Abstract:
According to one embodiment of the invention, a pattern of a mask is transferred onto a substrate via a projection optical system using an energy beam by placing a substrate on side of an energy beam emitting end portion of projection optical system, when the substrate is exposed, and placing an object on the side of the energy beam emitting end portion of the projection optical system in place of the substrate when the substrate is exchanged. This can adequately remove a light absorptive substance from the region near an output end of the projection optical system and can maintain the gas state even at a time of moving or replacing the substrate.
Abstract:
An exposure apparatus able to maintain reflectances of mirrors and transmittances of lenses and to maintain initial performance over a long period by using exposure light of a wavelength of the vacuum ultraviolet region to illuminate a mask and transfer images of patterns on the mask to a substrate, provided with a gas feed unit for supplying a light path space through which the exposure light passes with a gas mainly comprised of an inert gas or rare gas and introducing a predetermined concentration of hydrogen into the gas fed to at least part of the light path space.
Abstract:
An occupant restraint system includes an airbag and an inflator. A gas supply pipe extending from the inflator is inserted into the interior of the airbag and immovably fixed in a manner in which the gas supply pipe is clamped from above and below by a pipe support formed in the airbag from a part of stitching defining a plurality of cells. The gas supply pipe can thus be fixed without employing any special fixing member, thereby reliably preventing blockage of the gas nozzle that would cause interference with smooth issuing of the gas and preventing damage to a base fabric of the airbag by the heat and pressure of the gas.
Abstract:
An etching method of the invention includes arranging droplets including a film-forming material on a substrate, drying each of the droplets to form a dry film having a width smaller than the diameter of each droplet at the time of the arrangement, and performing etching while using the dry film as an etching protective film.
Abstract:
The invention provides a sliding screen door having a net guide that moves in association with the opening and closing movement of a net, wherein the opening and closing operation of the screen door can be performed smoothly while providing a buffering effect with an adequate resistance, without hindering the opening and closing operability of a movable edge member, by enabling a reaction force, which is required for its bending, to be used as a buffering force against the operating force of the movable edge member, the net guide being formed by connecting guide pieces. In order to do so, a net guide 12 fed out from and drawn into the lower end of the vertical frame member 6 in association with the opening and closing operation of the net 4, is provided for guiding the lower end of the net 4. The net guide 12 is formed by connecting with a tape member 16 a number of guide pieces 14 formed substantially into a U-shape with a bottom portion 14a and a stabilizing portion 14b. The tape member 16 is inserted into the insertion devices 14c on the guide pieces 14 and the guide pieces 14 at both ends are fixed to the tape member 16.
Abstract:
An exposure method and an exposure apparatus make it possible to easily supply a gas through which an exposure light beam is transmitted, to a space between a projection optical system and a substrate. A wafer is exposed with an image of a pattern on a reticle by radiating the exposure light beam having passed through the pattern on the reticle, onto the wafer via a projection optical system. A purge guide plate, which has a guide hole, is installed between the wafer and an optical member disposed at the tip of the projection optical system. A purge gas, through which the exposure light beam is transmitted, is supplied to the space between the wafer and the optical member. The purge gas flows through the guide hole toward the wafer, and then flows in directions toward the outer circumference.
Abstract:
A liquid crystal display device using an LCD panel made for display of computer output, wherein video signals of a predetermined television system are converted by a decoder into field-unit picture data, and frame-unit picture data obtained therefrom by a converter are supplied to an LCD panel to display a picture composed of such video signals. The picture is displayed on an effective screen of the display panel at the original aspect ratio of the video signals of a television system by changing the width-to-height ratio of each unit pixel formed on the effective screen of the display panel, on the basis of the ratio of the number of horizontal pixels to the number of vertical pixels of the frame-unit picture data, and also on the basis of the aspect ratio of the predetermined television system.
Abstract:
A control device for a vehicle controls a motor-driven pump at an appropriate timing when an internal combustion engine is stopped or starts. An ECU of the control device comprises an operation determination section which determines whether or not the motor-driven pump is operated depending on the value of an idling stop flag that makes the internal combustion engine stop, depending on a measured value output from an oil pressure sensor for measuring oil pressure in oil lines providing operation oil to a torque converter and a transmission, and depending on a measured value output from an oil temperature sensor for measuring the temperature of the operation oil; and a target electrical current calculation section for calculating a target value of electrical current to be supplied during the operation of the motor-driven oil pump depending on the determination result by the operation determination section. The target electrical current calculated by the target electrical current calculation section is input to a driving section of the motor-driven oil pump, and the driving section provides driving electrical power to the pump depending on the target electrical current.
Abstract:
During displacement relative to a substrate 1, a coating die head emits coating liquid out of a slot 12a to a surface of the substrate. The coating die head includes a lip 12b having a lip surface 12b and a side having a side surface 12c. A contact angle of the surface 12c with respect to the coating liquid is greater than a contact angle of the surface 12b with respect to the coating liquid. This configuration enhances stabilization of bead of the coating liquid during application process of the coating liquid, preventing stripes and steps from appearing in the coating layer. This coating die head makes it possible to carry out high precision coating required for fabrication of color filters for liquid crystal displays.
Abstract:
An electric device comprises a plurality of detachable battery units (2, 3, 4), each consisting of a set of storage battery packs (2B, 3B, 4B) and memories (11, 12, 13) storing information about the charge and discharge states of the battery packs. Connectors are provided to connect and disconnect an electric device (1) electrically incident to each battery unit being attached or detached. The device includes a driver (9) for driving a load, a charger (5) for charging the storage battery packs (2B, 3B, 4B) by referring to the information stored in the memories (11, 12, 13) of the respective mounted battery units (2, 3, 4), and a controller (6) for controlling the electric power supplied from the individual battery units (2, 3, 4) to the driver (9) by referring to the above-mentioned information.