摘要:
An object of the present invention is to provide a TiO2-containing quartz glass substrate which, when used as a mold base for nanoimprint lithography, can form a concavity and convexity pattern having a dimensional variation falling within ±10%. The invention relates to a TiO2-containing quartz glass substrate: in which a coefficient of thermal expansion in the range of from 15 to 35° C. is within ±200 ppb/° C.; a TiO2 concentration is from 4 to 9 wt %; and a TiO2 concentration distribution, in a substrate surface on the side where a transfer pattern is to be formed, is within ±1 wt %.
摘要翻译:本发明的目的是提供一种含TiO 2的石英玻璃基板,其用作纳米压印光刻用的模具基底时,可以形成尺寸变化在±10%以内的凹凸图案。 本发明涉及一种含TiO 2的石英玻璃基板,其中15至35℃范围内的热膨胀系数在±200ppb /℃以内。 TiO 2浓度为4〜9重量%。 并且在要形成转印图案的一侧的基板表面中的TiO 2浓度分布在±1重量%以内。
摘要:
Rims of an opening of each recess form a parallelogram, and comprise two first opening rims that that are parallel to a first direction and two second opening rims that are parallel to a second direction. The first opening rims of each of the recesses that are aligned along the first direction are arranged on a straight line along the first direction. The second opening rims of each of the recesses that are aligned along the second direction are arranged on a straight line along the second direction. The recesses are formed by pressing a wire barrel with a die where a plurality of protruding parts are formed so as to correspond to recesses.
摘要:
Provided is an electrode (1) which has a double structure including Cu or a Cu alloy as an electrode body (2) and a core material (3) made of W, Mo, a W-based alloy, or a Mo-based alloy embedded in a surface of the electrode body (2) which is abutted against a material to be welded, the core material (3) being formed by using W, Mo, the W-based alloy, or the Mo-based alloy which is in the form of a fibrous structure extended by sintering, swaging, and annealing in an electrode axis direction, the fibrous structure having a horizontal cross-sectional average particle diameter of 50 μm or more and an aspect ratio of 1.5 or more. The electrode (1) can be used as an inexpensive electrode obtained by suppressing particle dropping/attrition and defects in electrodes for spot welding, in which heat and pressure are applied repeatedly, stably enhancing durability.
摘要:
The invention is to provide a method in which waviness generated on a glass substrate surface during pre-polishing is removed, thereby finishing the glass substrate so as to have a surface excellent in flatness. The invention relates to a method for finishing a pre-polished glass substrate surface using any one of processing methods selected from the group consisting of ion beam etching, gas cluster ion beam etching and plasma etching, the glass substrate being made of quartz glass that contains a dopant and comprises SiO2 as a main component, and the method for finishing a pre-polished glass substrate surface including: a step of measuring flatness of the glass substrate surface using a shape measurement unit that comprises: a low-coherent light source whose outgoing light flux has a coherence length shorter than twice an optical distance between front and back surfaces of the glass substrate; a path match route part that divides the outgoing light flux from the low-coherent light source into two light fluxes, causes one of the two light fluxes to make a detour by a given optical path length relative to the other light flux, and then recombines the light fluxes into a single light flux and outputs it; and an interference optical system that acquires an interference fringe which carries wave surface information of the glass substrate surface by radiating an outgoing light flux from the low-coherent light source onto a reference surface and the glass substrate surface held on a measurement optical axis and making lights returning from the reference surface and the glass substrate surface interfere with each other; and a step of measuring a concentration distribution of the dopant contained in the glass substrate, wherein processing conditions of the glass substrate surface are set up for each site of the glass substrate based on the results obtained from the step of measuring flatness of the glass substrate and the step of measuring a concentration distribution of the dopant contained in the glass substrate, and the finishing is carried out while keeping an angle formed by a normal line of the glass substrate and an incident beam onto the glass substrate surface at from 30 to 89°.
摘要:
Fixing members (30) fixable to a circuit board (K) by soldering are mounted in a housing (10). Each fixing member (30) is comprised of a main panel (31) and a solder leg (32) projecting sideways from the bottom end of the main portion (31). The solder leg (32) has solder entering holes (37) that open at a side of the solder leg (32) toward the circuit board K and at a side opposite therefrom. Each solder entering hole (37) has a cross-section that gradually increases toward both upper and lower open ends (37a, 37b). A locking portion (38) is formed on each solder entering hole (37) and bulges more inward than both open ends (37a, 37b). The locking portion (38) locks solder (H) that enters the solder entering hole (37).
摘要:
A composite material which comprises an elastomer or vulcanized rubber and particles of a high-density material, such as tungsten, evenly dispersed therein, wherein the contents of the elastomer or vulcanized rubber and the high-density particles are 35 to 50 vol. % and 50 to 65 vol. %, respectively, based on the whole composite material, and the high-density particles have a particle composition comprising 60 to 80 vol. % coarse particles having a particle diameter of 10 to 100 μm, 10 to 20 vol. % medium particles having a particle diameter of 3 to 6 μm, and 10 to 20 vol. % fine particles having a particle diameter of 1 to 2 μm, the spaces among the coarse particles being filled with the medium particles and fine particles. The composite material is excellent in flexibility and processability and is suitable for use as a radiation-shielding sheet material, weight member, vibration-damping material, balancing member, radiating material, and shot material.
摘要:
A connector assembly is provided with a connector (first connector) to be mounted on a circuit board and a connector (second connector) for holding a flat cable flat wire member). When the two connectors are connected with each other, an end portion of the cable is inserted into the connector to bring conductors of the cable into contact with mating terminals. The connector is provided with a plate-shaped holder, and the cable is supported on this holder in such a state as to be displaceable in widthwise direction. On the other hand, the connector is provided with a pair of locking pieces as a positioning portion. When the two connectors are connected with each other, the respective locking pieces directly come into contact with the cable being inserted into the connector from widthwise outer sides, thereby positioning the cable with respect to the connector in widthwise direction. The respective conductors of the flat wire member can be more precisely and securely brought into contact with the mating terminals.
摘要:
In a method of manufacturing a semiconductor device in which a capacitor having a storage electrode is formed on a semiconductor substrate, silicon films are formed on the semiconductor substrate and at the same time first and second endpoint marker layers for dividing the silicon films into three parts in the direction of thickness are formed by using a material different from the material of the silicon films. The silicon films including the first and second endpoint marker layers are etched. The etching depth of the silicon films is controlled based on the type of etched material, thereby forming the storage electrode.
摘要:
A protecting cover B is provided for a miniature terminal, the upper face having a lance 41 formed by shearing. This lance 41 has a pair of protecting members 42 located in the posterior side thereof, the posterior edges of the protecting members 42 being cut so as to form diagonal edges with respect to the direction of extension of the lance 41. In this way, a portion of the bending space formed under the lance 41 is surrounded by the protecting member 42, thereby preventing entry of foreign matter. As a result, bending and entanglement can be prevented. The cover may have a protruding wall 43 to provide additional protection against external forces.