公开(公告)号：US07629578B2

公开(公告)日：2009-12-08

申请号：US11675260

申请日：2007-02-15

申请人： Juergen Frosien ,  Yacov Elgar

发明人： Juergen Frosien ,  Yacov Elgar

IPC分类号： H01J37/26

CPC分类号： H01J37/026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/26 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2809 ,  H01J2237/2817

摘要： The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.

摘要翻译： 本发明提供了一种用于照射样本的带电粒子束装置，包括用于提供带电粒子束的粒子源，用于将带电粒子束引导到样本上的光学装置和用于减少充电和/或污染的臭氧单元 的样本。 臭氧单元包括臭氧供应源和用于将臭氧气体流引导到样品的样本喷嘴单元。 此外，本发明提供了一种用于照射包括用于提供带电粒子束的粒子源的样本的带电粒子束装置，用于将带电粒子束引导到样本上的光学装置，用于减少充电的检测器和气体单元 和/或检测器的污染。 气体单元包括气体供应源和用于将气流引导到检测器的检测器喷嘴单元。 此外，本发明提供了用于操作根据本发明的带电粒子束装置的方法。

公开(公告)号：US20070194228A1

公开(公告)日：2007-08-23

申请号：US11675260

申请日：2007-02-15

申请人： Juergen Frosien ,  Yacov Elgar

发明人： Juergen Frosien ,  Yacov Elgar

IPC分类号： G21K7/00

CPC分类号： H01J37/026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/26 ,  H01J37/3174 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2809 ,  H01J2237/2817

摘要： The invention provides a charged particle beam device for irradiating a specimen, comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen and an ozone unit for reducing the charging and/or contamination of the specimen. The ozone unit comprises a supply of ozone and a specimen nozzle unit for directing an ozone gas flow to the specimen. Further, the invention provides a charged particle beam device for irradiating a specimen comprising a particle source for providing a beam of charged particles, an optical device for directing the beam of charged particles onto the specimen, a detector and a gas unit for reducing the charging and/or contamination of the detector. The gas unit comprises a supply of gas and a detector nozzle unit for directing a gas flow to the detector. Further, the present invention provides methods for operating charged particle beam devices according to the present invention.

摘要翻译： 本发明提供了一种用于照射样本的带电粒子束装置，包括用于提供带电粒子束的粒子源，用于将带电粒子束引导到样本上的光学装置和用于减少充电和/或污染的臭氧单元 的样本。 臭氧单元包括臭氧供应源和用于将臭氧气体流引导到样品的样本喷嘴单元。 此外，本发明提供了一种用于照射包括用于提供带电粒子束的粒子源的样本的带电粒子束装置，用于将带电粒子束引导到样本上的光学装置，用于减少充电的检测器和气体单元 和/或检测器的污染。 气体单元包括气体供应源和用于将气流引导到检测器的检测器喷嘴单元。 此外，本发明提供了用于操作根据本发明的带电粒子束装置的方法。

公开(公告)号：US07851768B2

公开(公告)日：2010-12-14

申请号：US12133147

申请日：2008-06-04

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： H01J49/10 ,  H01J27/26 ,  H01J27/02

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/24507 ,  H01J2237/24535

摘要： A focused ion beam device is described comprising a gas field ion source with an emitter emitting an ion beam including ions of gas, an ion beam column and a beam current control loop comprising a beam current measurement device. Furthermore, the focused ion beam device may have a sample charge control comprising measuring the sample charge. A method of operating a focused ion beam device is provided comprising applying a voltage between an emitter an electrode, applying gas to the emitter, emitting ions of a gas from the emitter and controlling a beam current by measuring the beam current with a beam current measurement device.

摘要翻译： 描述了一种聚焦离子束装置，其包括具有发射包括气体离子的离子束的发射体的气体场离子源，离子束列和包括束电流测量装置的束流控制回路。 此外，聚焦离子束装置可以具有包括测量样品电荷的样品电荷控制。 提供了一种操作聚焦离子束装置的方法，包括在发射极与电极之间施加电压，向发射体施加气体，从发射极发射气体的离子，并通过用束电流测量来测量束电流来控制束电流 设备。

公开(公告)号：US07675042B2

公开(公告)日：2010-03-09

申请号：US10578206

申请日：2004-11-04

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： H01J29/02

CPC分类号： H01J9/18 ,  H01J37/02 ,  H01J37/10 ,  H01J2237/036

摘要： The present invention relates to a beam optical component (1, 201) for acting on a charged particle beam (63) including a first element (3; 203) having a first opening (9; 209) for acting on the charged particle beam (63), at least a second element (5; 205) for acting on the charged particle beam (63); at least one distance piece (20a, 20b, 20c) positioned between the first element (3; 203) and the second element (5; 205) to define a minimum distance between the first element (3; 203) and the second element (5; 205); and a first holding piece (30a; 30b; 30c) for abutting the first element (3) to the at least one distance piece (20a, 20b, 20c), whereby the first holding piece (30a; 30b; 30c) is attached to the at least one distance piece (20a, 20b, 20c). First and second elements (3; 203; 5; 205) are preferably electrodes or pole pieces to act on the charged particle beam by an electrostatic or magnetic force. With the first holding piece (30a; 30b; 30c) attached to the at least one distance piece, distorting mechanical forces on the first and second elements (3, 5) are reduced which improves the performance of the respective beam optical components (1; 201).

摘要翻译： 本发明涉及一种用于作用在带电粒子束（63）上的束光学部件（1,201），其包括具有用于作用在带电粒子束上的第一开口（9; 209）的第一元件（3; 203） 至少一个用于作用在带电粒子束（63）上的第二元件（5; 205）; 位于第一元件（3; 203）和第二元件（5; 205）之间的至少一个距离件（20a，20b，20c），以限定第一元件（3; 203）和第二元件 5; 205）; 以及用于将所述第一元件（3）抵接到所述至少一个距离片（20a，20b，20c）的第一保持片（30a; 30b; 30c），由此所述第一保持片（30a; 30b; 30c） 所述至少一个距离件（20a，20b，20c）。 第一和第二元件（3; 203; 5; 205）优选地是通过静电或磁力作用在带电粒子束上的电极或极片。 在第一固定件（30a; 30b; 30c）附接到至少一个距离件上，使第一和第二元件（3,5）上的机械力变形减小，这改善了各个光束组件（1; 201）。

公开(公告)号：US20080230694A1

公开(公告)日：2008-09-25

申请号：US10587105

申请日：2004-12-13

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： H01J37/14 ,  H01J37/12 ,  H01J37/15 ,  H01J2237/1501

摘要： The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.

摘要翻译： 本发明涉及一种包括用于聚焦带电粒子束的带电粒子透镜的束光学部件，该带电粒子透镜包括具有用于聚焦带电粒子束的第一开口的第一元件; 第二元件具有用于聚焦带电粒子束的第二开口和与第一元件和第二元件中的至少一个连接的第一驱动装置，用于相对于第二开口对准第一开口。 利用第一驱动装置，第一开口和第二开口可以在光束操作期间相对于彼此对准，以提供光束光学部件的优良对准以获得更好的光束聚焦。 本发明还涉及使用所述光束光学部件来聚焦带电粒子束的带电粒子束装置，以及使第一开口和第二开口相对于彼此对准的方法。

公开(公告)号：US07315029B2

公开(公告)日：2008-01-01

申请号：US11241880

申请日：2005-09-30

申请人： Dieter Winkler ,  Henry Pearce-Percy ,  Juergen Frosien ,  William J. Devore

发明人： Dieter Winkler ,  Henry Pearce-Percy ,  Juergen Frosien ,  William J. Devore

IPC分类号： G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC分类号： H01J37/1477 ,  H01J2237/1518 ,  H01J2237/28 ,  H01J2237/3175

摘要： Embodiments of the present invention may be utilized to improve electron beam deflection. One embodiment provides an electrostatic deflection system with electrodes that minimize aberrations and to achieve vertical incidence simultaneously. By using at least two stages of deflection for a deflection direction, the present invention allows the deflected electron beam to pass a back focal plane of an objective lens while deflection capacitors are not disposed across the back focal plane. As a result, deflection electrodes can have an angle of 120° to minimize aberrations and simultaneously achieve vertical incidence of the electron beam on a target to avoid distortions or changes in magnification with height variations of the target or focus variations.

摘要翻译： 本发明的实施例可用于改善电子束偏转。 一个实施例提供一种静电偏转系统，其具有最小化像差并且同时实现垂直入射的电极。 通过对偏转方向使用至少两个偏转级，本发明允许偏转的电子束通过物镜的后焦平面，而偏转电容器不跨过后焦平面设置。 结果，偏转电极可以具有120°的角度以最小化像差并且同时实现电子束在靶上的垂直入射，以避免目标或焦点变化的高度变化引起的变形或放大变化。

公开(公告)号：US20070075256A1

公开(公告)日：2007-04-05

申请号：US11241789

申请日：2005-09-30

申请人： Benyamin Buller ,  William Devore ,  Juergen Frosien ,  Eugene Mirro ,  Henry Pearce-Percy ,  Dieter Winkler

发明人： Benyamin Buller ,  William Devore ,  Juergen Frosien ,  Eugene Mirro ,  Henry Pearce-Percy ,  Dieter Winkler

IPC分类号： H01J37/147

CPC分类号： H01J37/147 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/045 ,  H01J37/24 ,  H01J37/3174 ,  H01J2237/0432 ,  H01J2237/1504 ,  H01J2237/28

摘要： An apparatus and method for deflecting electron beams with high precision and high throughput. At least one electrode of a deflecting capacitor is connected to a signal source via a coaxial cable. A termination resistor is further connected to the coaxial cable and the electrode at the joint of the coaxial cable and the electrode. The termination resistor has a resistance matched to the impedance of the coaxial cable and the electrode has an impedance matched to half of the impedance of the coaxial. The deflecting capacitors of the present invention have a minimized loss of precision due to eddy current. The spacing of electrodes in the deflecting capacitors is reduced by a factor of approximately two compared to the state-the-art system.

公开(公告)号：US20060226360A1

公开(公告)日：2006-10-12

申请号：US11384043

申请日：2006-03-17

申请人： Juergen Frosien

发明人： Juergen Frosien

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J2237/047 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2538 ,  H01J2237/28

摘要： The present invention relates to a charged particle device with improved detection scheme. The device has a charged particle source providing a beam of primary charged particles; a first unit for providing a potential; a second unit for providing a potential; and a center unit positioned between the first unit and the second unit. The center unit is capable of providing a potential different from the potential of the first and the second unit for decelerating the primary charged particles to a first low energy and for accelerating the primary charged particles to a second high energy. Therein, the first unit and/or the second unit is a detector for detecting secondary electrons released at a specimen.

公开(公告)号：US20060151711A1

公开(公告)日：2006-07-13

申请号：US11274608

申请日：2005-11-15

申请人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

发明人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

IPC分类号： H01J1/50

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

摘要翻译： 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US4812651A

公开(公告)日：1989-03-14

申请号：US120133

申请日：1987-11-13

申请人： Hans-Peter Feuerbaum ,  Juergen Frosien

发明人： Hans-Peter Feuerbaum ,  Juergen Frosien

IPC分类号： H01L21/66 ,  G01N23/225 ,  G01R31/302 ,  H01J37/14 ,  H01J37/141 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/14 ,  H01J37/05 ,  H01J37/244 ,  H01J37/268 ,  H01J2237/057 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

摘要： A spectrometer objective includes a generally asymmetrical objective lens having a short focal length, a deflection system disposed within the objective lens symmetrically relative to an optical axis, and an electrostatic retarding field spectrometer including an electrode arrangement for accelerating the secondary electrons generated on the specimen. The electrode arrangement of the retarding field spectrometer includes an electrode pair for establishing a spherically symmetrical retarding field. The electrode arrangement for extracting and accelerating the secondary particles includes a grid electrode disposed in a region of the lower pole piece of the objective lens and of a planar electrode disposed in the particle beam path immediately above the specimen, wherein the planar electrode is charged with a potential lying between the potential of the specimen and the potential of the grid electrode.

摘要翻译： 光谱仪物镜包括具有短焦距的通常不对称的物镜，相对于光轴对称地设置在物镜内的偏转系统，以及包括用于加速在样本上产生的二次电子的电极装置的静电延迟场光谱仪。 延迟场光谱仪的电极布置包括用于建立球形对称延迟场的电极对。 用于提取和加速二次粒子的电极装置包括设置在物镜的下极片的区域中的栅电极和设置在样品正上方的粒子束路径中的平面电极，其中平面电极被充电 位于样品的电位和栅电极的电位之间的电位。