摘要:
A heating combustion tube 20 of the present invention is used in analysis of mercury in a heated state and includes a sample pyrolysis portion 10 in which a sample S is heated and decomposed, an oxidization portion 11 in which a fourth period metal oxide 13, which is a metal oxide in the fourth period on the periodic table, and a treating portion 12 in which an alkali metal compound and/or an alkali earth metal compound 14 is filled.
摘要:
A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate on which the cavity is formed and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface on which the thermally-oxidized film for the movable portion is formed; forming a sacrifice layer on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要:
A method for manufacturing an elastic wave device includes forming a lower resist layer on the piezoelectric substrate; forming an upper resist layer on the lower resist layer; patterning the upper and lower resist layers with a developer with respect to which a solubility of the lower resist layer is higher than that of the upper resist layer to form a lower resist pattern and an upper resist pattern on the lower resist pattern so that a periphery of the lower resist pattern lies within a periphery of the upper resist pattern; depositing an electrode material over an entire surface of the piezoelectric substrate that has the upper resist pattern and the lower resist pattern formed thereon; and removing the upper resist pattern and the lower resist pattern to pattern the electrode material, thereby forming a comb-shaped electrode by lift-off.
摘要:
A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.
摘要:
A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.
摘要:
A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要:
A switch includes a movable portion, a first electrode and a second electrode. The movable portion is provided on a substrate and moves with respect to the substrate. The first electrode is provided on the movable portion. The second electrode is able to contact with the first electrode and is fixed to the substrate. f×Ro×C≦1.6×10−4 when an operation frequency is represented as “f” (Hz), a transmission impedance is represented as “Ro” (Ω), and a capacitance in “OFF” state between the first electrode and the second electrode is represented as “C” (F).
摘要:
A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.
摘要:
The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要:
A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.