公开(公告)号：US08165181B2

公开(公告)日：2012-04-24

申请号：US12545474

申请日：2009-08-21

申请人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

发明人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

IPC分类号： H01S3/10 ,  H01S3/22

CPC分类号： H01S3/10061 ,  H01S3/005 ,  H01S3/2251 ,  H01S3/2316

摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。

公开(公告)号：US20100128747A1

公开(公告)日：2010-05-27

申请号：US12545474

申请日：2009-08-21

申请人： Shinji NAGAI ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

发明人： Shinji NAGAI ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

IPC分类号： H01S3/104 ,  G02B26/00

CPC分类号： H01S3/10061 ,  H01S3/005 ,  H01S3/2251 ,  H01S3/2316

摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。

公开(公告)号：US20120177072A1

公开(公告)日：2012-07-12

申请号：US13425825

申请日：2012-03-21

申请人： Shinji NAGAI ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

发明人： Shinji NAGAI ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

IPC分类号： H01S3/10 ,  H01S3/22

CPC分类号： H01S3/10061 ,  H01S3/005 ,  H01S3/2251 ,  H01S3/2316

摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。

公开(公告)号：US08891574B2

公开(公告)日：2014-11-18

申请号：US13425825

申请日：2012-03-21

申请人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

发明人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

IPC分类号： H01S3/22 ,  H01S3/10 ,  H01S3/23 ,  H01S3/225 ,  H01S3/00

CPC分类号： H01S3/10061 ,  H01S3/005 ,  H01S3/2251 ,  H01S3/2316

摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.

摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。

公开(公告)号：US08503499B2

公开(公告)日：2013-08-06

申请号：US12899886

申请日：2010-10-07

申请人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

发明人： Shinji Nagai ,  Fumika Yoshida ,  Osamu Wakabayashi ,  Kouji Kakizaki

IPC分类号： H01S3/22 ,  H01S3/10 ,  H01S3/08

CPC分类号： H01S3/034 ,  G02B1/02 ,  G02B5/3091 ,  H01S3/0346 ,  H01S3/08054 ,  H01S3/0816 ,  H01S3/225 ,  H01S3/2251

摘要： A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a axis and a axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their axis.

摘要翻译： 使用减少由于机械应力（窗口保持器和激光气体压力）的破裂的氟化钙晶体，来自光吸收等的热应力的气体放电室增加了输出激光器的线性极化的程度，并抑制了劣化 由于强紫外线（特别是ArF）激光照射。 气体放电室的第一窗口（2）和第二窗口（3）具有与其氟化钙晶体的（111）晶面平行的入射面和发射平面。 关于进入氟化钙晶体的激光通过包括第一窗口（2）和第二窗口（3）中的每一个的<111>轴和<001>轴的平面的布置，从内侧看 室（1），第一窗口（2）和第二窗口（3）被布置在围绕其<111>轴线沿相同方向旋转相同角度的位置。

公开(公告)号：US08158959B2

公开(公告)日：2012-04-17

申请号：US12705287

申请日：2010-02-12

申请人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

发明人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

IPC分类号： G01N21/00 ,  G01N21/33 ,  H05G2/00

CPC分类号： H05G2/008 ,  H05G2/003 ,  H05G2/005

摘要： An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.

摘要翻译： 一种极紫外光源装置，通过在室内产生通过用激光照射目标材料而产生的等离子体的极紫外光，并且利用磁场或电场来控制与极紫外光一起产生的离子的流动， 极紫外光源装置包括离子收集器装置，该离子收集器装置通过布置在腔室一侧的孔收集离子，以及中断机构阻止溅射颗粒朝向孔的方向移动，溅射粒子在离子碰撞面 与离子收集器装置中的离子相撞。

公开(公告)号：US20100243922A1

公开(公告)日：2010-09-30

申请号：US12705287

申请日：2010-02-12

申请人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

发明人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

IPC分类号： H05G2/00 ,  G01J3/10

CPC分类号： H05G2/008 ,  H05G2/003 ,  H05G2/005

摘要： An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.

摘要翻译： 一种极紫外光源装置，通过在室内产生通过用激光照射目标材料而产生的等离子体的极紫外光，并且利用磁场或电场来控制与极紫外光一起产生的离子的流动， 极紫外光源装置包括离子收集器装置，该离子收集器装置通过布置在腔室一侧的孔收集离子，以及中断机构阻止溅射颗粒朝向孔的方向移动，溅射粒子在离子碰撞面 与离子收集器装置中的离子相撞。

公开(公告)号：US20120176036A1

公开(公告)日：2012-07-12

申请号：US13419177

申请日：2012-03-13

申请人： Takeshi ASAYAMA ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

发明人： Takeshi ASAYAMA ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

IPC分类号： H05H1/46

CPC分类号： H05G2/008 ,  H05G2/003 ,  H05G2/005

摘要： An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.

摘要翻译： 一种极紫外光源装置，通过在室内产生通过用激光照射目标材料而产生的等离子体的极紫外光，并且利用磁场或电场来控制与极紫外光一起产生的离子的流动， 极紫外光源装置包括离子收集器装置，该离子收集器装置通过布置在腔室一侧的孔收集离子，以及中断机构阻止溅射颗粒朝向孔的方向移动，溅射粒子在离子碰撞面 与离子收集器装置中的离子相撞。

公开(公告)号：US08586954B2

公开(公告)日：2013-11-19

申请号：US13419177

申请日：2012-03-13

申请人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

发明人： Takeshi Asayama ,  Kouji Kakizaki ,  Akira Endo ,  Shinji Nagai

IPC分类号： G01N21/00 ,  G01N21/33 ,  H05G2/00

CPC分类号： H05G2/008 ,  H05G2/003 ,  H05G2/005

摘要： An extreme ultraviolet light source apparatus generating an extreme ultraviolet light from plasma generated by irradiating a target material with a laser light within a chamber, and controlling a flow of ions generated together with the extreme ultraviolet light using a magnetic field or an electric field, the extreme ultraviolet light source apparatus comprises an ion collector device collecting the ion via an aperture arranged at a side of the chamber, and an interrupting mechanism interrupting movement of a sputtered particle in a direction toward the aperture, the sputtered particle generated at an ion collision surface collided with the ion in the ion collector device.

摘要翻译： 一种极紫外光源装置，通过在室内产生通过用激光照射目标材料而产生的等离子体的极紫外光，并且利用磁场或电场来控制与极紫外光一起产生的离子的流动， 极紫外光源装置包括离子收集器装置，该离子收集器装置通过布置在腔室一侧的孔收集离子，以及中断机构阻止溅射颗粒朝向孔的方向移动，溅射粒子在离子碰撞面 与离子收集器装置中的离子相撞。

公开(公告)号：US20080198891A1

公开(公告)日：2008-08-21

申请号：US12071048

申请日：2008-02-14

申请人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

发明人： Tsukasa Hori ,  Takanobu Ishihara ,  Kouji Kakizaki

IPC分类号： H01S3/03

CPC分类号： H01S3/225 ,  H01S3/0057 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/073 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/2251 ,  H01S3/2316 ,  H01S3/2325

摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.

摘要翻译： 一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块 并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电 ，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。