公开(公告)号：US20120304769A1

公开(公告)日：2012-12-06

申请号：US13477529

申请日：2012-05-22

Applicant: Jun WATANABE ,  Kazuyuki NAKASENDO ,  Takahiro KAMETA

Inventor： Jun WATANABE ,  Kazuyuki NAKASENDO ,  Takahiro KAMETA

IPC: G01P15/00 ,  B23P17/04

CPC classification number: G01P15/0802 ,  G01P15/0922 ,  G01P15/097 ,  G01P2015/0828 ,  H05K3/4623 ,  Y10T29/49002 ,  Y10T29/49124 ,  Y10T29/49126 ,  Y10T29/49817

Abstract: A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Abstract translation: 一种用于制造物理量检测器的方法，用于物理量检测器，该物理量检测器包括平的框架状基部，平板状移动部件，其设置在基部内部，并且其一端经由接头连接到基部 部件以及放置在基部和移动部件上的物理量检测元件。 该方法包括：一体地形成基部，接合部，移动部和连接部，该连接部设置在移动部的自由端侧，将基部与移动部彼此连接; 将物理量检测元件铺设并固定在基部和移动部上; 并切断连接部分。

公开(公告)号：US08283738B2

公开(公告)日：2012-10-09

申请号：US12654902

申请日：2010-01-07

Applicant: Tetsuo Fujii ,  Masaki Inoue

Inventor： Tetsuo Fujii ,  Masaki Inoue

IPC: H01L29/84

CPC classification number: G01P15/0802 ,  B81B7/007 ,  B81B7/02 ,  B81B2207/092 ,  B81B2207/095 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  H01L27/14601 ,  H01L27/148

Abstract: A semiconductor device includes a sensor member and a cap member. The sensor member has a surface and includes a first sensing section. The first sensing section includes first and second portions that are located on the surface side of the sensor member and electrically insulated from each other. The cap member has a surface and includes a cross wiring portion. The surface of the cap member is joined to the surface of the sensor member in such a manner that the first sensing section is sealed by the sensor member and the cap member. The cross wiring portion electrically connects the first portion to the second portion.

Abstract translation: 半导体器件包括传感器部件和盖部件。 传感器构件具有表面并且包括第一感测部分。 第一感测部分包括位于传感器部件的表面侧并彼此电绝缘的第一和第二部分。 盖构件具有表面并且包括交叉布线部分。 盖构件的表面以传感器构件和帽构件密封第一感测部分的方式接合到传感器构件的表面。 十字布线部分将第一部分电连接到第二部分。

公开(公告)号：US08241923B2

公开(公告)日：2012-08-14

申请号：US12522786

申请日：2008-10-30

Applicant: Akio Morii

Inventor： Akio Morii

IPC: H01L21/00

CPC classification number: G01P15/125 ,  G01C19/5719 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: A method for correcting a mask pattern used for dry-etching an object with higher accuracy, and for manufacturing an acceleration sensor and an angular velocity sensor. The object is first etched by a dry-etching process using an uncorrected reference mask pattern. Then, distribution of the size of expansion of a tapered portion formed in a surface of the object is measured. Thereafter, the measured distribution is approximated by using a quadratic curve (Y=AX2+B) so as to determine A and B. Consequently, an amount t of correction for the tapered portion, which is expressed by the following equation (1) and related to a width of an opening of the mask pattern in a position at a distance r from a center of the object to be etched, can be set. In this way, the correction for the tapered portion can be carried out. t=(Ar2+B)/2  (1)

Abstract translation: 一种用于校正用于以更高精度对物体进行干法蚀刻的掩模图案，以及用于制造加速度传感器和角速度传感器的方法。 首先通过使用未校正的参考掩模图案的干蚀刻工艺蚀刻该物体。 然后，测量形成在物体的表面中的锥形部分的膨胀尺寸的分布。 此后，通过使用二次曲线（Y = AX2 + B）近似测量分布，以便确定A和B.因此，由下式（1）表示的锥形部分的校正量t和 可以设置与距离被蚀刻物的中心距离r的位置处的掩模图案的开口的宽度。 以这种方式，可以进行锥形部的校正。 t =（Ar2 + B）/ 2（1）

公开(公告)号：US20120180568A1

公开(公告)日：2012-07-19

申请号：US13374769

申请日：2012-01-11

Applicant: Mitsuaki KOYAMA ,  Takeru MUTOH ,  Hiroki IWAI ,  Yoshiaki AMANO ,  Ryoichi ICHIKAWA

Inventor： Mitsuaki KOYAMA ,  Takeru MUTOH ,  Hiroki IWAI ,  Yoshiaki AMANO ,  Ryoichi ICHIKAWA

IPC: G01H13/00

CPC classification number: G01P15/097 ,  G01L1/142 ,  G01L1/162 ,  G01P1/023 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0871

Abstract: A device is provided for a detecting external force applied to piezoelectric piece. A crystal piece is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively. A movable electrode, connected via a lead-out electrode to the excitation electrode, is formed on the lower face side at a front end of the crystal piece. A fixed electrode is provided on a bottom portion of the container to face this movable electrode. The excitation electrode on the upper face side and the fixed electrode are connected to an oscillation circuit. When the crystal piece bends in response to an applied external force, capacitance between the movable electrode and fixed electrode, changes. This capacitance change results in a corresponding change in oscillation frequency of the crystal piece.

Abstract translation: 提供了用于检测施加到压电片的外力的装置。 水晶片悬臂支撑在容器中。 激励电极分别形成在上表面和下表面上。 通过引出电极连接到激励电极的可动电极形成在晶片的前端的下表面侧。 固定电极设置在容器的底部上以面对该可动电极。 上侧激励电极和固定电极连接到振荡电路。 当晶体片响应于施加的外力弯曲时，可动电极和固定电极之间的电容发生变化。 该电容变化导致晶片的振荡频率的相应变化。

公开(公告)号：US08220328B2

公开(公告)日：2012-07-17

申请号：US12397744

申请日：2009-03-04

Applicant: Felix Rudolf ,  Roberto Frosio ,  Pascal Zwahlen ,  Bertrand Dutoit

Inventor： Felix Rudolf ,  Roberto Frosio ,  Pascal Zwahlen ,  Bertrand Dutoit

IPC: G01P15/00

CPC classification number: G01P15/14 ,  G01C19/5726 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0828

Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.

Abstract translation: 一种用于评估和/或补偿组合加速度计和陀螺仪中的加速度偏移的方法，其中评估或补偿基于由加速度计传递的正交信号。

公开(公告)号：US20120025333A1

公开(公告)日：2012-02-02

申请号：US13267004

申请日：2011-10-06

Applicant: Junichi YOSHIDA

Inventor： Junichi YOSHIDA

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0018 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/053 ,  B81B2207/095 ,  B81B2207/096 ,  B81C1/00587 ,  B81C2201/0133 ,  B81C2203/0118 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: An acceleration sensor is formed using an etched layer sandwiched between first and second substrates. In this case, a structure including a movable portion which is displaceable in the thickness direction of the substrates, and a support frame are formed in the etched layer. In addition, first and second fixed electrodes are formed on the first and second substrates, respectively, at a position facing the movable portion. Further, a remaining sacrificial layer is provided on the substrate by leaving a portion of a second sacrificial layer when a first sacrificial layer is entirely etched away. Therefore, when the first sacrificial layer is etched away, corrosion of the structure and the support beams is prevented because the second sacrificial layer is preferentially corroded as compared to the structure.

Abstract translation: 使用夹在第一和第二基板之间的蚀刻层形成加速度传感器。 在这种情况下，在蚀刻层中形成有包括可在基板的厚度方向上移动的可动部分和支撑框架的结构。 此外，第一和第二固定电极分别在面对可动部分的位置上形成在第一和第二基板上。 此外，当第一牺牲层被完全蚀刻掉时，通过留下第二牺牲层的一部分，在衬底上提供剩余的牺牲层。 因此，当第一牺牲层被蚀刻掉时，由于与结构相比，第二牺牲层被优先腐蚀，所以防止了结构和支撑梁的腐蚀。

公开(公告)号：US08042396B2

公开(公告)日：2011-10-25

申请号：US12208980

申请日：2008-09-11

Applicant: Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

Inventor： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

IPC: G01P9/04 ,  G01C19/00

CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.

Abstract translation: 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。 驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于 一架飞机。

公开(公告)号：US08026714B2

公开(公告)日：2011-09-27

申请号：US12397680

申请日：2009-03-04

Applicant: Dustin Wade Carr

Inventor： Dustin Wade Carr

IPC: G01P15/00 ,  G01P15/03

CPC classification number: G01V7/00 ,  G01P15/093 ,  G01P15/097 ,  G01P2015/0828

Abstract: An accelerometer with improved immunity to sensitivity drift is disclosed. In some embodiments, the accelerometer comprises an actuator that induces a known acceleration on a reference frame. A signal based on this known acceleration is used to calibrate the accelerometer to mitigate the effects due to at least one of sensitivity drift, D.C. bias drift, sense laser wavelength drift, and resonant frequency drift.

Abstract translation: 公开了一种具有提高的对灵敏度漂移的抗扰度的加速度计。 在一些实施例中，加速度计包括在参考系上引起已知加速度的致动器。 基于这种已知加速度的信号用于校准加速度计以减轻由于灵敏度漂移，直流偏置漂移，感测激光波长漂移和谐振频率漂移中的至少一个引起的影响。

公开(公告)号：US07956602B2

公开(公告)日：2011-06-07

申请号：US12061281

申请日：2008-04-02

Applicant: Tamon Kasajima ,  Hiroyoshi Nakajima ,  Yong Jun Dong ,  Fu Yu

Inventor： Tamon Kasajima ,  Hiroyoshi Nakajima ,  Yong Jun Dong ,  Fu Yu

IPC: G01B7/14

CPC classification number: G01C9/06 ,  B82Y25/00 ,  G01C2009/064 ,  G01P15/105 ,  G01P2015/0828 ,  G01R33/0385 ,  G01R33/091

Abstract: To provide a tilt angle sensor that is capable of detecting acceleration, a tilt angle, and the like of a device to which the tilt sensor angle is mounted, and also capable of reducing the size and the cost with a simple structure. The tilt angle sensor comprises: a spring member having a fixed end a free end that has a flexibility to be bent at least in one direction; a magnetic field generating device for generating a magnetic field, which is mounted at the free end of the spring member; a magnetic field detecting device provided by facing the magnetic field generating device for detecting a direction of the magnetic field generated by the magnetic field generating device; and a damping device for giving a damping force to a bending action of the spring member.

Abstract translation: 提供能够检测安装倾斜传感器角度的装置的加速度，倾斜角度等的倾斜角传感器，并且还能够以简单的结构来减小尺寸和成本。 倾斜角传感器包括：弹簧构件，其具有固定端，具有至少沿一个方向弯曲的自由端; 用于产生磁场的磁场产生装置，其安装在弹簧构件的自由端; 磁场检测装置，其通过面对所述磁场产生装置而设置，用于检测由所述磁场产生装置产生的磁场的方向; 以及用于对弹簧构件的弯曲作用施加阻尼力的阻尼装置。

公开(公告)号：US07956302B1

公开(公告)日：2011-06-07

申请号：US12069001

申请日：2008-01-16

Applicant: Daniel Jean ,  Ezra Chen

Inventor： Daniel Jean ,  Ezra Chen

IPC: H01H35/02 ,  H01H35/14 ,  G01P15/135

CPC classification number: H01H35/14 ,  G01P1/023 ,  G01P15/135 ,  G01P2015/0828 ,  H01H1/0036

Abstract: A hermetically packaged G-switch includes a MEMS structure having a bottom substrate layer, a top device layer and an intermediate oxide layer. A mass disposed in the top device layer is connected to one, two or three anchor portions using spring arms. One end of a spring arm is connected to the mass and another end to an anchor portion. The connection to the anchor portion includes a T shaped arrangement, which has a torsional spring cross piece connected to the spring arm. A cap containing a conductive pad is hermetically sealed to the MEMS structure. When a predetermined acceleration is attained, the mass makes electrical contact with the conductive pad to close the G-switch.

Abstract translation: 气密封装的G型开关包括具有底部基底层，顶部器件层和中间氧化物层的MEMS结构。 设置在顶部装置层中的质量使用弹簧臂连接到一个，两个或三个锚定部分。 弹簧臂的一端连接到质量块，另一端连接到锚定部分。 与锚定部分的连接包括T形布置，其具有连接到弹簧臂的扭转弹簧横梁。 包含导电垫的盖子密封到MEMS结构。 当达到预定的加速度时，质量块与导电焊盘电接触以闭合G开关。