Surface acoustic wave devices
    53.
    发明授权
    Surface acoustic wave devices 有权
    声表面波器件

    公开(公告)号:US08115365B2

    公开(公告)日:2012-02-14

    申请号:US12614597

    申请日:2009-11-09

    IPC分类号: H03H9/25

    摘要: A surface acoustic wave device has a supporting substrate, a propagation substrate made of a piezoelectric single crystal, an organic adhesive layer having a thickness of 0.1 to 1.0 μm and bonding the supporting substrate and the propagation substrate, and a surface acoustic wave filter provided on the propagation substrate.

    摘要翻译: 表面声波装置具有支撑基板,由压电单晶构成的传播基板,厚度为0.1〜1.0μm的有机粘合层,并且将支撑基板和传播基板接合,并且将声表面波滤波器设置在 传播基片。

    Memory controller for writing data into and reading data from a memory
    55.
    发明授权
    Memory controller for writing data into and reading data from a memory 有权
    用于将数据写入并从存储器读取数据的存储器控​​制器

    公开(公告)号:US07900095B2

    公开(公告)日:2011-03-01

    申请号:US12117985

    申请日:2008-05-09

    IPC分类号: G06F11/00

    CPC分类号: G06F11/1012

    摘要: According to an aspect of an embodiment, a memory controller for writing data into and reading data from a memory, comprises an error detector for detecting an error of data stored in the memory when reading the data, a time stamper for generating first time information indicative of the time when data is written into the memory, the first time information being written together with the data into an address location of the memory where the error has been detected, a timer for measuring a time period from the time indicated by the first time information until the time of subsequent occurrence of an error of data stored in said address location and a counter for counting a number of accesses to the address location over the time period.

    摘要翻译: 根据实施例的一个方面,一种用于将数据写入存储器并从其中读取数据的存储器控​​制器包括用于在读取数据时检测存储在存储器中的数据的错误的误差检测器,用于产生指示的第一时间信息的时间戳 在将数据写入存储器的时间中,将第一时间信息与数据一起写入已经检测到错误的存储器的地址位置;计时器,用于测量从第一次指示的时间开始的时间段 直到随后发生存储在所述地址位置中的数据的错误的时间的信息以及用于计数在该时间段内对地址位置的访问次数的计数器。

    Wave receiving device and method of determining wave reception
    56.
    发明授权
    Wave receiving device and method of determining wave reception 有权
    波接收装置及确定波接收的方法

    公开(公告)号:US07880721B2

    公开(公告)日:2011-02-01

    申请号:US11350926

    申请日:2006-02-10

    IPC分类号: G09G5/08

    CPC分类号: G01S11/16

    摘要: An ultrasonic receiver receives an ultrasonic signal having a period in which an amplitude thereof progressively increases as time elapses. A pattern matching unit determines whether a comparative pattern, which is generated as a result of comparison between the respective maximum amplitude values of a plurality of successive waves of said wave signal and a threshold value set by a threshold setting unit, matches a reference pattern or not during the period of the ultrasonic signal. The pattern matching unit determines that the ultrasonic receiver has successfully received the ultrasonic signal if the comparative pattern matches the reference pattern.

    摘要翻译: 超声波接收器接收具有时间间隔逐渐增加的周期的超声波信号。 模式匹配单元确定作为所述波信号的多个连续波的各个最大振幅值与由阈值设置单元设置的阈值之间的比较结果而产生的比较模式是否匹配参考模式或 不是在超声波信号的期间。 如果比较模式与参考模式匹配,模式匹配单元确定超声波接收器已成功接收到超声波信号。

    Method for performing a vapor deposition process
    58.
    发明授权
    Method for performing a vapor deposition process 有权
    进行气相沉积工艺的方法

    公开(公告)号:US07867560B2

    公开(公告)日:2011-01-11

    申请号:US11692801

    申请日:2007-03-28

    申请人: Kenji Suzuki

    发明人: Kenji Suzuki

    IPC分类号: C23C16/00

    摘要: A method for performing a vapor deposition process is described. The vapor deposition process involves the deposition of a thin film, such as a ruthenium (Ru), rhenium (Re) or rhodium (Rh) film, on a substrate using a solid-phase or liquid-phase precursor. The method facilitates the initiation of gas lines to supply dilution gas(es), carrier gas(es) and precursor vapor to the deposition system, the pre-heating and heating of the substrate, the pre-conditioning of the film precursor vaporization system, and the flow stabilization of the carrier gas(es) and the precursor vapor, for example.

    摘要翻译: 描述了一种执行气相沉积工艺的方法。 气相沉积工艺涉及使用固相或液相前体在基片上沉积诸如钌(Ru),铼(Re)或铑(Rh)薄膜的薄膜。 该方法有助于气体管线的启动,以向沉积系统提供稀释气体,载气和前体蒸汽,衬底的预热和加热,膜前体蒸发系统的预调节, 以及例如载气和前体蒸气的流动稳定。

    Method for reducing carbon monoxide poisoning in a thin film deposition system
    59.
    发明授权
    Method for reducing carbon monoxide poisoning in a thin film deposition system 有权
    降低薄膜沉积系统中一氧化碳中毒的方法

    公开(公告)号:US07858522B2

    公开(公告)日:2010-12-28

    申请号:US11277919

    申请日:2006-03-29

    IPC分类号: H01L21/44

    摘要: A method for introducing a precursor vapor to a process chamber configured for forming a thin film on a substrate is described. The method includes transporting a process gas containing metal precursor vapor and a CO delivery gas to a process chamber, and introducing a CO saturation gas to the precursor vapor in the process chamber and optionally adjusting the spatial distribution of the CO saturation gas addition in order to affect improvements to the properties of the deposited film.

    摘要翻译: 描述了将前体蒸气引入配置用于在基板上形成薄膜的处理室的方法。 该方法包括将含有金属前体蒸汽和CO输送气体的处理气体输送到处理室,并将CO饱和气体引入处理室中的前体蒸气,并任选地调节CO饱和气体添加的空间分布,以便 影响沉积膜性能的改善。

    Ampule tray for and method of precursor surface area
    60.
    发明授权
    Ampule tray for and method of precursor surface area 有权
    安培盘和前体表面积方法

    公开(公告)号:US07846256B2

    公开(公告)日:2010-12-07

    申请号:US11678122

    申请日:2007-02-23

    申请人: Kenji Suzuki

    发明人: Kenji Suzuki

    IPC分类号: C23C16/00 B01D7/00

    CPC分类号: C23C16/4481

    摘要: A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system includes one or more trays. Each tray is configured to support and retain a solid precursor, and permit the flow of a carrier gas. Furthermore, each tray comprises precursor stabilization elements designed to maintain a substantially level solid precursor powder during transport of the multi-tray precursor evaporation system.

    摘要翻译: 描述了与高电导蒸气传输系统耦合的高电导多托盘膜前体蒸发系统,以通过增加膜前体的暴露表面积来增加沉积速率。 多托盘膜前体蒸发系统包括一个或多个托盘。 每个托盘构造成支撑和保持固体前体,并且允许载气的流动。 此外,每个托盘包括被设计成在运输多托盘前体蒸发系统期间维持大致水平的固体前体粉末的前体稳定化元件。