公开(公告)号：US06924455B1

公开(公告)日：2005-08-02

申请号：US09774165

申请日：2001-01-26

申请人： Xing Chen ,  Donald K. Smith ,  William M. Holber

发明人： Xing Chen ,  Donald K. Smith ,  William M. Holber

IPC分类号： H01J27/16 ,  H01J37/32 ,  B23K10/00

CPC分类号： H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

摘要： A material processing apparatus having an integrated toroidal plasma source is described. The material processing apparatus includes a plasma chamber that comprises a portion of an outer surface of a process chamber. A transformer having a magnetic core surrounds a portion of the plasma chamber. The transformer has a primary winding. A solid state AC switching power supply comprising one or more switching semiconductor devices is coupled to a voltage supply and has an output that is coupled to the primary winding. The solid state AC switching power supply drives an AC current in the primary winding that induces an AC potential inside the chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas.

摘要翻译： 描述了具有集成环形等离子体源的材料处理装置。 材料处理装置包括等离子体室，其包括处理室的外表面的一部分。 具有磁芯的变压器包围等离子体室的一部分。 变压器有一个初级绕组。 包括一个或多个开关半导体器件的固态AC开关电源耦合到电压源并具有耦合到初级绕组的输出。 固态交流开关电源驱动初级绕组中的交流电流，其在室内引起AC电位，其直接形成环形等离子体，其完成变压器的次级电路并解离气体。

公开(公告)号：US06907167B2

公开(公告)日：2005-06-14

申请号：US09765544

申请日：2001-01-19

申请人： Hwan J. Jeong ,  Xing Chen

发明人： Hwan J. Jeong ,  Xing Chen

IPC分类号： H04J14/02 ,  G20B6/42

CPC分类号： H04J14/02 ,  G02B6/2934 ,  G02B6/29349 ,  G02B6/29353 ,  G02B6/29358 ,  G02B6/29386 ,  H04J14/0208 ,  H04J14/0213

摘要： An optical interleaver is described, comprising a splitting element for splitting an incident beam into a first optical signal directed along a first path and a second optical signal directed along a second path, a first resonant element positioned along the first path, a second resonant element positioned along the second path, and a combining element positioned to receive and to interferometrically combine the outputs of the first and second resonant to produce the output signal. The optical interleaver may be implemented using a free-space configuration using a beamsplitter and a plurality of resonant cavities such as asymmetric Fabry-Perot resonators or Michelson-Gires-Tournois resonators. In an alternative preferred embodiment, the optical interleaver may be implemented in a Mach-Zender-style configuration using couplers and fiber ring resonators.

摘要翻译： 描述了一种光学交织器，其包括用于将入射光束分成沿着第一路径定向的第一光信号和沿着第二路径引导的第二光信号的分离元件，沿着第一路径定位的第一谐振元件，第二谐振元件 以及组合元件，其被定位成接收和干涉地组合第一和第二谐振的输出以产生输出信号。 光交错器可以使用使用分束器和多个谐振腔的自由空间配置来实现，例如非对称法布里 - 珀罗谐振器或迈克尔逊 - 雷尔 - 波尔诺斯谐振器。 在替代的优选实施例中，光交错器可以使用耦合器和光纤环形谐振器以马赫 - 祖德式配置来实现。

公开(公告)号：US06734967B1

公开(公告)日：2004-05-11

申请号：US09248876

申请日：1999-02-11

申请人： Timothy R. Piwonka-Corle ,  Karen F. Scoffone ,  Xing Chen ,  Lloyd J. Lacomb, Jr. ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

发明人： Timothy R. Piwonka-Corle ,  Karen F. Scoffone ,  Xing Chen ,  Lloyd J. Lacomb, Jr. ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

IPC分类号： G01N2121

CPC分类号： G01N21/211

摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).

摘要翻译： 使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。 该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。 优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点 并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。 聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。 一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。 在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。 椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道 从样品）。

公开(公告)号：US06559408B2

公开(公告)日：2003-05-06

申请号：US10143061

申请日：2002-05-10

申请人： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

发明人： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

IPC分类号： B23K1000

CPC分类号： H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

摘要： An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.

公开(公告)号：US06388226B1

公开(公告)日：2002-05-14

申请号：US09502087

申请日：2000-02-10

申请人： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

发明人： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

IPC分类号： B23K1000

CPC分类号： H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

摘要： An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

摘要翻译： 改进的环形低场等离子体源允许在比现有技术的等离子体源允许的更宽的气体条件范围内等离子体点火。 通过根据对电源的负载自动调节输送到等离子体的功率来提高等离子体源的功率效率。 等离子体源可以在比现有技术的等离子体源允许的更宽的压力范围内操作。 可以操作等离子体源，以便增加来自源的原子物质的输出。 可以操作等离子体源以增加有机材料的蚀刻速率。 通过将等离子体源转换成可擦洗的产品，等离子体源可以有效地从废气流中去除有害气体化合物。

公开(公告)号：US10022676B2

公开(公告)日：2018-07-17

申请号：US15000801

申请日：2016-01-19

申请人： Xing Chen ,  Patricia Ignacio-De Leon ,  Emily Jane Rabe ,  Meltem Urgun-Demirtas ,  Richard W. Brotzman

发明人： Xing Chen ,  Patricia Ignacio-De Leon ,  Emily Jane Rabe ,  Meltem Urgun-Demirtas ,  Richard W. Brotzman

IPC分类号： B01D69/04 ,  B01D67/00 ,  B01D71/56 ,  B01D71/02

摘要： The invention provides a membrane comprising tubes extending through a polymer, wherein substantially all of the tubes are parallel with each other. Also provided is a method for producing a membrane, the method comprising: placing tubes on a substrate, subjecting the tubes to a magnetic field for a time and at a magnetic field strength to cause the tubes to align parallel with each other while simultaneously causing depending ends of the tubes to embed within the substrate; applying polymer to the tubes and substrate in an amount to affix the tubes relative to each other and relative to the substrate, and applying an etchant that cleaves a specific type of the bonds within the polymer to unblock the upstream ends of the nanotubes.

公开(公告)号：US09275839B2

公开(公告)日：2016-03-01

申请号：US12738314

申请日：2007-10-19

申请人： Xing Chen ,  Andrew Cowe

发明人： Xing Chen ,  Andrew Cowe

IPC分类号： H01J37/32

CPC分类号： H01J37/32357 ,  H01J37/3244 ,  H01J37/32449

摘要： A plasma chamber for activating a process gas, including at least four legs forming a toroidal plasma channel, each leg having a cross-sectional area, and an outlet formed on one leg, the outlet having a greater cross-sectional area than the cross-sectional area of the other legs. The plasma chamber further includes an inlet for receiving the process gas and a plenum for introducing the process gas over a broad area of the leg opposing the outlet to reduce localized high plasma impedance and gas flow instability, wherein the leg opposing the outlet defines a plurality of holes for providing a helical gas rotation in the plasma channel.

摘要翻译： 一种用于激活处理气体的等离子体室，包括形成环形等离子体通道的至少四条腿，每条腿具有横截面积，以及形成在一条腿上的出口，该出口具有比截面积更大的横截面面积， 其他腿的截面积。 等离子体室还包括用于接收处理气体的入口和用于将处理气体引导到与出口相对的腿的宽阔区域上以减少局部高等离子体阻抗和气流不稳定性的集气室，其中与出口相对的腿限定多个 的孔用于在等离子体通道中提供螺旋形气体旋转。

公开(公告)号：US08888982B2

公开(公告)日：2014-11-18

申请号：US12794470

申请日：2010-06-04

申请人： Xing Chen ,  Chengxiang Ji ,  Chiu-Ying Tai

发明人： Xing Chen ,  Chengxiang Ji ,  Chiu-Ying Tai

IPC分类号： C23C28/00 ,  C25D11/04 ,  C25D11/16 ,  C25D11/02 ,  H01J37/32 ,  H01J37/16 ,  C25D5/48

CPC分类号： C25D11/04 ,  C23C28/321 ,  C25D5/48 ,  C25D11/026 ,  C25D11/16 ,  H01J37/16 ,  H01J37/32357 ,  H01J37/32431 ,  H01J37/32467

摘要： A method for creating an oxide layer having a reduced copper concentration over a surface of an object comprising aluminum and copper for use in a semiconductor processing system. The oxide layer produced using a plasma electrolytic oxidation process has a reduced copper peak concentration, which decreases a risk of copper contamination, and includes magnesium oxides that can be converted to magnesium halide upon exposure to an excited halogen-comprising gas or halogen-comprising plasma to increase the erosion/corrosion resistance of the oxide layer.

摘要翻译： 一种在半导体处理系统中用于产生包含铝和铜的物体表面上的铜浓度降低的氧化物层的方法。 使用等离子体电解氧化法生产的氧化物层具有降低的铜峰浓度，这降低了铜污染的风险，并且包括在暴露于含激发的含卤素气体或含卤素的等离子体时可转化为卤化镁的氧化镁 以增加氧化物层的侵蚀/耐腐蚀性。

公开(公告)号：US20130146225A1

公开(公告)日：2013-06-13

申请号：US13314347

申请日：2011-12-08

申请人： Xing Chen ,  Youfan Gu ,  Chengxiang Ji ,  Paul Ashby Loomis ,  Ilya Pokidov ,  Kevin Wayne Wenzel

发明人： Xing Chen ,  Youfan Gu ,  Chengxiang Ji ,  Paul Ashby Loomis ,  Ilya Pokidov ,  Kevin Wayne Wenzel

IPC分类号： B44C1/22 ,  F16L9/00

CPC分类号： H01J37/32449 ,  C23C16/452 ,  H01J37/32495

摘要： A plasma chamber for use with a reactive gas source that includes a first conduit comprising a wall, an inlet, an outlet, an inner and outer surface, and a plurality of openings through the wall, the inlet receives a first gas for generating a reactive gas in the first conduit with a plasma formed in the first conduit. The plasma chamber also includes a second conduit that includes a wall, an inlet, and an inner surface. The first conduit is disposed in the second conduit defining a channel between the outer surface of the first conduit and the inner surface of the second conduit. A second gas provided to the inlet of the second conduit flows along the channel and through the plurality of openings of the wall of the first conduit into the first conduit to surround the reactive gas and plasma in the first conduit.

摘要翻译： 一种与反应性气体源一起使用的等离子体室，其包括第一导管，其包括壁，入口，出口，内部和外部表面以及穿过壁的多个开口，所述入口容纳用于产生反应性的第一气体 第一导管中的气体在第一导管中形成等离子体。 等离子体室还包括第二导管，其包括壁，入口和内表面。 第一导管设置在第二导管中，限定在第一导管的外表面和第二导管的内表面之间的通道。 设置到第二导管入口的第二气体沿着通道流动并且穿过第一导管的壁的多个开口进入第一导管，以围绕第一导管中的反应气体和等离子体。

公开(公告)号：US08416568B2

公开(公告)日：2013-04-09

申请号：US12651116

申请日：2009-12-31

申请人： Ping Tian ,  Xiaosong Xia ,  Xing Chen ,  Zhifeng Xin

发明人： Ping Tian ,  Xiaosong Xia ,  Xing Chen ,  Zhifeng Xin

IPC分类号： G06F1/16

CPC分类号： G06F1/1632 ,  G06F1/1626

摘要： The present invention provides a removable portable computer device. In an embodiment, the portable computer device includes: a flat panel computer; a base; a back plate; a first connection structure through which the base is connected with the back plate; a second connection structure through which the back plate is connected with the flat panel computer. The flat panel computer is removably connected onto the back plate through the second connection structure. In the present invention, the flat panel computer is removably mounted on the back plate through the second connection structure. When the computer is required to be used at other location and a mass of keyboard input is not needed, it only requires to take off the flat panel computer from the back plate so as to easily carry the computer from one location to another location for use, thus the portability is greatly increased.

摘要翻译： 本发明提供了一种可移动便携式计算机设备。 在一个实施例中，便携式计算机设备包括：平板计算机; 一个基地 背板 第一连接结构，底座与背板连接; 第二连接结构，背板与平板计算机连接。 平板计算机通过第二连接结构可拆卸地连接到背板上。 在本发明中，平板计算机通过第二连接结构可拆卸地安装在背板上。 当需要在其他位置使用计算机并且不需要大量的键盘输入时，仅需要从背板上取下平板计算机，以便将计算机从一个位置轻松携带到另一个位置以供使用 ，因此可携带性大大提高。