公开(公告)号：US20140029010A1

公开(公告)日：2014-01-30

申请号：US13560583

申请日：2012-07-27

Applicant: Zvi Bleier ,  Alexander Jacobson ,  Itai Vishnia

Inventor： Zvi Bleier ,  Alexander Jacobson ,  Itai Vishnia

IPC: G02B7/192 ,  G02B7/182 ,  B23P17/04 ,  G01B9/02

CPC classification number: G01B9/02051 ,  G01B9/02058 ,  G01J3/0202 ,  G01J3/0286 ,  G01J3/45 ,  G02B1/02 ,  G02B27/1073 ,  G02B27/144 ,  Y10T29/49826 ,  Y10T29/49895

Abstract: A frame for optics used in interferometers that may include different materials having substantially similar, identical, or as close as practicable coefficients of thermal expansion from the material(s) used to make the beamsplitter and/or compensator without warping, bending, tilting or distorting the optics. The beamsplitter and/or compensator are mounted onto the frame of the interferometer using a three-point method of mounting, preferably using three pins for each component. Preferably, the pins are made of the same material as the beamsplitter and compensator, and all three components are made of Potassium Bromide (“KBr”) or Calcium Fluoride (“CaF2”) such that the optic instrument can operate to scan into the mid or far infrared. Stability in optical alignment is therefore achieved without requiring the optic instrument include only one material. The invention provides stability in situations where it is not possible to utilize a single material for every component of the interferometer.

公开(公告)号：US20140022546A1

公开(公告)日：2014-01-23

申请号：US14009444

申请日：2012-04-02

Applicant: Yoshiroh Nagai ,  Toshio Kawano

Inventor： Yoshiroh Nagai ,  Toshio Kawano

IPC: G01J3/45 ,  G06F17/14

CPC classification number: G01J3/45 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/4535 ,  G06F17/14

Abstract: A Fourier transform spectrometer (Da) of the invention extracts, in generating an integrated interferogram obtained by integrating a plurality of interferograms, an output of an interferometer (11a) within a predetermined range according to positioning information of a center burst in an interferogram measured at a time before measurement of an interferogram at the present time.

Abstract translation: 本发明的傅里叶变换光谱仪（Da）在根据中央突发的定位信息产生通过将多个干涉图积分的积分干涉图提取到预定范围内的干涉仪（11a）的输出， 在目前测量干涉图之前的时间。

公开(公告)号：US08593637B2

公开(公告)日：2013-11-26

申请号：US13583534

申请日：2012-04-26

Applicant: Jacob Riis Folkenberg ,  Hans Larsen

Inventor： Jacob Riis Folkenberg ,  Hans Larsen

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01J3/4535

Abstract: A spectrometric instrument comprising: a scanning interferometer having a beamsplitter for dividing incident optical radiation into a reflected beam, following a reflected beam path and a transmitted beam following a transmitted beam path; a monochromatic optical radiation source for launching a reference beam into the interferometer along a first propagation path to be initially incident on a first face of the beamsplitter; an observation optical radiation source for launching a divergent observation beam into the interferometer along a second propagation path to be initially incident on the first face of beamsplitter and overlap the reference beam at the first face; wherein the radiation sources cooperate to generate a first angle between the directions of propagation of the two beams along respective first and second propagation paths when initially and simultaneously incident at the first face which is larger than a divergence half-angle of the observation beam 64.

Abstract translation: 一种光谱仪，包括：扫描干涉仪，具有分束器，用于将入射光辐射分成反射光束，跟随反射光束路径和发射光束跟随传输光束路径; 用于沿着第一传播路径将参考光束发射到干涉仪中以最初入射在分束器的第一面上的单色光辐射源; 观测光辐射源，用于沿着第二传播路径将发散观测光束发射到干涉仪中，以最初入射到分束器的第一面上，并在第一面处与参考光束重叠; 其中所述辐射源在最初并且同时入射在大于所述观察光束64的发散半角的所述第一面时在所述两个光束沿着相应的第一和第二传播路径的传播方向之间产生第一角度。

公开(公告)号：US08570524B2

公开(公告)日：2013-10-29

申请号：US12849046

申请日：2010-08-03

Applicant: Xiaoke Wan ,  Jian Ge

Inventor： Xiaoke Wan ,  Jian Ge

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/02 ,  G01B9/02051 ,  G01J3/0259 ,  G01J3/28 ,  G01J3/45 ,  G01J3/4531 ,  G01J3/4532 ,  G01J2003/2866

Abstract: Calibration of an arbitrary spectrometer can use a stable monolithic interferometer as a wavelength calibration standard. Light from a polychromatic light source is input to the monolithic interferometer where it undergoes interference based on the optical path difference (OPD) of the interferometer. The resulting wavelength-modulated output beam is analyzed by a reference spectrometer to generate reference data. The output beam from the interferometer can be provided to an arbitrary spectral instrument. Wavelength calibration of the arbitrary spectral instrument may then be performed based on a comparison of the spectral instrument output with the reference data. By appropriate choice of materials for the monolithic interferometer, a highly stable structure can be fabricated that has a wide field and/or is thermally compensated. Because the interferometer is stable, the one-time generated reference data can be used over an extended period of time without re-characterization.

Abstract translation: 任意光谱仪的校准可以使用稳定的单片干涉仪作为波长校准标准。 来自多色光源的光被输入到单片干涉仪，其中它基于干涉仪的光程差（OPD）而受到干扰。 所得到的波长调制输出光束由参考光谱仪分析以产生参考数据。 来自干涉仪的输出光束可以提供给任意的光谱仪器。 然后可以基于光谱仪器输出与参考数据的比较来执行任意光谱仪器的波长校准。 通过适当地选择用于单片干涉仪的材料，可以制造具有宽场和/或热补偿的高度稳定的结构。 因为干涉仪是稳定的，所以一次性生成的参考数据可以在延长的时间段内被使用，而无需重新表征。

公开(公告)号：US20130265582A1

公开(公告)日：2013-10-10

申请号：US13868215

申请日：2013-04-23

Applicant: DUKE UNIVERSITY

Inventor： Adam Wax ,  John W. Pyhtila

IPC: G01J3/45

CPC classification number: A61B5/0084 ,  A61B1/00165 ,  A61B1/00172 ,  A61B5/0066 ,  A61B5/0075 ,  G01B9/02043 ,  G01B9/02044 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01B9/02091 ,  G01J3/45 ,  G01N21/31 ,  G01N21/4795 ,  G01N2021/4704 ,  G01N2021/4709 ,  G01N2021/4735 ,  G01N2201/08

Abstract: Fourier domain a/LCI (faLCI) system and method which enables in vivo data acquisition at rapid rates using a single scan. Angle-resolved and depth resolved spectra information is obtained with one scan. The reference arm can remain fixed with respect to the sample due to only one scan required. A reference signal and a reflected sample signal are cross-correlated and dispersed at a multitude of reflected angles off of the sample, thereby representing reflections from a multitude of points on the sample at the same time in parallel. Information about all depths of the sample at each of the multitude of different points on the sample can be obtained with one scan on the order of approximately 40 milliseconds. From the spatial, cross-correlated reference signal, structural (size) information can also be obtained using techniques that allow size information of scatterers to be obtained from angle-resolved data.

Abstract translation: 傅里叶域a / LCI（faLCI）系统和方法，使用单次扫描能够以快速的速率进行体内数据采集。 通过一次扫描获得角度分辨和深度解析的光谱信息。 由于仅需要一次扫描，参考臂可以相对于样品保持固定。 参考信号和反射的采样信号以相对于样本的多个反射角度相互相关并分散，从而同时并行地表示来自样品上的多个点的反射。 可以通过大约40毫秒量级的一次扫描获得关于样本上多个不同点的每个样本的所有深度的信息。 从空间相互关联的参考信号，也可以使用允许从角度分辨数据获得散射体的尺寸信息的技术来获得结构（尺寸）信息。

公开(公告)号：US20130258343A1

公开(公告)日：2013-10-03

申请号：US13435735

申请日：2012-03-30

Applicant: Miao ZHU ,  Robert C. TABER

Inventor： Miao ZHU ,  Robert C. TABER

IPC: G01J3/50 ,  G01N21/59

CPC classification number: G01J3/108 ,  G01J3/45 ,  G01N21/255 ,  G01N21/31 ,  G01N2021/3595 ,  G01N2201/06113 ,  G01N2201/0697

Abstract: An optical spectroscopy method and apparatus increases signal to noise ratio of detected signals. Sample light passed through a sample includes attenuated light pulses and characteristic light located between the attenuated light pulses, the characteristic light formed by interaction between light pulses incident the sample and sample molecules. The attenuated light pulses are substantially removed from the sample light emerging from the sample prior to detection, to increase signal to noise ratio of the detected signal.

公开(公告)号：US08531678B2

公开(公告)日：2013-09-10

申请号：US13235986

申请日：2011-09-19

Applicant: Moshe Finarov ,  Boaz Brill

Inventor： Moshe Finarov ,  Boaz Brill

IPC: G01B11/14

CPC classification number: G01B11/24 ,  G01B9/02087 ,  G01J3/45 ,  G01N21/21 ,  H01L22/12 ,  H01L22/20

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

公开(公告)号：US08531675B2

公开(公告)日：2013-09-10

申请号：US12877888

申请日：2010-09-08

Applicant: Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

Inventor： Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

IPC: G01B9/02

CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

公开(公告)号：US20130215422A1

公开(公告)日：2013-08-22

申请号：US13735092

申请日：2013-01-07

Applicant: Hitachi, Ltd.

Inventor： Shigeharu KIMURA ,  Masataka SHIRAI ,  Koichi WATANABE

IPC: G01J3/45 ,  G01J3/44

CPC classification number: G01J3/45 ,  G01J3/44 ,  G01J3/453

Abstract: A signal is amplified by making a CARS beam from an observed body and a reference beam which is a portion of a super continuum beam and has a frequency of ωAS=2ωP−ωST interfere with each other and taking out the signal from an interference beam of the CARS beam and the reference beam.

Abstract translation: 通过从观测体进行CARS波束的信号和作为超连续波束的一部分且具有ωga= 2omega -P-ωgaST的频率的参考波束相互干扰并从干扰波束中取出信号来放大信号 CARS光束和参考光束。

公开(公告)号：US08379221B2

公开(公告)日：2013-02-19

申请号：US13060436

申请日：2010-03-02

Applicant: Zeqin Wang ,  Hong Xie

Inventor： Zeqin Wang ,  Hong Xie

IPC: G01B9/02

CPC classification number: G01J3/45 ,  G01J3/021 ,  G01J3/0286 ,  G02B6/29349 ,  G02F1/21 ,  G02F2203/60

Abstract: The present patent application provides an interference cavity for precisely controlling an optical path including a cavity formed by two equal distance arms, wherein a positive adjusting plate and a negative adjusting plate are disposed in the interference cavity for compensating the change of a cavity length with temperature and thereby ensuring that the interference cavity length is a constant. The present patent application utilizes the matching relationship between the change of the refractive index of the positive adjustment plate with the temperature and the change of the refractive index of the negative adjusting plates with the temperature to make the optical path difference OPL invariant with changes in the environment temperature and thereby to ensure the precision of the optical path.

Abstract translation: 本专利申请提供了一种用于精确控制光路的干涉腔，该光路包括由两个相等距离的臂形成的空腔，其中正调节板和负调节板设置在干涉腔中，用于补偿腔长随温度变化 从而确保干涉腔长度是恒定的。 本专利申请利用正调整板的折射率与温度的变化与负调节板的折射率随温度的变化之间的匹配关系，以使光路差OPL随着 从而保证光路的精度。