Method for making magnetic write head
    52.
    发明申请
    Method for making magnetic write head 失效
    磁头写入方法

    公开(公告)号:US20070017087A1

    公开(公告)日:2007-01-25

    申请号:US11186174

    申请日:2005-07-21

    IPC分类号: G11B5/127

    摘要: After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

    摘要翻译: 在定义磁读头的P2极之后,将氧化铝沉积在其上并通过CMP平坦化,其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽,并且氧化铝的部分覆盖 P2极的光斑区域,背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝,进行反应离子磨,以暴露P2极的火炬区域,后隙区域和中心抽头区域,从而形成后续步骤,例如形成线圈导体层,形成返回极, 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域,后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。

    WRITE POLE FABRICATION FOR PERPENDICULAR RECORDING
    53.
    发明申请
    WRITE POLE FABRICATION FOR PERPENDICULAR RECORDING 失效
    写字符制造用于完整记录

    公开(公告)号:US20060288565A1

    公开(公告)日:2006-12-28

    申请号:US11469132

    申请日:2006-08-31

    IPC分类号: G11B5/127

    摘要: Methods for forming write heads. One method includes forming a mask layer above a pole tip layer; forming a layer of resist above the mask layer; patterning the resist; removing portions of the mask layer not covered by the patterned resist; shaping a pole tip from the pole tip layer; depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer; depositing a stop layer over the dielectric material, the stop layer abutting the mask layer; and polishing for forming a substantially planar upper surface comprising the mask layer and stop layer. Another method includes depositing a layer of dielectric material at least adjacent the pole tip, wherein the layer of dielectric material extends about adjacent to the mask layer. A further method includes forming dishing in the pole tip.

    摘要翻译: 形成写头的方法 一种方法包括在极尖层上形成掩模层; 在掩模层之上形成抗蚀剂层; 图案化抗蚀剂; 去除未被图案化抗蚀剂覆盖的掩模层的部分; 从极尖层成形极尖; 在极尖和熔剂成形层上沉积介电材料层,其中介电材料层围绕掩模层延伸; 在电介质材料上沉积停止层,停止层邻接掩模层; 以及用于形成包括掩模层和停止层的基本平坦的上表面的抛光。 另一种方法包括沉积至少邻近极尖的介电材料层,其中电介质材料层围绕掩模层延伸。 另一种方法包括在极尖中形成凹陷。

    P1 write pole with shoulder formation and method of fabrication
    54.
    发明申请
    P1 write pole with shoulder formation and method of fabrication 失效
    P1写杆与肩部形成和制造方法

    公开(公告)号:US20060171069A1

    公开(公告)日:2006-08-03

    申请号:US11046740

    申请日:2005-01-31

    IPC分类号: G11B5/147

    CPC分类号: G11B5/1871 G11B5/3116

    摘要: A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

    摘要翻译: 公开了一种包括写头的磁盘驱动器头,该写头包括具有基座部分的P 1层,在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器,以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

    Recessed SiO2 or Si3N4 overcoat for GMR head in magnetic disk drive
    56.
    发明申请
    Recessed SiO2 or Si3N4 overcoat for GMR head in magnetic disk drive 审中-公开
    用于磁盘驱动器中的GMR磁头的嵌入式SiO2或Si3N4外涂层

    公开(公告)号:US20050264949A1

    公开(公告)日:2005-12-01

    申请号:US10857036

    申请日:2004-05-28

    IPC分类号: G11B5/127 G11B5/31 G11B5/33

    摘要: A giant magnetoresistive (GMR) head contains an overcoat layer consisting of silicon dioxide or silicon nitride. These materials have a coefficient of thermal expansion (CTE) that is less than alumina, which is conventionally used for the overcoat layer. As a result, the overcoat layer exhibits a smaller temperature-induced protrusion when the head heats up from friction with the passing air stream. The process of forming the head includes forming a recess in the overcoat layer that reduces the stress on the poles and improves the performance of the head. The process includes depositing a seed layer over the overcoat layer in preparation to plating a metal mask layer with an opening where the recess is to be formed, wet chemical etching the seed layer through the opening in the mask layer and performing an ion milling process to remove any remaining traces of the seed layer. With the seed layer completely removed, a trench having smooth sidewalls and bottom can be etched in the overcoat layer by a reactive ion etch (RIE) process. The saw that is used to separate the head elements in the wafer can be passed through the clean trench without contacting the overcoat layer, thereby avoiding the chipping and cracking that might otherwise result from the use of a silicon dioxide or silicon nitride overcoat layer.

    摘要翻译: 巨磁阻(GMR)磁头包含由二氧化硅或氮化硅组成的外涂层。 这些材料的热膨胀系数(CTE)小于通常用于外涂层的氧化铝。 结果,当头部与通过的空气流的摩擦加热时,外涂层表现出较小的温度引起的突起。 形成头部的过程包括在外涂层中形成凹陷,其减小了磁极上的应力并提高了磁头的性能。 该方法包括在外涂层上沉积种子层,以准备对具有要形成凹部的开口镀金属掩模层,通过掩模层中的开口湿化学蚀刻晶种层并执行离子铣削加工 去除种子层的剩余痕迹。 随着种子层完全去除,可以通过反应离子蚀刻(RIE)工艺在覆盖层中蚀刻具有平滑侧壁和底部的沟槽。 用于分离晶片中的头元件的锯可以通过干净的沟槽而不与外涂层接触,从而避免由于使用二氧化硅或氮化硅外涂层而导致的切屑和裂纹。

    Magnetic head with flared write pole having multiple tapered regions
    59.
    发明授权
    Magnetic head with flared write pole having multiple tapered regions 有权
    具有多个锥形区域的具有扩口写入磁极的磁头

    公开(公告)号:US08498078B2

    公开(公告)日:2013-07-30

    申请号:US12634533

    申请日:2009-12-09

    IPC分类号: G11B5/147 G11B5/187

    摘要: Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.

    摘要翻译: 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面(ABS)处或附近具有多个锥形表面,其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离,从而提高写入头的性能。