摘要:
A multifunctional electronic instrument includes a body of the electronic instrument, an operation display unit movably provided on the body of the electronic instrument, and a ground structure as an electric contact structure, which includes a parallel part and a contact spring piece. The parallel part includes an electrically conductive base material and an electrically insulating surface layer formed on surfaces of both sides of the base material, and is attached to a movable member that moves together with the operation display unit. The parallel part is provided with a projection. At an end of the projection, the base material is exposed in a ruptured part where the surface layer is ruptured. The ruptured part is provided with an electric contact. The contact spring piece comes in contact with the electric contact. The base material of the parallel part and the contact spring piece are electrically connected to each other.
摘要:
A method of film deposition using a single-wafer-processing type CVD apparatus includes: (a) sealing a periphery of a susceptor to separate a reaction chamber from a wafer-handling chamber when the susceptor rises; and (b) flowing a gas from the wafer-handling chamber into the reaction chamber through at least one discharge hole formed through the susceptor via a back side and a periphery of a wafer placed on the susceptor during film deposition.
摘要:
A batch-type etching method includes applying microwaves from the outside of a reaction chamber to semiconductor wafers after HF gas etching of the wafers to remove residual substances including H2O, CH3OH, CH3COOH and/or other by-products from surfaces of the wafers. Microwaves oscillate polar molecules of the substances and generate heat, thereby removing the substances.
摘要:
A single-wafer-processing type CVD apparatus includes: (a) a reaction chamber including: (i) a susceptor having at least one gas discharge hole to flow a gas into the reaction chamber via a back side and a periphery of the wafer into the reaction chamber; (ii) a showerhead; (iii) an exhaust duct positioned in the vicinity of the showerhead and provided circularly along an inner wall of the reaction chamber; and (iv) a circular separation plate provided coaxially with the exhaust duct to form a clearance with the bottom of the exhaust duct; and (b) a temperature-controlling apparatus for regulating the temperature of the showerhead. The separation plate has a sealing portion to seal a periphery of the susceptor and to separate the reaction chamber from a wafer-handling chamber when the susceptor rises.
摘要:
A semiconductor memory device includes a first, second, and third memory cell transistors in which information can be electrically rewritten, addresses of which are consecutive in a row direction. One end of a current passage in each of a first, second, and third transfer transistors is connected to a control electrode of the first, second, and third memory cell transistors. A write voltage, a pass voltage lower than the write voltage, and a first voltage lower than the pass voltage are applied to the other ends of the first, second, and third transfer transistors. A first control section applies the first on-voltage to make the first transfer transistor conductive, to a gate of the first transfer transistor. A second control section applies a second on-voltage to make the second and third transfer transistors conductive, to gates of the second and third transfer transistors.
摘要:
A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the susceptor.
摘要:
A method of processing a semiconductor substrate involves etching a SiOF layer with HF or HF+H2O. The method can be used to form hollow structures in semiconductor substrates and thus provides a way to make interlayer insulators.
摘要:
Described are a thermoplastic resin composition containing (A): one or more rubber reinforced thermoplastic resins, (B): one or more acrylic resins and (C): one or more thermoplastic norbornene resins, and further containing (D): one or more styrenic resins other than (A) and (E): coloring agents as needed, and a shaped article obtained by forming the composition. Described thermoplastic resin composition is excellent in heat resistance, strength and processability, and excellent in laser marking properties, so that it is useful for various applications.
摘要:
A double-surface printing apparatus, which is small-sized and has a simple construction to make it impossible to take out a sheet, of which one surface has been subjected to printing, from outside. The apparatus includes a paper discharge tray, to which sheets having been subjected to printing are discharged; a sheet reversing mechanism including a reversal/temporary storage unit for guiding a sheet in a direction different from a discharge direction toward the paper discharge tray, once exposing the sheet outside of the apparatus, and rotating conveying rollers in an opposite direction to thereby reverse the sheet; and a protective cover, which covers the sheet conveyed to the reversal/temporary storage unit so that a sheet, of which one-surface has been subjected to printing, cannot be taken out from outside.
摘要:
A method for fabricating MOS transistors comprises the steps of forming a polysilicon layer, having an underlying gate oxide layer on the major surface of a silicon substrate, providing a mask to cover a predetermined portion except the portion for an N-type polysilicon layer to be formed, doping the polysilicon layer uncovered by the first mask with N-type ions, providing a second mask to cover a predetermined portion except the portion for a P-type polysilicon layer to be formed, doping the polysilicon layer uncovered by the second mask with boron ions, subjecting the polysilicon layer to a patterning process to define gate electrodes of an NMOS and PMOS transistors, providing a third mask to cover a predetermined portion except the portion for an NMOS transistor to be formed, doping N-type ions into substrate portion for the NMOS transistor to be formed using the third mask and the gate electrodes as a mask to thereby form a source and a drain of the NMOS transistor, forming a silicon oxide layer over each of the gate electrodes, providing a fourth mask to cover a predetermined portion except the portion for a PMOS transistor to be formed, and doping BF.sub.2 ions into substrate portion for PMOS transistors to be formed using the fourth mask and gate electrodes overlaid by the silicon oxide layer as a mask, to thereby form source and drain regions of the PMOS transistors.