公开(公告)号：US07221991B2

公开(公告)日：2007-05-22

申请号：US11068778

申请日：2005-03-02

申请人： Hiroshi Matsushita ,  Tomonobu Noda ,  Kenichi Kadota ,  Junji Sugamoto ,  Yukihiro Ushiku

发明人： Hiroshi Matsushita ,  Tomonobu Noda ,  Kenichi Kadota ,  Junji Sugamoto ,  Yukihiro Ushiku

IPC分类号： G06F19/00

CPC分类号： H01L22/20 ,  G01R31/2894 ,  G05B23/0248 ,  G05B2219/31357 ,  Y02P90/14

摘要： A control system for a manufacturing apparatus includes manufacturing information input unit acquiring time series data of apparatus parameters controlling manufacturing apparatuses; failure pattern classification module classifying in-plane distributions of failures of each of the wafers into failure patterns; an index calculation unit configured to statistically process the time series data by algorithms to calculate indices corresponding to the respective algorithms; an index analysis unit providing first and second frequency distributions of the indices categorized with and without the target failure pattern, to implement significance test between the first and second frequency distributions; and an abnormal parameter extraction unit extracting failure cause index of failure pattern by comparing value of the significance test with test reference value.

摘要翻译： 一种制造装置的控制系统，包括制造信息输入单元，其获取控制制造装置的装置参数的时间序列数据; 故障模式分类模块将每个晶片的故障平面内分布分为故障模式; 索引计算单元，被配置为通过算法对所述时间序列数据进行统计处理，以计算与各个算法对应的索引; 索引分析单元，提供分类有和没有目标故障模式的索引的第一和第二频率分布，以实现第一和第二频率分布之间的显着性测试; 异常参数提取单元通过比较显着性检验值与检测参考值，提取失效原因指标的故障模式。

公开(公告)号：US07188049B2

公开(公告)日：2007-03-06

申请号：US11086220

申请日：2005-03-23

申请人： Norihiko Tsuchiya ,  Yukihiro Ushiku

发明人： Norihiko Tsuchiya ,  Yukihiro Ushiku

IPC分类号： G06F15/00

CPC分类号： H01L21/67253 ,  H01L22/20 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

摘要： A control system for a manufacturing process includes an inspection tool inspecting a dislocation image in semiconductor substrate processed by manufacturing processes; an inspection information input module configured to acquire the inspected dislocation image; a process condition input module acquiring process conditions of the manufacturing processes; a structure information input module acquiring structure of the semiconductor substrate processed by target manufacturing process; a stress analysis module calculating stresses at nodes provided in the structure, based on target process condition and the structure; an origin setting module providing origins at positions where stress concentration having stress value not less than reference value is predicted; a dislocation dynamics analysis module calculating dislocation pattern in stress field for each position of the origins; and a dislocation pattern comparison module comparing the dislocation pattern with the inspected dislocation image so as to determine whether the target manufacturing process is critical manufacturing process.

摘要翻译： 用于制造工艺的控制系统包括检查通过制造工艺处理的半导体衬底中的位错图像的检查工具; 检查信息输入模块，被配置为获取所检查的位错图像; 过程条件输入模块获取制造过程的处理条件; 通过目标制造工艺处理的半导体衬底的结构信息输入模块获取结构; 应力分析模块，根据目标过程条件和结构计算结构中提供的节点处的应力; 原点设定模块，其在具有应力值不小于参考值的应力集中的位置处提供起点; 位错动力学分析模块计算各个位置的应力场位错模式; 以及位错图案比较模块，将位错图案与被检查的位错图像进行比较，以确定目标制造过程是否是关键的制造过程。

公开(公告)号：US07065469B2

公开(公告)日：2006-06-20

申请号：US10390698

申请日：2003-03-19

申请人： Shuichi Samata ,  Takeo Furuhata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao

发明人： Shuichi Samata ,  Takeo Furuhata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao

IPC分类号： G01M7/02

CPC分类号： G01M15/12 ,  G05B23/0221 ,  G05B23/0283

摘要： A manufacturing apparatus which includes a rotary machine, includes: a plurality of accelerometers configured to measure diagnosis time series data attached to the rotary machine at locations where variations of the rotary machine are different; a frequency analysis device configured to perform a frequency analysis on the diagnosis time series data measured by the plurality of accelerometers; a time series data recording module configured to generate diagnosis data based on variations in characteristics of vibration corresponding to an analysis target frequency and to record the diagnosis data; and a life prediction unit configured to analyze the diagnosis data to determine a life span of the rotary machine.

摘要翻译： 一种包括旋转机器的制造装置，包括：多个加速度计，被配置为在旋转机器的变化不同的位置处测量附接到旋转机器的诊断时间序列数据; 频率分析装置，被配置为对由所述多个加速度计测量的诊断时间序列数据执行频率分析; 时间序列数据记录模块，被配置为基于与分析目标频率相对应的振动特性的变化产生诊断数据并记录诊断数据; 以及寿命预测单元，其构造成分析所述诊断数据以确定所述旋转机器的寿命。

公开(公告)号：US20060064188A1

公开(公告)日：2006-03-23

申请号：US11217592

申请日：2005-09-02

申请人： Yukihiro Ushiku ,  Hidenori Kakinuma ,  Tsutomu Miki ,  Junji Sugamoto ,  Akira Ogawa ,  Yoshinori Ookawauchi ,  Giichi Inoue ,  Tomomi Ino

发明人： Yukihiro Ushiku ,  Hidenori Kakinuma ,  Tsutomu Miki ,  Junji Sugamoto ,  Akira Ogawa ,  Yoshinori Ookawauchi ,  Giichi Inoue ,  Tomomi Ino

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/31372 ,  G05B2219/31395 ,  G05B2219/31455 ,  G06Q30/0283 ,  Y02P90/12 ,  Y02P90/18 ,  Y02P90/20

摘要： A process-state management system encompasses: a plurality of production machines; a control server configured to collectively control at least part of the production machines; a management server including a data-linking module configured to link operation-management data of the production machines with corresponding management information transmitted from the control server, respectively, the management server analyze the operation-management data linked with the management information with a common analysis application; and a management database configured to store the operation-management data linked with the management information.

摘要翻译： 过程状态管理系统包括：多个生产机器; 控制服务器，其被配置为共同控制所述生产机器的至少一部分; 管理服务器，其包括分别将生产机的运行管理数据与从控制服务器发送的相应的管理信息相连接的数据链接模块，所述管理服务器分析与所述管理信息相关联的运行管理数据， 应用; 以及管理数据库，被配置为存储与管理信息相关联的操作管理数据。

公开(公告)号：US20050260081A1

公开(公告)日：2005-11-24

申请号：US11190941

申请日：2005-07-28

申请人： Masayuki Tanaka ,  Takashi Nakao ,  Yukihiro Ushiku

发明人： Masayuki Tanaka ,  Takashi Nakao ,  Yukihiro Ushiku

IPC分类号： F04B49/10 ,  C23C16/44 ,  F04B37/16 ,  H01L21/02 ,  F04B49/00 ,  F04B1/00

CPC分类号： C23C16/4412

摘要： A vacuum pumping system includes: an evacuation conduit, having a sequence of monitoring zones serially assigned in an exhaust direction; sensors respectively provided to the monitoring zones and independently detecting the conditions of the monitoring zones; heaters respectively provided to the monitoring zones and being paired with the sensors; and a control unit receiving data signals from the sensors, comparing the data signals with a threshold value, and when the data signals from a specific sensor exceed the threshold value, selectively supplying heating power to a heater of the monitoring zone where the specific sensor is provided.

摘要翻译： 真空泵系统包括：排气管，具有在排气方向上串联排列的一系列监测区; 传感器分别提供给监控区并独立检测监控区的状况; 加热器分别设置在监控区域并与传感器配对; 以及控制单元，其从所述传感器接收数据信号，将所述数据信号与阈值进行比较，并且当来自特定传感器的数据信号超过所述阈值时，选择性地向所述监测区域的加热器供应加热功率， 提供。

公开(公告)号：US20050107984A1

公开(公告)日：2005-05-19

申请号：US11020477

申请日：2004-12-27

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Takashi Nakao ,  Takeo Furuhata

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Takashi Nakao ,  Takeo Furuhata

IPC分类号： B25B13/56 ,  B25F1/04 ,  F04C18/18 ,  F04C29/00 ,  G06F11/30

CPC分类号： F04C18/18 ,  B25B13/56 ,  B25F1/04 ,  F04C28/28 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2270/07 ,  F04C2270/80

摘要： A method for predicting life of a rotary machine used in a manufacturing apparatus, includes: determining a starting time of an abnormal condition just before a failure of a monitor rotary machine used in a monitor manufacturing process, from monitor time-series data for characteristics of the monitor rotary machine, statistically analyzing the monitor time-series data, and finding a value for the characteristics at the starting time of the abnormal condition as a threshold of the abnormal condition; measuring diagnosis time-series data for the characteristic of a motor current of a diagnosis rotary machine during a manufacturing process; preparing diagnosis data from the diagnosis time-series data; and determining a time for the diagnosis data exceeding the threshold as the life of the diagnosis rotary machine.

摘要翻译： 一种用于预测制造设备中使用的旋转机器的寿命的方法，包括：根据监视器制造过程中使用的监视旋转机器故障之前的异常状况的开始时间，从监视时间序列数据 监视旋转机，对监视时间序列数据进行统计分析，并将异常状态开始时的特性值作为异常状态的阈值求和; 在制造过程中测量诊断旋转机器的电机电流特性的诊断时间序列数据; 从诊断时间序列数据准备诊断数据; 并且将诊断数据超过阈值的时间确定为诊断旋转机器的寿命。

公开(公告)号：US06865513B2

公开(公告)日：2005-03-08

申请号：US10101720

申请日：2002-03-21

申请人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

发明人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

IPC分类号： F04D27/00 ,  F04B37/16 ,  F04B49/06 ,  F04B49/10 ,  F04B51/00 ,  G01M13/00 ,  H01L21/00 ,  G06F11/30

CPC分类号： F04B51/00 ,  F04B49/065 ,  F04D19/04 ,  F04D27/001 ,  G01M13/00

摘要： An apparatus for predicting life expectancy of a rotary machine includes: a load recipe input module acquiring loading conditions of a rotary machine; a characterizing feature input module obtaining characterizing feature data of a rotary machine; and a life expectancy prediction module calculating life expectancy of the rotary machine in conformity with the loading conditions and the characterizing feature datap.

摘要翻译： 一种用于预测旋转机器的预期寿命的装置包括：负载配方输入模块，其获取旋转机器的负载条件; 特征特征输入模块获得旋转机器的特征特征数据; 以及根据加载条件和特征特征数据表计算旋转机器的预期寿命的预期寿命预测模块。

公开(公告)号：US06782348B2

公开(公告)日：2004-08-24

申请号：US10105381

申请日：2002-03-26

申请人： Yukihiro Ushiku

发明人： Yukihiro Ushiku

IPC分类号： G06F1130

CPC分类号： G05B23/024

摘要： The sensor signals relating to the equipment are input from the sensors. The scalar distances of the recognition spaces of every combination of the sensor signals are computed. The flag signals of every combination of the sensor signals are outputted according to whether or not the scalar distances are included in the normal ranges of the recognition spaces. The failures of the equipment are determined according to the flag signals.

摘要翻译： 传感器输入与设备相关的传感器信号。 计算传感器信号的每个组合的识别空间的标量距离。 根据标量距离是否包括在识别空间的正常范围内，输出传感器信号的每个组合的标志信号。 根据标志信号确定设备的故障。

公开(公告)号：US06766275B2

公开(公告)日：2004-07-20

申请号：US10228111

申请日：2002-08-27

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Ken Ishii ,  Takashi Nakao

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Ken Ishii ,  Takashi Nakao

IPC分类号： G06F1900

CPC分类号： G05B23/0283

摘要： A method for diagnosing life of manufacturing equipment having a rotary machine, includes: measuring reference time series data for characteristics before deterioration of the manufacturing equipment occurs; finding a reference auto covariance function based on the reference time series data; extracting a reference variation caused by variations of the process condition and power supply from the reference auto covariance function, and calculating a cycle of the reference variation; measuring diagnostic time series data for the characteristics in a sequence to be measured of the manufacturing equipment; finding a diagnostic auto covariance function based on the diagnostic time series data; and determining the life of the manufacturing equipment from the diagnostic auto covariance function using a component with a cycle shorter than a cycle of the reference variation.

摘要翻译： 一种用于诊断具有旋转机器的制造设备的寿命的方法，包括：测量制造设备劣化之前的特性的基准时间序列数据; 基于参考时间序列数据找到参考自动协方差函数; 从参考自动协方差函数中提取由过程条件和电源的变化引起的参考变化，并计算参考变化的周期; 测量制造设备要测量的序列中的特性的诊断时间序列数据; 基于诊断时间序列数据找到诊断自动协方差函数; 以及使用周期短于参考变化的周期的分量从诊断自动协方差函数确定制造设备的寿命。

公开(公告)号：US5903027A

公开(公告)日：1999-05-11

申请号：US910222

申请日：1997-08-13

申请人： Takashi Yoshitomi ,  Masanobu Saito ,  Hisayo Momose ,  Hiroshi Iwai ,  Yukihiro Ushiku ,  Mizuki Ono ,  Yasushi Akasaka ,  Hideaki Nii ,  Satoshi Matsuda ,  Yasuhiro Katsumata ,  Tatsuya Ooguro ,  Claudio Fiegna

发明人： Takashi Yoshitomi ,  Masanobu Saito ,  Hisayo Momose ,  Hiroshi Iwai ,  Yukihiro Ushiku ,  Mizuki Ono ,  Yasushi Akasaka ,  Hideaki Nii ,  Satoshi Matsuda ,  Yasuhiro Katsumata ,  Tatsuya Ooguro ,  Claudio Fiegna

IPC分类号： H01L21/033 ,  H01L21/225 ,  H01L21/28 ,  H01L21/336 ,  H01L21/8238 ,  H01L27/092 ,  H01L29/08 ,  H01L29/423 ,  H01L29/76

CPC分类号： H01L29/6659 ,  H01L21/0338 ,  H01L21/2255 ,  H01L21/28035 ,  H01L21/28123 ,  H01L21/823814 ,  H01L27/0928 ,  H01L29/0847 ,  H01L29/42376 ,  H01L29/66628

摘要： A MOS type semiconductor device has a gate whose length is 170 nm (0.17 .mu.m) or less, a junction depth of source and drain diffusion layers in the vicinity of a channel is 22 nm or less, and a concentration of impurities at the surface in the source and drain diffusion layers is made to 10.sup.20 cm.sup.-3 or more. Such structure is obtained using solid phase diffusion using heat range from 950.degree. C. to 1050.degree. C. and/or narrowing gate width by ashing or etching. The other MOS type semiconductor device is characterized in that the relationship between the junction depth x.sub.j �nm! in the source and drain diffusion layer regions and the effective channel length L.sub.eff �nm! is determined by L.sub.eff >0.69 x.sub.j -6.17.

摘要翻译： MOS型半导体器件具有长度为170nm（0.17μm）以下的栅极，沟道附近的源极和漏极扩散层的结深度为22nm以下，表面上的杂质浓度 在源极和漏极扩散层中形成1020cm-3以上。 这种结构使用从950℃到1050℃的热范围的固相扩散和/或通过灰化或蚀刻使栅极宽度变窄来获得。 其他MOS型半导体器件的特征在于源极和漏极扩散层区域中的结深度xj [nm]与有效沟道长度Leff [nm]之间的关系由Leff> 0.69×j-6.17确定。