EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    31.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
    曝光装置和装置制造方法

    公开(公告)号:US20110262866A1

    公开(公告)日:2011-10-27

    申请号:US13090410

    申请日:2011-04-20

    CPC classification number: G03F7/70925

    Abstract: An exposure apparatus which projects exposure light from a pattern of an illuminated original onto a substrate, comprises a projection system including an optical element and configured to project the exposure light onto the substrate, an enclosure configured to enclose the projection system, and a cleaning mechanism configured to clean the optical element by irradiating the optical element with ultraviolet light under an environment in which oxygen is present within the enclosure, the cleaning mechanism including a light source configured to generate ultraviolet light, a tubular member including an exit window and configured to partially enclose an optical path between the light source and the optical element, and a regulating device configured to regulate an environment of a space inside the tubular member so that a partial pressure of oxygen becomes lower in the space inside the tubular member than in a space which is outside the tubular member.

    Abstract translation: 将曝光光从照明原稿的图案投影到基板上的曝光装置包括:投影系统,包括光学元件,并将曝光光投射到基板上;被构造成包围投影系统的外壳;以及清洁机构 被配置为通过在所述外壳内存在氧气的环境下用紫外线照射所述光学元件来清洁所述光学元件,所述清洁机构包括被配置为产生紫外线的光源,所述管状部件包括出射窗, 在光源和光学元件之间包围光路,以及调节装置,其被配置为调节管状部件内的空间的环境,使得在管状部件内的空间中氧的分压变低 在管状构件外。

    Optical disc recording and reproducing apparatus and disc autochanger
    32.
    发明授权
    Optical disc recording and reproducing apparatus and disc autochanger 有权
    光盘记录和再现设备和光盘自动转换器

    公开(公告)号:US07864637B2

    公开(公告)日:2011-01-04

    申请号:US11785378

    申请日:2007-04-17

    CPC classification number: G11B17/223 G11B17/028

    Abstract: An object of the invention is to provide a disc autochanger without any disc reversing mechanism by using on A-side recording and reproducing apparatus and a B-side recording and reproducing apparatus while using a sheet-like optical disc in which both surfaces can be recorded and reproduced. The disc autochanger is constituted by a cartridge storing a plurality of sheet-like optical discs in which both surfaces are recorded and reproduced in a state of putting in a tray, the A-side recording and reproducing apparatus in which a moving table of an A-side recording and reproducing portion is arranged in an upper side of a tray take-out mechanism and a moving table of a cap is provided in a lower side thereof, and the B-side recording and reproducing apparatus in which a moving table of a B-side recording and reproducing portion is arranged in a lower side of the tray take-out mechanism and a moving table of a cap is provided in an upper side thereof. Accordingly, since it is possible to alternately supply the sheet-like optical discs in which both surfaces are recorded and reproduced to the A-side and B-side recording and reproducing apparatuses from the cartridge, it is possible to record and reproduce continuously and in parallel.

    Abstract translation: 本发明的目的是提供一种使用A侧记录和再现装置和B侧记录和再现装置的盘式自动转换器,而不需要任何盘反转机构,同时使用其中可以记录两个表面的片状光盘 并转载。 光盘自动转换器由存放多个片状光盘的盒构成,其中以放入托盘的状态记录和再现两个表面,A侧记录和再现装置,其中A的移动台 侧记录再现部分布置在托盘取出机构的上侧,盖的移动台设置在其下侧;以及B侧记录和再现装置,其中移动台 B侧记录和再现部分布置在托盘取出机构的下侧,盖的移动台在其上侧设置。 因此,由于可以从盒中交替地向A侧和B侧记录和再现装置供给其中记录和再现两个表面的片状光盘,所以可以连续地记录和再现 平行。

    Drive system for electrically driven dump truck
    33.
    发明授权
    Drive system for electrically driven dump truck 有权
    电动自卸车用驱动系统

    公开(公告)号:US07863837B2

    公开(公告)日:2011-01-04

    申请号:US12091995

    申请日:2007-05-07

    Abstract: A drive system for an electrically driven dump truck is capable of enabling electric motors for traveling to make full use of the output horsepower of the prime mover up to an output limit of the prime mover. A target motor horsepower corresponding to an operation amount of an accelerator pedal is calculated and an available maximum horsepower for the electric motors out of the maximum output horsepower of the prime mover is calculated in response to the actual revolution speed of the prime mover. The horsepower coefficient corresponding to the instantaneous revolution speed deviation is calculated. The available maximum horsepower for the electric motors is modified by the horsepower coefficient to determine a second target motor horsepower. The target motor horsepower is limited to not exceed the second target motor horsepower so as to control the torque of the electric motors.

    Abstract translation: 用于电动自卸车的驱动系统能够使电动机行驶,以充分利用原动机的输出功率直到原动机的输出极限。 计算与加速器踏板的操作量相对应的目标马力,并且响应于原动机的实际转速来计算用于原动机的最大输出功率之外的电动马达的可用最大马力。 计算与瞬时转速偏差对应的马力系数。 电动机的可用最大功率由马力系数改变以确定第二目标马达功率。 目标电动马力限制为不超过第二目标电机功率,以便控制电动机的转矩。

    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    34.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    曝光装置和装置制造方法

    公开(公告)号:US20100141911A1

    公开(公告)日:2010-06-10

    申请号:US12632457

    申请日:2009-12-07

    CPC classification number: G03F7/70733 G03F7/70341 G03F7/707

    Abstract: An exposure apparatus, exposing a substrate via liquid so as to transfer a pattern of a mask onto the substrate, includes a stage configured to move while holding the substrate. The stage includes a substrate supporting portion on which the substrate is disposed, a supporting surface disposed outside the substrate supporting portion configured to support the liquid together with the substrate, and a frame portion formed so as to surround the supporting surface. The frame portion includes a depression and a member whose top surface is located in a plane including the supporting surface.

    Abstract translation: 曝光装置,通过液体使基板曝光以将掩模的图案转印到基板上,包括配置成在保持基板的同时移动的台。 台架包括:衬底支撑部分,衬底被设置在衬底支撑部分上,支撑表面设置在衬底支撑部分的外部,该衬底支撑部分构造成与衬底一起支撑液体;以及框架部分,形成为围绕支撑表面。 框架部分包括凹部和其顶表面位于包括支撑表面的平面中的构件。

    SWING DRIVE SYSTEM FOR CONSTRUCTION MACHINE
    37.
    发明申请
    SWING DRIVE SYSTEM FOR CONSTRUCTION MACHINE 有权
    建筑机械摆动驱动系统

    公开(公告)号:US20090055056A1

    公开(公告)日:2009-02-26

    申请号:US11816346

    申请日:2006-12-22

    Abstract: A swing drive system for a construction machine enhances safety for an operator. A swing control means 55A has a lever input amount-torque table 11 and an actual rotating speed-torque table 13. Based on a lever input amount and an actual rotating speed of an electric motor, the tables are used to derive torque values. A minimum value of the torque values is taken as the acceleration torque. The swing control means 55A further has a lever input amount-meter-out restriction area table 15 and an actual rotating speed-relief torque table 119. Based on the lever input amount and the actual rotating speed of the electric motor, a meter-out restriction area is derived from the lever input amount-meter-out restriction area table and the actual rotating speed to calculate a meter-out torque. A minimum value of the meter-out torque and relief torque is taken as the braking torque.

    Abstract translation: 用于施工机械的摆动驱动系统提高了操作者的安全性。 摆动控制装置55A具有杠杆输入量扭矩表11和实际转速扭矩表13.根据杠杆输入量和电动机的实际转速,使用这些表来导出转矩值。 扭矩值的最小值作为加速扭矩。 摆动控制装置55A还具有杠杆输入量计出限制区域表15和实际转速减速扭矩表119.根据杠杆输入量和电动机的实际转速,计量出 从杠杆输入量计出限制区域表和实际转速导出限制区域以计算出出扭矩。 将出力矩和减速转矩的最小值作为制动转矩。

    Obstacle detection device
    39.
    发明授权
    Obstacle detection device 失效
    障碍物检测装置

    公开(公告)号:US07230524B2

    公开(公告)日:2007-06-12

    申请号:US10524208

    申请日:2004-03-09

    Abstract: An obstacle detection device includes: an obstacle detection section (11) for emitting beams having a predetermined divergence angle consecutively in a plurality of different directions, receiving a reflected wave from an obstacle for each direction, and detecting the obstacle existing within an emission angle range of the beam for the direction; a distance calculation section (12) for calculating a distance representative of an interspace between the obstacle and the vehicle for each direction based on a received signal of the reflected wave for the direction outputted from the obstacle detection section; an obstacle image creation section (14) for creating, as an obstacle image, a figure two-dimensionally developed in the emission angle range of the beam emitted in each direction while treating, as a basis for image creation, the distance calculated by the distance calculation section for the direction, and for creating and outputting image data for displaying the obstacle image; and a display section (15) for receiving the image data created by the obstacle image creation section and displaying an image showing a positional relationship between the obstacle and the vehicle.

    Abstract translation: 障碍物检测装置包括:障碍物检测部(11),用于在多个不同的方向上连续地发射具有预定发散角的光束,从每个方向接收来自障碍物的反射波,并且检测存在于发射角范围内的障碍物 的梁的方向; 距离计算部分,用于根据从障碍物检测部分输出的方向的反射波的接收信号,计算表示每个方向上的障碍物与车辆之间的空间的距离; 用于在处理作为图像创建的基础的距离计算出的距离的同时,在以每个方向发射的光束的发射角范围内形成二维显影的图像作为障碍物图像的障碍物图像创建部分(14) 计算部分,用于创建和输出用于显示障碍物图像的图像数据; 以及显示部(15),用于接收由障碍物图像创建部创建的图像数据,并且显示示出障碍物和车辆之间的位置关系的图像。

    Cooling fin connected to a cooling unit and a pusher of the testing apparatus
    40.
    发明申请
    Cooling fin connected to a cooling unit and a pusher of the testing apparatus 有权
    冷却翅片连接到测试装置的冷却单元和推动器

    公开(公告)号:US20060255822A1

    公开(公告)日:2006-11-16

    申请号:US11483075

    申请日:2006-07-10

    Abstract: A device testing apparatus including a connection terminal to which an electronic device under test is detachably attached, a pusher for pushing the electronic device in the direction of the connection terminal so as to connect the electronic device to the connection terminal, and a cooling unit for cooling the electronic device. As the cooling unit, an element cooling the device using electricity is for example used. The cooling unit includes a cooling medium blower for blowing a cooling medium around the electronic device and heat exchange projections or depressions for raising the cooling efficiency by blowing a cooling medium. In the device testing apparatus, even if the electronic device generates heat on its own during testing, the electronic device is cooled through the pusher, connection terminals, or socket, so the effect of the heat generated by the electronic device is canceled out and the electronic device can be tested at the predetermined temperature as prescribed in the specification.

    Abstract translation: 一种装置测试装置,包括可拆卸地安装有被测试的电子设备的连接端子,用于沿着连接端子的方向推动电子设备以将电子设备连接到连接端子的推动器,以及用于 冷却电子设备。 作为冷却单元,例如使用电力冷却装置的元件。 冷却单元包括用于吹送电子设备周围的冷却介质的冷却介质鼓风机和通过吹送冷却介质而提高冷却效率的热交换突起或凹部。 在设备测试装置中,即使电子设备在测试期间自身产生热量,电子设备通过推动器,连接端子或插座被冷却,因此电子设备产生的热量的影响被消除,并且 电子设备可以按照说明书中规定的预定温度进行测试。

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