Highly purified liquid perfluoro-n-alkanes and method for preparing
    41.
    发明授权
    Highly purified liquid perfluoro-n-alkanes and method for preparing 失效
    高纯液体全氟正烷烃及其制备方法

    公开(公告)号:US07465667B2

    公开(公告)日:2008-12-16

    申请号:US11074440

    申请日:2005-03-08

    CPC classification number: G03F7/70216

    Abstract: The present invention is drawn to liquid perfluoro-n-alkanes that are highly transparent to UV wavelengths ranging from about 150 nm to 165 nm, and to the method by which high transparency may be obtained. The liquid perfluoro-n-alkanes of the invention are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography at 157 nm exposure wavelength.

    Abstract translation: 本发明涉及对从约150nm至165nm范围的UV波长高度透明的液体全氟正烷烃,以及可获得高透明度的方法。 本发明的液体全氟正烷烃可用于光耦合剂,光学胶粘剂,光学元件,用于半导体晶片和器件的光学检查介质以及157nm曝光波长下的浸没光刻。

    Solvents for amorphous fluoropolymers
    46.
    发明授权
    Solvents for amorphous fluoropolymers 有权
    无定形含氟聚合物溶剂

    公开(公告)号:US06248823B1

    公开(公告)日:2001-06-19

    申请号:US09338149

    申请日:1999-06-23

    CPC classification number: C08J3/093 C08J2327/12 C08K5/02 C09D127/12 C08L27/12

    Abstract: Disclosed is a liquid/gelatinous composition of matter comprising: (a) a solvent or a mixture of solvents selected from the group consisting of: (i) a CnF2n+2−xHx compound, wherein n is an integer from 6 to 15 and x is an integer from 1 to 3; and (ii) a Cn′F2n′−x′Hx′ compound, wherein n′ is an integer from 7 to 15 and x′ is an integer from 1 to 3; and (b) one or more amorphous fluoropolymers selected from the group consisting of: (i) poly(HFP/TFE); (ii) iodine ended poly(TFE/PMVE); (iii) poly(TFE/PMVE/PEVE); (iv) poly(TFE/PDD); (v) poly(TFE/perfluorovinylether); (vi) poly(CF2═CF(CF2)2OCF═CF2/TFE); and wherein the amorphous fluoropolymer has no detectable Tm (

    Abstract translation: 公开了一种液体/凝胶状物质组合物,其包含:(a)选自以下的溶剂或溶剂混合物:(i)C n F 2n + 2-x H x化合物,其中n为6至15的整数,x 是1到3的整数; 和(ii)Cn'F2n'-x'Hx'化合物,其中n'为7至15的整数,x'为1至3的整数; 和(b)一种或多种选自以下的无定形含氟聚合物:(i)聚(HFP / TFE);(ii)碘末端聚(TFE / PMVE);(iii)聚(TFE / PMVE / PEVE); (IV)聚(TFE / PDD);(v)聚(TFE /全氟乙烯基醚);(vi)聚(CF 2 = CF(CF 2)2 OCF = CF 2 / TFE); 并且其中所述无定形含氟聚合物通过差示扫描量热法不具有可检测的Tm(<1J / g),并且其中所述无定形含氟聚合物占组合物的0.05至30重量%,并且其中存在的至少5%的无定形含氟聚合物在溶液中 溶剂或溶剂混合物。

    Use of highly purified hydrocarbons in vacuum ultraviolet applications
    50.
    发明授权
    Use of highly purified hydrocarbons in vacuum ultraviolet applications 失效
    在真空紫外线应用中使用高度纯化的碳氢化合物

    公开(公告)号:US07589242B2

    公开(公告)日:2009-09-15

    申请号:US11141285

    申请日:2005-09-14

    CPC classification number: G03F7/2041

    Abstract: The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.

    Abstract translation: 本发明涉及在光耦合剂,光学胶粘剂,光学元件,用于半导体晶片和器件的光学检查介质以及浸没式光刻技术中使用对从约170nm至260nm范围内的UV波长高度透明的烷烃,特别是在 193和248 nm的曝光波长。

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