time-resolved spectroscopy, a sample to be analyzed is irradiated by a modulated light source having short light pulses, and the radiation emitted by the sample is represented via imaging optical elements and a spectral-selective element on a sensor disposed in the image plane, and the signals thereof are evaluated by a control and regulating unit, and/or stored. The sensor disposed in the image plane is a PMD sensor, which in addition to the intensity values also determines the running times of the radiation emitted by the sample, and forwards the same to the control and regulating unit. Although PMD sensors were originally intended for object recognition, particularly in traffic, the use thereof in many other technical fields is conceivable and advantageous. The solution provided herein describes the use of PMD sensors in spectroscopy, particularly for the time-resolved analysis of samples. However, the use of PMD sensors is also possible in Raman spectrometry, or for the measurement of luminescence, such as for differentiating phosphorescence and fluorescence light.

Abstract translation: 本发明涉及一种用于时间分辨光谱的解决方案，其中待分析的样品被调制光源照射，并且以时间分辨的方式记录从其反射的光谱并进行评估。 在根据本发明的用于时间分辨光谱的方法中，待分析的样品被具有短光脉冲的调制光源照射，并且由样品发射的辐射通过成像光学元件和光谱选择元素 设置在图像平面中的传感器，其信号由控制和调节单元进行评估和/或存储。 设置在图像平面中的传感器是PMD传感器，除了强度值还决定了样品发射的辐射的运行时间，并将其传送到控制和调节单元。 虽然PMD传感器最初是用于对象识别，特别是在交通中，但是在许多其他技术领域中的使用是可以想到的和有利的。 本文提供的解决方案描述了在光谱学中使用PMD传感器，特别是对样品的时间分辨分析。 然而，使用PMD传感器在拉曼光谱测定中也是可能的，或者用于测量发光，例如用于区分磷光和荧光。