公开(公告)号：US07335896B2

公开(公告)日：2008-02-26

申请号：US11190043

申请日：2005-07-26

申请人： Wolfgang Pilz ,  Lothar Bischoff

发明人： Wolfgang Pilz ,  Lothar Bischoff

IPC分类号： H01J27/00

CPC分类号： H01J49/10 ,  H01J37/08

摘要： An emitter for an ion source, such as a liquid metal alloy ion source (LMAIS). The emitter includes a binary alloy PrSi as a source material.

摘要翻译： 用于离子源的发射体，例如液态金属合金离子源（LMAIS）。 发射极包括作为源材料的二元合金PrSi。

公开(公告)号：US20070194228A1

公开(公告)日：2007-08-23

申请号：US11675260

申请日：2007-02-15

申请人： Juergen Frosien ,  Yacov Elgar

发明人： Juergen Frosien ,  Yacov Elgar

IPC分类号： G21K7/00

CPC分类号： H01J37/026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/26 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2809 ,  H01J2237/2817

摘要： The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.

摘要翻译： 本发明提供了一种用于照射样本的带电粒子束装置，包括用于提供带电粒子束的粒子源，用于将带电粒子束引导到样本上的光学装置和用于减少充电和/或污染的臭氧单元 的样本。 臭氧单元包括臭氧供应源和用于将臭氧气体流引导到样品的样本喷嘴单元。 此外，本发明提供了一种用于照射包括用于提供带电粒子束的粒子源的样本的带电粒子束装置，用于将带电粒子束引导到样本上的光学装置，用于减少充电的检测器和气体单元 和/或检测器的污染。 气体单元包括气体供应源和用于将气流引导到检测器的检测器喷嘴单元。 此外，本发明提供了用于操作根据本发明的带电粒子束装置的方法。

公开(公告)号：US07122805B2

公开(公告)日：2006-10-17

申请号：US10729839

申请日：2003-12-06

申请人： Kurt Hoffmann

发明人： Kurt Hoffmann

IPC分类号： H01T23/00

CPC分类号： G09G3/22 ,  G09G3/06 ,  G09G2300/0842 ,  G09G2310/0248 ,  G09G2310/061 ,  G09G2320/0233 ,  G09G2320/0295 ,  G09G2320/043 ,  G09G2320/0693 ,  H01J3/022 ,  H01J37/073 ,  H01J37/243 ,  H01J2237/06316 ,  H01J2237/0635 ,  H01J2237/31774

摘要： The present invention refers to a field emitter beam source (10) comprising at least one emitter (11); at least one extracting electrode (19) to extract a beam current (IE) from the emitter (11); a current source (12) for providing a predetermined beam current (IE0); a first voltage source (13) for providing a first voltage (UA) between the emitter (11) and the extracting electrode (19) to switch on the beam current (IE); and a first switch (S1) for disconnecting the first voltage source (13). With such a field emitter beam source, the emitter voltage (UE) necessary to emit a predetermined beam current (IE0) can be determined. This in turn enables the field emitter beam source (10) to generate beam current pulses with a fast rise time and a well defined beam current pulse charge Q.

摘要翻译： 本发明涉及包括至少一个发射极（11）的场致发射束源（10）。 至少一个提取电极（19），用于从发射器（11）提取射束电流（I SUB）; 用于提供预定的束电流（I OUT）的电流源（12）; 用于在所述发射极（11）和所述提取电极（19）之间提供第一电压（U SUB）的第一电压源（13）以接通所述射束电流（I SUB） SUB>）; 以及用于断开第一电压源（13）的第一开关（S SUB1＆lt; 1＆gt;）。 利用这种场致发射束源，可以确定发射预定射束电流（I E0））所需的发射极电压（U SUB）。 这又使得场发射器束源（10）能够产生具有快速上升时间和良好限定的束电流脉冲电荷Q的束电流脉冲。

公开(公告)号：US5422486A

公开(公告)日：1995-06-06

申请号：US58959

申请日：1993-05-07

申请人： Karl H. Herrmann ,  Steffen Beck ,  Hans P. Feuerbaum ,  Jurgen Frosien ,  Andreas Benez ,  Stefan Lanio ,  Gerold Schonecker

发明人： Karl H. Herrmann ,  Steffen Beck ,  Hans P. Feuerbaum ,  Jurgen Frosien ,  Andreas Benez ,  Stefan Lanio ,  Gerold Schonecker

IPC分类号： H01J37/244 ,  G01N23/00

CPC分类号： H01J37/244 ,  H01J2237/151

摘要： The invention relates to a scanning electron beam device in which at least one electrostatic reflector is provided for reflection of a secondary electron beam emitted by the primary electron beam on the object. This reflector is preferably located outside the beam path of the primary electron beam, and at least one electron-optical element which effects a preliminary deflection of the secondary electron beam by a small angle with respect to the beam path of the primary electron beam is provided between the object and the reflector. Such an arrangement makes it possible with comparatively low technical expenditure to reflect the secondary electron beam by a relatively large angle with respect to the unaffected primary electron beam which travels on a straight axis.

摘要翻译： 本发明涉及一种扫描电子束装置，其中提供至少一个静电反射器用于反射由一次电子束在物体上发射的二次电子束。 该反射器优选位于一次电子束的光束路径的外侧，并且提供至少一个电子光学元件，该电子光学元件相对于一次电子束的光束路径以小的角度实现二次电子束的初步偏转 物体与反射体之间。 这样的布置使得相对于在直轴上行进的未受影响的一次电子束相对较大的角度反射二次电子束，可以以相对较低的技术支出反射二次电子束。

公开(公告)号：US08878148B2

公开(公告)日：2014-11-04

申请号：US12888978

申请日：2010-09-23

申请人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

发明人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

IPC分类号： G21K5/00 ,  H01J37/06

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.

摘要翻译： 提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。 该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面 用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

公开(公告)号：US08203119B2

公开(公告)日：2012-06-19

申请号：US11568442

申请日：2005-06-10

申请人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

发明人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J2237/24485 ,  H01J2237/24585

摘要： The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer. The improvement of the energy resolution is significant, in particular when the beam tube element is part of a high voltage beam tube.

摘要翻译： 本发明提供一种带电粒子束装置，用于沿着光轴传播的初级带电粒子束来检查或构造样本; 具有管电压的束管元件; 以及在束管元件附近的延迟场分析器，以检测由样品上的一次带电粒子束产生的二次带电粒子。 根据本发明，延迟场分析仪由此包括第二电压的入口栅电极; 至少一个第一电压的滤波栅极; 用于检测次级带电粒子的带电粒子检测器; 以及至少一个另外的电极元件，其布置在所述入口栅格电极和所述至少一个滤光栅格电极之间。 至少一个另外的电极元件减小了延迟电场区域中的杂散场区域的尺寸，以提高延迟场分析器的能量分辨率。 能量分辨率的提高是显着的，特别是当束管元件是高压束管的一部分时。

公开(公告)号：US20110139978A1

公开(公告)日：2011-06-16

申请号：US12962284

申请日：2010-12-07

申请人： Jürgen FROSIEN

发明人： Jürgen FROSIEN

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/28 ,  H01J37/147 ,  H01J2237/057 ,  H01J2237/1508 ,  H01J2237/1534 ,  H01J2237/244

摘要： A charged particle beam device is provided, including a primary beam source for generating a primary charged particle beam, an objective lens for focusing the primary charged particle beam onto a specimen, and an achromatic beam separator adapted to separate the primary charged particle beam from a secondary charged particle beam originating from the specimen. The achromatic beam separator is adapted to separate the primary charged particle beam and the secondary charged particle beam earliest practicable after generation of the secondary charged particle beam.

摘要翻译： 提供一种带电粒子束装置，包括用于产生初级带电粒子束的一次束源，用于将初级带电粒子束聚焦到样本上的物镜，以及适于将初级带电粒子束与 源自样品的二次带电粒子束。 无色光束分离器适于在产生二次带电粒子束之后最早切实地分离初级带电粒子束和次级带电粒子束。

公开(公告)号：US20110089322A1

公开(公告)日：2011-04-21

申请号：US12579869

申请日：2009-10-15

申请人： Gerald SCHOENECKER ,  Stefan LANIO

发明人： Gerald SCHOENECKER ,  Stefan LANIO

IPC分类号： G01N23/00 ,  H01J1/50 ,  H01J37/28

CPC分类号： H01J37/1472 ,  H01J2237/1508 ,  H01J2237/153

摘要： An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

摘要翻译： 提供了一种消色差束分离器装置，用于将初级带电粒子束与另一带电粒子束分离并在光轴（142）上提供初级带电粒子束，包括初级带电粒子束入口（134），初级带电粒子束 包括光轴的出口（132），适于产生磁场的磁偏转元件（163）和适于产生与磁场重叠的电场的静电偏转元件（165），其中，从 静电偏转元件和磁偏转元件被定位和/或定位以补偿八极杆的影响。

公开(公告)号：US20100108904A1

公开(公告)日：2010-05-06

申请号：US12264848

申请日：2008-11-04

申请人： PAVEL ADAMEC

发明人： PAVEL ADAMEC

IPC分类号： H01J3/14

CPC分类号： H01J37/1471 ,  H01J2237/1501

摘要： A charged particle gun alignment assembly for emitting a charged particle beam along an optical axis of a charged particle beam device is described. The charged particle gun alignment assembly is configured to compensate for misalignment of the charged particle beam and includes a charged particle source having an emitter with a virtual source defining a virtual source plane substantially perpendicular to the optical axis; a condenser lens for imaging the virtual source; a final beam limiting aperture adapted for shaping the charged particle beam; and a double stage deflection assembly positioned between the condenser lens and the final beam limiting aperture, wherein the working distance of the condenser lens is 15 mm or less.

摘要翻译： 描述了一种用于沿带电粒子束装置的光轴发射带电粒子束的带电粒子枪对准组件。 带电粒子枪对准组件被配置为补偿带电粒子束的未对准，并且包括具有发射器的带电粒子源，发射器具有限定基本上垂直于光轴的虚拟源平面的虚拟源; 用于对虚拟源成像的聚光透镜; 用于对带电粒子束进行成形的最终光束限制孔; 以及位于聚光透镜和最终光束限制孔之间的双级偏转组件，其中聚光透镜的工作距离为15mm或更小。

公开(公告)号：US20100084553A1

公开(公告)日：2010-04-08

申请号：US12247849

申请日：2008-10-08

申请人： Juergen FROSIEN

发明人： Juergen FROSIEN

IPC分类号： G01N23/00

CPC分类号： G01T1/00

摘要： A detection apparatus for use in a charged particle beam device is provided. The detection apparatus includes a separation field generating portion adapted to generate a separation field separating positively and negatively charged secondary particles, at least one first detector for detecting positively charged particles, at least one second detector for detecting negatively charged particles, wherein the detection apparatus is adapted to simultaneously detect the positively charged secondary particles in the at least one first detector and the negatively charged secondary particles in the at least one second detector. Further, a method of simultaneously detecting negatively and positively charged particles is provided. The method includes providing a separation field, providing at least one first detector and at least one second detector, separating the negatively charged particles from the positively charged particles in the separation field, simultaneously detecting positively charged particles with the at least one first detector and negatively charged particles with the at least one second detector.

摘要翻译： 提供一种用于带电粒子束装置的检测装置。 检测装置包括：分离场产生部分，适于产生分离带正电荷和带负电荷的二次粒子的分离场;至少一个检测带正电荷的粒子的第一检测器;用于检测带负电荷的粒子的至少一个第二检测器，其中检测装置 适于同时检测所述至少一个第一检测器中的带正电荷的次级颗粒和所述至少一个第二检测器中的带负电荷的次级颗粒。 此外，提供同时检测带正电的带电粒子的方法。 该方法包括提供分离场，提供至少一个第一检测器和至少一个第二检测器，从分离场中带正电的粒子分离带负电的粒子，同时用至少一个第一检测器检测带正电的粒子， 带电粒子与至少一个第二检测器。