公开(公告)号：US20100090103A1

公开(公告)日：2010-04-15

申请号：US12526163

申请日：2008-02-19

Applicant: Joerg Mueller ,  Eric Wapelhorst ,  Jan-Peter Hauschild

Inventor： Joerg Mueller ,  Eric Wapelhorst ,  Jan-Peter Hauschild

IPC: H01J49/26 ,  H01L21/50

CPC classification number: H01J49/0018 ,  H01J49/004 ,  H01J49/40 ,  H01J49/482

Abstract: A mass spectrometer with an ionization chamber with a feed channel for a gas to be examined, including an electron source (d, n) for ionizing the gas to be examined, electrodes (c) for accelerating the ionizing electrons, electrodes (g, h, j, m) for the mass-dependent separation of the ions by acceleration/deceleration thereof, a detector (l) for the separated ions, a wiring with metallic conductors. The components are arranged on a plane nonconductive substrate (1), having an energy filter (k) for the ions, the energy filter being embodied as a 90° sector, is constructed in completely planar fashion. The ionization chamber (b), the electrodes (g, h, j, m) for accelerating the electrons and ions, the detector (l) for the ions and the energy filter (k) are produced by a single step of photolithography and etching of a doped semiconductor die (6) applied to the substrate (1) and the wiring (2) and the abovementioned parts are covered by a second flat nonconductive substrate (7).

Abstract translation: 一种具有电离室的质谱仪，具有用于待检测气体的进料通道，包括用于离子化被检气体的电子源（d，n），用于加速电离电子的电极（c），电极（g，h ，j，m），用于通过加速/减速来离子的质量依赖性分离，用于分离离子的检测器（1），具有金属导体的布线。 这些部件布置在平面非导电基板（1）上，其具有用于离子的能量过滤器（k），能量过滤器被实施为90°扇区，以完全平面的方式构造。 电离室（b），用于加速电子和离子的电极（g，h，j，m），用于离子的检测器（1）和能量过滤器（k））通过光刻和蚀刻的一个步骤 施加到基板（1）和布线（2）的掺杂半导体管芯（6）和上述部件被第二扁平非导电基板（7）覆盖。

公开(公告)号：US07692141B2

公开(公告)日：2010-04-06

申请号：US11942647

申请日：2007-11-19

Applicant: Yu-Chong Tai ,  Xuan-Qi Wang ,  Amish Desai ,  Terry D. Lee ,  Lawrence Licklider

Inventor： Yu-Chong Tai ,  Xuan-Qi Wang ,  Amish Desai ,  Terry D. Lee ,  Lawrence Licklider

IPC: H01J49/04 ,  H01J49/26 ,  B01D59/44

CPC classification number: H01J49/167 ,  G01N30/6095 ,  G01N30/7266 ,  H01J49/0018

Abstract: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.

Abstract translation: 具有突出“聚合物”毛细管的MEMS器件在将MEMS电喷雾喷嘴连接到MS入口或其他宏观仪器时提供了重要且显着的改进。 与此相关的制造方法容易扩展到包括内置的微粒过滤器和片上提供的厘米长的蛇形微通道，并使用低温工艺制造。

公开(公告)号：US20100075428A1

公开(公告)日：2010-03-25

申请号：US12298905

申请日：2008-10-28

Applicant: Daojing Wang ,  Peidong Yang ,  Woong Kim ,  Rong Fan

Inventor： Daojing Wang ,  Peidong Yang ,  Woong Kim ,  Rong Fan

IPC: G01N33/53 ,  H01J49/10 ,  B29C71/00 ,  B44C1/22

CPC classification number: H01J49/165 ,  B01L3/5027 ,  B82Y15/00 ,  H01J49/0018

Abstract: Novel and significantly simplified procedures for fabrication of fully integrated nanoelectrospray emitters have been described. For nanofabricated monolithic multinozzle emitters (NM2 emitters), a bottom up approach using silicon nanowires on a silicon sliver is used. For microfabricated monolithic multinozzle emitters (M3 emitters), a top down approach using MEMS techniques on silicon wafers is used. The emitters have performance comparable to that of commercially-available silica capillary emitters for nanoelectrospray mass spectrometry.

Abstract translation: 已经描述了用于制造完全集成的纳米电喷雾发射器的新颖且显着简化的程序。 对于纳米制单体多喷嘴发射体（NM2发射体），使用硅片上的硅纳米线的自底向上方法。 对于微制造的单片多喷嘴（M3发射器），采用了硅晶片上的MEMS技术的自上而下的方法。 发射器具有与用于纳米电喷雾质谱法的市售二氧化硅毛细管发射体相当的性能。

公开(公告)号：US07649171B1

公开(公告)日：2010-01-19

申请号：US11802183

申请日：2007-05-21

Applicant: Carl B. Freidhoff

Inventor： Carl B. Freidhoff

IPC: H01J49/26

CPC classification number: H01J49/165 ,  H01J49/0018

Abstract: Analysis of biological small molecules such as toxins, spores or cells is achieved by miniature mass spectrometer apparatus and apparatus attached thereto for vaporizing and ionizing a liquid sample fed into an evacuated vaporization chamber as an electrospray. The mass spectrometer apparatus includes: a collimation chamber, a repeller assembly, an internal ionization chamber, a mass filter and ion separation chamber, a drift space region, and a multi-channel ion detection array so as to permit the collection and analysis of ions formed over a wide mass range simultaneously. The vaporization chamber includes an output port adjacent the input to the collimation chamber so as to maximize the amount of vaporized material being fed into the mass spectrometer apparatus.

Abstract translation: 生物小分子如毒素，孢子或细胞的分析是通过附着于其上的微型质谱仪装置和装置实现的，用于蒸发和电离作为电喷雾送入真空蒸发室的液体样品。 质谱仪装置包括：准直室，推斥器组件，内部电离室，质量过滤器和离子分离室，漂移空间区域和多通道离子检测阵列，以便允许离子的收集和分析 同时在宽质量范围内形成。 蒸发室包括与准直室的输入相邻的输出端口，以便使进料到质谱仪装置中的汽化材料的量最大化。

公开(公告)号：US07618576B2

公开(公告)日：2009-11-17

申请号：US11265332

申请日：2005-11-01

Applicant: Sau Lan Tang Staats

Inventor： Sau Lan Tang Staats

IPC: B29B7/00 ,  B29C35/08 ,  B01L3/02 ,  G01N23/12

CPC classification number: H01J49/167 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B01L2400/027 ,  B29C45/0055 ,  B29C45/2628 ,  B33Y80/00 ,  H01J49/0018

Abstract: Microfluidic nozzle array devices are provided with the body of each device having at least one nozzle extending outwardly from one surface of the body. The microfluidic nozzle array devices are fabricated using an injection molding process and find particular utility in a wide range of applications, including but not limited to nanospray/electrospray applications, mass spectrometer applications, optical spectrometry applications, spotting applications (i.e., DNA or protein array), etc. Manufactured nozzles can include sealed nozzle apexes which are subsequently opened by focusing energy from an energy source on the sealed apex resulting in the opening of the nozzle channel.

Abstract translation: 微流体喷嘴阵列装置设置有每个装置的主体，其具有从主体的一个表面向外延伸的至少一个喷嘴。 使用注射成型工艺制造微流体喷嘴阵列器件，并且在广泛的应用中找到特别的用途，包括但不限于纳子喷雾/电喷雾应用，质谱仪应用，光谱测定应用，点样应用（即DNA或蛋白质阵列 ）等。制造的喷嘴可以包括密封的喷嘴顶点，其随后通过聚焦来自密封顶点上的能量源的能量而打开，从而导致喷嘴通道的打开。

公开(公告)号：US07605377B2

公开(公告)日：2009-10-20

申请号：US11550241

申请日：2006-10-17

Applicant: Guido Fridolin Verbeck, IV ,  Kenneth Tsui

Inventor： Guido Fridolin Verbeck, IV ,  Kenneth Tsui

IPC: H01J3/14 ,  H01J23/04 ,  H01J9/00 ,  G09G1/04

CPC classification number: H01J49/0018 ,  H01J49/405 ,  H01J49/406

Abstract: A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.

Abstract translation: 一种微电子设备，包括基板，在中心轴线的相对侧耦合到所述基板的一对网格电极，其中所述栅电极基本上彼此平行并且从所述基板大致垂直延伸，并且每个所述多个离子反射透镜 耦合到所述衬底，其中每个离子反射透镜：（1）基本上垂直于每个所述栅极; （2）基本上垂直于基底延伸; 和（3）具有与中心轴对准的孔。

公开(公告)号：US07598489B2

公开(公告)日：2009-10-06

申请号：US11906264

申请日：2007-10-01

Applicant: Raanan A. Miller ,  Clayton James Morris ,  Douglas B. Cameron ,  Erkinjon G. Nazarov ,  John A. Wright

Inventor： Raanan A. Miller ,  Clayton James Morris ,  Douglas B. Cameron ,  Erkinjon G. Nazarov ,  John A. Wright

IPC: B01D59/44 ,  H01J49/22

CPC classification number: H01J49/0018 ,  G01N27/624

Abstract: The invention provides, in various embodiments, systems and methods relating to controlling ion behavior in an ion-based analysis system.

Abstract translation: 在各种实施例中，本发明提供了与基于离子的分析系统中的离子行为控制有关的系统和方法。

公开(公告)号：US20080265173A1

公开(公告)日：2008-10-30

申请号：US12082452

申请日：2008-04-11

Applicant: Rosemary Smith ,  Scott Collins ,  Brian G. Frederick ,  Lawrence J. LeGore

Inventor： Rosemary Smith ,  Scott Collins ,  Brian G. Frederick ,  Lawrence J. LeGore

IPC: H01J49/06

CPC classification number: H01J9/14 ,  H01J49/0018 ,  H01J49/061 ,  H01L2924/0002 ,  Y10S438/977 ,  H01L2924/00

Abstract: A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.

公开(公告)号：US20080185518A1

公开(公告)日：2008-08-07

申请号：US12012000

申请日：2008-01-29

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/26 ,  H01J49/42

CPC classification number: H01J49/0018 ,  H01J49/067 ,  H01J49/4215

Abstract: A method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer is provided. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.

Abstract translation: 提供了可以在四极质谱仪中作为质量过滤器的微型四极静电透镜的几何形状中对齐圆柱形电极组的方法。 电极成对地安装在由绝缘基板上的导电部件形成的微细支撑件上。 导电部件的完全分割提供了共面圆柱形电极之间的低电容耦合，并且允许并入Brubaker预滤器以在给定的质量分辨率下提高灵敏度。 完整的四极杆由两个这样的支撑件构成，其通过另外的导电间隔件间隔开。 间隔件围绕电极继续以提供导电屏。

公开(公告)号：US07402799B2

公开(公告)日：2008-07-22

申请号：US11260106

申请日：2005-10-28

Applicant: Carl B. Freidhoff

Inventor： Carl B. Freidhoff

IPC: H01J49/28 ,  B01D59/44

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.

Abstract translation: 一种MEMS质谱仪，其具有连接在盖和底座之间的金属壁，其中壁限定了多个内室，包括样品气体输入室，离子发生器室，多个离子光学腔室和离子分离室。 在离子分离室的端部处的检测器阵列包括沿着两条平行线定位的多个V形检测器元件，并且布置成拦截在质谱仪中产生的所有电离束。