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    Z AXIS ACCELEROMETER USING VARIABLE VERTICAL GAPS
    42.
    发明申请
    Z AXIS ACCELEROMETER USING VARIABLE VERTICAL GAPS 审中-公开

    公开(公告)号：US20200081028A1

    公开(公告)日：2020-03-12

    申请号：US16125604

    申请日：2018-09-07

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang ,  Gaurav Vohra

    IPC: G01P15/125

    Abstract: Z-axis microelectromechanical systems (MEMS) accelerometers are described. The z-axis MEMS accelerometers are of a teeter-totter type, having a pivoting beam suspended above a substrate. A non-uniform gap distance between the pivoting beam and the substrate is provided to increase the sensitivity of the accelerometer to z-axis acceleration. In some embodiments, the non-uniform gap distance is created by one or more substrate layers, such as one or more layers of polysilicon on the substrate above which the pivoting beam is suspended. In some embodiments, the non-uniform gap distance is created by the use of one or more bumps on the beam. In some embodiments, both substrate layers and bumps are used to provide a non-uniform gap distance for different electrodes of the accelerometer. The non-uniform gap distance may include a gap of reduced height, resulting in increased sensitivity of the accelerometer to z-axis accelerations.

    3-axis angular accelerometer
    43.
    发明授权
    3-axis angular accelerometer 有权

    公开(公告)号：US10585111B2

    公开(公告)日：2020-03-10

    申请号：US15400109

    申请日：2017-01-06

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang ,  Jianglong Zhang

    IPC: G01P15/125 ,  G01P15/08 ,  G01P15/02 ,  G01P15/18 ,  B81B3/00

    Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.

    Accelerometer with offset compensation
    45.
    发明授权
    Accelerometer with offset compensation 有权

    公开(公告)号：US09927459B2

    公开(公告)日：2018-03-27

    申请号：US14073160

    申请日：2013-11-06

    Applicant: Analog Devices, Inc.

    Inventor： William A. Clark ,  Xin Zhang

    IPC: G01P15/125 ,  G01P21/00 ,  G01P15/08

    CPC classification number: G01P15/125 ,  G01P21/00 ,  G01P2015/0814 ,  G01P2015/0868

    Abstract: An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the substrate, while the acceleration capacitor has both a stationary finger extending from the substrate, and a movable finger extending from the movable mass. The accelerometer also has a variable stress capacitor, which also includes the stress finger, for determining movement of the mass anchor relative to the substrate.

    MEMS sensor with dynamically variable reference capacitance
    46.
    发明授权
    MEMS sensor with dynamically variable reference capacitance 有权
    具有动态可变参考电容的MEMS传感器

    公开(公告)号：US09410981B2

    公开(公告)日：2016-08-09

    申请号：US13910755

    申请日：2013-06-05

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang ,  Michael W. Judy

    IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  G01P2015/0837

    Abstract: An MEMS device has a dynamically variable reference capacitor that provides a reference to a sense capacitance. In some embodiments, a 3-axis accelerometer includes a proof mass suspended above a substrate from an anchor, and a cantilevered Z-axis reference capacitor arm suspended above the substrate from the same anchor. In some embodiments, the proof mass is suspended from a plurality of anchors, and each anchor also supports one or more cantilevered arms, the cantilevered arms forming a dynamically variable reference capacitance.

    Abstract translation: MEMS器件具有动态可变参考电容器，其提供对感测电容的参考。 在一些实施例中，3轴加速度计包括悬挂在来自锚固件的基板上方的检验质量块，以及从相同锚点悬挂在基板上方的悬臂Z轴参考电容臂。 在一些实施例中，证明物质从多个锚固体悬挂，并且每个锚固件还支撑一个或多个悬臂，悬臂构成动态可变参考电容。

    Low-noise multi-axis accelerometers and related methods
    47.
    发明授权
    Low-noise multi-axis accelerometers and related methods 有权

    公开(公告)号：US12146893B2

    公开(公告)日：2024-11-19

    申请号：US17380601

    申请日：2021-07-20

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang

    IPC: G01P15/18 ,  G01P15/08 ,  G01P15/125

    Abstract: Microelectromechanical system (MEMS) accelerometers are described. The MEMS accelerometers may include multiple proof mass portions collectively forming one proof mass. The entirety of the proof mass may contribute to detection of in-plane acceleration and out-of-plane acceleration. The MEMS accelerometers may detect in-plane and out-of-plane acceleration in a differential fashion. In response to out-of-plane accelerations, some MEMS accelerometers may experience butterfly modes, where one proof mass portion rotates counterclockwise relative to an axis while at the same time another proof mass portion rotates clockwise relative to the same axis. In response to in-plane acceleration, the proof mass portions may experience common translational modes, where the proof mass portions move in the plane along the same direction.

    3-AXIS ANGULAR ACCELEROMETER
    48.
    发明申请
    3-AXIS ANGULAR ACCELEROMETER 有权

    公开(公告)号：US20220155336A1

    公开(公告)日：2022-05-19

    申请号：US17589745

    申请日：2022-01-31

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang ,  Jianglong Zhang ,  Alan O'Donnell

    IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08 ,  B81B3/00

    Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.

    Low-noise multi-axis accelerometers and related methods
    49.
    发明授权
    Low-noise multi-axis accelerometers and related methods 有权

    公开(公告)号：US11099207B2

    公开(公告)日：2021-08-24

    申请号：US16171302

    申请日：2018-10-25

    Applicant: Analog Devices, Inc.

    Inventor： Xin Zhang

    IPC: G01P15/18 ,  G01P15/125 ,  G01P15/08

    Abstract: Microelectromechanical system (MEMS) accelerometers are described. The MEMS accelerometers may include multiple proof mass portions collectively forming one proof mass. The entirety of the proof mass may contribute to detection of in-plane acceleration and out-of-plane acceleration. The MEMS accelerometers may detect in-plane and out-of-plane acceleration in a differential fashion. In response to out-of-plane accelerations, some MEMS accelerometers may experience butterfly modes, where one proof mass portion rotates counterclockwise relative to an axis while at the same time another proof mass portion rotates clockwise relative to the same axis. In response to in-plane acceleration, the proof mass portions may experience common translational modes, where the proof mass portions move in the plane along the same direction.

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