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    PRESSURE SENSOR GENERATING A TRANSDUCED SIGNAL WITH REDUCED AMBIENT TEMPERATURE DEPENDENCE, AND MANUFACTURING METHOD THEREOF
    33.
    发明申请
    PRESSURE SENSOR GENERATING A TRANSDUCED SIGNAL WITH REDUCED AMBIENT TEMPERATURE DEPENDENCE, AND MANUFACTURING METHOD THEREOF 审中-公开
    压力传感器产生具有降低环境温度依赖性的转换信号及其制造方法

    公开(公告)号：US20160370242A1

    公开(公告)日：2016-12-22

    申请号：US14980373

    申请日：2015-12-28

    Applicant: STMicroelectronics S.R.L.

    Inventor： Enri Duqi ,  Sebastiano Conti ,  Sonia Costantini

    IPC: G01L9/00 ,  B81C1/00 ,  B81B7/00

    Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.

    Abstract translation: 设计用于检测压力传感器外部环境环境压力值的压力传感器包括：第一衬底，其具有掩埋腔和悬挂在掩埋腔上的膜; 具有凹部的第二基板，气密地联接到所述第一基板，使得所述凹部限定其内部压力值提供压力参考值的密封空腔; 以及至少部分地形成在所述第一基板中并且被配置为将所述掩埋腔布置成与所述压力传感器外部的环境连通的通道。 膜作为密封腔中的压力参考值与埋入腔中的环境压力值之间的压力差的函数发生偏转。

    DIFFERENTIAL-TYPE MEMS ACOUSTIC TRANSDUCER
    34.
    发明申请
    DIFFERENTIAL-TYPE MEMS ACOUSTIC TRANSDUCER 有权
    差分型MEMS声学传感器

    公开(公告)号：US20160173992A1

    公开(公告)日：2016-06-16

    申请号：US14858997

    申请日：2015-09-18

    Applicant: STMicroelectronics S.r.l.

    Inventor： Germano Nicollini ,  Silvia Adorno ,  Andrea Barbieri ,  Federica Barbieri ,  Sebastiano Conti ,  Edoardo Marino ,  Sergio Pernici

    IPC: H04R19/00 ,  H04R19/02

    CPC classification number: H04R19/005 ,  H04R19/02 ,  H04R19/04 ,  H04R2201/003 ,  H04R2499/11 ,  H04R2499/15

    Abstract: A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.

    Abstract translation: MEMS声换能器具有：检测结构，其产生作为检测到的声信号的函数的电检测量; 以及电子接口电路，其可操作地耦合到所述检测结构并且产生作为所述电检测量的函数的电输出量。 该检测结构具有电容型的第一微机械结构和电容式的第二微机械结构，每个微机械结构均包括面对电容耦合到刚性电极并且限定相应的第一检测电容器和第二检测电容器的膜; 电子接口电路在偏置线和参考线之间限定了第一检测电容器和第二检测电容器串联的电连接，并且还具有第一单输出放大器和第二单输出放大器，其耦合到 第一检测电容器和第二检测电容器中的一个，并且具有各自的第一输出端子和第二输出端子，其间存在电输出量。

    MICROELECTROMECHANICAL SENSING STRUCTURE FOR A CAPACITIVE ACOUSTIC TRANSDUCER INCLUDING AN ELEMENT LIMITING THE OSCILLATIONS OF A MEMBRANE, AND MANUFACTURING METHOD THEREOF
    36.
    发明申请
    MICROELECTROMECHANICAL SENSING STRUCTURE FOR A CAPACITIVE ACOUSTIC TRANSDUCER INCLUDING AN ELEMENT LIMITING THE OSCILLATIONS OF A MEMBRANE, AND MANUFACTURING METHOD THEREOF 有权
    用于电容式声学传感器的微电子感应传感结构，包括限制膜振荡的元件及其制造方法

    公开(公告)号：US20140286509A1

    公开(公告)日：2014-09-25

    申请号：US14220985

    申请日：2014-03-20

    Applicant: STMicroelectronics S.r.l.

    Inventor： Alessandra Sciutti ,  Matteo Perletti ,  Sebastiano Conti ,  Roberto Carminati

    IPC: H04R19/00 ,  H04R19/04

    CPC classification number: H04R19/005 ,  B81B7/0029 ,  B81B2201/0257 ,  B81B2203/0118 ,  B81B2203/0127 ,  G01L9/0073 ,  H04R19/04

    Abstract: A microelectromechanical sensing structure for a capacitive acoustic transducer, including: a semiconductor substrate; a rigid electrode; and a membrane set between the substrate and the rigid electrode, the membrane having a first surface and a second surface, which are in fluid communication, respectively, with a first chamber and a second chamber, respectively, the first chamber being delimited at least in part by a first wall portion and a second wall portion formed at least in part by the substrate, the second chamber being delimited at least in part by the rigid electrode, the membrane being moreover designed to undergo deformation following upon incidence of pressure waves and facing the rigid electrode so as to form a sensing capacitor having a capacitance that varies as a function of the deformation of the membrane. The structure moreover includes a beam, which is connected to the first and second wall portions and is designed to limit the oscillations of the membrane.

    Abstract translation: 一种用于电容式声换能器的微机电感测结构，包括：半导体衬底; 刚性电极; 以及膜，其设置在所述基底和所述刚性电极之间，所述膜具有第一表面和第二表面，所述第一表面和第二表面分别与第一腔室和第二腔室流体连通，所述第一腔室至少在 部分由第一壁部分和至少部分地由基底形成的第二壁部分，第二室至少部分地由刚性电极限定，该膜还被设计成在压力波入射之后经历变形，并且面向 刚性电极，以形成感测电容器，该感测电容器具有作为膜的变形的函数而变化的电容。 该结构还包括梁，其连接到第一和第二壁部分并被设计成限制膜的振荡。

    MIRROR MICROMECHANICAL STRUCTURE AND RELATED MANUFACTURING PROCESS
    37.
    发明申请
    MIRROR MICROMECHANICAL STRUCTURE AND RELATED MANUFACTURING PROCESS 有权
    镜子微观结构及相关制造工艺

    公开(公告)号：US20140198366A1

    公开(公告)日：2014-07-17

    申请号：US14151471

    申请日：2014-01-09

    Applicant: STMicroelectronics S.r.l.

    Inventor： Roberto Carminati ,  Sebastiano Conti ,  Sonia Costantini

    IPC: G02B26/08

    CPC classification number: G02B26/0833 ,  G01B11/2518 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/105 ,  G03B21/008 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2257 ,  H04N13/211 ,  H04N13/236 ,  H04N13/254 ,  Y10T29/49

    Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

    Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。

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