公开(公告)号：US11876123B2

公开(公告)日：2024-01-16

申请号：US17214969

申请日：2021-03-29

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. Stamper ,  Vibhor Jain ,  Renata A. Camillo-Castillo

IPC: H01L21/762 ,  H01L29/66 ,  H01L29/08 ,  H01L29/10 ,  H01L29/06 ,  H01L29/737 ,  H01L29/732

CPC classification number: H01L29/66242 ,  H01L21/762 ,  H01L21/76224 ,  H01L29/0603 ,  H01L29/0649 ,  H01L29/0821 ,  H01L29/1004 ,  H01L29/66272 ,  H01L29/7371 ,  H01L29/732

Abstract: According to a semiconductor device herein, the device includes a substrate. An active device is formed in the substrate. The active device includes a collector region, a base region formed on the collector region, and an emitter region formed on the base region. An isolation structure is formed in the substrate around the active device. A trench filled with a compressive material is formed in the substrate and positioned laterally adjacent to the emitter region and base region. The trench extends at least partially into the collector region.

公开(公告)号：US11764225B2

公开(公告)日：2023-09-19

申请号：US17344391

申请日：2021-06-10

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. Stamper ,  Uzma Rana ,  Siva P. Adusumilli ,  Steven M. Shank

IPC: H01L27/12 ,  H01L29/45 ,  H01L21/84 ,  H01L21/28 ,  H01L21/285 ,  H01L29/49

CPC classification number: H01L27/1203 ,  H01L21/28052 ,  H01L21/28518 ,  H01L21/84 ,  H01L29/45 ,  H01L29/4933

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to field effect transistors and methods of manufacture. The structure includes: at least one gate structure comprising source/drain regions; and at least one isolation structure perpendicular to the at least one gate structure and within the source/drain regions.

公开(公告)号：US11749559B2

公开(公告)日：2023-09-05

申请号：US17983436

申请日：2022-11-09

Applicant: GlobalFoundries U.S. Inc.

Inventor： Steven M. Shank ,  Anthony K. Stamper ,  Ian McCallum-Cook ,  Siva P. Adusumilli

IPC: H01L21/763 ,  H01L29/06 ,  H01L27/12 ,  H01L21/762 ,  H01L21/324 ,  H01L21/84 ,  H01L21/265 ,  H01L21/74 ,  H01L29/32 ,  H01L21/02 ,  H01L27/06 ,  H01L29/10

CPC classification number: H01L21/763 ,  H01L21/26506 ,  H01L21/26526 ,  H01L21/26533 ,  H01L21/324 ,  H01L21/743 ,  H01L21/76267 ,  H01L21/76283 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/0642 ,  H01L29/0649 ,  H01L29/32 ,  H01L21/0217 ,  H01L21/02164 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/02271 ,  H01L27/0629 ,  H01L29/1087

Abstract: Structures with altered crystallinity beneath semiconductor devices and methods associated with forming such structures. Trench isolation regions surround an active device region composed of a single-crystal semiconductor material. A first non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. A second non-single-crystal layer is arranged beneath the trench isolation regions and the active device region. The first non-single-crystal layer is arranged between the second non-single-crystal layer and the active device region.

公开(公告)号：US11721719B2

公开(公告)日：2023-08-08

申请号：US17074891

申请日：2020-10-20

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Anthony K. Stamper ,  John J. Ellis-Monaghan ,  Steven M. Shank ,  Rajendran Krishnasamy

IPC: H01L29/06 ,  H01L29/08 ,  H01L29/66 ,  H01L29/737 ,  H01L21/763 ,  H01L29/165

CPC classification number: H01L29/0642 ,  H01L21/763 ,  H01L29/0826 ,  H01L29/165 ,  H01L29/66242 ,  H01L29/7371

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors (HBTs) with a buried trap rich region and methods of manufacture. The structure includes: a trap rich isolation region embedded within the bulk substrate; and a heterojunction bipolar transistor above the trap rich isolation region, with its sub-collector region separated by the trap rich isolation region by a layer of the bulk substrate.

公开(公告)号：US20230215869A1

公开(公告)日：2023-07-06

申请号：US17647176

申请日：2022-01-06

Applicant: GlobalFoundries U.S. Inc.

Inventor： Uzma B. Rana ,  Steven M. Shank ,  Anthony K. Stamper

IPC: H01L27/12 ,  H01L21/762

CPC classification number: H01L27/1207 ,  H01L21/76283

Abstract: An integrated circuit (IC) structure, a switch and related method, are disclosed. The IC structure includes an active device, e.g., a switch, over a bulk semiconductor substrate, and an isolation structure under the active device in the bulk semiconductor substrate. The isolation structure may include a trench isolation adjacent the active device in the bulk semiconductor substrate, a dielectric layer laterally adjacent the trench isolation and over the active device, and a porous semiconductor layer in the bulk semiconductor substrate under the dielectric layer laterally adjacent the trench isolation. The IC structure employs a lower cost, low resistivity bulk semiconductor substrate rather than a semiconductor-on-insulator (SOI) substrate, yet it has better performance characteristics for RF switches than an SOI substrate.

公开(公告)号：US11677000B2

公开(公告)日：2023-06-13

申请号：US17450186

申请日：2021-10-07

Applicant: GlobalFoundries U.S. Inc.

Inventor： Uzma B. Rana ,  Steven M. Shank ,  Anthony K. Stamper

IPC: H01L29/06 ,  H01L29/08 ,  H01L21/76 ,  H01L21/8234 ,  H01L27/088 ,  H01L29/10 ,  H01Q1/22

CPC classification number: H01L29/0653 ,  H01L29/0847 ,  H01L29/1083 ,  H01Q1/2283

Abstract: An integrated circuit (IC) structure includes an active device over a bulk semiconductor substrate, and an isolation structure around the active device in the bulk semiconductor substrate. The active device includes a semiconductor layer having a center region, a first end region laterally spaced from the center region by a first trench isolation, a second end region laterally spaced from the center region by a second trench isolation, a gate over the center region, and a source/drain region in each of the first and second end regions. The isolation structure includes: a polycrystalline isolation layer under the active device, a third trench isolation around the active device, and a porous semiconductor layer between the first trench isolation and the polycrystalline isolation layer and between the second trench isolation and the polycrystalline isolation layer.

公开(公告)号：US11515397B2

公开(公告)日：2022-11-29

申请号：US16934669

申请日：2020-07-21

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. Stamper ,  Siva P. Adusumilli ,  Vibhor Jain ,  Steven Bentley

IPC: H01L29/66 ,  H01L29/20 ,  H01L29/778 ,  H01L29/06 ,  H01L21/763 ,  H01L21/8234 ,  H01L29/36

Abstract: Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. A layer stack is formed on a semiconductor substrate comprised of a single-crystal semiconductor material. The layer stack includes a semiconductor layer comprised of a III-V compound semiconductor material. A polycrystalline layer is formed in the semiconductor substrate. The polycrystalline layer extends laterally beneath the layer stack.

公开(公告)号：US11469178B2

公开(公告)日：2022-10-11

申请号：US17126921

申请日：2020-12-18

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. Stamper ,  John J. Ellis-Monaghan ,  Steven M. Shank ,  John J. Pekarik ,  Vibhor Jain

IPC: H01L23/525 ,  H01L27/12 ,  H01L23/532

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a metal-free fuse structure and methods of manufacture. The structure includes: a first metal-free fuse structure comprising a top semiconductor material of semiconductor-on-insulator (SOI) technologies, the top semiconductor material including end portions with a first electrical resistance and a fuse portion of a second, higher electrical resistance electrically connected to the end portions; and a second metal-free fuse structure comprising the top semiconductor material of semiconductor-on-insulator (SOI) technologies, the top semiconductor material of the second metal-free fuse structure including at least a fuse portion of a lower electrical resistance than the second, higher electrical resistance.

公开(公告)号：US11437522B2

公开(公告)日：2022-09-06

申请号：US16890063

申请日：2020-06-02

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michel J. Abou-Khalil ,  Steven M. Shank ,  Mark Levy ,  Rajendran Krishnasamy ,  John J. Ellis-Monaghan ,  Anthony K. Stamper

IPC: H01L29/786 ,  H01L21/763 ,  H01L29/06 ,  H01L29/423

Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A shallow trench isolation region is formed in a semiconductor substrate. A trench is formed in the shallow trench isolation region, and a body region is formed in the trench of the shallow trench isolation region. The body region is comprised of a polycrystalline semiconductor material.

公开(公告)号：US20220254715A1

公开(公告)日：2022-08-11

申请号：US17169947

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Anthony K. Stamper ,  Steven M. Shank ,  Venkata N. R. Vanukuru

IPC: H01L23/522 ,  H01L23/528 ,  H01L21/768

Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure, including a device layer including a device on a substrate. A local interconnect layer is over the device layer, and includes a first dielectric material over the substrate. The first dielectric material has a first effective dielectric constant. A second dielectric material is over the device and adjacent the first dielectric material. The second dielectric material has a second effective dielectric constant less than the first effective dielectric constant.