Method and apparatus for inspecting optical modules
    41.
    发明授权
    Method and apparatus for inspecting optical modules 有权
    用于检查光学模块的方法和装置

    公开(公告)号:US07102738B2

    公开(公告)日:2006-09-05

    申请号:US10665464

    申请日:2003-09-22

    IPC分类号: G01N21/00

    CPC分类号: G01M11/33

    摘要: A method and apparatus for inspecting a plurality of optical modules, in which the optical modules are given channel numbers, a plurality of inspection items, which are related to optical characteristics and/or electrical characteristics of the optical modules, are measured in parallel, and measurement data on the inspection items is stored in storing device. This makes it possible to inspect the optical modules efficiently in a short time, eliminating waiting time.

    摘要翻译: 测量与光学模块的光学特性和/或电气特性有关的多个检查项目,其中光学模块被给予通道号的多个光学模块的并行测量方法和装置,以及 检查项目的测量数据存储在存储装置中。 这样可以在短时间内有效地检查光模块,从而消除等待时间。

    Vertical batch processing apparatus
    42.
    发明申请
    Vertical batch processing apparatus 有权
    立式批处理装置

    公开(公告)号:US20060185592A1

    公开(公告)日:2006-08-24

    申请号:US11354966

    申请日:2006-02-16

    申请人: Hiroyuki Matsuura

    发明人: Hiroyuki Matsuura

    IPC分类号: C23C16/00

    摘要: A vertical batch processing apparatus is configured to transform a semiconductor oxide film on target objects into an intermediate film, which is decomposed or sublimated more easily than the semiconductor oxide film, so as to remove the semiconductor oxide film. The apparatus includes a first process gas supply circuit having a first supply port disposed outside a process field to supply a first process gas, and a second process gas supply circuit having a second supply port disposed between the first supply port and the process field to supply a second process gas. A plasma generation field is disposed between the first and second supply ports to activate the first process gas to produce first active species. The first active species react with the second process gas and thereby produce a reactant to react with the semiconductor oxide film to form the intermediate film.

    摘要翻译: 垂直批量处理装置被配置为将目标物体上的半导体氧化膜转换成比半导体氧化膜更容易分解或升华的中间膜,以便去除半导体氧化物膜。 该设备包括:第一处理气体供应电路,其具有设置在处理区外部以供应第一处理气体的第一供应端口;以及第二处理气体供应回路,其具有设置在第一供应口和处理区之间的第二供应口, 第二工艺气体。 等离子体产生场被布置在第一和第二供应端口之间以激活第一处理气体以产生第一活性物质。 第一活性物质与第二工艺气体反应,从而产生反应物以与半导体氧化物膜反应以形成中间膜。

    Pressure reduction process device, pressure reduction process method, and pressure regulation valve
    43.
    发明申请
    Pressure reduction process device, pressure reduction process method, and pressure regulation valve 失效
    减压工艺装置,减压工艺方法和压力调节阀

    公开(公告)号:US20060162780A1

    公开(公告)日:2006-07-27

    申请号:US10563208

    申请日:2004-07-02

    申请人: Hiroyuki Matsuura

    发明人: Hiroyuki Matsuura

    IPC分类号: F16K51/02

    摘要: The object of the present invention is to provide a low pressure processing system having no possibility of leakage at a valve provided in an exhaust passage when the valve is closed, and capable of reducing a load of maintenance work. An exhaust pipe 3 connected to a reaction tube 1 is provided therein with a gate valve 4 for hermetically closing the exhaust passage. A purge gas is jetted, from jetting ports circumferentially arranged respectively in a valve seat and a valving element of the gate valve, into a gap between the valve seat and the valving element. This prevents foreign objects originated from a process gas from adhering to those surfaces of the valve seat and the valving element that face the gap between the valve seat and valving element, improving sealing capability of the gate valve.

    摘要翻译: 本发明的目的是提供一种低压处理系统,当阀门关闭时,在排气通道中设置的阀门上没有渗漏的可能性,并且能够减少维护工作的负担。 连接到反应管1的排气管3设置有用于气密地关闭排气通道的闸阀4。 喷射气体从分别在阀座和阀门的阀元件周向布置的喷射口喷射到阀座和阀元件之间的间隙中。 这防止了源自工艺气体的异物粘附到阀座和阀座元件的面对阀座和阀元件之间的间隙的表面,从而提高了闸阀的密封能力。

    Electrode structure
    46.
    发明授权

    公开(公告)号:US06810181B2

    公开(公告)日:2004-10-26

    申请号:US10714911

    申请日:2003-11-18

    IPC分类号: G02B610

    CPC分类号: G02F1/065 Y10T428/12535

    摘要: The present invention relates to an electrode structure, which comprises a substrate provided with an electrode formed thereon, wherein the substrate comprises a layer of a fluorine-containing polyimide and a layer of a fluorine-free resin is interposed between the polyimide layer and the electrode and, in particular, to the foregoing electrode structure, wherein the electrode comprises a gold layer as the outermost or surface layer and an aluminum layer interposed between the substrate and the gold layer. The electrode structure of the present invention never causes any peeling off of the electrode due to insufficient adhesion of the electrode to the substrate, the structure has sufficiently high strength and therefore the boundary between the substrate and the electrode formed thereon is not destroyed by the energy of ultrasonics applied thereto.

    Optical pickup
    47.
    发明授权
    Optical pickup 失效
    光学拾音

    公开(公告)号:US5877904A

    公开(公告)日:1999-03-02

    申请号:US888232

    申请日:1997-07-03

    摘要: An optical pickup comprises an objective-lens driving device including a movable section provided with an objective lens, a focusing coil, and tracking coils, and a fixed section provided with a single magnetic circuit having a magnetic gap, the focusing coil and the tracking coils being disposed in the magnetic gap. The point of application of a tracking-driving force, the point of application of a result force of focusing-driving forces occurring in and outside the magnetic gap, and the position of the center of gravity of the movable section are made to substantially coincide with each other. In addition, the objective lens and the magnetic circuit are disposed within an area of a window in a lower shell of a optical disk. Further, a through hole for accommodating a lower portion of a yoke of the magnetic circuit is provided in a mounting base on which the objective-lens driving device is mounted. An inclining fulcrum and a height adjusting component for inclining the objective-lens driving device about the inclining fulcrum are provided in the vicinities of the through hole.

    摘要翻译: 光拾取器包括物镜驱动装置,该物镜驱动装置包括设置有物镜的可移动部分,聚焦线圈和跟踪线圈,以及设置有具有磁隙的单个磁路的固定部分,聚焦线圈和跟踪线圈 设置在磁隙中。 跟踪驱动力的应用点,发生在磁隙内外的聚焦驱动力的结果力的施加点和可移动部分的重心位置基本上与 彼此。 此外,物镜和磁路设置在光盘的下壳体内的窗口的区域内。 此外,用于容纳磁路的磁轭的下部的通孔设置在安装有物镜驱动装置的安装基座中。 在通孔附近设置倾斜支点和用于使物镜驱动装置围绕倾斜支点倾斜的高度调节部件。

    Electrolytic capacitor
    49.
    发明授权
    Electrolytic capacitor 有权
    电解电容器

    公开(公告)号:US09208954B2

    公开(公告)日:2015-12-08

    申请号:US13574390

    申请日:2011-02-07

    摘要: An electrolytic capacitor includes a capacitor element, an electrolyte solution with which the capacitor element is impregnated, and an outer package enclosing the capacitor element and the electrolyte solution. The capacitor element includes an anode foil having a dielectric layer on a surface thereof, a cathode foil, a separator disposed between the anode foil and the cathode foil, and a solid electrolyte layer in contact with the dielectric layer of the anode foil and the cathode foil. The electrolyte solution contains a low-volatile solvent that is at least one of polyalkylene glycol and a derivative of polyalkylene glycol.

    摘要翻译: 电解电容器包括电容器元件,浸渍电容器元件的电解质溶液和封装电容器元件和电解质溶液的外包装。 电容器元件包括在其表面上具有电介质层的阳极箔,阴极箔,设置在阳极箔和阴极箔之间的隔膜以及与阳极箔和阴极的电介质层接触的固体电解质层 挫败。 电解质溶液包含低聚挥发性溶剂,其为聚亚烷基二醇和聚亚烷基二醇衍生物中的至少一种。

    Film formation apparatus for semiconductor process and method for using the same
    50.
    发明授权
    Film formation apparatus for semiconductor process and method for using the same 有权
    用于半导体工艺的成膜装置及其使用方法

    公开(公告)号:US08646407B2

    公开(公告)日:2014-02-11

    申请号:US13530941

    申请日:2012-06-22

    申请人: Hiroyuki Matsuura

    发明人: Hiroyuki Matsuura

    摘要: A method is provided for using a film formation apparatus including a process container having an inner surface, which contains as a main component a material selected from the group consisting of quartz and silicon carbide. The method includes performing a film formation process to form a silicon nitride film on a product target substrate inside the process container, and then, unloading the product target substrate from the process container. Thereafter, the method includes supplying an oxidizing gas into the process container with no product target substrate accommodated therein, thereby performing an oxidation process to change by-product films deposited on the inner surface of the process container into a composition richer in oxygen than nitrogen, at a part of the by-product films from a surface thereof to a predetermined depth.

    摘要翻译: 提供了一种使用成膜装置的方法,该成膜装置包括具有内表面的处理容器,该内表面含有选自石英和碳化硅的材料作为主要成分。 该方法包括进行成膜工艺以在处理容器内部的产品目标基材上形成氮化硅膜,然后从处理容器卸载产品目标衬底。 此后,该方法包括将氧化气体供应到处理容器中,其中没有容纳产品目标衬底,从而进行氧化处理以将沉积在处理容器内表面上的副产物膜变成比氮气更富氧的组合物, 在副产物膜的一部分从其表面到预定深度。