中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

47 records (took 0.022 seconds)

    Method and apparatus for partial pressure detection
    41.
    发明授权
    Method and apparatus for partial pressure detection 有权

    公开(公告)号：US10914717B2

    公开(公告)日：2021-02-09

    申请号：US15975473

    申请日：2018-05-09

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01N33/00 ,  G01L21/12 ,  F26B25/22 ,  F26B5/06

    Abstract: A partial pressure detector and methods of detecting a partial pressure are provided, in which a thermal conductivity gauge, such as a Pirani gauge, is configured to sense a pressure of a mixture of gases within a vacuum chamber. An input of the partial pressure detector is configured to receive a total pressure reading from a species-independent pressure sensor of the mixture of gases in the vacuum chamber, and a controller configured to provide an output representing an amount of a species of gas in the vacuum chamber as a function of the pressure as sensed by the thermal conductivity gauge and the received total pressure reading. The controller has a resolution, and a range of the resolution is scaled to a range of expected partial pressures of the species. The output can be a partial pressure or a weighted partial pressure of the gas species.

    END POINT DETECTION FOR LYOPHILIZATION
    42.
    发明申请
    END POINT DETECTION FOR LYOPHILIZATION 审中-公开

    公开(公告)号：US20180306763A1

    公开(公告)日：2018-10-25

    申请号：US15952482

    申请日：2018-04-13

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker ,  David W. Kelly ,  Philip D. Acomb

    IPC: G01N33/15

    CPC classification number: G01N33/15 ,  F26B5/06 ,  F26B25/22

    Abstract: Methods and systems for endpoint detection of lyophilization processes are provided. A method for detecting an endpoint in a lyophilization process includes monitoring a total pressure of gases within a chamber containing a sample undergoing lyophilization and controlling a mass rate of flow of inert gas delivered to the chamber to replace water vapor removed from the chamber. The method further includes determining that sufficient water has been removed from the chamber based on total pressure and mass flow rate of inert gas being delivered.

    Ionization gauge with operational parameters and geometry designed for high pressure operation
    44.
    发明授权
    Ionization gauge with operational parameters and geometry designed for high pressure operation 有权
    具有操作参数和几何设计用于高压操作的电离计

    公开(公告)号：US09404827B2

    公开(公告)日：2016-08-02

    申请号：US14174386

    申请日：2014-02-06

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

    Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION
    46.
    发明申请
    IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 有权
    用于高压运行的离子化仪

    公开(公告)号：US20150300904A1

    公开(公告)日：2015-10-22

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L19/06 ,  H01J41/02 ,  H01J1/52 ,  G01L21/30

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

Patent Agency Ranking