MOVABLE EVAPORATION SOURCE
    34.
    发明申请
    MOVABLE EVAPORATION SOURCE 有权
    可移动蒸发源

    公开(公告)号:US20150167149A1

    公开(公告)日:2015-06-18

    申请号:US14559033

    申请日:2014-12-03

    CPC classification number: C23C14/325 C23C14/225

    Abstract: A moveable evaporation source system may have an insulator disposed above a cathode support member, and a cathode support member disposed beneath the insulator and exerting an upward force on the insulator so that the upward force exerted by the cathode support member urges the insulator toward a down force source. A cathode may be placed between the insulator and the down force source and translated so that material liberated from the cathode may strike different portions of a workpiece as the cathode is translated.

    Abstract translation: 可移动蒸发源系统可以具有设置在阴极支撑构件上方的绝缘体和设置在绝缘体下方并在绝缘体上施加向上的力的阴极支撑构件,使得由阴极支撑构件施加的向上的力促使绝缘体向下 力源。 阴极可以放置在绝缘体和向下的力源之间并且平移,使得从阴极释放的材料可以在阴极平移时撞击工件的不同部分。

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