Film-bulk acoustic wave resonator with motion plate
    31.
    发明申请
    Film-bulk acoustic wave resonator with motion plate 有权
    具有运动板的膜 - 体声波谐振器

    公开(公告)号:US20060197411A1

    公开(公告)日:2006-09-07

    申请号:US11073345

    申请日:2005-03-04

    CPC classification number: G01P15/097 G01L1/165

    Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

    Abstract translation: 一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量(TEV)的装置和方法。 膜 - 体声波谐振器(FBAR)包括形成在FBAR晶片和表面中的声反射器。 第一电极形成在声反射体的表面上并具有表面。 在第一电极的表面上形成压电层并具有表面。 第二电极形成在压电层的表面上。 运动板相对于第二电极的表面以预定距离悬挂在空间中,并且电容耦合到FBAR。

    Thin-film acoustically-coupled transformer
    32.
    发明申请
    Thin-film acoustically-coupled transformer 有权
    薄膜声耦合变压器

    公开(公告)号:US20050093656A1

    公开(公告)日:2005-05-05

    申请号:US10699481

    申请日:2003-10-30

    Abstract: One embodiment of the acoustically-coupled transformer includes a stacked bulk acoustic resonator (SBAR) having a stacked pair of film bulk acoustic resonators (FBARs) with an acoustic decoupler between them. Each FBAR has opposed planar electrodes with piezoelectric material between them. The transformer additionally has first terminals electrically connected to the electrodes of one FBAR and second terminals electrically connected to the electrodes of the other FBAR. Another embodiment includes first and second stacked bulk acoustic resonators (SBARs), each as described above, a first electrical circuit connecting one FBARs of the first SBAR to one FBAR of the second SBAR, and a second electrical circuit connecting the other FBAR of the first SBAR to the other FBAR of the second SBAR. The transformer provides impedance transformation, can linking single-ended circuitry with balanced circuitry or vice versa and electrically isolates primary and secondary. Some embodiments are additionally electrically balanced.

    Abstract translation: 声耦合变压器的一个实施例包括具有堆叠的一对膜体声波谐振器(FBAR)的层叠体声波谐振器(SBAR),它们之间具有声耦合器。 每个FBAR都具有与它们之间的压电材料的平面电极。 变压器还具有电连接到一个FBAR的电极的第一端子和电连接到另一个FBAR的电极的第二端子。 另一个实施例包括如上所述的第一和第二层叠体声波谐振器(SBAR),将第一SBAR的一个FBAR与第二SBAR的一个FBAR连接的第一电路和连接第一SBAR的另一个FBAR的第二电路 SBAR到第二个SBAR的另一个FBAR。 变压器提供阻抗变换,可以将单端电路与平衡电路相连,反之亦然,电隔离一次和二次。 一些实施例另外电平衡。

    BONDED WAFER STRUCTURE AND METHOD OF FABRICATION
    33.
    发明申请
    BONDED WAFER STRUCTURE AND METHOD OF FABRICATION 失效
    结合的波浪结构和制造方法

    公开(公告)号:US20100096745A1

    公开(公告)日:2010-04-22

    申请号:US12254536

    申请日:2008-10-20

    Abstract: A method of packaging electronics comprises providing a first wafer and providing a second wafer. The method also comprises depositing a polymer material over a surface of the first wafer; and selectively removing a portion of the polymer from the first wafer to create a void in the polymer. The method also comprises placing the first wafer over the second wafer and in contact with the polymer; and curing the polymer to bond the first wafer to the second wafer. A bonded wafer structure is also described.

    Abstract translation: 包装电子器件的方法包括提供第一晶片并提供第二晶片。 该方法还包括在第一晶片的表面上沉积聚合物材料; 并且从第一晶片选择性地去除聚合物的一部分以在聚合物中产生空隙。 该方法还包括将第一晶片放置在第二晶片上并与聚合物接触; 并固化聚合物以将第一晶片结合到第二晶片。 还描述了接合晶片结构。

    Arrangement of lattice filter
    35.
    发明授权
    Arrangement of lattice filter 有权
    晶格滤波器的布置

    公开(公告)号:US07187255B2

    公开(公告)日:2007-03-06

    申请号:US10974078

    申请日:2004-10-26

    CPC classification number: H03H9/0095

    Abstract: A filter and method of manufacturing a filter having a lattice arrangement that efficiently utilizes substrate space. An embodiment of the invention is directed to a filter having a plurality of resonators disposed on a substrate, each resonator comprising a first electrode and a second electrode disposed vertically adjacent such that an acoustic cavity of a piezoelectric material is formed between each first electrode and each second electrode of each resonator, the first and second electrodes of each resonator electrically isolated from each other via the piezoelectric material. In this manner, the filter is realized without having to use any vias. Additionally, the resonators may be of a shape that allows each to be disposed close together such that some sides of each of the resonators are parallel to each other. Thus, substrate space can be preserved even further.

    Abstract translation: 一种制造具有有效利用衬底空间的晶格布置的滤光器的滤光器和方法。 本发明的实施例涉及一种具有设置在基板上的多个谐振器的滤波器,每个谐振器包括第一电极和垂直相邻设置的第二电极,使得在每个第一电极和每个第一电极之间形成压电材料的声腔 每个谐振器的第二电极,每个谐振器的第一和第二电极经由压电材料彼此电隔离。 以这种方式,实现过滤器而不必使用任何通孔。 此外,谐振器可以是允许每个谐振器彼此靠近放置的形状,使得每个谐振器的一些侧面彼此平行。 因此,可以进一步保持基板空间。

    Method of manufacturing vertically separated acoustic filters and resonators
    36.
    发明申请
    Method of manufacturing vertically separated acoustic filters and resonators 失效
    制造垂直分离的声学滤波器和谐振器的方法

    公开(公告)号:US20060158284A1

    公开(公告)日:2006-07-20

    申请号:US11373451

    申请日:2006-03-09

    Abstract: An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.

    Abstract translation: 公开了一种包括垂直分离的声谐振器的装置。 该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。 由于谐振器在另一个上方垂直分离,所以实现谐振器所需的总面积减小,从而实现了芯片尺寸和成本的节省。 垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。

    Thin film bulk acoustic resonator with a mass loaded perimeter
    37.
    发明申请
    Thin film bulk acoustic resonator with a mass loaded perimeter 有权
    具有质量负载周长的薄膜体声波谐振器

    公开(公告)号:US20060103492A1

    公开(公告)日:2006-05-18

    申请号:US10990201

    申请日:2004-11-15

    CPC classification number: H03H9/02118 H03H9/173 H03H9/177

    Abstract: A resonator structure (FBAR) made of electrodes sandwich a piezoelectric material. The intersection of the two conducting electrodes defines the active area of the acoustic resonator. The active area is divided into two concentric areas; a perimeter or frame, and a central region. An annulus is added to one of the two conducting electrodes to improve the electrical performance (in terms of Q).

    Abstract translation: 由电极制成的谐振器结构(FBAR)夹着压电材料。 两个导电电极的交点定义了声谐振器的有效面积。 活动区域分为两个同心区域; 周边或框架,以及中央区域。 在两个导电电极中的一个上添加环,以改善电性能(以Q为单位)。

    Acoustic resonator performance enhancement using alternating frame structure
    38.
    发明申请
    Acoustic resonator performance enhancement using alternating frame structure 有权
    使用交替框架结构的声谐振器性能提升

    公开(公告)号:US20060071736A1

    公开(公告)日:2006-04-06

    申请号:US11159753

    申请日:2005-06-23

    Abstract: Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.

    Abstract translation: 公开了一种包括基板,第一电极,压电材料层,第二电极和交替框架区域的声共振器。 第一电极与衬底相邻,并且第一电极具有外周边。 压电层与第一电极相邻。 第二电极邻近压电层,第二电极具有外周。 交替的框架区域在第一和第二电极之一上。

    Method for acoustically isolating an acoustic resonator from a substrate
    40.
    发明申请
    Method for acoustically isolating an acoustic resonator from a substrate 审中-公开
    用于将声共振器与衬底声学隔离的方法

    公开(公告)号:US20050181572A1

    公开(公告)日:2005-08-18

    申请号:US10778618

    申请日:2004-02-13

    CPC classification number: H03H9/0542 H03H3/02 H03H9/173 H03H2003/021

    Abstract: A method for acoustically isolating an acoustic resonator comprises: providing a substrate; forming a porous region in the substrate; forming the acoustic resonator on the porous region; and removing the porous region from the substrate. The removing forms a cavity that separates a portion of the acoustic resonator from the substrate. By using the techniques described herein, it is possible to form an acoustic resonator on a substrate and to form a cavity between the acoustic resonator and the substrate without depositing sacrificial material.

    Abstract translation: 用于声学隔离声谐振器的方法包括:提供衬底; 在所述基板中形成多孔区域; 在所述多孔区域上形成所述声共振器; 以及从所述基底去除所述多孔区域。 去除形成将声谐振器的一部分与基板分离的空腔。 通过使用本文描述的技术,可以在衬底上形成声谐振器并在声谐振器和衬底之间形成空腔,而不沉积牺牲材料。

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