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    Multi-axis magnetic lens for focusing a plurality of charged particle beams
    41.
    发明授权
    Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
    用于聚焦多个带电粒子束的多轴磁性透镜

    公开(公告)号：US09000394B2

    公开(公告)日：2015-04-07

    申请号：US13464261

    申请日：2012-05-04

    Applicant: Weiming Ren ,  Zhongwei Chen

    Inventor： Weiming Ren ,  Zhongwei Chen

    IPC: H01J37/14

    CPC classification number: H01J37/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/3177 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/31774

    Abstract: The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.

    Abstract translation: 本发明提供了在多轴磁性透镜的每个子透镜内部形成特殊的渗透率不连续单元的两种方式，其具有更简单的构造或者在诸如材料选择和机械结构的制造中具有更大的灵活性。 因此，针对各种应用提出了几种类型的多轴磁性透镜。 一种用于一般应用，例如多轴磁聚焦透镜或多轴磁转移透镜，另一种类型是可以要求较低磁动势的多轴磁性非浸没物镜，另一种类型是 可以产生较小像差的多轴磁浸物镜。 由于使用导磁率不连续单位，本发明中的每个多轴磁性透镜也可以被电激励以用作多轴电磁复合透镜，以便进一步降低其像差和/或实现低电压的电子束延迟 对样品照射

    Monochromator for charged particle beam apparatus
    42.
    发明授权
    Monochromator for charged particle beam apparatus 有权
    带电粒子束装置的单色器

    公开(公告)号：US08274046B1

    公开(公告)日：2012-09-25

    申请号：US13111851

    申请日：2011-05-19

    Applicant: Weiming Ren ,  Zhongwei Chen

    Inventor： Weiming Ren ,  Zhongwei Chen

    IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

    CPC classification number: H01J37/28 ,  G21K1/093 ,  H01J37/05 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/153

    Abstract: This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

    Abstract translation: 本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉， 无色分离和单色仪内部。 因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。 对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。 本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

    Carbon based electrocatalysts for fuel cells
    43.
    发明申请
    Carbon based electrocatalysts for fuel cells 失效
    用于燃料电池的碳基电催化剂

    公开(公告)号：US20100159305A1

    公开(公告)日：2010-06-24

    申请号：US11376768

    申请日：2006-03-15

    Applicant: Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

    Inventor： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

    IPC: H01M4/92 ,  H01M4/88

    CPC classification number: H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

    Abstract: Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

    Abstract translation: 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

    Microtomic system and process utilizing electrostatic force to handle sample sections
    49.
    发明授权
    Microtomic system and process utilizing electrostatic force to handle sample sections 有权
    透视系统和利用静电力处理样品部分的工艺

    公开(公告)号：US09464967B2

    公开(公告)日：2016-10-11

    申请号：US14284328

    申请日：2014-05-21

    Applicant: Zhongwei Chen

    Inventor： Zhongwei Chen

    IPC: G01N1/06 ,  G01N1/28 ,  B26D7/18

    CPC classification number: G01N1/06 ,  B26D7/1845 ,  G01N1/286 ,  G01N2001/061 ,  G01N2001/063 ,  G01N2001/066 ,  G01N2001/2873 ,  Y10T83/0448 ,  Y10T83/0453 ,  Y10T83/2066 ,  Y10T83/2096

    Abstract: Provided is a microtomic system and process for the preparation of sections for microscope examination. A cutting edge in the system can cut through a sample block and produce a section one end of which remains attached to the cutting edge. A voltage generator can generate a voltage and apply the voltage between the cutting edge and a section receiver such as a semiconductor chip grid. Through electrostatic force caused by the voltage, another end of the section can anchor to the section receiver. The section is then spread on the receiver. The system is automatable, highly efficient, and does not need liquid to float sample sections, and can therefore maintain the integration of the sample sections.

    Abstract translation: 提供了用于制备用于显微镜检查的切片的显微镜系统和方法。 系统中的切割边缘可以切割出样品块，并产生其一端保持连接到切割边缘的部分。 电压发生器可以产生电压并且在切割边缘和诸如半导体芯片格栅之类的部分接收器之间施加电压。 通过由电压引起的静电力，该部分的另一端可以锚定到部分接收器。 然后将该部分扩展到接收器。 该系统是可自动化的，高效率的，并且不需要液体漂浮样品部分，因此可以保持样品部分的整合。

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