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公开(公告)号：US20060066419A1
公开(公告)日：2006-03-30
申请号：US11236861
申请日：2005-09-28
申请人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
发明人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
IPC分类号： H03H9/70
CPC分类号： H03H9/564 , H03H7/18 , H03H7/46 , H03H9/0571 , H03H9/706
摘要： A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.
摘要翻译： 双工器包括：第一和第二滤波器，包括以梯形布置的薄膜体声共振器（FBAR）; 提供在公共端子与第一和第二滤波器之间的第一和第二集成无源器件（IPD）; 以及其上安装有第一和第二滤光器以及第一和第二IPD的基板。 衬底包括实现连接在第一和第二滤波器和地之间的电感的导电图案。 第一和第二IPD包括连接到第一和第二滤波器的电感器。
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公开(公告)号：US08847700B2
公开(公告)日：2014-09-30
申请号：US13565173
申请日：2012-08-02
申请人： Motoaki Hara , Takeshi Sakashita , Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Masanori Ueda
发明人： Motoaki Hara , Takeshi Sakashita , Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Masanori Ueda
CPC分类号： H03H9/725 , H03H9/0023 , H03H9/0576 , H03H9/132 , H03H9/605 , H03H9/6483 , H03H9/706
摘要： The filter includes one or more series resonators and one or more parallel resonators. An inductance is connected in series to at least a parallel resonator of the parallel resonators, and a antiresonance frequency of the parallel resonator to which the inductance is connected in series is equal to or higher than that of the series resonators. The duplexer, the communication module and the communication device are provided with the filter.
摘要翻译： 滤波器包括一个或多个串联谐振器和一个或多个并联谐振器。 电感与并联谐振器的至少并联谐振器串联连接，电感串联连接的并联谐振器的反谐振频率等于或高于串联谐振器的并联谐振器的反谐振频率。 双工器，通信模块和通信设备设有过滤器。
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公开(公告)号：US09184725B2
公开(公告)日：2015-11-10
申请号：US13556865
申请日：2012-07-24
IPC分类号： H03H9/70 , H03H9/54 , H03H9/02 , H03H9/13 , H03H9/17 , H03H3/04 , H03H9/56 , H03H9/58 , H03H3/02
CPC分类号： H03H9/02102 , H03H3/04 , H03H9/02118 , H03H9/02157 , H03H9/131 , H03H9/132 , H03H9/173 , H03H9/175 , H03H9/564 , H03H9/582 , H03H9/706 , H03H2003/021 , H03H2003/0407 , H03H2003/0442
摘要： An acoustic wave device includes: a substrate; a lower electrode formed on the substrate; at least two piezoelectric films formed on the lower electrode; an insulating film located between the at least two piezoelectric films; and an upper electrode formed on the at least two piezoelectric films, wherein an outer periphery of an uppermost piezoelectric film out of the at least two piezoelectric films in a region in which the lower electrode and the upper electrode face each other is positioned further in than an outer periphery of the upper electrode.
摘要翻译： 声波装置包括：基板; 形成在所述基板上的下电极; 形成在下电极上的至少两个压电膜; 位于所述至少两个压电膜之间的绝缘膜; 以及形成在所述至少两个压电膜上的上电极，其中所述至少两个压电膜中的最下压电膜的外周在所述下电极和所述上电极彼此面对的区域中进一步位于 上电极的外周。
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公开(公告)号：US07211931B2
公开(公告)日：2007-05-01
申请号：US10966035
申请日：2004-10-18
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
IPC分类号： H01L41/08
CPC分类号： H03H9/174 , H03H9/02133 , H03H9/132 , H03H9/564 , H03H9/568
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1
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公开(公告)号：USRE41813E1
公开(公告)日：2010-10-12
申请号：US12276318
申请日：2008-11-22
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
IPC分类号： H01L41/08
CPC分类号： H03H9/174 , H03H9/02133 , H03H9/132 , H03H9/564 , H03H9/568
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1
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公开(公告)号：US20050099094A1
公开(公告)日：2005-05-12
申请号：US10966035
申请日：2004-10-18
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Masafumi Iwaki , Tsutomu Miyashita
IPC分类号： H01L41/09 , H01L29/82 , H01L41/08 , H01L41/187 , H03H9/13 , H03H9/15 , H03H9/17 , H03H9/54 , H03H9/56 , H03H9/58
CPC分类号： H03H9/174 , H03H9/02133 , H03H9/132 , H03H9/564 , H03H9/568
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1
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公开(公告)号：US09013250B2
公开(公告)日：2015-04-21
申请号：US13362753
申请日：2012-01-31
CPC分类号： H03H9/02086 , H03H3/04 , H03H9/02157 , H03H9/173 , H03H9/582 , H03H2003/021 , H03H2003/0442 , H03H2003/045 , H03H2003/0471
摘要： An acoustic wave device including: a substrate; a piezoelectric film formed on the substrate; an lower electrode provided on a first surface of the piezoelectric film; an upper electrode provided on a second surface of the piezoelectric film opposite to the first surface; and a mass loading film having a first pattern and a second pattern in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the first pattern having portions and the second pattern having portions interlinking the portions of the first pattern.
摘要翻译： 一种声波装置，包括：基板; 形成在基板上的压电膜; 设置在所述压电膜的第一表面上的下电极; 设置在与第一表面相对的压电膜的第二表面上的上电极; 以及在下部电极和上部电极通过压电膜彼此面对的共振部中具有第一图案和第二图案的质量加载膜，第一图案具有部分，第二图案具有将部分 第一种模式
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公开(公告)号：US08841819B2
公开(公告)日：2014-09-23
申请号：US13240407
申请日：2011-09-22
摘要： An acoustic wave device includes: a first piezoelectric thin film resonator including a first lower electrode, a first upper electrode and a first piezoelectric film sandwiched between the first lower and upper electrodes; a decoupler film provided on the first upper electrode; and a second piezoelectric thin film resonator provided on the decoupler film and including a second lower electrode, a second upper electrode and a second piezoelectric film sandwiched between the second lower and upper electrodes, wherein the first piezoelectric film and the second piezoelectric film comprise aluminum nitride and include an element increasing a piezoelectric constant of the aluminum nitride.
摘要翻译： 声波装置包括：第一压电薄膜谐振器，包括第一下电极，第一上电极和夹在第一下电极和上电极之间的第一压电薄膜; 设置在第一上电极上的去耦膜; 以及第二压电薄膜谐振器，其设置在所述去耦膜上并且包括夹在所述第二下电极和上电极之间的第二下电极，第二上电极和第二压电薄膜，其中所述第一压电薄膜和所述第二压电薄膜包括氮化铝 并且包括增加氮化铝的压电常数的元素。
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49.发明授权Thin-film piezoelectric resonator, band-pass filter and method of making thin-film piezoelectric resonator 有权薄膜压电谐振器，带通滤波器和制造薄膜压电谐振器的方法公开(公告)号：US06734763B2
公开(公告)日：2004-05-11
申请号：US10117219
申请日：2002-04-08
IPC分类号： H03H900
摘要： A thin-film piezo-resonator includes a silicon substrate and a resonator assembly. The substrate is formed with a cavity or through-hole which is opened in the upper and the lower surfaces of the substrate. The resonator assembly, disposed at a location corresponding to the cavity, is composed of a first electrode contacting the upper surface of the substrate, a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer. The cavity has a side surface extending in a substantially perpendicular direction to the first surface.
摘要翻译： 薄膜压电谐振器包括硅衬底和谐振器组件。 衬底形成有在衬底的上表面和下表面中打开的空腔或通孔。 设置在与空腔对应的位置处的谐振器组件由与基板的上表面接触的第一电极，形成在第一电极上的压电层和形成在压电层上的第二电极组成。 空腔具有在与第一表面大致垂直的方向上延伸的侧表面。
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公开(公告)号：US06949990B2
公开(公告)日：2005-09-27
申请号：US10665209
申请日：2003-09-22
CPC分类号： H03H9/0547 , H03H9/0523 , H03H9/564 , H03H9/568
摘要： A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.
摘要翻译： 滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。 在该过滤器装置中，过滤元件和封装通过凸块彼此电连接。 该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。 滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分，以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。 在该结构中，形成有传输路径的电感与压电薄膜谐振器串联连接。
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