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公开(公告)号：US20070272555A1
公开(公告)日：2007-11-29
申请号：US11440711
申请日：2006-05-24
申请人： Brian W. Baird
发明人： Brian W. Baird
IPC分类号： C10G33/02
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/083 , B23K26/0876 , B23K26/40 , B23K2103/172 , B23K2103/42 , B23K2103/50 , H01L21/31105 , H01L21/31127 , H01L21/481
摘要： Laser output including at least one laser pulse having a wavelength greater than 1.1 μm and shorter than 5 μm (preferably at about 1.1 μm) and having a pulsewidth shorter than 100 ps (preferably shorter than 10 ps) permits low-k dielectric material, such as SRO or SiCOH, to be removed without damaging the substrate. An oscillator module in cooperation with an amplification module are used to generate the laser output.
摘要翻译： 具有波长大于1.1μm且小于5μm（优选约1.1μm）并具有短于100ps（优选地小于10ps）的脉冲宽度的脉冲宽度的至少一个激光脉冲的激光输出允许低k电介质材料，例如 作为SRO或SiCOH被去除而不损坏基底。 与放大模块配合使用的振荡器模块用于产生激光输出。
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32.发明授权Method for stablizing an output of a pulsed laser system using pulse shaping 有权使用脉冲整形来稳定脉冲激光系统的输出的方法公开(公告)号：US08263903B2
公开(公告)日：2012-09-11
申请号：US12782458
申请日：2010-05-18
IPC分类号： B23K26/42 , B23K26/06 , B23K26/073
CPC分类号： H01S5/06835 , H01S3/06758 , H01S3/094003 , H01S5/0057 , H01S5/0428
摘要： A method for stabilizing an output of a pulsed laser system includes a directly modulated laser diode by mitigating the effect of switching transients on the temporal shape of the outputted pulses. The method includes controlling a pulse shaping signal to define, over time, processing and conditioning periods. During the processing periods, the pulse shaping signal has an amplitude profile tailored to produce the desired temporal shape of the output. Each conditioning period either immediately precedes or follows a processing period. During a given processing period, the amplitude profile of the pulse shaping signal is tailored so that the drive current of the laser diode is lower than its maximum value during the corresponding processing period, and is of the same order of magnitude as the laser threshold current of the laser diode. In this manner, the stability of the output during the corresponding processing period is improved.
摘要翻译： 用于稳定脉冲激光系统的输出的方法包括通过减轻对输出脉冲的时间形状的切换瞬变的影响的直接调制的激光二极管。 该方法包括控制脉冲整形信号以定义时间上的处理和调节周期。 在处理周期期间，脉冲整形信号具有调整的幅度分布，以产生输出的期望时间形状。 每个调理期间紧接在处理期之前或之后。 在给定的处理周期期间，调整脉冲整形信号的幅度分布，使得激光二极管的驱动电流在相应的处理周期内低于其最大值，并且与激光阈值电流具有相同的数量级 的激光二极管。 以这种方式，提高了在相应处理期间输出的稳定性。
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公开(公告)号：USRE43487E1
公开(公告)日：2012-06-26
申请号：US12350767
申请日：2009-01-08
申请人： James N. O'Brien , Lian-Cheng Zou , Yunlong Sun , Kevin P. Fahey , Michael J. Wolfe , Brian W. Baird , Richard S. Harris
发明人： James N. O'Brien , Lian-Cheng Zou , Yunlong Sun , Kevin P. Fahey , Michael J. Wolfe , Brian W. Baird , Richard S. Harris
CPC分类号： B23K26/0622 , B23K26/032 , B23K26/066 , B23K26/073 , B23K26/083 , B23K26/0869 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： UV laser cutting throughput through silicon and like materials is improved by dividing a long cut path (112) into short segments (122), from about 10 μm to 1 mm. The laser output (32) is scanned within a first short segment (122) for a predetermined number of passes before being moved to and scanned within a second short segment (122) for a predetermined number of passes. The bite size, segment size (126), and segment overlap (136) can be manipulated to minimize the amount and type of trench backfill. Real-time monitoring is employed to reduce rescanning portions of the cut path 112 (112) where the cut is already completed. Polarization direction of the laser output (32) is also correlated with the cutting direction to further enhance throughput. This technique can be employed to cut a variety of materials with a variety of different lasers and wavelengths. A multi-step process can optimize the laser processes for each individual layer.
摘要翻译： 通过将长切割路径（112）分割成约10微米至1mm的短段（122）来提高通过硅等材料的UV激光切割吞吐量。 激光输出（32）在第一短段（122）内扫描预定数量的通过，然后移动到第二短段（122）内并在第二短段（122）内扫描预定次数的通过次数。 可以操纵咬合尺寸，段尺寸（126）和段重叠（136）以最小化沟槽回填的数量和类型。 采用实时监测来减少已经完成切割的切割路径112（112）的重新扫描部分。 激光输出（32）的极化方向也与切割方向相关，以进一步提高吞吐量。 该技术可用于切割具有各种不同激光和波长的各种材料。 多步骤过程可以优化每个单独层的激光工艺。
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公开(公告)号：US20120092755A1
公开(公告)日：2012-04-19
申请号：US12374989
申请日：2007-07-25
申请人： Brian W. Baird , David M. Hemenway , Xiaoyuan Peng , Wensheng Ren
发明人： Brian W. Baird , David M. Hemenway , Xiaoyuan Peng , Wensheng Ren
CPC分类号： H01S3/2316 , B23K26/0622 , H01S3/0064 , H01S3/0085 , H01S3/06758 , H01S3/09408 , H01S3/0941 , H01S3/09415 , H01S3/10038 , H01S3/2333
摘要： Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).
摘要翻译： 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。
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公开(公告)号：US07817686B2
公开(公告)日：2010-10-19
申请号：US12057264
申请日：2008-03-27
IPC分类号： H01S3/098
CPC分类号： H01S3/0057 , B23K26/0622 , G02F1/0327
摘要： Laser pulse shaping techniques produce tailored laser pulse spectral output. The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns-20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators receiving drive signals that selectively change the amount of incident pulsed laser emission to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build-up time.
摘要翻译： 激光脉冲整形技术产生定制的激光脉冲光谱输出。 激光脉冲可以被编程为具有期望的脉冲宽度和脉冲形状（例如，亚纳秒到10ns-20ns脉冲宽度，1ns至几纳秒前沿上升时间）。 优选实施例是用一个或多个电光调制器来实现的，该电光调制器接收有选择地改变入射脉冲激光发射量的驱动信号以形成定制的脉冲输出。 从脉冲激光发射器触发驱动信号抑制与链路处理系统的其他级相关联的抖动，并且基本上消除与脉冲激光发射建立时间相关联的抖动。
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公开(公告)号：US20130327389A1
公开(公告)日：2013-12-12
申请号：US13821009
申请日：2011-09-06
申请人： Brian W. Baird , Timothy D. Gerke
发明人： Brian W. Baird , Timothy D. Gerke
IPC分类号： H01L31/0236 , H01L31/18
CPC分类号： H01L31/0236 , B23K26/0624 , B23K26/0732 , B23K26/364 , B23K26/40 , B23K2103/172 , H01L21/268 , H01L21/78 , H01L31/046 , H01L31/0463 , H01L31/073 , H01L31/0749 , H01L31/18 , Y02E10/543
摘要： A method comprising providing a layer structure for a photovoltaic device, the layer structure comprising an electrode, a light absorber comprising a layer of chalcopyrite-type semiconductor material, such as copper indium gallium diselenide, disposed on the electrode and a transparent electrode disposed on the light absorber. The method also comprises delivering a spatially-shaped picosecond pulsed laser beam so as to remove material from a region of the transparent electrode so as to expose at least a portion of the light absorber.
摘要翻译： 一种方法，包括提供用于光伏器件的层结构，所述层结构包括电极，设置在电极上的黄铜矿型半导体材料如铜铟镓二硒化物层的光吸收体和设置在电极上的透明电极 光吸收器。 该方法还包括递送空间形状的皮秒脉冲激光束，以从透明电极的区域去除材料，以暴露光吸收体的至少一部分。
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公开(公告)号：US08248688B2
公开(公告)日：2012-08-21
申请号：US12374989
申请日：2007-07-25
申请人： Brian W. Baird , David M. Hemenway , Xiaoyuan Peng , Wensheng Ren
发明人： Brian W. Baird , David M. Hemenway , Xiaoyuan Peng , Wensheng Ren
CPC分类号： H01S3/2316 , B23K26/0622 , H01S3/0064 , H01S3/0085 , H01S3/06758 , H01S3/09408 , H01S3/0941 , H01S3/09415 , H01S3/10038 , H01S3/2333
摘要： Embodiments of laser systems advantageously use pulsed optical fiber-based laser source (12) output, the temporal pulse profile of which may be programmed to assume a range of pulse shapes. Pulsed fiber lasers are subject to peak power limits to prevent an onset of undesirable nonlinear effects; therefore, the laser output power of these devices is subsequently amplified in a diode-pumped solid state photonic power amplifier (DPSS-PA) (16). The DPSS PA provides for amplification of the desirable low peak power output of a pulsed fiber master oscillator power amplifier (14) to much higher peak power levels and thereby also effectively increases the available energy per pulse at a specified pulse repetition frequency. The combination of the pulsed fiber master oscillator power amplifier and the diode-pumped solid state power amplifier is referred to as a tandem solid state photonic amplifier (10).
摘要翻译： 激光系统的实施例有利地使用基于脉冲光纤的激光源（12）输出，其时间脉冲分布可被编程为呈现一定范围的脉冲形状。 脉冲光纤激光器受到峰值功率限制，以防止发生不期望的非线性效应; 因此，这些器件的激光输出功率随后在二极管泵浦固态光子功率放大器（DPSS-PA）（16）中放大。 DPSS PA提供将脉冲光纤主振荡器功率放大器（14）的期望的低峰值功率输出放大到更高的峰值功率电平，从而也可以在指定的脉冲重复频率下有效地增加每个脉冲的可用能量。 脉冲光纤主振荡器功率放大器和二极管泵浦固态功率放大器的组合被称为串联固态光子放大器（10）。
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38.发明授权Methods for stabilizing the output of a pulsed laser system having pulse shaping capabilities 有权用于稳定具有脉冲整形能力的脉冲激光系统的输出的方法公开(公告)号：US08238390B2
公开(公告)日：2012-08-07
申请号：US12782470
申请日：2010-05-18
IPC分类号： H01S3/10
CPC分类号： B23K26/0624 , B23K26/382 , B23K26/40 , B23K2101/40 , B23K2103/50 , G06F1/0321 , H01S3/2308 , H01S5/06216 , H01S5/06821 , H01S5/146
摘要： Methods stabilize the output of a pulsed laser system using pulse shaping capabilities. In some embodiments, transient effects following a transition between a QCW regime and a pulse shaping regime are mitigated by ensuring that the average QCW optical power substantially corresponds to the average pulsed optical power outputted in a steady-state operation of the pulsed laser system in the pulse shaping regime. The QCW signal or the pulse shaping signal may be adapted for this purpose. In other embodiments, transient effects associated with non-process pulses emitted between series of consecutive process pulses are mitigated through the proper use of sequential pulse shaping.
摘要翻译： 方法使用脉冲整形功能来稳定脉冲激光系统的输出。 在一些实施例中，通过确保平均QCW光功率基本上对应于在脉冲激光系统的稳态操作中输出的平均脉冲光功率，可以减轻QCW状态和脉冲整形状态之间的转变之后的瞬态效应 脉冲整形方式。 QCW信号或脉冲整形信号可以适用于此目的。 在其他实施例中，通过适当地使用顺序脉冲整形来减轻与在连续过程脉冲串之间发射的非过程脉冲相关的瞬态效应。
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39.发明申请METHOD FOR STABLIZING AN OUTPUT OF A PULSED LASER SYSTEM USING PULSE SHAPING 有权使用脉冲形状稳定脉冲激光系统的输出的方法公开(公告)号：US20110284507A1
公开(公告)日：2011-11-24
申请号：US12782458
申请日：2010-05-18
IPC分类号： B23K26/06
CPC分类号： H01S5/06835 , H01S3/06758 , H01S3/094003 , H01S5/0057 , H01S5/0428
摘要： A method for stabilizing an output of a pulsed laser system includes a directly modulated laser diode by mitigating the effect of switching transients on the temporal shape of the outputted pulses. The method includes controlling a pulse shaping signal to define, over time, processing and conditioning periods. During the processing periods, the pulse shaping signal has an amplitude profile tailored to produce the desired temporal shape of the output. Each conditioning period either immediately precedes or follows a processing period. During a given processing period, the amplitude profile of the pulse shaping signal is tailored so that the drive current of the laser diode is lower than its maximum value during the corresponding processing period, and is of the same order of magnitude as the laser threshold current of the laser diode. In this manner, the stability of the output during the corresponding processing period is improved.
摘要翻译： 用于稳定脉冲激光系统的输出的方法包括通过减轻对输出脉冲的时间形状的切换瞬变的影响的直接调制的激光二极管。 该方法包括控制脉冲整形信号以定义时间上的处理和调节周期。 在处理周期期间，脉冲整形信号具有调整的幅度分布，以产生输出的期望时间形状。 每个调理期间紧接在处理期之前或之后。 在给定的处理周期期间，调整脉冲整形信号的幅度分布，使得激光二极管的驱动电流在相应的处理周期内低于其最大值，并且与激光阈值电流具有相同的数量级 的激光二极管。 以这种方式，提高了在相应处理期间输出的稳定性。
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公开(公告)号：US5334474A
公开(公告)日：1994-08-02
申请号：US75440
申请日：1993-06-14
CPC分类号： G03G9/091 , G03G9/09733 , G03G9/09758
摘要： A dry toner having Zapon Yellow 141 as a charge control agent, dispersed moderately in the toner. Zapon Yellow 141 is about 95% by weight Solvent Yellow 81 and about 5% by weight Solvent Orange 56.
摘要翻译： 具有Zapon Yellow 141作为电荷控制剂的干燥调色剂，适度地分散在调色剂中。 Zapon Yellow 141为约95重量％溶剂黄81和约5重量％溶剂橙56。
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