摘要:
In an electron source manufacturing apparatus, the quantity of heat generated from an electron source substrate is measured. A temperature of a support member for the electron source substrate is controlled based on the measured quantity of heat generated. A variation in performances of electron source substrates is suppressed, which increase their life.
摘要:
A control circuit board is opposed to an outer surface of a case in the form of a rectangular box, and an connector cable, which has connector terminals connectable with an external device, extends from the circuit board. The control circuit board has a plurality of first connector pads with a first property and a plurality of second connector pads with a second property different from the first property, the first and second connector pads being arranged side by side on the control circuit board. The connector cable has a proximal end portion connected to at least one type, among the first and second connector pads, and the connector terminals including a plurality of connector terminals connecting with the at least one type of connector pads to which the proximal end portion is connected.
摘要:
A probe for applying a voltage to lines provided on a substrate comprises (a) a conductive sheet, the conductive sheet including a mesh sheet in which linear members are woven into a mesh and a conductive material which coats the mesh sheet, (b) an elastic member for pressing the conductive sheet against the lines, and (c) a holding member for holding the conductive sheet and the elastic member together. The probe has improved electrical connectivity and durability, and achieves a reduction in size and facilitation of operations of an apparatus for manufacturing an electron source.
摘要:
The present invention provides a CZ silicon wafer, wherein the wafer includes rod-like void defects and/or plate-like void defects inside thereof, and a CZ silicon wafer, wherein the silicon wafer includes void defects inside the wafer, a maximum value of a ratio between long side length L1 and short side length L2 (L1/L2) in an optional rectangle circumscribed the void defect image projected on an optional {110} plane is 2.5 or more, and the silicon wafer including rod-like void defects and/or plate-like void defects inside the wafer, wherein a void defect density of the silicon wafer at a depth of from the wafer surface to at least 0.5 &mgr;m after the heat treatment is ½ or less than that of inside the wafer. According to this, the silicon wafer, which is suitable for expanding reducing effect of void defects by heat treatment up to a deeper region, can be obtained.
摘要:
A silicon single crystal wafer for epitaxial growth grown by the CZ method, which is doped with nitrogen and has a V-rich region over its entire plane, or doped with nitrogen, has an OSF region in its plane, and shows an LEP density of 20/cm2 or less or an OSF density of 1×104/cm2 or less in the OSF region, epitaxial wafer utilizing the substrate, as well as methods for producing them and method for evaluating a substrate suitable for an epitaxial wafer. There are provided a substrate for an epitaxial wafer that suppresses crystal defects to be generated in an epitaxial layer when epitaxial growth is performed on a CZ silicon single crystal wafer doped with nitrogen and also has superior IG ability, epitaxial wafer utilizing the substrate, as well as methods for producing them and method for evaluating a substrate suitable for an epitaxial wafer.
摘要翻译:通过CZ法生长的用于外延生长的硅单晶晶片,其掺杂有氮并在其整个平面上具有富V区或掺杂氮,在其平面中具有OSF区,并且显示出LEP密度 在OSF区域中使用20 / cm 2以下的OSF密度或1×10 4 / cm 2以下的OSF密度,利用该基板的外延晶片及其制造方法以及评价适用于外延晶片的基板的方法。 提供了一种用于外延晶片的衬底,其抑制在掺杂氮的CZ硅单晶晶片上进行外延生长时外延层中产生的晶体缺陷,并且还具有优异的IG能力,以及利用衬底的外延晶片 作为其制造方法和评价适用于外延晶片的基板的方法。
摘要:
There is disclosed a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, wherein a size of grown-in defects in the silicon single crystal wafer is 70 nm or less, a silicon single crystal wafer produced by processing a silicon single crystal ingot grown by Czochralski method with doping nitrogen, the silicon single crystal ingot is grown with controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and a method for producing a silicon single crystal wafer wherein a silicon single crystal ingot is grown with doping nitrogen and controlling a rate of cooling from 1150 to 1080° C. to be 2.3° C./min or more, and is then processed to provide a silicon single crystal wafer. The silicon single crystal wafer for device wherein growth of the crystal defects is suppressed can be produced by CZ method in high productivity.
摘要:
A light-triggered switching circuit which comprises a PNPN element, a resistor, and control means. The PNPN element is made of a P-type emitter layer, an N-type base layer, a P-type base layer, and an N-type emitter layer. The resistor is connected between the P-type base layer and the N-type emitter layer. The control means is connected between the P-type emitter layer and the N-type emitter layer. It controls the PNPN element such that the PNPN element performs a switching operation only when a voltage applied between the P-type emitter layer and the N-type emitter layer is lower than a predetermined value while a first amount of light is being applied to the PNPN element, and is also performs a switching operation, regardless of the value of the voltage applied between the P-type emitter layer and the N-type emitter layer, while a second amount of light, different from the first amount of light, is being applied to the PNPN element.
摘要:
A magnetic medium for horizontal magnetization recording which comprises a non-magnetic substrate and a magnetic recording film formed on at least one side of the substrate, is described. The magnetic recording film consists essentially of an amorphous Co-Cr alloy containing from 5 to 15 atomic percent of oxygen atom. A method for making the above type of medium is also described in which the magnetic film is vapor deposited under conditions of a partial pressure of oxygen gas of 1.times.10.sup.-3 to 3.times.10.sup.-3 Torr., and a sputtering rate of from 0.05 to 0.15 .mu.m/minute.
摘要:
A hybrid vehicle includes a differential device, a first motor, an engine, a second motor, an engagement device, and an electronic control unit. The electronic control unit is configured to control the first motor and the second motor when an engagement state of the engagement device changes, such that a first angular acceleration and a second angular acceleration reach a first target value and the second target value respectively, the first angular acceleration and the second angular acceleration being two angular accelerations of the engine, the first motor, and the second motor and to calculate the first target value and the second target value by applying a constraint condition to at least one of the first target value and the second target value.
摘要:
A multilayer nonwoven fabric includes a first fiber layer and a second fiber layer laminated and arranged on a first surface of the first fiber layer. A plurality of groove portions are formed along a prescribed direction in a shape depressed in a thickness direction of the multilayer nonwoven fabric. A plurality of raised ridge portions are formed adjacent to the plurality of groove portions in a shape projected in the thickness direction. The basis weight of the raised ridge portion is greater than the basis weight in regions, which include the bottoms of the groove portions. The second fiber layer including each of the plurality of raised ridge portions is in such a shape that a surface, on the side of the first fiber layer, of the second fiber layer is projected in the same direction as the direction in which the second surface of the first fiber layer is projected.