Method of manufacturing semiconductor light emitting device
    42.
    发明授权
    Method of manufacturing semiconductor light emitting device 有权
    制造半导体发光器件的方法

    公开(公告)号:US08859314B2

    公开(公告)日:2014-10-14

    申请号:US13523571

    申请日:2012-06-14

    IPC分类号: H01L33/32 H01L33/00

    摘要: There is provided a method of manufacturing a semiconductor light emitting device, the method including: sequentially growing a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer on a semiconductor growth substrate to form a light emitting part; forming a support part on the second conductivity type semiconductor layer to be coupled to the light emitting part; separating the semiconductor growth substrate from the light emitting part; and applying an etching gas to the semiconductor growth substrate to remove a residue of the first conductivity type semiconductor layer from a surface of the semiconductor growth substrate.

    摘要翻译: 提供一种制造半导体发光器件的方法,该方法包括:在半导体生长衬底上依次生长第一导电类型半导体层,有源层和第二导电类型半导体层,以形成发光部分; 在要耦合到所述发光部分的所述第二导电类型半导体层上形成支撑部分; 将半导体生长衬底与发光部分分离; 以及向所述半导体生长衬底施加蚀刻气体以从所述半导体生长衬底的表面去除所述第一导电类型半导体层的残留物。

    MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME
    46.
    发明申请
    MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME 有权
    具有纳米尺寸的多个锥形结构及其制备方法

    公开(公告)号:US20100136490A1

    公开(公告)日:2010-06-03

    申请号:US12245940

    申请日:2008-10-06

    IPC分类号: G03F7/20

    摘要: Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.

    摘要翻译: 提供了具有通过阳极氧化制备的纳米尺寸的孔的多尺度悬臂结构及其制备方法。 使用阳极氧化和电抛光制备多尺度悬臂结构,使得制造工艺简单并且制造成本便宜。 此外,多尺度悬臂结构具有在其内部具有多个纳米尺寸的孔的多孔结构,因此可以使悬臂结构的表面积最大化。 因此,当传感器中使用悬臂结构时,传感器可以提高灵敏度和选择性。

    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD
    48.
    发明申请
    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD 审中-公开
    制备具有高稳定性的聚合物致动器的方法和由该方法制备的聚合物致动器

    公开(公告)号:US20080107906A1

    公开(公告)日:2008-05-08

    申请号:US11856484

    申请日:2007-09-17

    IPC分类号: B32B27/06 B05D5/12 B32B15/08

    摘要: Provided are a method for preparing polymer actuators with high stability and polymer actuators prepared by the method, and more specifically, to a method for preparing polymer actuators with high stability that use low power, are extremely thin, and can be substituted in a motor of a camera module, and polymer actuators prepared by the method. The method includes the steps of: preparing an Ionic Polymer Metal Composite (IPMC) in which metal electrodes are plated on both surfaces of a ionic polymer film; removing water from the ionic polymer film of the IPMC; and expanding the IPMC in a polar solvent that has a higher boiling point and a lower freezing point than water.

    摘要翻译: 提供一种制备具有高稳定性的聚合物致动器和通过该方法制备的聚合物致动器的方法,更具体地说,涉及一种制备具有高功率,非常薄的高稳定性的聚合物致动器的方法,并且可以在 相机模块和通过该方法制备的聚合物致动器。 该方法包括以下步骤:制备在离子聚合物膜的两个表面上镀金属电极的离子聚合物金属复合物(IPMC); 从IPMC的离子聚合物膜中除去水分; 并在具有比水更高的沸点和更低的凝固点的极性溶剂中扩展IPMC。

    Microelectromechanical system (MEMS) variable optical attenuator
    50.
    发明授权
    Microelectromechanical system (MEMS) variable optical attenuator 失效
    微机电系统(MEMS)可变光衰减器

    公开(公告)号:US06901204B2

    公开(公告)日:2005-05-31

    申请号:US10610756

    申请日:2003-07-02

    摘要: Disclosed is an MEMS variable optical attenuator comprising a substrate having a planar surface, optical fibers having an optical signal transmitting end and an optical signal receiving end, respectively, coaxially arranged on the substrate, a micro-electric actuator arranged on the substrate for providing a driving stroke along a direction perpendicular to an optical axis of the optical beam, at least one lever structure arranged on the substrate for receiving the driving stroke of the micro-electric actuator at a first end thereof and transferring an amplified displacement distance to an optical shutter through a second end thereof, an optical shutter arranged on the substrate and connected to the second end of the lever structure so as to be moved by the amplified displacement distance, thereby being displaced to an attenuation position of the optical beam.

    摘要翻译: 公开了一种MEMS可变光衰减器,其包括具有平坦表面的基板,具有光信号发射端的光纤和分别同轴地布置在基板上的光信号接收端,布置在基板上的微电致动器,用于提供 沿着与所述光束的光轴垂直的方向驱动行程;至少一个杠杆结构,布置在所述基板上,用于在其第一端处接收所述微型致动器的驱动行程,并将放大的位移距离传送到光学快门 通过其第二端,设置在基板上并连接到杠杆结构的第二端的光闸,以便被放大的位移距离移动,从而被移位到光束的衰减位置。