Multiple directional scans of test structures on semiconductor integrated circuits
    31.
    发明授权
    Multiple directional scans of test structures on semiconductor integrated circuits 有权
    半导体集成电路测试结构的多方向扫描

    公开(公告)号:US06566885B1

    公开(公告)日:2003-05-20

    申请号:US09648109

    申请日:2000-08-25

    IPC分类号: G01R3100

    摘要: A sample is inspected. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.

    摘要翻译: 检查样品。 用至少一个粒子束沿第一方向扫描样品。 用至少一个粒子束在第二个方向上扫描样品。 第二方向与第一方向成一个角度。 作为第一扫描的结果,发现样品的每个区域的缺陷数,并且从第二次扫描确定发现的一个或多个缺陷的位置。 在具体实施例中,样本包括其上具有多个测试元件的测试结构。 测试元件的第一部分在第一次扫描期间暴露于光束以识别具有缺陷的测试元件,并且第二部分测试元件在第二次扫描期间暴露以分离和表征缺陷。

    Apparatus and method for secondary electron emission microscope
    32.
    发明授权
    Apparatus and method for secondary electron emission microscope 失效
    二次电子发射显微镜的装置和方法

    公开(公告)号:US5973323A

    公开(公告)日:1999-10-26

    申请号:US964544

    申请日:1997-11-05

    CPC分类号: H01J37/285

    摘要: An apparatus and method for inspecting a surface of a sample, particularly but not limited to a semiconductor device, using an electron beam is presented. The technique is called Secondary Electron Emission Microscopy (SEEM), and has significant advantages over both Scanning Electron Microscopy (SEM) and Low Energy Electron Microscopy (LEEM) techniques. In particular, the SEEM technique utilizes a beam of relatively high-energy primary electrons having a beam width appropriate for parallel, multi-pixel imaging. The electron energy is near a charge-stable condition to achieve faster imaging than was previously attainable with SEM, and charge neutrality unattainable with LEEM.

    摘要翻译: 提出了一种使用电子束检查样品表面,特别是但不限于半导体器件的装置和方法。 该技术被称为二次电子发射显微镜(SEEM),并且具有优于扫描电子显微镜(SEM)和低能量电子显微镜(LEEM)技术的显着优点。 特别地,SEEM技术利用具有适于平行多像素成像的光束宽度的相对高能量的一次电子束。 电子能量接近电荷稳定条件以实现比先前可用SEM更快的成像,并且电荷中性在LEEM中不能实现。

    Encapsulation apparatus and process
    33.
    发明授权
    Encapsulation apparatus and process 失效
    封装装置和工艺

    公开(公告)号:US5735105A

    公开(公告)日:1998-04-07

    申请号:US481411

    申请日:1995-10-02

    摘要: A continuous solvent free gelatin encapsulation apparatus and process includes an oil roll back assembly (20) for applying a controlled amount of a food-approved lubricant to a first side of the gelatin ribbon and an applicator guide bar assembly (40) for applying a controlled amount of food-approved lubricant to a second side of the gelatin ribbon. Two opposing food-approved lubricant coated gelatin ribbons are then united in a die assembly (50) to form gelatin capsules which are then dried and recovered.

    摘要翻译: PCT No.PCT / GB93 / 02566 Sec。 371 1995年10月2日日期 102(e)日期1995年10月2日PCT 1993年12月16日PCT公布。 公开号WO94 / 13249 日期1994年6月23日一种连续无溶剂的明胶包封装置和方法包括用于将明显的胶带的第一面施加受控量的食品认可的润滑剂的油卷回装置(20)和涂抹器导杆组件(40) ),用于将受控量的食品认可的润滑剂施加到明胶带的第二侧。 然后将两个相对食物认可的润滑剂涂覆的明胶带合并在模具组件(50)中以形成明胶胶囊,然后将其干燥并回收。

    Closed-cycle MHD-faraday generation of electric power using steam as the gaseous medium
    34.
    发明授权
    Closed-cycle MHD-faraday generation of electric power using steam as the gaseous medium 失效
    使用蒸汽作为气体介质的闭环循环MHD-法拉第电力发电

    公开(公告)号:US08601816B2

    公开(公告)日:2013-12-10

    申请号:US11780130

    申请日:2007-07-19

    申请人: David J. Walker

    发明人: David J. Walker

    CPC分类号: H02K44/08

    摘要: A closed-cycle system and method of electrical power generation uses steam to transport charge carriers through an MHD generator. Water droplets, fine particles or mixtures thereof are used as the charge carriers. The fine particles are sufficiently small to allow the particles to pass through pumps and other equipment in the flow path with little or no damage, thereby eliminating the need to remove and re-inject a seed material, or treat it prior to discharge to the environment. The high operating temperatures of prior art MHD generators are avoided, thereby allowing more economical and readily available materials to be used. The system and method also allows the MHD generator to be used as the bottoming cycle in a single-loop power generation system, with a conventional steam turbine-generator used as the topping cycle, resulting in an increased heat rate with reduced emissions of greenhouse gases and other pollutants, and with reduced heat rejection to the environment per unit of electricity produced.

    摘要翻译: 封闭循环系统和发电方法使用蒸汽将电荷载体传送通过MHD发生器。 使用水滴,细粒或其混合物作为电荷载体。 细颗粒足够小以允许颗粒在流动路径中通过泵和其他设备,几乎没有或没有损坏,从而不需要去除和重新注入种子材料,或者在排放到环境之前对其进行处理 。 避免了现有技术的MHD发生器的高操作温度,从而允许使用更经济和容易获得的材料。 该系统和方法还允许将MHD发电机用作单回路发电系统的底循环,其中传统的蒸汽轮机发电机用作顶部循环,导致增加的热速率,减少温室气体的排放 和其他污染物,并且每单位产生的电力对环境的排放降低。

    METHOD AND APPARATUS FOR MESSAGE HANDLING DURING POWER SAVING MODES
    35.
    发明申请
    METHOD AND APPARATUS FOR MESSAGE HANDLING DURING POWER SAVING MODES 审中-公开
    节电模式下的消息处理方法与装置

    公开(公告)号:US20120151234A1

    公开(公告)日:2012-06-14

    申请号:US12969780

    申请日:2010-12-16

    IPC分类号: G06F1/32

    CPC分类号: H04W52/0229 Y02D70/26

    摘要: A method for implementing a sleep control that includes the steps of receiving a message from a sending block via a messaging bus, wherein the message is destined for a receiving block; determining whether the receiving block is awake; and delaying further transmission of the message until the receiving block is awake. An apparatus for performing the method is also disclosed.

    摘要翻译: 一种用于实现睡眠控制的方法,包括以下步骤:经由消息总线从发送块接收消息,其中所述消息指定给接收块; 确定接收块是否清醒; 并延迟消息的进一步传输,直到接收块清醒。 还公开了一种用于执行该方法的装置。

    Multiple directional scans of test structures on semiconductor integrated circuits
    37.
    发明授权
    Multiple directional scans of test structures on semiconductor integrated circuits 有权
    半导体集成电路测试结构的多方向扫描

    公开(公告)号:US07012439B2

    公开(公告)日:2006-03-14

    申请号:US11058943

    申请日:2005-02-15

    IPC分类号: G01R31/304

    摘要: Disclosed is a method of inspecting a sample. The sample is scanned in a first direction with at least one particle beam. The sample is scanned in a second direction with at least one particle beam. The second direction is at an angle to the first direction. The number of defects per an area of the sample are found as a result of the first scan, and the position of one or more of the found defects is determined from the second scan. In a specific embodiment, the sample includes a test structure having a plurality of test elements thereon. A first portion of the test elements is exposed to the beam during the first scan to identify test elements having defects, and a second portion of the test elements is exposed during the second scan to isolate and characterize the defect.

    摘要翻译: 公开了一种检查样品的方法。 用至少一个粒子束沿第一方向扫描样品。 用至少一个粒子束在第二个方向上扫描样品。 第二方向与第一方向成一个角度。 作为第一扫描的结果,发现样品的每个区域的缺陷数,并且从第二次扫描确定发现的一个或多个缺陷的位置。 在具体实施例中,样本包括其上具有多个测试元件的测试结构。 测试元件的第一部分在第一次扫描期间暴露于光束以识别具有缺陷的测试元件,并且第二部分测试元件在第二次扫描期间暴露以分离和表征缺陷。

    Floored impact-type solids separator using downward expanding separator elements
    39.
    发明授权
    Floored impact-type solids separator using downward expanding separator elements 失效
    地下冲击型固体分离器使用向下扩张的分离器元件

    公开(公告)号:US06681722B1

    公开(公告)日:2004-01-27

    申请号:US10273917

    申请日:2002-10-18

    IPC分类号: F22B100

    摘要: A collection element arrangement is provided having sleeve attachments near their lowermost ends which simulate a continuous sloping surface, or floor. The sleeve attachments upper surfaces forming the floor permit collected solids to flow down the sloping surface back into the furnace or reactor chamber. Stainless steel can be used for the collection elements and sleeve attachments since the floating floor accommodates differential thermal expansion between CFB components.

    摘要翻译: 提供收集元件布置,其在其最下端附近具有套筒附件,其模拟连续的倾斜表面或地板。 套筒附件形成地板的上表面允许收集的固体沿着倾斜的表面向下流回炉或反应室。 不锈钢可以用于收集元件和套筒附件,因为浮动地板容纳CFB部件之间的差分热膨胀。

    Particulate collector channel with cooling inner elements in a CFB boiler
    40.
    发明授权
    Particulate collector channel with cooling inner elements in a CFB boiler 失效
    在CFB锅炉中具有冷却内部元件的颗粒收集器通道

    公开(公告)号:US06322603B1

    公开(公告)日:2001-11-27

    申请号:US09613132

    申请日:2000-07-10

    申请人: David J. Walker

    发明人: David J. Walker

    IPC分类号: B01D4508

    摘要: An apparatus for separating solids from flue gas in a circulating fluidized bed (CFB) boiler includes a plurality of impact type particle separators mounted vertically to a wall of the CFB. The impact type particle separators being adjacently positioned and horizontally spaced. Each impact type particle separator includes a plurality of vertically mounted cooling tubes connected to a fluid circulating system. A slip fit element surrounds the cooling tubes. A cup shaped configuration is formed by side walls and a back wall. The side walls and back wall have a plurality of separate vertically aligned segments extending along the height of the impact type particle separator. Each vertically aligned segment is connected at its ends to an adjacent segment.

    摘要翻译: 用于在循环流化床(CFB)锅炉中从烟道气中分离固体的装置包括垂直安装在CFB壁上的多个冲击型颗粒分离器。 冲击式颗粒分离器相邻定位并水平间隔。 每个冲击式颗粒分离器包括连接到流体循环系统的多个垂直安装的冷却管。 滑动配合元件围绕冷却管。 杯形构造由侧壁和后壁形成。 侧壁和后壁具有沿着冲击型颗粒分离器的高度延伸的多个单独的垂直对齐的部分。 每个垂直对准的段在其端部连接到相邻的段。