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    Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
    42.
    发明授权
    Non-volatile electromechanical field effect devices and circuits using same and methods of forming same 有权
    非易失性机电场效应器件和使用其的电路及其形成方法

    公开(公告)号：US07943464B2

    公开(公告)日：2011-05-17

    申请号：US12554647

    申请日：2009-09-04

    申请人： John E. Berg ,  Claude L. Bertin ,  Thomas Rueckes

    发明人： John E. Berg ,  Claude L. Bertin ,  Thomas Rueckes

    IPC分类号： H01L21/336

    CPC分类号： B82Y10/00 ,  G11C8/10 ,  G11C11/412 ,  G11C11/54 ,  G11C13/025 ,  G11C16/0416 ,  G11C23/00 ,  H01L27/115 ,  Y10S977/733

    摘要： Non-volatile field effect devices and circuits using same. A non-volatile field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. Each of the source, drain, and gate have a corresponding terminal. An electromechanically-deflectable, nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal. The others of the source, drain and gate are directly connected to their corresponding terminals. The nanotube switching element is electromechanically-deflectable in response to electrical stimulation at two control terminals to create one of a non-volatile open and non-volatile closed electrical communication state between the one of the source, drain and gate and its corresponding terminal.

    摘要翻译： 非易失性场效应器件和使用它的电路。 非易失性场效应器件包括在源极和漏极之间具有场可调通道的源极，漏极和栅极。 源极，漏极和栅极中的每一个都具有相应的端子。 电气可偏转的纳米管开关元件电气地定位在源极，漏极和栅极之一及其对应的端子之间。 源极，漏极和栅极中的其他物体直接连接到其相应的端子。 纳米管开关元件响应于在两个控制端子处的电刺激而机电可偏转以产生源极，漏极和栅极之一与其相应的端子之间的非易失性开放和非易失性闭合电连通状态之一。

    APPARATUS AND METHOD
    43.
    发明申请
    APPARATUS AND METHOD 有权
    装置和方法

    公开(公告)号：US20110036994A1

    公开(公告)日：2011-02-17

    申请号：US12676472

    申请日：2008-09-04

    申请人： Cameron Frayling

    发明人： Cameron Frayling

    IPC分类号： G01J1/58 ,  G01N21/65 ,  G01N21/01

    CPC分类号： G01N27/44756 ,  B01L3/5027 ,  G01N21/648 ,  G01N21/65 ,  G01N21/658 ,  G01N27/44721 ,  Y10S977/704 ,  Y10S977/733 ,  Y10S977/781

    摘要： An apparatus for investigating a molecule comprising a channel provided in a substrate, a metallic moiety capable of plasmon resonance which is associated with the channel in a position suitable for the electromagnetic field produced by the metallic moiety to interact with a molecule passing therethrough, means to induce a molecule to pass through the channel, means to induce surface plasmon resonance in the metallic moiety; and means to detect interaction between the electromagnetic field produced by the metallic moiety and a molecule passing through the channel. Methods of investigating molecules are also provided.

    摘要翻译： 一种用于研究包括在基底中提供的通道的分子的装置，能够等离子体共振的金属部分，其与适于由金属部分产生的电磁场的通道相关联的通道与通过其的分子相互作用， 诱导分子通过通道，意味着在金属部分中诱导表面等离子体共振; 以及检测由金属部分产生的电磁场与通过通道的分子之间的相互作用的手段。 还提供了研究分子的方法。

    MEMS process and device
    44.
    发明授权
    MEMS process and device 有权
    MEMS工艺和器件

    公开(公告)号：US07781249B2

    公开(公告)日：2010-08-24

    申请号：US11723514

    申请日：2007-03-20

    申请人： Richard I. Laming ,  Mark Begbie ,  Anthony Traynor

    发明人： Richard I. Laming ,  Mark Begbie ,  Anthony Traynor

    IPC分类号： H01L21/00

    CPC分类号： B81C1/00158 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81C99/004 ,  B81C2201/0109 ,  H04R7/10 ,  H04R7/18 ,  H04R19/005 ,  H04R2307/207 ,  Y10S977/733

    摘要： A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connect the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.

    摘要翻译： 包括柔性膜的MEMS器件，其可响应于由声波产生的压力差而自由移动。 机械地耦合到柔性膜的第一电极，并且一起形成第一电容板。 机械耦合到大致刚性的结构层或背板的第二电极，它们一起形成第二电容板。 在膜的下方提供背部体积。 位于膜下方的第一腔。 介于第一和第二电极之间的是第二腔。 多个排放孔连接第一腔和第二腔。 声孔布置在背板中，以便允许空气分子的自由运动，使得声波可以进入第二腔。 与背容积相关联的第一和第二空腔允许膜响应于通过背板中的声孔进入的声波而移动。

    NON-VOLATILE ELECTROMECHANICAL FIELD EFFECT DEVICES AND CIRCUITS USING SAME AND METHODS OF FORMING SAME
    46.
    发明申请
    NON-VOLATILE ELECTROMECHANICAL FIELD EFFECT DEVICES AND CIRCUITS USING SAME AND METHODS OF FORMING SAME 有权
    非挥发性电磁场效应装置及其使用方法及其形成方法

    公开(公告)号：US20080017888A1

    公开(公告)日：2008-01-24

    申请号：US11860929

    申请日：2007-09-25

    申请人： Claude BERTIN ,  Thomas RUECKES ,  John BERG

    发明人： Claude BERTIN ,  Thomas RUECKES ,  John BERG

    IPC分类号： H01L27/105 ,  H01L29/788

    CPC分类号： B82Y10/00 ,  G11C8/10 ,  G11C11/412 ,  G11C11/54 ,  G11C13/025 ,  G11C16/0416 ,  G11C23/00 ,  H01L27/115 ,  Y10S977/733

    摘要： Non-volatile field effect devices and circuits using same. A non-volatile field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. Each of the source, drain, and gate have a corresponding terminal. An electromechanically-deflectable, nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal. The others of the source, drain and gate are directly connected to their corresponding terminals. The nanotube switching element is electromechanically-deflectable in response to electrical stimulation at two control terminals to create one of a non-volatile open and non-volatile closed electrical communication state between the one of the source, drain and gate and its corresponding terminal.

    摘要翻译： 非易失性场效应器件和使用它的电路。 非易失性场效应器件包括在源极和漏极之间具有场可调通道的源极，漏极和栅极。 源极，漏极和栅极中的每一个都具有相应的端子。 电气可偏转的纳米管开关元件电气地定位在源极，漏极和栅极之一及其对应的端子之间。 源极，漏极和栅极中的其他物体直接连接到其相应的端子。 纳米管开关元件响应于在两个控制端子处的电刺激而机电可偏转以产生源极，漏极和栅极之一与其相应的端子之间的非易失性开放和非易失性闭合电连通状态之一。

    DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT
    49.
    发明申请
    DEVELOPMENT OR REMOVAL OF BLOCK COPOLYMER OR PMMA-b-S-BASED RESIST USING POLAR SUPERCRITICAL SOLVENT 有权
    使用极性超临界溶剂开发或去除嵌段共聚物或PMMA-b-S基电阻

    公开(公告)号：US20060228653A1

    公开(公告)日：2006-10-12

    申请号：US10907688

    申请日：2005-04-12

    申请人： Matthew Colburn ,  Dmitriy Shneyder ,  Shahab Siddiqui

    发明人： Matthew Colburn ,  Dmitriy Shneyder ,  Shahab Siddiqui

    IPC分类号： G03C5/00

    CPC分类号： G03F7/168 ,  G03F7/325 ,  Y10S438/922 ,  Y10S977/733 ,  Y10S977/734

    摘要： Methods of developing or removing a select region of block copolymer films using a polar supercritical solvent to dissolve a select portion are disclosed. In one embodiment, the polar supercritical solvent includes chlorodifluoromethane, which may be exposed to the block copolymer film using supercritical carbon dioxide (CO2) as a carrier or chlorodiflouromethane itself in supercritical form. The invention also includes a method of forming a nano-structure including exposing a polymeric film to a polar supercritical solvent to develop at least a portion of the polymeric film. The invention also includes a method of removing a poly(methyl methacrylate-b-styrene) (PMMA-b-S) based resist using a polar supercritical solvent.

    摘要翻译： 公开了使用极性超临界溶剂显影或除去嵌段共聚物膜的选择区域以溶解选择部分的方法。 在一个实施方案中，极性超临界溶剂包括氯二氟甲烷，其可以使用超临界二氧化碳（CO 2 CO 2）作为载体或氯二氟乙烷本身以超临界形式暴露于嵌段共聚物膜。 本发明还包括形成纳米结构的方法，包括将聚合物膜暴露于极性超临界溶剂以形成至少一部分聚合物膜。 本发明还包括使用极性超临界溶剂除去聚（甲基丙烯酸甲酯-b-苯乙烯）（PMMA-b-S）基抗蚀剂的方法。

    Nanotube device structure and methods of fabrication
    50.
    发明授权
    Nanotube device structure and methods of fabrication 有权
    纳米管器件结构及其制造方法

    公开(公告)号：US07071023B2

    公开(公告)日：2006-07-04

    申请号：US10918181

    申请日：2004-08-13

    申请人： Claude L. Bertin ,  Thomas Rueckes ,  Brent M. Segal

    发明人： Claude L. Bertin ,  Thomas Rueckes ,  Brent M. Segal

    IPC分类号： H01L51/40 ,  H01L21/335 ,  H03H9/00

    CPC分类号： H01L29/0665 ,  B82Y10/00 ,  G11C13/025 ,  G11C23/00 ,  H01H1/0094 ,  H01H1/027 ,  H01H2001/0005 ,  H01L27/28 ,  H01L29/0673 ,  H01L29/73 ,  H01L29/78 ,  H01L51/0048 ,  H01L51/0508 ,  Y10S977/725 ,  Y10S977/733 ,  Y10S977/755 ,  Y10S977/938 ,  Y10T29/49105

    摘要： Nanotube device structures and methods of fabrication. Under one embodiment, a method of forming a nanotube switching element includes forming a first structure having at least one output electrode, forming a conductive article having at least one nanotube, and forming a second structure having at least one output electrode and positioning said second structure in relation to the first structure and the conductive article such that the output electrode of the first structure is opposite the output electrode of the second structure and such that a portion of the conductive article is positioned therebetween. At least one signal electrode is provided in electrical communication with the conductive article having at least one nanotube, and at least one control electrode is provided in relation to the conductive article such that the conductive electrode may control the conductive article to form a channel between the signal electrode and at least one of the output electrodes. The first and second structures each include a respective second output electrode and wherein the second electrodes are positioned opposite each other with the conductive article positioned therebetween. The control electrode and the second control electrode includes an insulator layer on a surface facing the conductive article.

    摘要翻译： 纳米管器件结构和制造方法。 在一个实施例中，形成纳米管切换元件的方法包括形成具有至少一个输出电极的第一结构，形成具有至少一个纳米管的导电制品，并形成具有至少一个输出电极的第二结构，并且将所述第二结构 相对于第一结构和导电制品，使得第一结构的输出电极与第二结构的输出电极相对，并且导电制品的一部分位于它们之间。 提供至少一个信号电极与具有至少一个纳米管的导电制品电连通，并且相对于导电制品提供至少一个控制电极，使得导电电极可以控制导电制品以在导电制品之间形成通道 信号电极和至少一个输出电极。 第一和第二结构各自包括相应的第二输出电极，并且其中第二电极彼此相对定位，导电制品位于它们之间。 控制电极和第二控制电极在面向导电物品的表面上包括绝缘体层。