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公开(公告)号：US06910385B2
公开(公告)日：2005-06-28
申请号：US10198410
申请日：2002-07-18
Applicant: Yuri M. Shkel
Inventor： Yuri M. Shkel
Abstract: An apparatus and method directed to a solid-state capacitance sensor for measuring a strain force on a dielectric having a corresponding dielectric constant includes at least one pair of electrodes disposed so as to interface with the dielectric. The sensor preferably includes a measuring circuit coupled to the electrodes to measure a change in the dielectric constant in response to the force. In operation, the change in the dielectric constant is caused by an electrostrictive response of the dielectric upon deformation. Preferably, the response is quantified by computing a change in the dielectric constant based on a measured change in capacitance. The electrodes may be fixed to the dielectric, and the measuring circuit determines the change in the dielectric constant by measuring a change in capacitance between the pair of electrodes and then computing the change in the dielectric constant. The force can then be computed based on both the change in dielectric constant and the electrostriction parameters associated with the dielectric.
Abstract translation: 涉及用于测量具有相应介电常数的电介质上的应变力的固态电容传感器的装置和方法包括设置成与电介质接合的至少一对电极。 传感器优选地包括耦合到电极的测量电路，以测量响应于该力的介电常数的变化。 在操作中，介电常数的变化由电介质在变形时的电致伸缩响应引起。 优选地，通过基于测量的电容变化计算介电常数的变化来量化响应。 电极可以固定到电介质上，并且测量电路通过测量一对电极之间的电容变化，然后计算介电常数的变化来确定介电常数的变化。 然后可以基于介电常数的变化和与电介质相关的电致伸缩参数两者来计算力。
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42.发明授权Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权超晶体金刚石悬臂宽动态范围加速/振动/压力传感器公开(公告)号：US06613601B1
公开(公告)日：2003-09-02
申请号：US10142814
申请日：2002-05-09
Applicant: Alan R. Krauss , Dieter M. Gruen , Michael J. Pellin , Orlando Auciello
Inventor： Alan R. Krauss , Dieter M. Gruen , Michael J. Pellin , Orlando Auciello
IPC: H01L2100
CPC classification number: G01H9/00 , B82Y35/00 , G01D5/30 , G01H11/06 , G01L1/005 , G01L1/044 , G01P15/0888 , G01P15/0894 , G01P15/093 , Y10S977/732 , Y10S977/932
Abstract: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.
Abstract translation: 在一个高灵敏度的超小型传感器中，采用悬臂结构形成的超微晶金刚石（UNCD）元件用于在宽动态范围内测量加速度，冲击，振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用，测量光学或电容测量。 在另一个实施例中，悬臂UNCD元件设置在两个阳极之间，其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件上的小的AC调制电压，并且由于Fowler-Nordheim方程中所施加的电压和阳极 - 阴极间隙距离的对称性，维持指定的所需的阳极电压比V1 / V2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化，可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极，可以精确地独立测量压力，单轴加速度，振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。
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公开(公告)号：US06211558B1
公开(公告)日：2001-04-03
申请号：US08896793
申请日：1997-07-18
Applicant: M. Salleh Ismail , Raffi M. Garabedian
Inventor： M. Salleh Ismail , Raffi M. Garabedian
IPC: H01L2982
Abstract: A surface micro-machined sensor uses a pedestal in a cavity to support a flexible structure and reduce the span of the flexible structure. The reduced span per sense area allows larger sensor areas without permitting forces to permanently deform the flexible structure or cause the structure to touch an opposite wall of the cavity. The flexible structure bonded to the pedestal and an elevated region surrounding the pedestal defines a cavity between the flexible membrane and a lower plane region. Active regions can be formed in the lower plane region for capacitors or transistors. A pedestal can be of various shapes including a circular, ovoid, rectangular or polygonal shape. The lower plane region can be of various shapes including a ring or donut shape, ovoid, rectangular or polygonal shape with an inner dimension corresponding to the outer dimension of the pedestal. The elevated region can be of various shapes with an inner dimension corresponding to the outer dimension of the lower plane region. Alternative embodiments of the invention include cavities containing multiple pedestals which may be concentric. Additionally, a central pedestal may be hollow to increase sensor volume. The device can be a capacitive sensor with plates in the active region and the flexible structure. The device can be a piezoresistive sensor with the flexible structure containing piezoresistive elements. The device can also be a transistor with source, drain, and channel in the active regions of the substrate and the flexible structure containing a gate.
Abstract translation: 表面微加工传感器使用空腔中的基座来支撑柔性结构并减小柔性结构的跨度。 每个感测区域的减小的跨度允许更大的传感器区域，而不允许力使柔性结构永久变形或使结构接触空腔的相对的壁。 结合到基座的柔性结构和围绕基座的升高区域在柔性膜和下平面区域之间限定空腔。 有源区可以形成在用于电容器或晶体管的下平面区域中。 基座可以是各种形状，包括圆形，卵形，矩形或多边形。 下平面区域可以是各种形状，包括环形或环形，卵形，矩形或多边形形状，其内部尺寸对应于基座的外部尺寸。 升高区域可以是具有对应于下平面区域的外部尺寸的内部尺寸的各种形状。 本发明的替代实施例包括包含可以同心的多个基座的空腔。 此外，中央基座可以是中空的，以增加传感器体积。 该器件可以是在有源区域和柔性结构中具有板的电容传感器。 该器件可以是具有包含压阻元件的柔性结构的压阻式传感器。 器件还可以是在衬底的有源区域中的源极，漏极和沟道的晶体管，以及包含栅极的柔性结构。
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44.发明授权
公开(公告)号：US5503034A
公开(公告)日：1996-04-02
申请号：US154025
申请日：1993-11-18
Applicant: Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
Inventor： Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
CPC classification number: G01D5/48 , G01L1/005 , G01L11/00 , G01P15/0894 , H01L2224/45144 , H01L2224/48091 , H01L2924/12032 , H01L2924/181 , H01L2924/3025
Abstract: A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.
Abstract translation: 力传感器包括具有可移动单元的基板，其可响应于所施加的力和加速度之一而移位; 具有根据施加电位发射电子的阴极的电子发射单元; 电子吸收单元，其具有用于捕获从阴极发射的电子的阳极，电子发射单元和电子吸收单元形成在基板的表面上; 以及控制单元，用于根据可移动单元的位移来控制阳极相对于从阴极发射的电子的电子捕获效率。
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公开(公告)号：US5499535A
公开(公告)日：1996-03-19
申请号：US438967
申请日：1995-05-11
Applicant: Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
Inventor： Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
CPC classification number: G01D5/48 , G01L1/005 , G01L11/00 , G01P15/0894 , H01L2224/45144 , H01L2224/48091 , H01L2924/12032 , H01L2924/181 , H01L2924/3025
Abstract: A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.
Abstract translation: 力传感器包括具有可移动单元的基板，其可响应于所施加的力和加速度之一而移位; 具有根据施加电位发射电子的阴极的电子发射单元; 电子吸收单元，其具有用于捕获从阴极发射的电子的阳极，电子发射单元和电子吸收单元形成在基板的表面上; 以及控制单元，用于根据可移动单元的位移来控制阳极相对于从阴极发射的电子的电子捕获效率。
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Patent Agency Ranking
公开(公告)号：US5492011A
公开(公告)日：1996-02-20
申请号：US438973
申请日：1995-05-11
Applicant: Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
Inventor： Akira Amano , Kazuo Matsuzaki , Toshiaki Sakai
CPC classification number: G01D5/48 , G01L1/005 , G01L11/00 , G01P15/0894 , H01L2224/45144 , H01L2224/48091 , H01L2924/12032 , H01L2924/181 , H01L2924/3025
Abstract: A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.
Abstract translation: 力传感器包括具有可移动单元的基板，其可响应于所施加的力和加速度之一而移位; 具有根据施加电位发射电子的阴极的电子发射单元; 电子吸收单元，其具有用于捕获从阴极发射的电子的阳极，电子发射单元和电子吸收单元形成在基板的表面上; 以及控制单元，用于根据可移动单元的位移来控制阳极相对于从阴极发射的电子的电子捕获效率。
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公开(公告)号：US5198740A
公开(公告)日：1993-03-30
申请号：US478266
申请日：1990-02-12
Applicant: Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
Inventor： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
CPC classification number: G01D5/145 , G01B7/003 , G01D5/18 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124
Abstract: Displacement measuring apparatus for measuring the displacement and movement of an object includes an array of sensors having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the disposition of an electrical/magnetic field producing member along the sensor array. The field producing member is disposed to contact and slide over the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the position of the field producing member along the sensor array and thus by the position and movement of the object.
Abstract translation: 用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器阵列和用于产生电输出信号的电路，该电输出信号的值取决于沿着传感器阵列的电场/磁场产生部件的布置。 场产生部件设置成随着要测量其位移的物体移动而接触并滑动在操作表面上。 因此，由电路产生的电输出信号的值取决于场产生部件沿着传感器阵列的位置，并因此取决于物体的位置和移动。
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公开(公告)号：US5016481A
公开(公告)日：1991-05-21
申请号：US580779
申请日：1990-09-11
Applicant: Stephen C. Jacobsen , John E. Wood
Inventor： Stephen C. Jacobsen , John E. Wood
CPC classification number: G01L1/14 , G01L1/005 , G01L1/2293
Abstract: A field-based movement sensor adapted for measuring strain along a certain axis in an object on which the sensor is attached. The sensor includes a substrate having a working surface and formed with a pair of fingers projecting from a first direction, and a third finger projecting from a direction opposite the first direction, to a position between the pair of fingers. The pair of fingers and third finger extend generally perpendicular to the axis along which strain is to be measured, with the pair of fingers being moveable with respect to the third finger along the axis when the strain occurs. An electrically charged element for producing an electric field is disposed on the working surface of the third finger, and a pair of field-effect transistors (FETS) are each disposed on a working surface of a different one of the pair of fingers. As the object is subjected to strain causing the pair of fingers to move relative to the third finger, the variation in the strength of the electric field from the charged elements to the FETS is determined and this provides a measure of the variation in distance between the third finger and the pair of fingers and this, in turn, provides a measure of the strain in the object to which the substrate is attached.
Abstract translation: 一种基于场的运动传感器，适用于测量传感器附着在物体上的特定轴线的应变。 传感器包括具有工作表面并且形成有从第一方向突出的一对手指的基板和从与第一方向相反的方向突出的第三指状物到一对指状物之间的位置。 一对指状物和第三指状物大体上垂直于待测应变的轴线延伸，当应变发生时，一对手指可相对于第三指状物沿轴线移动。 用于产生电场的带电元件设置在第三手指的工作表面上，并且一对场效应晶体管（FETS）分别设置在一对指状物的不同的一个的工作表面上。 当物体受到使一对手指相对于第三指状物移动的应变时，确定从充电元件到FETS的电场强度的变化，并且这提供了 第三手指和一对手指，这又提供了测量衬底附着到的物体中的应变。
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公开(公告)号：US4586576A
公开(公告)日：1986-05-06
申请号：US536891
申请日：1983-09-28
Applicant: Kiyoshi Inoue
Inventor： Kiyoshi Inoue
CPC classification number: G01L1/005 , G01B7/16 , G01D5/2451 , G01G3/12 , Y10S177/05 , Y10S33/01
Abstract: A measuring system using the magnetic scale and a sensing head measures a deformation of a deformable member and/or one or more physical quantities, e.g. a strain and internal stress of, or an external force to, the member, which are functions of the deformation. The magnetic scale comprises a succession of discrete, uniformly spaced scaling units each of which individually consists of a pair of magnetic poles (N, S). The magnetic scale is arranged to be displaceable relative to the magnetic sensing head in response to a deformation of the deformable member so that the magnetic pickup head successively senses the passage of the magnetic scaling units. An output circuit unit is connected to the magnetic head for counting the number of magnetic scaling units sensed corresponding to the deformation and produces an electrical output signal representative thereof, and/or one or more of the above physical quantities.
Abstract translation: 使用磁标尺和感测头的测量系统测量可变形构件的变形和/或一个或多个物理量，例如， 构件的应变和内部应力或外力作为变形的函数。 磁标尺包括一系列离散的，均匀间隔的缩放单元，每个单元分别由一对磁极（N，S）组成。 磁标尺被布置为响应于可变形构件的变形而相对于磁感应头移动，使得磁性拾取头连续地感测磁性缩放单元的通过。 输出电路单元连接到磁头，用于计数对应于变形的感测磁数量单位的数量，并产生代表其的电输出信号，和/或上述物理量中的一个或多个。
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公开(公告)号：US4579006A
公开(公告)日：1986-04-01
申请号：US636214
申请日：1984-07-31
Applicant: Yuji Hosoda , Masakatsu Fijie , Kazuo Honma , Taro Iwamoto , Kohji Kamejima , Yoshio Kojima , Yoshiyuki Nakano
Inventor： Yuji Hosoda , Masakatsu Fijie , Kazuo Honma , Taro Iwamoto , Kohji Kamejima , Yoshio Kojima , Yoshiyuki Nakano
CPC classification number: G12B1/00 , F03G7/06 , G01K7/02 , G01L1/005 , G01L5/0061
Abstract: In force sensing apparatus for a driving device which employs a shape memory alloy, note is taken of the fact that a force to be generated by the shape memory alloy varies depending upon the temperature or resistance and the displacement of the shape memory alloy, and force information on an output of the driving device is detected on the basis of information of the temperature or resistance and the displacment of the shape memory alloy.
Abstract translation: 采用形状记忆合金的驱动装置的力传感装置，注意到由形状记忆合金产生的力根据形状记忆合金的温度或电阻和位移而变化，并且力 基于形状记忆合金的温度或电阻和位移的信息来检测关于驱动装置的输出的信息。
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