中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

45 records (took 0.018 seconds)

    MEMS ACTUATION SYSTEMS AND METHODS
    32.
    发明申请
    MEMS ACTUATION SYSTEMS AND METHODS 审中-公开

    公开(公告)号：US20180072561A1

    公开(公告)日：2018-03-15

    申请号：US15698942

    申请日：2017-09-08

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang ,  Gerardo Morabito

    IPC: B81B3/00 ,  B81C1/00 ,  H02N1/06 ,  H02N2/02

    Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).

    MEMS ACTUATOR PACKAGE ARCHITECTURE
    34.
    发明申请
    MEMS ACTUATOR PACKAGE ARCHITECTURE 审中-公开

    公开(公告)号：US20170133950A1

    公开(公告)日：2017-05-11

    申请号：US15012682

    申请日：2016-02-01

    Applicant: MEMS Drive Inc.

    Inventor： Xiaolei Liu ,  Guiqin Wang ,  Matthew Ng

    IPC: H02N1/00 ,  H04N5/232 ,  G02B7/09 ,  G02B27/64 ,  H01L41/09 ,  H02N2/02

    Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.

    Multi-directional actuator
    36.
    发明授权
    Multi-directional actuator 有权

    公开(公告)号：US11005392B2

    公开(公告)日：2021-05-11

    申请号：US16252091

    申请日：2019-01-18

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

    IPC: H02N1/00

    Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    MEMS Actuator System
    37.
    发明申请
    MEMS Actuator System 有权

    公开(公告)号：US20210088804A1

    公开(公告)日：2021-03-25

    申请号：US17025147

    申请日：2020-09-18

    Applicant: MEMS Drive, Inc.

    Inventor： MATTHEW NG ,  Xiaolei Liu ,  Guiqin Wang

    IPC: G02B27/64 ,  H02N1/00 ,  H02K41/035 ,  H02N2/02

    Abstract: A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.

    MULTI-DIRECTIONAL ACTUATOR
    39.
    发明申请
    MULTI-DIRECTIONAL ACTUATOR 审中-公开

    公开(公告)号：US20190157989A1

    公开(公告)日：2019-05-23

    申请号：US16252091

    申请日：2019-01-18

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

    IPC: H02N1/00

    Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    Low stiffness flexure
    40.
    发明授权
    Low stiffness flexure 有权

    公开(公告)号：US10071903B2

    公开(公告)日：2018-09-11

    申请号：US14677730

    申请日：2015-04-02

    Applicant: MEMS DRIVE, INC.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Guiqin Wang ,  Benson Mai ,  Matthew Ng

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

    Abstract: A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.

Patent Agency Ranking