公开(公告)号：US5793160A

公开(公告)日：1998-08-11

申请号：US746743

申请日：1996-11-15

申请人： Dennis A. Losco

发明人： Dennis A. Losco

IPC分类号： G03F7/20 ,  H01J61/36

CPC分类号： G03F7/70016 ,  H01J61/366

摘要： A medium pressure quartz lamp for arc discharge illumination, includes a quartz envelope having opposite electrode ends with an electrode unit sealably attached to each of the opposite electrode ends. Each of the electrode units includes an electrode rod extending into the envelope and a platform physically attached to the rod. The platform has a melting point of at least 1,000.degree. C. The electrode units also include at least one conductive, elongated metal foil which has a first end and a second end. The conductive elongated metal foil(s) are attached at their first end to the platform and attached at their second end to a terminal connector. Preferably, plural foils are utilized with a single platform attached to the electrode rod at their first ends and attached to a plurality of terminal connectors a their second ends. Present invention lamps, as a result of utilizing the conductor enhancing platform approximately doubles maximum operating current as compared to prior art lamps of otherwise similar configurations.

摘要翻译： 一种用于电弧放电照明的中压石英灯，包括具有相对电极端的石英外壳，电极单元密封地连接到每个相对的电极端。 每个电极单元包括延伸到外壳中的电极杆和物理地附接到杆的平台。 该平台具有至少1,000℃的熔点。电极单元还包括至少一个具有第一端和第二端的导电细长金属箔。 导电细长金属箔在其第一端附接到平台并在其第二端连接到终端连接器。 优选地，使用多个箔，其中单个平台在其第一端处附接到电极杆，并且在其第二端附接到多个端子连接器。 与其他类似配置的现有技术灯相比，作为使用导体增强平台的结果，本发明的灯大约使最大工作电流翻倍。

公开(公告)号：US5670842A

公开(公告)日：1997-09-23

申请号：US438600

申请日：1995-05-10

申请人： James T. Dolan ,  Brian P. Turner ,  Michael G. Ury ,  Charles H. Wood

发明人： James T. Dolan ,  Brian P. Turner ,  Michael G. Ury ,  Charles H. Wood

IPC分类号： G03F7/20 ,  H01J61/02 ,  H01J61/12 ,  H01J61/35 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J17/20 ,  H01J61/18

CPC分类号： H01J61/025 ,  G03F7/70016 ,  H01J61/04 ,  H01J61/12 ,  H01J61/24 ,  H01J61/35 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J65/042 ,  H01J65/044 ,  H01J65/046 ,  H01J65/048

摘要： Ignition of an electrodeless lamp, energized by microwave or radio energy, is achieved by disposing an additive material in the lamp envelope along with the primary fill material. In a first embodiment, the additive is at least partially electrically conductive at room temperatures but non-conductive or a vapor at lamp operating temperatures. The preferred additives for this embodiment are mercury sulfide and mercury selenide. In a second embodiment, the additive is a material, such as piezoelectric crystals, that produces sparks in the envelope when the crystals collide with each other, or with other materials, in response to agitation of the envelope. The additive may alternatively build up electrostatic charge by rubbing along the interior surface of the lamp envelope when the envelope is agitated, the charge build up being sufficient to ignite the primary fill material.

摘要翻译： 通过微波或无线电能量激发的无电极灯的点火是通过将添加剂材料与主填充材料一起设置在灯壳中来实现的。 在第一实施方案中，添加剂在室温下至少部分导电，但是在灯工作温度下为非导电或蒸气。 该实施方案的优选添加剂是硫化汞和硒化汞。 在第二个实施方案中，添加剂是当晶体相互碰撞或与其它材料相互碰撞时，在外壳中产生火花的材料，例如压电晶体。 添加剂可替代地当包封被搅动时沿着灯壳的内表面摩擦地堆积静电电荷，电荷积聚足以点燃主填充材料。

公开(公告)号：US5608227A

公开(公告)日：1997-03-04

申请号：US517594

申请日：1995-08-22

申请人： Joern Dierks ,  Juergen Maier

发明人： Joern Dierks ,  Juergen Maier

IPC分类号： C03C17/23 ,  C03C17/34 ,  G02B5/28 ,  G03F7/20 ,  H01J61/20 ,  H01J61/30 ,  H01J61/40 ,  H01J61/86

CPC分类号： G03F7/70016 ,  C03C17/23 ,  C03C17/3417 ,  G02B5/283 ,  H01J61/20 ,  H01J61/302 ,  H01J61/40 ,  H01J61/86 ,  C03C2217/212 ,  C03C2217/213 ,  C03C2217/23 ,  H01J61/35

摘要： To essentially eliminate short ultraviolet (UV) radiation from a mercury high-pressure short-arc discharge lamp, that is, wavelengths below the radiation band of 365 nm, the lamp includes a discharge vessel of quartz glass which is coated with a selectively reflective outer coating (2a) and, at the inside, with a selectively absorbing inner coating (2b). The outer coating (2a) is formed by a multi-layer interference reflection filter which preferentially reflects wavelengths between about 240 and 300 nm with a filter cut-off, corresponding to 50% transmission, in the wavelength region between about 290 and 330 nm. The inner coating (2b) is a titanium dioxide coating which, preferentially, absorbs radiation below about 250 nm, with a 50% transmission at about 240 nm. In accordance with a preferred feature of the invention, a radiation absorbing titanium dioxide/silicon dioxide mixed-layer coating (2c) is applied at the outside over the multi-layer interference reflection filter (2a). The outer absorbing coating preferentially absorbs radiation below about 280 nm. Preferably, the multi-layer interference reflection filter is formed by at least 8 alternating ZrO.sub.2 and SiO.sub.2 individual layers; all the coating layers preferably have thicknesses between about 30 and 50 nm.

摘要翻译： 为了基本上消除来自汞高压短弧放电灯的短波长（UV）辐射，即波长低于365nm的辐射波长的波长，该灯包括石英玻璃的放电容器，该放电容器涂覆有选择性反射外壳 涂层（2a）和在内部具有选择性吸收内涂层（2b）。 外涂层（2a）由多层干涉反射滤光片形成，多层干涉反射滤光片在约290nm与330nm之间的波长范围内优先反射约240nm至300nm之间的波长，并具有对应于50％透射率的滤光片截止。 内涂层（2b）是二氧化钛涂层，其优选地吸收低于约250nm的辐射，在约240nm处具有50％透射率。 根据本发明的优选特征，在多层干涉反射滤光器（2a）的外部施加吸收辐射的二氧化钛/二氧化硅混合层涂层（2c）。 外部吸收涂层优先吸收低于约280nm的辐射。 优选地，多层干涉反射滤光器由至少8个交替的ZrO 2和SiO 2单独层形成; 所有涂层的厚度优选在约30和50nm之间。

公开(公告)号：US4704346A

公开(公告)日：1987-11-03

申请号：US868690

申请日：1986-05-30

申请人： Tatsumi Hiramoto ,  Ikuo Iwai ,  Masachika Ohyama ,  Mitsuo Narita

发明人： Tatsumi Hiramoto ,  Ikuo Iwai ,  Masachika Ohyama ,  Mitsuo Narita

IPC分类号： H01J61/20 ,  G03F7/20 ,  H01J61/88 ,  H01L21/027 ,  G03C5/00 ,  H01J61/16

CPC分类号： G03F7/70016

摘要： A semiconductor wafer can be exposed by arranging a combination of electrodes in an opposed relation with an interelectrode distance of not more than 15 mm in a closed discharge cavity, enclosing, within the cavity, mercury as a light-emitting discharge component in an amount such that the vapor pressure of mercury reaches 0.4-5 atms during discharge lighting, forming a discharge between the combination of electrodes while controlling the discharge current at not less than 10 A, and irradiating light, which has been radiated as a result of the discharge and contains at least one of light components having wave-lengths of 405 nm and 436 nm respectively, onto the surface of a photoresist applied on the semiconductor wafer through a photomask or reticle and a lens which permits transmission of the light having wavelength of 405 nm or 436 nm therethrough.

摘要翻译： 半导体晶片可以通过在封闭的放电空腔中以相对的关系布置电极的组合，在封闭的放电空腔内封闭，作为发光放电部件的水银作为发光放电部件 在放电照明期间汞的蒸气压达到0.4-5atms，在控制放电电流不小于10A的同时在电极组合之间形成放电，并且照射由于放电而放射的光;以及 通过光掩模或掩模版和透镜，在波长为405nm的透镜和透镜上分别具有波长为405nm和436nm的光分量中的至少一种， 436 nm。

公开(公告)号：US4673843A

公开(公告)日：1987-06-16

申请号：US799583

申请日：1985-11-19

申请人： Tsuneo Okanuma

发明人： Tsuneo Okanuma

IPC分类号： G03F7/20 ,  H01J61/36 ,  H01J61/82 ,  H01L21/027 ,  H01J61/12 ,  H01J61/35

CPC分类号： G03F7/70016 ,  H01J61/366 ,  H01J61/822

摘要： An electrically-conductive member is provided on the outer wall of a cathode-sealing portion of a dc discharge lamp such as a super high pressure mercury vapor lamp, and the electrically-conductive member is electrically connected to a sealed cathodic conductor which is contained in the cathode-sealing portion and connected to its cathode rod. The electric potential of the electrically-conductive member is thus kept equal to that of the sealed cathodic conductor while the dc discharge lamp is in operation. As a result, the air-tight connection between the sealed cathodic conductor and the quartz glass of the cathode-sealing portion is maintained stably over a long period of time. Such a dc discharge lamp assures long service life and high reliability.

摘要翻译： 导电构件设置在诸如超高压汞蒸气灯的直流放电灯的阴极密封部分的外壁上，并且导电构件电连接到密封的阴极导体，阴极导体包含在 阴极密封部分并连接到其阴极棒。 因此，直流放电灯工作时，导电部件的电位保持与密封阴极导体的电位相等。 结果，密封阴极导体与阴极密封部分的石英玻璃之间的气密连接长时间稳定地保持。 这种直流放电灯确保了长的使用寿命和高可靠性。

公开(公告)号：US4206494A

公开(公告)日：1980-06-03

申请号：US939463

申请日：1978-09-05

申请人： Howard B. Lovering

发明人： Howard B. Lovering

IPC分类号： G03B19/02 ,  F21S8/00 ,  F21V8/00 ,  G02B21/06 ,  G03F7/20 ,  H01L21/027 ,  F21V7/04

CPC分类号： G03F7/70016 ,  G02B6/0005 ,  G03F7/70175 ,  F21W2131/402

摘要： A relatively high percentage of the light given off by a source lamp is gathered by four collector lens systems disposed around the lamp. The desired wavelength components of the light gathered by each lens system are directed by a dichroic mirror toward the system axis and into a respective focusing lens system, while longer wavelengths are transmitted by each mirror to a heat sink. The light from each focusing lens system is directed to the entrance face of a respective sub-bundle of a fiber optic combining system. The entrance face of each sub-bundle is inclined off axis to receive the incident light. The sub-bundles then bend and join each other in alignment with the system axis to transmit the combined light to a single exit face.

摘要翻译： 由源灯发出的相对较高百分比的光由设置在灯周围的四个收集透镜系统聚集。 由每个透镜系统收集的光的期望波长分量由分色镜朝向系统轴线引导到相应的聚焦透镜系统中，而较长的波长由每个反射镜传输到散热器。 来自每个聚焦透镜系统的光被引导到光纤组合系统的相应子束的入射面。 每个子束的入射面倾斜离轴以接收入射光。 子束然后弯曲并且与系统轴线对准地彼此连接，以将组合的光传输到单个出口面。

公开(公告)号：US4190786A

公开(公告)日：1980-02-26

申请号：US891460

申请日：1978-03-29

申请人： Takehiro Kira

发明人： Takehiro Kira

IPC分类号： H01J61/073 ,  G03F7/20 ,  H01J61/16 ,  H01J61/20 ,  H01J61/35 ,  H01J61/86 ,  H01J61/30

CPC分类号： G03F7/70016 ,  H01J61/20

摘要： A discharge lamp of the type which seals mercury and a rare gas in a bulb having sealed therein a pair of electrodes and in which both the mercury and the rare gas contribute to discharge radiation. Letting the value of the quantity of mercury (mg/cc.) sealed per 1 cc. of the volume of the bulb and the value of the (atmospheric) pressure of the rare gas be represented by X and Y, respectively, the values X and Y are selected to be in the ranges of 1.ltoreq.X.ltoreq.13 and 2.ltoreq.Y.ltoreq.10, respectively, whereby to abundantly emit ultraviolet rays of the wavelengths between 2000 to 2500 A. The discharge lamp is employed as a light source for photolithography in the manufacture of semiconductor devices to achieve the formation of a fine pattern in a short time.

摘要翻译： 一种在其中密封有一对电极的灯泡中密封汞和稀有气体的类型的放电灯，其中汞和稀有气体都有助于放电辐射。 使汞的数量（mg / cc）每1cc密封。 的灯泡的体积和稀有气体的（大气压）值分别由X和Y表示，值X和Y被选择在1≤X≤13的范围内 和2

公开(公告)号：US20190080898A1

公开(公告)日：2019-03-14

申请号：US16110620

申请日：2018-08-23

申请人： PHOENIX ELECTRIC CO., LTD.

发明人： Tomihiko IKEDA ,  Kouichi ODANI

IPC分类号： H01J61/52 ,  H01J61/02 ,  H01J61/56 ,  H05B41/36 ,  G03F7/20

CPC分类号： H01J61/523 ,  G03F7/70016 ,  H01J61/025 ,  H01J61/56 ,  H05B41/36

摘要： A light source is composed of a discharge lamp, a resistor and a reflector container. The discharge lamp is provided as a source of light. The resistor increases a resistance in elevation of a temperature thereof, and reduces the resistance in lowering of the temperature thereof. The reflector container is a constituent element to which the discharge lamp and the resistor are attached. Additionally, the resistor is caused to heat an outer surface of the reflector container in accordance with elevation of a temperature of the discharge lamp in activation of lighting of the discharge lamp.

公开(公告)号：US09814126B2

公开(公告)日：2017-11-07

申请号：US15029285

申请日：2014-09-23

申请人： ASML Netherlands B.V.

发明人： Martijn Petrus Christianus Van Heumen

IPC分类号： G03F7/20 ,  H05H1/24 ,  H01J61/34 ,  H01J61/40 ,  H01J65/04 ,  G01N21/71 ,  G01N21/956

CPC分类号： H05H1/24 ,  G01B2210/56 ,  G01N21/71 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/068 ,  G03F7/70016 ,  G03F7/70575 ,  G03F7/70616 ,  G03F7/70916 ,  H01J61/34 ,  H01J61/40 ,  H01J65/04

摘要： A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma.

公开(公告)号：US20160266497A1

公开(公告)日：2016-09-15

申请号：US15064771

申请日：2016-03-09

申请人： CANON KABUSHIKI KAISHA

发明人： Hiromi Suda

IPC分类号： G03F7/20 ,  F21V23/00 ,  G02B19/00 ,  F21V29/60

CPC分类号： G02B19/0047 ,  G02B6/0008 ,  G02B19/0028 ,  G02B27/0994 ,  G03F7/70016 ,  G03F7/70075

摘要： Provided is an illumination optical system that illuminates a target illumination region by using light emitted from a discharge lamp. The system includes a condensing mirror that condenses the light from the discharge lamp, an optical integrator which has a polygonal cross-sectional shape and is arranged on an optical path from the condensing mirror to the target illumination region, an imaging optical system that forms an image on the target illumination region with respect to an exit end face of the optical integrator as an object plane, and a power supply cable connecting to an electrode of the discharge lamp across the optical path directed from the condensing mirror to the optical integrator. The cable is arranged so that a shadow of the cable is neither parallel nor perpendicular to each side of the polygon of an entrance surface of the optical integrator.

摘要翻译： 提供一种通过使用从放电灯发出的光来照射目标照明区域的照明光学系统。 该系统包括会聚放射灯的光的聚光镜，具有多边形横截面形状并且设置在从聚光镜到目标照射区域的光路上的光学积分器，形成 相对于作为物平面的光积分器的出射端面的目标照明区域上的图像，以及连接到从聚光镜指向光学积分器的光路的放电灯的电极的电源电缆。 电缆布置成使得电缆的阴影既不平行也不垂直于光学积分器的入射表面的多边形的每一侧。