ULTRA-THIN, ULTRA-LOW DENSITY FILMS FOR EUV LITHOGRAPHY

    公开(公告)号:US20240419062A1

    公开(公告)日:2024-12-19

    申请号:US18816681

    申请日:2024-08-27

    Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

    Artificial muscle tentacles
    57.
    发明授权

    公开(公告)号:US11746760B2

    公开(公告)日:2023-09-05

    申请号:US16970828

    申请日:2019-02-22

    Inventor: Marcio Dias Lima

    CPC classification number: F03G7/06 G05B19/402 G05B2219/39462

    Abstract: An artificial muscle tentacle and method for manufacturing an artificial muscle tentacle, and a computer readable medium for controlling an artificial muscle tentacle are disclosed. The artificial muscle tentacle includes two spacers and a central core that connects the two spacers. The artificial muscle tentacle also includes at least two Z-Twist actuators and at least two S-Twist actuators. The Z-Twist actuators and the S-Twist actuators are disposed around the central core and in between the two spacers connecting the two spacers. The actuation of one or more of the Z-Twist actuators and the S-Twist actuators actuates the artificial muscle tentacle.

    Nanofiber yarn dispenser
    59.
    发明授权

    公开(公告)号:US11524862B2

    公开(公告)日:2022-12-13

    申请号:US17085397

    申请日:2020-10-30

    Abstract: A dispenser is described for dispensing nanofiber yarns that includes a housing that defines an inlet, an outlet, and a chamber. A spool, around which is wound a length of nanofiber yarn, is disposed within the chamber defined by the housing. The nanofiber yarn is threaded from the chamber through the outlet and can be dispensed in a controlled way that reduces the likelihood of developing knots within the nanofiber yarn, and which facilitates convenient application of the yarn onto an underlying surface. In some cases, the dispenser can be used to concurrently dispense an adhesive or other polymer along with the nanofiber yarn.

    NANOFIBER ASSEMBLIES WITH MULTIPLE ELECTROCHROMIC STATES

    公开(公告)号:US20220342267A1

    公开(公告)日:2022-10-27

    申请号:US17760900

    申请日:2020-09-11

    Inventor: Jaeah LEE

    Abstract: Composite assemblies are described that can be switched from a transparent state to a non transparent state, and in some examples even switched between different colors/reflectivities in the non transparent state. Switching between these states can be initiated by application of an electrical current to Ag carbon nanotube yarns in contact with an electrochromic electrolyte. The carbon nanotube yarns increase the efficiency with which electrons are provided to an electrolyte.

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