Abstract:
An exposure apparatus which projects exposure light from a pattern of an illuminated original onto a substrate, comprises a projection system including an optical element and configured to project the exposure light onto the substrate, an enclosure configured to enclose the projection system, and a cleaning mechanism configured to clean the optical element by irradiating the optical element with ultraviolet light under an environment in which oxygen is present within the enclosure, the cleaning mechanism including a light source configured to generate ultraviolet light, a tubular member including an exit window and configured to partially enclose an optical path between the light source and the optical element, and a regulating device configured to regulate an environment of a space inside the tubular member so that a partial pressure of oxygen becomes lower in the space inside the tubular member than in a space which is outside the tubular member.
Abstract:
An object of the invention is to provide a disc autochanger without any disc reversing mechanism by using on A-side recording and reproducing apparatus and a B-side recording and reproducing apparatus while using a sheet-like optical disc in which both surfaces can be recorded and reproduced. The disc autochanger is constituted by a cartridge storing a plurality of sheet-like optical discs in which both surfaces are recorded and reproduced in a state of putting in a tray, the A-side recording and reproducing apparatus in which a moving table of an A-side recording and reproducing portion is arranged in an upper side of a tray take-out mechanism and a moving table of a cap is provided in a lower side thereof, and the B-side recording and reproducing apparatus in which a moving table of a B-side recording and reproducing portion is arranged in a lower side of the tray take-out mechanism and a moving table of a cap is provided in an upper side thereof. Accordingly, since it is possible to alternately supply the sheet-like optical discs in which both surfaces are recorded and reproduced to the A-side and B-side recording and reproducing apparatuses from the cartridge, it is possible to record and reproduce continuously and in parallel.
Abstract:
A drive system for an electrically driven dump truck is capable of enabling electric motors for traveling to make full use of the output horsepower of the prime mover up to an output limit of the prime mover. A target motor horsepower corresponding to an operation amount of an accelerator pedal is calculated and an available maximum horsepower for the electric motors out of the maximum output horsepower of the prime mover is calculated in response to the actual revolution speed of the prime mover. The horsepower coefficient corresponding to the instantaneous revolution speed deviation is calculated. The available maximum horsepower for the electric motors is modified by the horsepower coefficient to determine a second target motor horsepower. The target motor horsepower is limited to not exceed the second target motor horsepower so as to control the torque of the electric motors.
Abstract:
An exposure apparatus, exposing a substrate via liquid so as to transfer a pattern of a mask onto the substrate, includes a stage configured to move while holding the substrate. The stage includes a substrate supporting portion on which the substrate is disposed, a supporting surface disposed outside the substrate supporting portion configured to support the liquid together with the substrate, and a frame portion formed so as to surround the supporting surface. The frame portion includes a depression and a member whose top surface is located in a plane including the supporting surface.
Abstract:
Provided are a vinyl monomer-grafted alkoxysilane-modified oxyalkylene resin which is useful as a raw material for a modified silicone based elastic adhesive and excellent in storage stability and adhesiveness and furthermore, cures with moisture excellently within a short time period, a production method for the resin, and a curable composition containing the resin. Specifically disclosed is a vinyl monomer-grafted alkoxysilane-modified oxyalkylene resin, which is produced by a method including grafting of a vinyl monomer by using an oxyalkylene based polymer as a raw material, in which the vinyl monomer includes a vinyl monomer containing 50 wt % or more of one or more of kinds of (meth)acrylic monomers, and the vinyl monomer is subjected to a graft reaction by using an alkyl peroxide as a radical reaction initiator.
Abstract:
A drive system of an electrically driven dump truck that includes a prime mover, an electric generator, electric motors for traveling, each of which is driven by the electric power supplied from the electric generator 5 and inverters for controlling the electric motors, respectively. A total control unit calculates a correction coefficient Kp in response to the hydraulic fluid temperature detected by a thermometer 20, and then subtracts the horsepower g(Ne) for driving the other prime mover loads, which have been corrected by use of the correction coefficient Kp, from the maximum output horsepower f(Ne) of the prime mover to determine the maximum horsepower Mr that can be used by the electric motors An inverter control unit 7 determines a target torque of the electric motors on the basis of the maximum horsepower Mr so that the inverters are controlled respectively.
Abstract:
A swing drive system for a construction machine enhances safety for an operator. A swing control means 55A has a lever input amount-torque table 11 and an actual rotating speed-torque table 13. Based on a lever input amount and an actual rotating speed of an electric motor, the tables are used to derive torque values. A minimum value of the torque values is taken as the acceleration torque. The swing control means 55A further has a lever input amount-meter-out restriction area table 15 and an actual rotating speed-relief torque table 119. Based on the lever input amount and the actual rotating speed of the electric motor, a meter-out restriction area is derived from the lever input amount-meter-out restriction area table and the actual rotating speed to calculate a meter-out torque. A minimum value of the meter-out torque and relief torque is taken as the braking torque.
Abstract:
A drive system of an electrically driven dump truck is capable of achieving an operational feeling in which the operation amount of the accelerator pedal is well balanced with the output horsepower of the electric motors, particularly at the time of slow traveling. To achieve this, the target motor output horsepower Pm0 corresponding to the operation amount of an accelerator pedal 1 is calculated. The target motor torque Tr1R, Tr1L is calculated on the basis of the target motor output horsepower Pm0 and the rotational speed ωR, ωL of electric motors 12R, 12L respectively. The acceleration torque limit values of the electric motors 12R, 12L corresponding to the operation amount of the accelerator pedal 1 are calculated, respectively. Then, smaller values are selected, as motor torque instruction values TrR, TrL, between the acceleration torque limit value and the target motor torque Tr1R, Tr1L to control inverters 73R, 73L, respectively.
Abstract:
An obstacle detection device includes: an obstacle detection section (11) for emitting beams having a predetermined divergence angle consecutively in a plurality of different directions, receiving a reflected wave from an obstacle for each direction, and detecting the obstacle existing within an emission angle range of the beam for the direction; a distance calculation section (12) for calculating a distance representative of an interspace between the obstacle and the vehicle for each direction based on a received signal of the reflected wave for the direction outputted from the obstacle detection section; an obstacle image creation section (14) for creating, as an obstacle image, a figure two-dimensionally developed in the emission angle range of the beam emitted in each direction while treating, as a basis for image creation, the distance calculated by the distance calculation section for the direction, and for creating and outputting image data for displaying the obstacle image; and a display section (15) for receiving the image data created by the obstacle image creation section and displaying an image showing a positional relationship between the obstacle and the vehicle.
Abstract:
A device testing apparatus including a connection terminal to which an electronic device under test is detachably attached, a pusher for pushing the electronic device in the direction of the connection terminal so as to connect the electronic device to the connection terminal, and a cooling unit for cooling the electronic device. As the cooling unit, an element cooling the device using electricity is for example used. The cooling unit includes a cooling medium blower for blowing a cooling medium around the electronic device and heat exchange projections or depressions for raising the cooling efficiency by blowing a cooling medium. In the device testing apparatus, even if the electronic device generates heat on its own during testing, the electronic device is cooled through the pusher, connection terminals, or socket, so the effect of the heat generated by the electronic device is canceled out and the electronic device can be tested at the predetermined temperature as prescribed in the specification.