公开(公告)号：US6151966A

公开(公告)日：2000-11-28

申请号：US304849

申请日：1999-05-05

申请人： Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Seiji Fujino ,  Tsuyoshi Fukada ,  Hiroshige Sugito ,  Minoru Murata ,  Hiroshi Muto ,  Hirofumi Higuchi ,  Kenichi Ao

发明人： Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Seiji Fujino ,  Tsuyoshi Fukada ,  Hiroshige Sugito ,  Minoru Murata ,  Hiroshi Muto ,  Hirofumi Higuchi ,  Kenichi Ao

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01L1/00

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

摘要： A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.

摘要翻译： 通过微加工在SOI衬底上形成半导体加速度计装置。 可移动单元被支撑在两端，并且重量部分可响应于沿检测方向施加的加速度而移动。 可动电极与配重部一体地形成为梳形。 一对梳状的固定电极是悬臂式的，与可动电极交错而面对可动电极。 多个通孔设置在电极中，使得电极具有Rahmen结构，其是一系列矩形框架。 这种结构减小了每个电极的重量，同时增加了抗扭力的强度。 由于重量减轻，电极响应于垂直于正常检测方向的方向的加速度而不太可能破裂。

公开(公告)号：US6065341A

公开(公告)日：2000-05-23

申请号：US209414

申请日：1998-12-11

申请人： Seiichiro Ishio ,  Minekazu Sakai ,  Kenichi Ao

发明人： Seiichiro Ishio ,  Minekazu Sakai ,  Kenichi Ao

IPC分类号： G01P15/08 ,  G01P15/125

CPC分类号： B81B3/0051 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  G01P2015/0814

摘要： A mass portion of a movable portion is supported by an anchor portion protruding from a substrate through a beam portion. A stopper portion fixed to the substrate through another anchor portion is disposed on a side opposite to the mass portion with respect to the beam portion to define a gap with the beam portion. The stopper portion is electrically connected to the beam portion through the anchor portions. Accordingly, the movable portion is restricted from being displaced in a direction generally parallel to a surface of the substrate, and a movable electrode of the movable portion is prevented from being attached to the fixed electrode.

摘要翻译： 可移动部分的质量部分由通过梁部分从基底突出的锚固部分支撑。 通过另一个锚定部分固定到基板的止动部分相对于梁部分设置在与质量部分相对的一侧上以限定与梁部分的间隙。 止动部分通过锚定部电连接到梁部分。 因此，可动部被限制在大致平行于基板的表面的方向上移动，并且防止可动部的可动电极附着到固定电极。

公开(公告)号：US20140139241A1

公开(公告)日：2014-05-22

申请号：US14116149

申请日：2012-05-22

申请人： Minekazu Sakai ,  Naohisa Niimi

发明人： Minekazu Sakai ,  Naohisa Niimi

IPC分类号： G01N27/22

CPC分类号： G01N27/223 ,  G01N27/048 ,  G01N27/225 ,  H01L2224/48137 ,  H01L2224/8592

摘要： A humidity sensor includes a detection device with a capacitance changing with humidity at a first ratio and a reference device with a capacitance changing with humidity at a second ratio smaller than the first ratio. The detection device has detection electrodes facing each other with a first gap and a detection humidity-sensitive film covering the detection electrodes. The reference device has reference electrodes facing each other with a second gap and a reference humidity-sensitive film covering the reference electrodes. The detection humidity-sensitive film and the reference humidity-sensitive film are made from the same material and have the same thickness. The detection electrodes and the reference electrodes are made from the same material and have the same width and thickness. The second ratio peaks when the second gap is equal to a predetermined value. The second gap is smaller than the first gap and the predetermined value.

摘要翻译： 一种湿度传感器包括具有以第一比例的湿度变化的电容的检测装置和具有小于第一比率的第二比率的电容随湿度变化的参考装置。 检测装置具有检测电极，第一间隙彼此面对，检测用湿敏膜覆盖检测电极。 参考装置具有彼此面对的具有第二间隙的参考电极和覆盖参考电极的参考湿度敏感膜。 检测用湿度敏感膜和基准湿度敏感膜由相同的材料制成，厚度相同。 检测电极和参考电极由相同的材料制成并且具有相同的宽度和厚度。 当第二间隙等于预定值时，第二比率达到峰值。 第二间隙小于第一间隙和预定值。

公开(公告)号：US20060097331A1

公开(公告)日：2006-05-11

申请号：US11294580

申请日：2005-12-06

申请人： Koji Hattori ,  Takao Yoneyama ,  Ryuichiro Abe ,  Minekazu Sakai ,  Shigenori Yamauchi

发明人： Koji Hattori ,  Takao Yoneyama ,  Ryuichiro Abe ,  Minekazu Sakai ,  Shigenori Yamauchi

IPC分类号： H01L29/82

CPC分类号： G01C19/5719 ,  B81C1/0023 ,  B81C1/00238 ,  G01P1/023 ,  G01P15/125 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/1305 ,  H01L2924/13091 ,  H01L2924/00014 ,  H01L2924/00

摘要： A sensor device includes a sensor chip having a movable portion on one surface, a circuit chip laminated with the sensor chip to be opposite to the movable portion of the sensor chip, and a bump located between the sensor chip and the circuit chip. In the sensor device, the sensor chip and the circuit chip are electrically connected through the bump, and the movable portion of the sensor chip is separated from the circuit chip by a space using the bump. Accordingly, it can effectively restrict parasitic capacity of an electric connecting portion between both the chips from being changed by an impact. For example, the sensor device can be used as an angular velocity sensor device having a vibrator as the movable portion.

摘要翻译： 传感器装置包括在一个表面上具有可移动部分的传感器芯片，与传感器芯片层叠以与传感器芯片的可移动部分相对的电路芯片，以及位于传感器芯片和电路芯片之间的凸块。 在传感器装置中，传感器芯片和电路芯片通过凸块电连接，并且传感器芯片的可移动部分使用凸块与电路芯片分离。 因此，能够有效地抑制两个芯片之间的电连接部的寄生容量受到冲击而变化。 例如，传感器装置可以用作具有振动器作为可动部分的角速度传感器装置。

公开(公告)号：US20050087015A1

公开(公告)日：2005-04-28

申请号：US10994283

申请日：2004-11-23

申请人： Minekazu Sakai

发明人： Minekazu Sakai

IPC分类号： G01P15/125 ,  H01L29/84

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： In a capacitive type dynamic quantity sensor, a width of a beam in a beam portion extending in a direction that is perpendicular to a predetermined deformation direction and a gap disposed between a movable electrode and the fixed electrode in the predetermined deformation direction are approximately identical. Accordingly, manufacturing error is prevented from affecting the sensitivity of the capacitive type dynamic quantity sensor. For example, a manufacturing tolerance error of ±2.5% is allowed as a result of designing the width of the beam and the gap to be identical in length.

摘要翻译： 在电容型动态量传感器中，沿着与预定变形方向垂直的方向延伸的梁部分中的梁的宽度和在预定变形方向上设置在可动电极和固定电极之间的间隙的宽度大致相同。 因此，防止制造误差影响电容式动态量传感器的灵敏度。 例如，通过设计光束的宽度和长度上相同的间隙，允许±2.5％的制造公差误差。

公开(公告)号：US06792805B2

公开(公告)日：2004-09-21

申请号：US10369198

申请日：2003-02-20

申请人： Minoru Murata ,  Minekazu Sakai

发明人： Minoru Murata ,  Minekazu Sakai

IPC分类号： G01P15125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： A capacitive acceleration sensor includes a supporting substrate, a movable member, and two fixed members. The movable member moves in response to a force that acts on the movable member. Each fixed member is stationary under the force. Two capacitances are formed between the movable member and the fixed members. One of the capacitances increases while the other decreases when the movable member moves in response to the force. The force includes a substantially constant force and a variable force when an acceleration is measured using the sensor. The variable force is proportional to the acceleration. The acceleration is measured on the basis of the difference between the capacitances. The capacitances are different from each other when the force that acts on the movable member is zero to reduce the difference between the capacitances that corresponds to the substantially constant force.

摘要翻译： 电容式加速度传感器包括支撑基板，可移动部件和两个固定部件。 可移动构件响应于作用在可动构件上的力移动。 每个固定构件在力作用下是静止的。 在可动构件和固定构件之间形成两个电容。 当可动构件响应于力而移动时，电容之一增加而另一个减小。 当使用传感器测量加速度时，该力包括基本恒定的力和可变的力。 可变力与加速度成比例。 基于电容之差测量加速度。 当作用在可动构件上的力为零时，电容彼此不同，以减小对应于基本恒定的力的电容之间的差异。

公开(公告)号：US06753201B2

公开(公告)日：2004-06-22

申请号：US10154784

申请日：2002-05-28

申请人： Hiroshi Muto ,  Tsuyoshi Fukada ,  Kenichi Ao ,  Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Junji Oohara

发明人： Hiroshi Muto ,  Tsuyoshi Fukada ,  Kenichi Ao ,  Minekazu Sakai ,  Yukihiro Takeuchi ,  Kazuhiko Kano ,  Junji Oohara

IPC分类号： H01L2100

CPC分类号： B81C1/00936 ,  B81B2203/0136 ,  B81C1/0019 ,  B81C1/00531 ,  B81C2201/0132 ,  G01P2015/0814 ,  H01L21/76232 ,  H01L21/76264 ,  H01L21/76283

摘要： A method of manufacturing a semiconductor device is provided. The device is manufactured with use of an SOI (Silicon On Insulator) substrate having a first silicon layer, an oxide layer, and a second silicon layer laminated in this order. After forming a trench reaching the oxide layer from the second silicon layer, dry etching is performed, thus allowing the oxide layer located at the trench bottom to be charged at first. This charging forces etching ions to impinge upon part of the second silicon layer located laterally to the trench bottom. Such part is removed, forming a movable section. For example, ions to neutralize the electric charges are administered into the trench, so that the electric charges are removed from charged movable electrodes and their charged surrounding regions. Removing the electric charges prevents the movable section to stick to its surrounding portions.

摘要翻译： 提供一种制造半导体器件的方法。 使用具有按顺序层叠的第一硅层，氧化物层和第二硅层的SOI（绝缘体上硅）基板来制造器件。 在形成从第二硅层到达氧化物层的沟槽之后，进行干蚀刻，从而允许首先将位于沟槽底部的氧化物层充电。 该充电迫使蚀刻离子撞击位于沟槽底部横向的第二硅层的一部分。 去除这样的部件，形成可动部分。 例如，中和电荷的离子被施加到沟槽中，使得电荷从带电的可移动电极及其带电的周围区域中去除。 拆卸电荷可防止可动部分粘附到其周围部分。

公开(公告)号：US06672161B2

公开(公告)日：2004-01-06

申请号：US09901133

申请日：2001-07-10

申请人： Minekazu Sakai ,  Yoshiyuki Kato

发明人： Minekazu Sakai ,  Yoshiyuki Kato

IPC分类号： G01P15125

CPC分类号： G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0136 ,  B81B2203/04 ,  G01P2015/0814

摘要： In a dynamic quantity sensor for detecting a dynamic quantity, a movable portion having comb-shaped movable electrodes is connected to a base portion through a beam portion as a spring portion, and moves in direction Y upon receiving dynamic quantity. Comb-shaped fixed electrodes are arranged opposite to the movable electrodes through detection intervals. A Q value of vibration of the movable portion in the direction Y is smaller than {fraction (1/500)} of a resonance frequency of the movable portion in the direction Y. Therefore, free vibration of the movable portion is rapidly damped so as not to adversely affect sensor output.

摘要翻译： 在用于检测动态量的动态量传感器中，具有梳形可动电极的可移动部分通过作为弹簧部分的梁部连接到基部，并且在接收到动态量时沿方向Y移动。 梳状固定电极通过检测间隔与可动电极相对布置。 可移动部分在方向Y上的振动的AQ值小于{分量（Y方向上的可移动部分的共振频率的1/500）。因此，可移动部分的自由振动被快速衰减，从而不会不利地 影响传感器输出。

公开(公告)号：US06502462B2

公开(公告)日：2003-01-07

申请号：US09880778

申请日：2001-06-15

申请人： Minekazu Sakai

发明人： Minekazu Sakai

IPC分类号： G01P15125

CPC分类号： G01P15/125 ,  G01P2015/0814

摘要： In a capacitance type dynamic quantity sensor, a movable electrode is connected to a support substrate through a frame shaped displacement portion. The displacement portion is composed of first and second beams and a beam connection part connecting the first and second beams at ends thereof. The support substrate has electrode pads for wire bonding involving vibration. The first and second beams can perform flexural vibration at a natural frequency with the beam connection part working as a free end. The shape of the beam connection part is adjusted so that the natural frequency at the flexural vibration is different from that of the vibration applied by the wire bonding.

公开(公告)号：US06494096B2

公开(公告)日：2002-12-17

申请号：US09801917

申请日：2001-03-09

申请人： Minekazu Sakai ,  Minoru Murata

发明人： Minekazu Sakai ,  Minoru Murata

IPC分类号： G01P15125

CPC分类号： B81B3/0008 ,  B81B2201/0235 ,  G01P15/125 ,  G01P2015/0814

摘要： A semiconductor acceleration sensor, which prevents an adhesion of a movable electrode to a first or second fixed electrode due to an electrostatic attracting force generated therebetween. The sensor has a weight portion and movable electrodes formed on both sides of which, and first and second fixed electrodes each engaging with the each of the movable electrodes. Each of the first and second fixed electrodes is disposed in parallel with each of the movable electrodes so that side faces thereof determine a detection interval and non-detection interval larger than the detection interval with side faces of adjoining two of the movable electrodes. Protrusions are formed on both of the side faces of each of the first and second fixed electrodes. These protrusions prevent the movable electrodes from adhering to the first or second fixed electrode in both of the detection interval and non-detection interval.

摘要翻译： 一种半导体加速度传感器，其防止由于其间产生的静电吸引力而将可动电极粘附到第一或第二固定电极。 该传感器具有一个配重部分和形成在其两侧的可动电极，并且每个可移动电极各自配置有第一和第二固定电极。 第一固定电极和第二固定电极中的每一个与每个可动电极平行地设置，使得其侧面确定相邻两个可动电极的侧面的检测间隔和大于检测间隔的非检测间隔。 突起形成在第一和第二固定电极中的每一个的两个侧面上。 这些突起在检测间隔和非检测间隔中都防止可动电极粘附到第一或第二固定电极。