公开(公告)号：US10928265B2

公开(公告)日：2021-02-23

申请号：US16397436

申请日：2019-04-29

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Clinton L. Percy

IPC: G01L21/34 ,  H01J41/06

Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.

公开(公告)号：US09945749B2

公开(公告)日：2018-04-17

申请号：US14773250

申请日：2013-07-09

Applicant: INFICON GMBH

Inventor： Bernhard Andreaus ,  Rolf Enderes ,  Martin Wuest ,  Oskar Untermarzoner ,  Rudolf Stocker

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).

公开(公告)号：US09671302B2

公开(公告)日：2017-06-06

申请号：US14500820

申请日：2014-09-29

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly

IPC: G01L21/34 ,  H01J9/50 ,  G01L19/06 ,  H01J41/06

CPC classification number: G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

公开(公告)号：US09355825B2

公开(公告)日：2016-05-31

申请号：US13661011

申请日：2012-10-25

Applicant: Peng Liu ,  Duan-Liang Zhou ,  Chun-Hai Zhang ,  Jing Qi ,  Pi-Jin Chen ,  Shou-Shan Fan

Inventor： Peng Liu ,  Duan-Liang Zhou ,  Chun-Hai Zhang ,  Jing Qi ,  Pi-Jin Chen ,  Shou-Shan Fan

IPC: G01L21/34 ,  B82Y10/00 ,  B82Y30/00 ,  H01J41/06

CPC classification number: H01J41/06

Abstract: An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire.

Abstract translation: 电离真空计包括阴极，阳极和离子收集器。 离子收集器部件位于阳极部件的一侧并与阳极部件间隔开。 阴极部件位于阳极部件的另一侧，并且包括从阴极部件向阳极部件延伸的电子发射器。 电子发射体包括至少一个碳纳米管线。

公开(公告)号：US09116065B2

公开(公告)日：2015-08-25

申请号：US14237007

申请日：2012-08-02

Applicant: Bernhard Andreaus

Inventor： Bernhard Andreaus

IPC: G01L21/34 ,  H01J41/06 ,  G01L21/30

CPC classification number: G01L21/30 ,  G01L21/34 ,  H01J41/06

Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).

Abstract translation: 电离真空测量池具有：a）具有用于要测量的真空的测量连接（8）的可抽空壳体（10），b）第一外部和第二内部电极（3,4），其同轴地布置在 与公共轴（7）间隔开，由此在两个电极之间形成测量室（20），测量室与测量连接（8）连通，c）电压源（16），其连接到电极 （3,4），d）用于分析在所述电极（3,4）之间产生的放电电流的电流测量机构（17），以及e）至少一个围绕所述同轴电极（3）的永磁体环（1） 4）布置具有径向指向轴线的磁化方向（13），并且具有围绕永磁体环（1）的软磁轭（2）。

公开(公告)号：US4000457A

公开(公告)日：1976-12-28

申请号：US620004

申请日：1975-10-06

Applicant: Charles D. O'Neal, III

Inventor： Charles D. O'Neal, III

IPC: G01L21/34 ,  H01J41/06 ,  G01N27/00 ,  H01J39/28

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: A cold cathode ionization gauge controller utilizing a periodically varying potential across the gauge tube at higher pressure and substantially constant potential at low pressure provides a wide-range pressure measurement capability from about 10.sup.-.sup.1 to about 10.sup.-.sup.7 torr.

Abstract translation: 在较高压力和基本上恒定的低压下，在计量管上利用周期性变化的电位的冷阴极电离计控制器提供约10 -1至约10 -7 torr的宽范围压力测量能力。

公开(公告)号：US3872377A

公开(公告)日：1975-03-18

申请号：US29653172

申请日：1972-10-11

Applicant: TOKYO SHIBAURA ELECTRIC CO

Inventor： KAGEYAMA KATSUHIRO ,  UTSUNOMIYA SHINHACHI

IPC: H01J41/06 ,  G01N27/62

CPC classification number: H01J41/06

Abstract: A cold cathode ionization gauge is disclosed and includes means for establishing a temporary high electric field and a magnetic field between an anode and a cathode thereof. The temporary application of a high electric field enables a high accuracy vacuum measurement to be made.

Abstract translation: 公开了一种冷阴极电离计，并且包括用于在其阳极和阴极之间建立临时高电场和磁场的装置。 临时应用高电场能够进行高精度的真空测量。

公开(公告)号：US3622870A

公开(公告)日：1971-11-23

申请号：US3622870D

申请日：1969-04-24

Applicant: BENDIX CORP

Inventor： HAMILTON ALLEN R ,  METZGER THOMAS R

IPC: H01J41/06 ,  G01N27/00

CPC classification number: H01J41/06

Abstract: An improved Penning gauge circuit in which the sensitivity and linearity of the response is maintained at pressures in the 10 4 and 10 5 torr range by using a device having nonlinear resistance in series with the sensing head.

公开(公告)号：US3495165A

公开(公告)日：1970-02-10

申请号：US3495165D

申请日：1967-02-13

Applicant: GEN ELECTRIC

Inventor： COBINE JAMES D ,  LAFFERTY JAMES M

IPC: G01R31/327 ,  H01H33/668 ,  H01J9/42 ,  H01J41/06 ,  G01N27/62

CPC classification number: H01H33/668 ,  G01R31/3274 ,  H01J9/42 ,  H01J41/06

公开(公告)号：US3455657A

公开(公告)日：1969-07-15

申请号：US3455657D

申请日：1966-06-09

Applicant: BODENSEEWERK PERKIN ELMER CO

Inventor： JENTZSCH DIETRICH ,  KUHNE KLAUS

IPC: F23M11/04 ,  F23N5/12 ,  G01N30/68 ,  H01J41/06 ,  G01N33/00

CPC classification number: F23M11/045 ,  F23N5/12 ,  G01N30/68 ,  H01J41/06