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11 条记录 (耗时 0.019 秒)

    LOW COST OPTICAL PUMP LASER PACKAGE
    1.
    发明申请
    LOW COST OPTICAL PUMP LASER PACKAGE 审中-公开

    公开(公告)号：US20190229499A1

    公开(公告)日：2019-07-25

    申请号：US16372963

    申请日：2019-04-02

    申请人： David C. Dawson ,  Wolfram Urbanek ,  David Martin Hemenway

    发明人： David C. Dawson ,  Wolfram Urbanek ,  David Martin Hemenway

    IPC分类号： H01S5/40 ,  H01S5/022 ,  H01S5/042 ,  H01S5/024

    摘要： Laser diode packages include a rigid thermally conductive base member that includes a base member surface situated to support at least one laser diode assembly, at least one electrode standoff secured to the base member surface that has at least one electrical lead having a first end and a second end with the first end secured to a lead surface of the electrode standoff, and a lid member that includes a lid portion and a plurality of side portions extending from the lid portion and situated to be secured to the base member so as to define sides of the laser diode package, wherein at least one of the side portions includes a lead aperture situated to receive the second end of the secured electrical lead that is insertable through the lead aperture so that the lid member extends over the base member to enclose the laser diode package.

    LASER MICROMACHINING USING PROGRAMMABLE PULSE SHAPES
    2.
    发明申请
    LASER MICROMACHINING USING PROGRAMMABLE PULSE SHAPES 有权
    使用可编程脉冲形状的激光微型计算机

    公开(公告)号：US20090245301A1

    公开(公告)日：2009-10-01

    申请号：US12057264

    申请日：2008-03-27

    申请人： Xiaoyuan Peng ,  Brian W. Baird ,  William J. Jordens ,  David Martin Hemenway

    发明人： Xiaoyuan Peng ,  Brian W. Baird ,  William J. Jordens ,  David Martin Hemenway

    IPC分类号： H01S3/10 ,  H01S3/00

    CPC分类号： H01S3/0057 ,  B23K26/0622 ,  G02F1/0327

    摘要： Laser pulse shaping techniques produce tailored laser pulse spectral output. The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns-20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators receiving drive signals that selectively change the amount of incident pulsed laser emission to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build-up time.

    摘要翻译： 激光脉冲整形技术产生定制的激光脉冲光谱输出。 激光脉冲可以被编程为具有期望的脉冲宽度和脉冲形状（例如，亚纳秒到10ns-20ns脉冲宽度，1ns至几纳秒前沿上升时间）。 优选实施例是用一个或多个电光调制器来实现的，该电光调制器接收有选择地改变入射脉冲激光发射量的驱动信号以形成定制的脉冲输出。 从脉冲激光发射器触发驱动信号抑制与链路处理系统的其他级相关联的抖动，并且基本上消除与脉冲激光发射建立时间相关联的抖动。

    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing
    8.
    发明授权
    Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing 有权
    用于区分多个激光束的反射用于半导体结构处理的校准的系统和方法

    公开(公告)号：US08110775B2

    公开(公告)日：2012-02-07

    申请号：US11499394

    申请日：2006-08-03

    申请人： Ho Wai Lo ,  David Martin Hemenway ,  Brady Nilsen ,  Kelly J. Bruland

    发明人： Ho Wai Lo ,  David Martin Hemenway ,  Brady Nilsen ,  Kelly J. Bruland

    IPC分类号： B23K26/04

    CPC分类号： H01L23/5258 ,  G11C17/14 ,  G11C17/143 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A system determines relative positions of a semiconductor substrate and a plurality of laser beam spots on or within the semiconductor substrate in a machine for selectively irradiating structures on or within the substrate using a plurality of laser beams. The system comprises a laser source, first and second laser beam propagation paths, first and second reflection sensors, and a processor. The laser source produces at least the first and second laser beams, which propagate toward the substrate along the first and second propagation paths, respectively, which have respective first and second axes that intersects the substrate at respective first and second spots. The reflection sensors are positioned to detect reflection of the spots, as the spots moves relative to the substrate, thereby generating reflection signals. The processor is configured to determine, based on the reflection signals, positions of the spots on or within the substrate.

    摘要翻译： 系统确定半导体衬底和机器中半导体衬底上或半导体衬底内的多个激光束点的相对位置，用于使用多个激光束选择性地照射衬底上或衬底内的结构。 该系统包括激光源，第一和第二激光束传播路径，第一和第二反射传感器以及处理器。 激光源至少产生第一和第二激光束，其分别沿着第一和第二传播路径朝着衬底传播，其具有在相应的第一和第二点处与衬底相交的相应的第一和第二轴。 反射传感器被定位成检测点的反射，因为光点相对于基板移动，从而产生反射信号。 处理器被配置为基于反射信号确定基板上或内部的斑点的位置。