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    MEMS-BASED SENSOR SUITE
    37.
    发明申请
    MEMS-BASED SENSOR SUITE 审中-公开

    公开(公告)号：US20180238930A1

    公开(公告)日：2018-08-23

    申请号：US15897819

    申请日：2018-02-15

    Applicant: HRL LABORATORIES, LLC

    Inventor： Hung Nguyen ,  David T. Chang ,  Raviv Perahia ,  Logan D. Sorenson

    IPC: G01P15/18 ,  G01P15/14 ,  G01P15/105 ,  G01P15/08

    Abstract: A microelectromechanical (MEMS) sensor suite including a three axis accelerometer including an accelerometer sensor polyhedron having a series of faces, and a series of axial accelerometers on three faces of the series of faces of the accelerometer sensor polyhedron. The MEMS sensor suite also includes a three axis magnetometer including a magnetometer sensor polyhedron having a series of faces, and a series of axial magnetometers on three faces of the series of faces of the magnetometer sensor polyhedron.

    Micro-resonator having lid-integrated electrode
    38.
    发明授权
    Micro-resonator having lid-integrated electrode 有权

    公开(公告)号：US09991868B1

    公开(公告)日：2018-06-05

    申请号：US14686567

    申请日：2015-04-14

    Applicant: HRL Laboratories, LLC

    Inventor： Hung Nguyen ,  Raviv Perahia ,  Lian X. Huang ,  Srikanth Iyer

    IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

    CPC classification number: H03H9/02259 ,  B81B2207/094 ,  H03H3/0072 ,  H03H9/2426 ,  H03H9/2463

    Abstract: A micro-resonator employs a lid-integrated electrode to one or more of drive, sense and tune a vibrational resonant mode of a microelectromechanical systems (MEMS) resonator. The micro-resonator includes a lid attached to a base that provides a resonator cavity. The micro-resonator further includes the MEMS resonator extending from a surface of the base toward the lid within the resonator cavity. The lid-integrated electrode extends vertically from the lid into the resonator cavity toward the base. The vertically extending, lid-integrated electrode is positioned spaced from and adjacent to a side of the MEMS resonator to one or more of drive, sense and tune mechanical movement of the MEMS resonator.

    Micro-scale piezoelectric resonating magnetometer
    39.
    发明授权
    Micro-scale piezoelectric resonating magnetometer 有权

    公开(公告)号：US09977097B1

    公开(公告)日：2018-05-22

    申请号：US14628182

    申请日：2015-02-20

    Applicant: HRL Laboratories, LLC

    Inventor： Hung Nguyen ,  Logan D. Sorenson ,  David T. Chang ,  Raviv Perahia ,  Deborah J. Kirby ,  Richard J. Joyce

    IPC: G01R33/028

    CPC classification number: G01R33/0283 ,  G01R33/0286

    Abstract: A magnetometer has a resonating structure which is naturally resonant in at least first and second resonant modes, a resonant frequency of the second mode being at least an order of magnitude greater than a resonant frequency of the first mode, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of said loop. First and second oscillators are provided, the first oscillator being coupled to the loop for applying an oscillating current to the loop, the oscillating current having a frequency essentially equal to the resonant frequency of the first mode of the resonating structure, the second oscillator being coupled to said sense electrodes, the second oscillator oscillating with a fundamental frequency corresponding to the resonant frequency of the second mode of the resonating structure, the second oscillator also producing sidebands indicative of the magnetometer sensing an external magnetic field.

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