摘要:
There is provided an apparatus for measuring a warpage characteristic of a specimen, the apparatus including: a light irradiating unit irradiating light toward the specimen; alight transmitting member transmitting the light irradiated by the light irradiating unit therethrough and including a reference lattice pattern to allow a shadow to be formed on the specimen; a sensing unit sensing the shadow formed on the specimen by the reference lattice pattern; and a heating plate disposed under the light transmitting member and heating the specimen mounted thereon, wherein the reference lattice pattern formed on the light transmitting member is formed of a conductive material and is connected to a power supplying unit to thereby generate heat when power is supplied.
摘要:
Disclosed herein are an apparatus and method for measuring characteristics of multi-layered thin films. There is provided an apparatus for measuring characteristics of multi-layered films, including: a light source member irradiating light to a sample formed of the multi-layered thin films; an interference-reflection member splitting light into a first beam for acquiring reference reflection light and a second beam for acquiring sample reflection light, and generating an interference signal when the light shutter is opened, and generating the reflection signal when the light shutter is closed; a sample member scanning and irradiating the sample by the second beam and transferring a support to which the sample is fixed; an interference-reflection light detection member splitting and detecting the intensity of the generated interference signal and reflection signal for each wavelength; and a signal processing member using the intensity of the interference signal for each wavelength and the reflection signal for each wavelength detected from the interference-reflection detection unit to image the multi-layered thin films of the sample, calculating reflectivity, refractive index, and the thickness of the multi-layered thin films. By this configuration, the performance of measuring characteristics of multi-layered thin films can be improved.
摘要:
Provided are nanocomposites and a light emitting device package including the same. The nanocomposites include nanoparticles, and silicon compounds bonded to surfaces of the nanoparticles and expressed by a specific chemical formula. The nanocomposites can be dispersed evenly in various matrices without the nanoparticles being agglutinated.
摘要:
Disclosed herein are a high temperature chromatography apparatus and a method thereof. The high temperature chromatography apparatus includes: an eluent pump; a sample dissolving unit that uniformly dissolves an insoluble sample; an injecting unit that mixes and injects the sample and the eluent; a column unit that separates materials; a detector that detects materials; a temperature measuring unit that measures the temperature of the sample dissolving unit, the injecting unit, and the column unit; a heating device that increases or decreases the temperature of the sample dissolving unit, the injecting unit, and the column unit; a temperature controller that maintains the measured temperature and the setting temperature to be the same as each other; and a controller.
摘要:
A method of manufacturing a light emitting device includes: forming a plurality of independent light emitting portions on a growth substrate; separating the light emitting portions from the growth substrate; mounting the light emitting portions onto a receiving substrate; and dicing the receiving substrate, onto which the light emitting portions are mounted, into a light emitting unit. Residual stress, which occurs when the light emitting portions are separated from the substrate, can be reduced, and the light emitting portions can be mounted onto the receiving substrate in a fluid state, whereby the light emitting device can be easily mass produced with excellent quality, and its manufacturing costs can be reduced.
摘要:
A packaging chip in which a circuit module is packaged and a method of packaging a circuit module are provided. The packaging chip includes a base wafer; a circuit module on the base wafer; a packaging wafer having a cavity and combined with the base wafer so that the circuit module fits inside the cavity; a connecting electrode connecting upper and lower surfaces of the cavity; and a seed layer between the connecting electrode and the packaging wafer. The method includes etching a lower surface of the packaging wafer to form a cavity, stacking a metal layer in an area of the lower surface, combining the base wafer with the packaging wafer, polishing the packaging wafer, forming a viahole through the packaging wafer, stacking a seed layer on the packaging wafer, plating the inside of the viahole, removing the seed layer and forming an electrode.
摘要:
There are provided a ceramic sheet product for a ceramic electronic component, a multilayer ceramic electronic component using the same, and a method of manufacturing the multilayer ceramic electronic component. The ceramic sheet product for a ceramic electronic component includes a ceramic layer; a metal layer formed on the ceramic layer; and metal nanostructures contacting the metal layer and protruding from the metal layer to an inner portion of the ceramic layer. With the multilayer ceramic electronic component using the ceramic sheet product for a ceramic electronic component, an interval between electrodes is reduced to thereby allow for the increase of capacitance, whereby a multilayer ceramic electronic component having high capacitance may be provided.
摘要:
The present invention provides a manufacturing method of group III-V compound semiconductor material including a step of making a metal oxide nano-particle of a group III metal element reductively react to a group-V-element-containing compound in order to manufacture compound semiconductor material comprised of two or more element compounds.