摘要:
A sample is inspected. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.
摘要:
An apparatus and method for inspecting a surface of a sample, particularly but not limited to a semiconductor device, using an electron beam is presented. The technique is called Secondary Electron Emission Microscopy (SEEM), and has significant advantages over both Scanning Electron Microscopy (SEM) and Low Energy Electron Microscopy (LEEM) techniques. In particular, the SEEM technique utilizes a beam of relatively high-energy primary electrons having a beam width appropriate for parallel, multi-pixel imaging. The electron energy is near a charge-stable condition to achieve faster imaging than was previously attainable with SEM, and charge neutrality unattainable with LEEM.
摘要:
A continuous solvent free gelatin encapsulation apparatus and process includes an oil roll back assembly (20) for applying a controlled amount of a food-approved lubricant to a first side of the gelatin ribbon and an applicator guide bar assembly (40) for applying a controlled amount of food-approved lubricant to a second side of the gelatin ribbon. Two opposing food-approved lubricant coated gelatin ribbons are then united in a die assembly (50) to form gelatin capsules which are then dried and recovered.
摘要:
A closed-cycle system and method of electrical power generation uses steam to transport charge carriers through an MHD generator. Water droplets, fine particles or mixtures thereof are used as the charge carriers. The fine particles are sufficiently small to allow the particles to pass through pumps and other equipment in the flow path with little or no damage, thereby eliminating the need to remove and re-inject a seed material, or treat it prior to discharge to the environment. The high operating temperatures of prior art MHD generators are avoided, thereby allowing more economical and readily available materials to be used. The system and method also allows the MHD generator to be used as the bottoming cycle in a single-loop power generation system, with a conventional steam turbine-generator used as the topping cycle, resulting in an increased heat rate with reduced emissions of greenhouse gases and other pollutants, and with reduced heat rejection to the environment per unit of electricity produced.
摘要:
A method for implementing a sleep control that includes the steps of receiving a message from a sending block via a messaging bus, wherein the message is destined for a receiving block; determining whether the receiving block is awake; and delaying further transmission of the message until the receiving block is awake. An apparatus for performing the method is also disclosed.
摘要:
An improved well completion system for completing two or more separate production zones in a well bore during a single downhole trip is disclosed. The improved completion system comprises a completion assembly comprising two or more production zone assemblies and a completion tool assembly. Each production zone assembly may comprise an automatic system locating assembly and at least two inverted seal systems for sealing against the tool assembly.
摘要:
Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.
摘要:
Disclosed is a semiconductor die having a scanning area. The semiconductor die includes a first plurality of test structures wherein each of the test structures in the first plurality of test structures is located entirely within the scanning area. The semiconductor die further includes a second plurality of test structures wherein each of the test structures in the first plurality of test structures is located only partially within the scanning area. The test structures are arranged so that a scan of the scanning area results in detection of defects outside of the scanning area.
摘要:
A collection element arrangement is provided having sleeve attachments near their lowermost ends which simulate a continuous sloping surface, or floor. The sleeve attachments upper surfaces forming the floor permit collected solids to flow down the sloping surface back into the furnace or reactor chamber. Stainless steel can be used for the collection elements and sleeve attachments since the floating floor accommodates differential thermal expansion between CFB components.
摘要:
An apparatus for separating solids from flue gas in a circulating fluidized bed (CFB) boiler includes a plurality of impact type particle separators mounted vertically to a wall of the CFB. The impact type particle separators being adjacently positioned and horizontally spaced. Each impact type particle separator includes a plurality of vertically mounted cooling tubes connected to a fluid circulating system. A slip fit element surrounds the cooling tubes. A cup shaped configuration is formed by side walls and a back wall. The side walls and back wall have a plurality of separate vertically aligned segments extending along the height of the impact type particle separator. Each vertically aligned segment is connected at its ends to an adjacent segment.