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公开(公告)号：US06787459B2
公开(公告)日：2004-09-07
申请号：US10294700
申请日：2002-11-15
IPC分类号： H01C2144
CPC分类号： G03F1/70 , G03F1/26 , Y10S438/942
摘要： There is provided a method of fabricating a semiconductor device whereby fine patterns are formed with high dimensional accuracy by means of multiple exposures, using a phase shift mask and a trim mask. Phases are periodically assigned to shifter patterns within a given range from patterns generated with the phase shift mask, respectively.
摘要翻译： 提供一种制造半导体器件的方法，由此通过使用相移掩模和修剪掩模，通过多次曝光以高尺寸精度形成精细图案。 相位分别定期地分配给给定范围内的移相器图案，从用相移掩模生成的图案。
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公开(公告)号：US06780781B2
公开(公告)日：2004-08-24
申请号：US10445068
申请日：2003-05-27
IPC分类号： H01L21302
CPC分类号： G03F1/32 , G03F1/56 , G03F7/405 , H01L21/76802 , Y10S438/942 , Y10S438/945 , Y10S438/947 , Y10S438/948 , Y10S438/949
摘要： A method for manufacturing an electronic device is provided. In one example of the method, the method prevents deformation of a resist mask caused by the irradiation of exposure light. The resist mask has a resist as an opaque element, and can afford mask patterns undergoing little change even with an increase in the number of wafers subjected to exposure processing. The resist mask maintains a high dimensional accuracy. A photomask pattern is formed using as an opaque element a resist comprising a base resin and Si incorporated therein or a resist with a metal such as Si incorporated thereby by a silylation process, to improve the resistance to active oxygen. The deformation of a resist opaque pattern in a photomask is prevented. The dimensional accuracy of patterns transferred onto a Si wafer is improved in repeated use of the photomask.
摘要翻译： 提供了一种用于制造电子设备的方法。 在该方法的一个示例中，该方法防止由曝光光的照射引起的抗蚀剂掩模的变形。 抗蚀剂掩模具有作为不透明元素的抗蚀剂，并且即使随着经受曝光处理的晶片数量的增加，也可以提供几乎没有变化的掩模图案。 抗蚀剂掩模保持高尺寸精度。 使用作为不透明元件的抗蚀剂形成光掩模图案，该抗蚀剂包含掺入其中的基础树脂和Si，或通过甲硅烷基化方法掺入其中的诸如Si的金属的抗蚀剂，以提高对活性氧的耐受性。 防止光掩模中的抗蚀剂不透明图案的变形。 转移到Si晶片上的图案的尺寸精度在光掩模的重复使用中得到改善。
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公开(公告)号：US06624876B2
公开(公告)日：2003-09-23
申请号：US09740936
申请日：2000-12-21
申请人： Hiroshi Fukuda , Takashi Ebato
发明人： Hiroshi Fukuda , Takashi Ebato
IPC分类号： G03B2900
CPC分类号： G03B27/73
摘要： A printer prints a calibration pattern on a leading end portion of a roll of recording paper when the recording paper is loaded in the printer. A cutter cuts the leading end portion off the recording sheet so as to make an end edge rectangular to side edges of the recording sheet. A photometric device measures densities of the printed calibration pattern, and a system controller derives correction values for correcting density or color from the measured densities. After the calibration process, an image is printed in an image recording area on the recording paper following the leading end portion. For a printer that prints an image on a cut sheet recording paper, a calibration pattern is printed on a margin outside an image recording area. After densities of the calibration pattern are measured, the margin with the calibration pattern is cut off the recording paper.
摘要翻译： 当记录纸被装载到打印机中时，打印机将标记图案打印在一卷记录纸的前端部分上。 切割器将记录片材的前端部分切割成使得端部边缘与记录片材的侧边缘成矩形。 测光装置测量印刷校准图案的密度，并且系统控制器从测量的密度获得用于校正密度或颜色的校正值。 在校准处理之后，在跟随前端部分的记录纸上的图像记录区域中打印图像。 对于在切纸记录纸上打印图像的打印机，在图像记录区域外的边缘上印刷校准图案。 在测量校准图案的密度之后，用记录纸切断校准图案的余量。
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公开(公告)号：US06533477B2
公开(公告)日：2003-03-18
申请号：US09775625
申请日：2001-02-05
申请人： Hiroshi Fukuda
发明人： Hiroshi Fukuda
IPC分类号： B41J2315
CPC分类号： B41J2/355
摘要： There is disclosed a thermosensitive line printer, wherein a heating element array of a thermal head is pressed on a thermosensitive recording paper at a distance L2 from a nipping position by a pair of conveyer rollers, and is driven to record an image frame line by line from a print starting end, as the recording paper is conveyed by the conveyer rollers in a direction from the thermal head to the conveyer rollers. Based on image data of an upper zone of an image frame that is to be recorded around the distance L2 from the print starting end if the image frame is recorded from its top side, an image analyzer calculates a first estimation value that represents conspicuousness of potential density deviation in the upper zone that could be caused by a thermal deformation of the thermosensitive recording paper at the print starting end if the image frame is recorded from the top side. The image analyzer calculates a second estimation value based on image data of a lower zone that is to be located at the distance L2 from the print starting end if the image frame is recorded from its bottom side. If the first estimation value is smaller than the second estimation value, the image frame is recorded from the top side, and vise versa.
摘要翻译： 公开了一种热敏线打印机，其中热敏头的加热元件阵列通过一对输送辊以与夹持位置L2的距离压在热敏记录纸上，并被驱动以逐行记录图像帧 因为记录纸由输送辊沿从热敏头到输送辊的方向传送。 如果从其顶侧记录图像帧，则基于要从打印开始端到达距离L2周围的图像帧的上部区域的图像数据，图像分析器计算表示潜在的显着性的第一估计值 如果从顶侧记录图像帧，则可能由热敏记录纸在打印开始端的热变形引起的上区域中的浓度偏差。 如果从其底侧记录图像帧，则图像分析器基于将位于距离打印开始端的距离L2的下区域的图像数据来计算第二估计值。 如果第一估计值小于第二估计值，则从顶侧记录图像帧，反之亦然。
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公开(公告)号：US5879576A
公开(公告)日：1999-03-09
申请号：US852291
申请日：1997-05-07
IPC分类号： B05C11/08 , G03F7/30 , H01L21/00 , H01L21/687 , B44C1/22
CPC分类号： H01L21/6715 , B05C11/08 , G03F7/3021 , H01L21/67023 , H01L21/67051 , H01L21/68721 , H01L21/6875 , H01L21/68778
摘要： Method and apparatus for processing substrates through a number of wet treatments. A substrate is set on a substrate rotating means for rotation in a horizontal face-up position, within a housing which is open on its top side. By a treating liquid feed means having a treating liquid feed nozzle member, at least one kind of treating liquid is supplied onto upper surfaces of the substrate being rotated by the substrate rotating means. The treating liquid feed nozzle member is supported on a movable arm for displacement to and from an operative position vertically confronting the substrate and a receded standby position away from the substrate on the substrate rotating means. Located face to face with lower surfaces of the substrate is a nozzle means which supplies a fluid to the lower side of the substrate.
摘要翻译： 通过多次湿处理处理基材的方法和装置。 基板被设置在基板旋转装置上，用于在水平面向上的位置，在其顶侧开口的壳体内旋转。 通过具有处理液体供给喷嘴构件的处理液体进料装置，至少一种处理液体被供给到通过基板旋转装置旋转的基板的上表面上。 处理液体供给喷嘴构件被支撑在可移动臂上，用于位于与基板垂直相对的操作位置和离开基板旋转装置上的基板的后退待机位置。 与基板的下表面面对面地设置有向基板的下侧供给流体的喷嘴装置。
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公开(公告)号：US5832169A
公开(公告)日：1998-11-03
申请号：US869677
申请日：1997-06-05
IPC分类号： G11B20/12 , G11B23/087 , G11B27/036 , G11B27/11 , G11B27/30 , H04N5/7826 , H04N7/00 , H04N7/087 , H04N9/804 , H04N9/806 , H04N9/82 , H04N9/83 , H04N9/885 , H04N9/79
CPC分类号： G11B27/036 , G11B20/1208 , G11B23/08714 , G11B27/11 , G11B27/3027 , G11B27/3063 , H04N7/007 , H04N7/087 , H04N9/8047 , H04N9/8063 , H04N9/8205 , H04N9/8233 , H04N9/832 , G11B2220/655 , H04N5/78266 , H04N9/885
摘要： The television signal recording/reproducing system digitally records and reproduces television signals composed of a luminance signal, a chrominance signal and a resolution compensation signal included in predetermined television scanning lines. The system includes a Y/C separating circuit for separating the luminance signal Y from the chrominance signal C. The luminance signal Y and the resolution compensation signal are combined onto a first signal line. A demodulating circuit demodulates the chrominance signal into a color difference signal and outputs the demodulated signal to a second signal line. A digital video signal recorder digitally process the signals on the first signal line separately from the signals on the second signal line and records the digitally processed signals. In this manner, the resolution compensation signal is processed with the luminance signal and the resolution compensation signal can be accurately recorded.
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公开(公告)号：US5699100A
公开(公告)日：1997-12-16
申请号：US389156
申请日：1995-02-15
申请人： Hiroshi Fukuda , Toshiaki Fujimaki , Kazuo Miyaji
发明人： Hiroshi Fukuda , Toshiaki Fujimaki , Kazuo Miyaji
摘要： A direct color thermal printing method supplements coloring density in a print start area for each color frame of a full-color image to be printed in a three color sequential fashion. A color thermosensitive recording sheet has cyan, magenta and yellow thermosensitive coloring layers formed on a base in this order. The heat sensitivities of the coloring layers become the lower the nearer to the base. Since the coloring density tends to be insufficient in the beginning of printing due to the temperature of the thermal head, supplementary drive pulses for supplementing coloring density is applied to each heating elements in addition to drive pulses for coloring. The supplementary heat energy is predetermined to be lower, the higher the line number from a print start position of the print area, and the higher the heat sensitivities of the thermosensitive coloring layers.
摘要翻译： 直接彩色热印打印法以三色顺序的方式补充要打印的全色图像的每个彩色帧的打印开始区域中的着色浓度。 彩色热敏记录片材依次形成在基底上的青色，品红色和黄色热敏着色层。 着色层的热敏性越低越接近底层。 由于由于热敏头的温度而在印刷开始时着色密度趋于不足，所以除了用于着色的驱动脉冲之外，补充着色浓度的补充驱动脉冲也被施加到每个加热元件。 补充热能被预先设定得较低，从打印区域的打印开始位置起的行数越高，热敏着色层的热敏性越高。
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公开(公告)号：US5680168A
公开(公告)日：1997-10-21
申请号：US665367
申请日：1996-06-17
申请人： Hideyuki Kokubo , Hiroshi Fukuda , Satoshi Ueda
发明人： Hideyuki Kokubo , Hiroshi Fukuda , Satoshi Ueda
CPC分类号： B41M5/34 , B41J11/42 , B41J2/32 , B41J2/38 , B41M2205/04
摘要： A color thermal printing method capable of preventing a color registration shift and shading. A color thermosensitive recording sheet has cyan, magenta, and yellow thermosensitive coloring layers, respectively formed on a base in this order. A thermal sensitivity becomes lower the nearer the thermosensitive coloring layer is to the base. The thermosensitive coloring layer having a lower sensitivity is printed at an earlier timing to make the centers of three color print areas coincident with each other. According to a preferred embodiment, a preliminary pressed running section is provided in front of each print area. In the preliminary pressed running section, a thermal head is preheated and pressed against a color thermosensitive recording sheet. In order to reduce a change in the friction coefficient between the preliminary pressed running section and the print area, the heat energy for the preheating is set to a bias heat energy having a level just under a coloring energy. This bias heat energy having a level just under a coloring energy changes with color so that the preliminary pressed running section is set differently for each color. During the preliminary pressed running operation, a pulse motor for driving a platen drum is driven by the same predetermined number of drive pulses for all three colors.
摘要翻译： 一种能够防止着色偏移和着色的彩色热敏打印方法。 彩色热敏记录片材具有依次形成在基底上的青色，品红色和黄色热敏着色层。 热敏着色层越接近基底时，热敏感度越低。 在较早的时间打印具有较低灵敏度的热敏着色层，以使三个彩色印刷区域的中心彼此一致。 根据优选实施例，在每个打印区域的前面设置预压按行程部。 在初步挤压运行部分中，将热敏头预热并压在彩色热敏记录纸上。 为了减少初步挤压运行部分和打印区域之间的摩擦系数的变化，用于预热的热能被设定为具有刚好在着色能量下的水平的偏置热能。 具有刚好在着色能量下的水平的偏置热能随着颜色而变化，使得对于每种颜色设置不同的初步压榨运行部分。 在预压操作期间，用于驱动压盘滚筒的脉冲电机以对于所有三种颜色的相同的预定数量的驱动脉冲驱动。
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公开(公告)号：US5625394A
公开(公告)日：1997-04-29
申请号：US382494
申请日：1995-02-02
申请人： Hiroshi Fukuda , Kazuo Miyaji
发明人： Hiroshi Fukuda , Kazuo Miyaji
CPC分类号： B41J2/36
摘要： A color thermosensitive recording sheet is formed by sequentially laying a cyan thermosensitive coloring layer, a magenta thermosensitive coloring layer, and a yellow thermosensitive coloring layer on a base. On this color thermosensitive recording sheet, a color image is printed with a thermal head by a three-color image sequential printing method. Each thermosensitive coloring layer develops color by a bias heating and an image heating. A bias heat energy slightly short of the coloring of a thermosensitive coloring layer to be colored and an image heat energy corresponding to the coloring density are used. A blank area is formed in the background of a binary image such as characters and line drawings. A blank frame is formed surrounding a half tone image area, Rearing elements facing such a blank area and a blank frame make a bias heating at a heat energy approximate to the magenta bias heat energy, for printing to the lowermost cyan thermosensitive coloring layer. The heating elements for printing the binary image or the half tone image make the bias heating at the cyan bias heat energy. For a postcard having a half tone image area and a binary image area juxtaposed with the half tone image area, the first several lines of the binary image area are inhibited from being printed for yellow and magenta, and the cyan image is dummy-printed at the magenta bias heat energy, so as to avoid a color registration shift of the binary image.
摘要翻译： 通过在基底上依次铺设青色热敏着色层，品红色热敏着色层和黄色热敏着色层来形成彩色热敏记录纸。 在该彩色热敏记录纸上，通过三色图像顺序打印方法用热敏头打印彩色图像。 每个热敏着色层通过偏置加热和图像加热显色。 使用稍微短于要着色的热敏着色层的着色的偏置热能和对应于着色密度的图像热能。 在二进制图像的背景中形成空白区域，例如字符和线条图。 形成围绕半色调图像区域的空白框架，面向这样的空白区域的元件元件和空白框架以接近品红偏压热能的热能进行偏压加热，以打印到最低的青色热敏着色层。 用于打印二进制图像或半色调图像的加热元件使得偏压加热为青色偏压热能。 对于具有与半色调图像区域并列的半色调图像区域和二进制图像区域的明信片，禁止二进制图像区域的前几行被打印为黄色和品红色，并且将青色图像伪印在 品红偏置热能，以避免二进制图像的颜色对准偏移。
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公开(公告)号：USD377186S
公开(公告)日：1997-01-07
申请号：US50760
申请日：1996-02-26
申请人： Hiroshi Fukuda
设计人： Hiroshi Fukuda
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