摘要:
A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.
摘要:
A processing apparatus for performing a process on a surface of an object to be processed by applying a high frequency power to an electrode installed in an airtight processing chamber to convert a processing gas introduced therein into a plasma, includes a thermal transfer gas feed pathway for supplying a thermal transfer gas for controlling a temperature of the object to be processed to a minute space between the object to be processed and a holding unit installed on the electrode for attracting and holding the object to be processed through an inner portion of an insulating member disposed under the electrode. A portion of the thermal transfer gas feed pathway, which passes through the inner portion of the insulating member, is formed in a zigzag shape or a spiral shape with respect to a normal direction of a holding surface of the holding unit.
摘要:
An upper electrode for use in generating a plasma of a processing gas includes a cooling block having a coolant path for circulating a coolant therethrough and one or more through holes for passing the processing gas therethrough, an electrode plate having one or more injection openings for injecting the processing gas toward the substrate to be processed mounted on the mounting table, and an electrode frame installed at an upper portion of the cooling block and providing a processing gas diffusion gap for diffusing the processing gas between the cooling block and the electrode frame. The electrode plate is detachably fixed to a bottom surface of the cooling block via a thermally conductive member having flexibility.
摘要:
A sheet processing apparatus operating in xerographic printing apparatus employs a single-component magnetic toner. The inventive features of the sheet processing apparatus are directed toward smooth transportation and discharge of printing sheets sent through the printing apparatus, across a sheet transport guide, and through an image fixing and sheet transporting unit which finally discharges the printing sheets. Conductivity of the transport guide is selected by the material of which it is made, specified herein to have superficial resistivity in the range of ten thousand to one hundred million megohms. Charge applied to a printing sheet to electrostatically attract the magnetic toner during the xerographic printing is thus drained by the transport guide gradually enough not to disturb the adhesion of the toner to the sheet, yet rapidly enough to prevent the sheet from being curled upward by electrostatic attraction toward a residual toner container just over the downstream end of the guide, in the optimally compacted arrangement of the various components of the sheet processing and xerographic printing apparatus into a facsimile machine or the like.
摘要:
A forward error correcting transmitter and receiver for preventing the erroneous detection of synchronization is provided in a system in which synchronization of an interleaver circuit and a deinterleaver circuit, to be inserted between a convolutional encoder and a Viterbi decoder, is obtained from a synchronization detecting circuit of the Viterbi decoder. A LFSR (Linear Feedback Shift Register) is used as a row-direction address counter during writing and an up/down counter is used as a column-direction address counter during reading, during the interleaver circuit. In the deinterleaver circuit, an up/down counter is used as the column-direction address counter during writing, and an LFSR is used as the row-direction address counter during reading.
摘要:
A combustor with a burner maintains combustion stability. The burner includes an air hole member 31 with a plurality of air holes 34, 35 provided at an upstream side of the combustion gases generated by a combustion chamber 1. A first fueling nozzle 33 jets fuel in a direction crossing a central axis of the burner towards at least two of air holes 35. A plurality of second fueling nozzles 32, one for each of the remaining air holes 34, are provided to jet the fuel in a direction routed along the burner axis towards the corresponding air hole 34. A fuel header 30 distributes the fuel to the first fueling nozzle 33 and each of the second fueling nozzles 32. A fuel header storage unit 70 shrouds the fuel header 30, fueling nozzles 32, 33, and has an air inflow hole 71.
摘要:
A spectrophotometer is provided, including a light source for irradiating light into a sample gas, a photodetector for detecting light transmitted through the sample gas, an optical filter, and an operation device for calculating a concentration of an actual gas to be measured, contained in the sample gas based on a detection signal value obtained from the photodetector. The operation device calculates the concentration of the actual gas based on function α for associating a concentration of a substitute gas with the actual gas obtained from a reference instrument, function β for associating a relation between a light absorption of the actual gas and the substitute gas in the reference instrument, with a relation between a light absorption of the actual gas the substitute gas in a calibration instrument, and a function indicating a relation between the concentration of the substitute gas and the detection signal value.
摘要:
A projector includes: a display device which modulates illumination light; a projection lens which projects modulation light produced by the display device; and a holding device which has a holder member supporting the display device, a frame member supporting the projection lens and functions as a base capable of supporting the holder member, and an expanding and contracting member disposed between the frame member and the display device, wherein a temperature coefficient for the expansion and contraction of the expanding and contracting member in the direction of the optical axis of the projection lens corresponds to a temperature coefficient for the increase and decrease of the focal distance of the projection lens.
摘要:
A substrate processing apparatus that can prevent formation of deposit in openings of a plurality of gas supply holes leading into a processing chamber. Each of the gas supply holes is configured to uniformly supply a processing gas, whose molecules are turned into clusters, into the processing chamber and to prevent liquefaction of processing gas when the processing gas is supplied into the processing chamber.
摘要:
A projector includes an illumination device that emits an illumination light flux, a color-separating optical system that separates light from the illumination device into plural color lights and directs the color lights to an illuminated area, and a plurality of liquid crystal light valves that have liquid crystal panels. The crystal light valves are configured to maximize light utilization efficiency.