Exposure method, exposure apparatus, and method for manufacturing device
    41.
    发明授权
    Exposure method, exposure apparatus, and method for manufacturing device 有权
    曝光方法,曝光装置和制造装置的方法

    公开(公告)号:US07098991B2

    公开(公告)日:2006-08-29

    申请号:US10957639

    申请日:2004-10-05

    Abstract: According to one embodiment of the invention, a pattern of a mask is transferred onto a substrate via a projection optical system using an energy beam by placing a substrate on side of an energy beam emitting end portion of projection optical system, when the substrate is exposed, and placing an object on the side of the energy beam emitting end portion of the projection optical system in place of the substrate when the substrate is exchanged. This can adequately remove a light absorptive substance from the region near an output end of the projection optical system and can maintain the gas state even at a time of moving or replacing the substrate.

    Abstract translation: 根据本发明的一个实施例,当衬底暴露时,通过将投影光学系统的能量束发射端部的一侧放置基板,通过使用能量束的投影光学系统将掩模图案转印到基板上 并且当更换基板时,将物体放置在投影光学系统的能量束发射端部侧而不是基板。 这可以从投影光学系统的输出端附近的区域充分地去除光吸收物质,并且即使在移动或更换基板时也能够保持气体状态。

    Exposure apparatus and exposure method
    42.
    发明授权
    Exposure apparatus and exposure method 失效
    曝光装置和曝光方法

    公开(公告)号:US07050149B2

    公开(公告)日:2006-05-23

    申请号:US11008631

    申请日:2004-12-10

    CPC classification number: G03F7/70933 G03F7/70808 G03F7/70825

    Abstract: An exposure apparatus able to maintain reflectances of mirrors and transmittances of lenses and to maintain initial performance over a long period by using exposure light of a wavelength of the vacuum ultraviolet region to illuminate a mask and transfer images of patterns on the mask to a substrate, provided with a gas feed unit for supplying a light path space through which the exposure light passes with a gas mainly comprised of an inert gas or rare gas and introducing a predetermined concentration of hydrogen into the gas fed to at least part of the light path space.

    Abstract translation: 一种曝光装置,其能够保持透镜的反射镜和透镜的透射率,并且通过使用真空紫外线区域的波长的曝光光来长时间保持初始性能,以照亮掩模并将掩模上的图案的图像转印到基板上, 设置有供气单元,用于提供曝光光通过的光路空间,主要由惰性气体或稀有气体组成的气体,并将预定浓度的氢气引入供给到光路空间的至少一部分的气体 。

    Sliding screen door
    45.
    发明授权
    Sliding screen door 失效
    滑动筛门

    公开(公告)号:US06978820B2

    公开(公告)日:2005-12-27

    申请号:US10491900

    申请日:2002-10-29

    Applicant: Takashi Aoki

    Inventor: Takashi Aoki

    CPC classification number: E06B9/262 E06B9/52 E06B2009/2625

    Abstract: The invention provides a sliding screen door having a net guide that moves in association with the opening and closing movement of a net, wherein the opening and closing operation of the screen door can be performed smoothly while providing a buffering effect with an adequate resistance, without hindering the opening and closing operability of a movable edge member, by enabling a reaction force, which is required for its bending, to be used as a buffering force against the operating force of the movable edge member, the net guide being formed by connecting guide pieces. In order to do so, a net guide 12 fed out from and drawn into the lower end of the vertical frame member 6 in association with the opening and closing operation of the net 4, is provided for guiding the lower end of the net 4. The net guide 12 is formed by connecting with a tape member 16 a number of guide pieces 14 formed substantially into a U-shape with a bottom portion 14a and a stabilizing portion 14b. The tape member 16 is inserted into the insertion devices 14c on the guide pieces 14 and the guide pieces 14 at both ends are fixed to the tape member 16.

    Abstract translation: 本发明提供了一种滑动筛门,其具有与网的打开和关闭运动相关联地移动的网状引导件,其中屏幕门的打开和关闭操作可以平滑地执行,同时提供具有足够阻力的缓冲效果,而没有 通过使其弯曲所需的反作用力作为抵抗可动边缘构件的操作力的缓冲力,妨碍可动边缘构件的打开和关闭操作性,网导向件由连接导轨 件 为了这样做,提供了与网4的打开和关闭操作相关联地从垂直框架构件6的下端引出并被拉入的网状导向件12,用于引导网4的下端。 网状引导件12通过与带状构件16连接而形成有基本上形成为具有底部14a和稳定部分14b的U形的多个引导件14。 带状构件16插入到导向件14上的插入装置14c中,两端的引导件14固定在带状构件16上。

    Exposure method and system
    46.
    发明授权
    Exposure method and system 失效
    曝光方法和系统

    公开(公告)号:US06970228B1

    公开(公告)日:2005-11-29

    申请号:US10030822

    申请日:1999-07-16

    CPC classification number: G03F7/70933 G03F7/70225 G03F7/70883

    Abstract: An exposure method and an exposure apparatus make it possible to easily supply a gas through which an exposure light beam is transmitted, to a space between a projection optical system and a substrate. A wafer is exposed with an image of a pattern on a reticle by radiating the exposure light beam having passed through the pattern on the reticle, onto the wafer via a projection optical system. A purge guide plate, which has a guide hole, is installed between the wafer and an optical member disposed at the tip of the projection optical system. A purge gas, through which the exposure light beam is transmitted, is supplied to the space between the wafer and the optical member. The purge gas flows through the guide hole toward the wafer, and then flows in directions toward the outer circumference.

    Abstract translation: 曝光方法和曝光装置使得可以容易地将曝光光束透过的气体供应到投影光学系统和基板之间的空间。 通过投影光学系统将已经通过掩模版上的图案的曝光光束通过投影光学系统辐射到晶片上,从而将掩模上的图案的图像曝光。 具有引导孔的清洗引导板安装在晶片和设置在投影光学系统的尖端处的光学构件之间。 将曝光光束透过的吹扫气体供给到晶片和光学构件之间的空间。 吹扫气体朝向晶片流过引导孔,然后朝着外周方向流动。

    Display panel with aspect ratio of matrix-arrayed pixels set to predetermined value, and display device using such display panel
    47.
    发明授权
    Display panel with aspect ratio of matrix-arrayed pixels set to predetermined value, and display device using such display panel 失效
    将矩阵阵列像素的纵横比设置为预定值的显示面板,以及使用该显示面板的显示装置

    公开(公告)号:US06970205B2

    公开(公告)日:2005-11-29

    申请号:US10002755

    申请日:2001-10-19

    Abstract: A liquid crystal display device using an LCD panel made for display of computer output, wherein video signals of a predetermined television system are converted by a decoder into field-unit picture data, and frame-unit picture data obtained therefrom by a converter are supplied to an LCD panel to display a picture composed of such video signals. The picture is displayed on an effective screen of the display panel at the original aspect ratio of the video signals of a television system by changing the width-to-height ratio of each unit pixel formed on the effective screen of the display panel, on the basis of the ratio of the number of horizontal pixels to the number of vertical pixels of the frame-unit picture data, and also on the basis of the aspect ratio of the predetermined television system.

    Abstract translation: 使用用于显示计算机输出的LCD面板的液晶显示装置,其中预定电视系统的视频信号由解码器转换为场单元图像数据,并且由转换器从其获得的帧单位图像数据被提供给 用于显示由这种视频信号组成的图像的LCD面板。 通过改变在显示面板的有效屏幕上形成的每个单位像素的宽高比,将图像以电视系统的视频信号的原始宽高比显示在显示面板的有效屏幕上 基于水平像素数与帧单位图像数据的垂直像素数的比例,以及基于预定电视系统的宽高比的基础。

    Control device for vehicle
    48.
    发明授权
    Control device for vehicle 有权
    车辆控制装置

    公开(公告)号:US06840889B2

    公开(公告)日:2005-01-11

    申请号:US10376459

    申请日:2003-03-03

    Abstract: A control device for a vehicle controls a motor-driven pump at an appropriate timing when an internal combustion engine is stopped or starts. An ECU of the control device comprises an operation determination section which determines whether or not the motor-driven pump is operated depending on the value of an idling stop flag that makes the internal combustion engine stop, depending on a measured value output from an oil pressure sensor for measuring oil pressure in oil lines providing operation oil to a torque converter and a transmission, and depending on a measured value output from an oil temperature sensor for measuring the temperature of the operation oil; and a target electrical current calculation section for calculating a target value of electrical current to be supplied during the operation of the motor-driven oil pump depending on the determination result by the operation determination section. The target electrical current calculated by the target electrical current calculation section is input to a driving section of the motor-driven oil pump, and the driving section provides driving electrical power to the pump depending on the target electrical current.

    Abstract translation: 当内燃机停止或起动时,用于车辆的控制装置在适当的时刻控制电动泵。 控制装置的ECU包括:操作判定部,根据从油压输出的测量值,根据使内燃机停止的怠速停止标志的值来判定电动泵是否动作 传感器,用于测量向扭矩转换器和变速器提供操作油的油路中的油压,并且根据用于测量操作油的温度的油温传感器输出的测量值; 以及目标电流计算部分,用于根据操作确定部分的确定结果计算在马达驱动的油泵的操作期间要提供的电流的目标值。 由目标电流计算部计算出的目标电流被输入到电动机油泵的驱动部,驱动部根据目标电流向泵提供驱动电力。

    Die head coating, coating device, and method of manufacturing die head for coating
    49.
    发明申请
    Die head coating, coating device, and method of manufacturing die head for coating 有权
    模头涂布,涂布装置以及制造用于涂装的模头的方法

    公开(公告)号:US20050000420A1

    公开(公告)日:2005-01-06

    申请号:US10494893

    申请日:2003-07-18

    CPC classification number: B05C5/0254

    Abstract: During displacement relative to a substrate 1, a coating die head emits coating liquid out of a slot 12a to a surface of the substrate. The coating die head includes a lip 12b having a lip surface 12b and a side having a side surface 12c. A contact angle of the surface 12c with respect to the coating liquid is greater than a contact angle of the surface 12b with respect to the coating liquid. This configuration enhances stabilization of bead of the coating liquid during application process of the coating liquid, preventing stripes and steps from appearing in the coating layer. This coating die head makes it possible to carry out high precision coating required for fabrication of color filters for liquid crystal displays.

    Abstract translation: 在相对于基板1的位移期间,涂覆模头将涂覆液体从槽12a中发射到基板的表面。 涂覆模头包括具有唇表面12b的边缘12b和具有侧表面12c的一侧。 表面12c相对于涂布液的接触角大于表面12b相对于涂布液的接触角。 这种构造增强了涂布液涂布过程中涂布液珠的稳定性,防止了涂层中出现条纹和台阶。 该涂布模头使得可以进行制造用于液晶显示器的滤色器所需的高精度涂层。

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