Piezoelectric actuator having embedded electrodes
    34.
    发明授权
    Piezoelectric actuator having embedded electrodes 失效
    具有嵌入电极的压电致动器

    公开(公告)号:US08668311B2

    公开(公告)日:2014-03-11

    申请号:US13384101

    申请日:2009-10-30

    摘要: A piezoelectric actuator includes a thin film sheet, a first electrode, and a second electrode. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet. The first electrode is embedded within the thin film sheet. The second electrode is embedded within the thin film sheet, and is interdigitated in relation to the first electrode. The electric field is induced within the thin film sheet via application of a voltage across the first and the second electrodes.

    摘要翻译: 压电致动器包括薄膜片,第一电极和第二电极。 薄膜片是为了响应于在薄膜片内感应的电场而物理地变形的。 第一电极嵌入薄膜片内。 第二电极嵌入在薄膜片内,并且相对于第一电极交错。 通过施加跨越第一和第二电极的电压,在薄膜片内感应出电场。

    ARCHITECTURE FOR PIEZOELECTRIC MEMS DEVICES
    36.
    发明申请
    ARCHITECTURE FOR PIEZOELECTRIC MEMS DEVICES 有权
    压电MEMS器件的结构

    公开(公告)号:US20120187804A1

    公开(公告)日:2012-07-26

    申请号:US13013494

    申请日:2011-01-25

    IPC分类号: H01L41/04 H01L41/22

    摘要: A piezoelectric thin film device comprises a piezoelectric thin film having upper and lower surfaces and a defined tilted crystal morphology, a top electrode disposed on the upper surface, a substrate having a surface morphology that corresponds to the defined crystallographically tilted morphology, and a bottom electrode disposed between and crystallographically linked to both the lower surface of the piezoelectric thin film and the substrate surface, the bottom and top electrodes having a parallel planar configuration relative to the plane of the substrate and the defined crystallographically tilted morphology having a crystallographic c-axis direction oriented at a >0° angle relative to the normal to the plane of the electrodes; and method of making the device.

    摘要翻译: 压电薄膜器件包括具有上表面和下表面的压电薄膜和限定的倾斜晶体形态,设置在上表面上的顶电极,具有对应于限定的晶体倾斜形态的表面形态的基底,以及底电极 设置在晶体学上与压电薄膜的下表面和基板表面相关联,底部和顶部电极相对于基板的平面具有平行的平面结构,并且具有限定的晶体学倾斜的形态,具有晶体c轴方向 相对于电极平面的法线> 0°角定向; 以及制造该装置的方法。

    Printhead unit
    37.
    发明申请
    Printhead unit 有权
    打印头单元

    公开(公告)号:US20110102516A1

    公开(公告)日:2011-05-05

    申请号:US12610196

    申请日:2009-10-30

    IPC分类号: B41J2/045 H04R17/00 H01L41/00

    摘要: Piezoelectric unit, comprising a fluid chamber, a fluid outlet, an actuator, comprising a thin film piezoceramic element and a membrane, acting as a wall of the fluid chamber, and a support element arranged for preventing a supported portion of the actuator from movement in a main direction of actuation movement of the actuator, while allowing such actuation movement on at least two sides of the supported portion, wherein the support element is connected to a unit portion that extends approximately opposite to the actuator.

    摘要翻译: 压电单元,包括流体室,流体出口,致动器,其包括用作流体室的壁的薄膜压电陶瓷元件和膜;以及支撑元件,其布置成用于防止致动器的支撑部分在 致动器的致动运动的主要方向,同时允许在被支撑部分的至少两侧上的这种致动运动,其中支撑元件连接到大致相对于致动器延伸的单元部分。

    Photonic structures, devices, and methods
    38.
    发明授权
    Photonic structures, devices, and methods 有权
    光子结构,器件和方法

    公开(公告)号:US07608194B2

    公开(公告)日:2009-10-27

    申请号:US11774397

    申请日:2007-07-06

    IPC分类号: B05D1/32 C23F1/00

    摘要: Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.

    摘要翻译: 光子晶体结构通过包括提供衬底,沉积至少一个平面层以形成堆叠的步骤的方法制成,堆叠的每个平面层包括具有不同子层折射率的两个或多个子层,沉积硬掩模材料,沉积 在硬掩模材料之上的可压印材料,通过压印凹陷阵列来图案化可压印材料,并且在凹陷处定向蚀刻通过硬掩模材料和叠层的规则的开口阵列。

    Photonic structures, devices, and methods
    39.
    发明授权
    Photonic structures, devices, and methods 失效
    光子结构,器件和方法

    公开(公告)号:US07255805B2

    公开(公告)日:2007-08-14

    申请号:US10755955

    申请日:2004-01-12

    IPC分类号: G02B6/136

    摘要: Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.

    摘要翻译: 光子晶体结构通过包括提供衬底,沉积至少一个平面层以形成堆叠的步骤的方法制成,堆叠的每个平面层包括具有不同子层折射率的两个或多个子层,沉积硬掩模材料,沉积 在硬掩模材料之上的可压印材料,通过压印凹陷阵列来图案化可压印材料,并且在凹陷处定向蚀刻通过硬掩模材料和叠层的规则的开口阵列。