公开(公告)号：US08405463B2

公开(公告)日：2013-03-26

申请号：US13115698

申请日：2011-05-25

Applicant: Takahiko Nakamura ,  Keiji Sato ,  Hitoshi Takeuchi ,  Kiyoshi Aratake ,  Masashi Numata

Inventor： Takahiko Nakamura ,  Keiji Sato ,  Hitoshi Takeuchi ,  Kiyoshi Aratake ,  Masashi Numata

IPC: H05K7/02 ,  H03B5/32

CPC classification number: H03H9/1021 ,  B81B7/007 ,  B81B2207/096 ,  H01L21/486 ,  H01L21/50 ,  H01L23/10 ,  H01L23/49827 ,  H01L24/13 ,  H01L24/16 ,  H01L24/29 ,  H01L24/32 ,  H01L24/81 ,  H01L24/83 ,  H01L2224/13144 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/29294 ,  H01L2224/29339 ,  H01L2224/32227 ,  H01L2224/81191 ,  H01L2224/81203 ,  H01L2224/81444 ,  H01L2224/81895 ,  H01L2224/832 ,  H01L2224/83801 ,  H01L2924/1461 ,  H01L2924/161 ,  H05K1/114 ,  H05K3/4046 ,  H05K2201/10075 ,  H05K2201/10371 ,  Y10T29/49124 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An electronic device is provided which includes a base, a through-electrode that passes through the base and from which an insulating material on an end face thereof is removed by polishing, a circuit pattern that is formed on an end face of the through-electrode, an electronic component that is disposed via an internal wiring formed on the circuit pattern, an electrode pattern that is formed on the surface of the base opposite to the surface on which the electronic component is disposed and that is connected to the other end face of the through-electrode, an external electrode that is formed on the electrode pattern, and a cap that is bonded to the base so as to protect the electronic component on the base.

Abstract translation: 提供了一种电子器件，其包括基底，穿过基底的通孔，通过抛光除去其端面上的绝缘材料，形成在通孔的端面上的电路图案 ，电子部件，其经由形成在所述电路图案上的内部配线设置，电极图案，形成在所述基板的与所述电子部件配置的表面相反的表面上，并且连接到所述电子部件的另一端面 所述贯通电极，形成在所述电极图案上的外部电极和与所述基底接合以保护所述电子部件在所述基部上的盖。

公开(公告)号：US08013499B2

公开(公告)日：2011-09-06

申请号：US12791286

申请日：2010-06-01

Applicant: Kiyoshi Aratake ,  Yasuo Kawada

Inventor： Kiyoshi Aratake ,  Yasuo Kawada

IPC: H01L41/04 ,  H01L41/08

CPC classification number: H03H3/02 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: There is provided a method of manufacturing a package 1 having a base substrate 10 and a lid substrate 20 bonded to each other and both formed of a glass base material; and a cavity C formed between the both substrates for storing an encapsulated object 2 in a state of being hermetically encapsulated, including: a depression forming step for forming a depression C1 for a cavity which defines the cavity when the both substrates are superimposed to each other on at least one of the both substrates; and a bonding step for superimposing the both substrates so as to store the encapsulated object in the depression and then bonding the both substrates to encapsulate the encapsulated object in the cavity, characterized in that in the depression forming step, printed layers 12 are laminated on an upper surface of a flat plate-shaped glass base material 11 in a frame shape in plan view by screen printing, and then the printed layers and the glass base material are baked at the same time to form the depression.

Abstract translation: 提供一种制造封装1的方法，该封装1具有彼此接合且均由玻璃基材形成的基底基板10和盖基板20; 以及形成在两个基板之间的空腔C，用于以密封的状态存储被封装物体2，包括：凹陷形成步骤，用于在两个基板彼此叠置时形成限定空腔的空腔的凹陷C1 在两个基材中的至少一个上; 以及结合步骤，用于叠加两个基板，以将封装物体存储在凹陷中，然后将两个基板接合以将封装物体封装在空腔中，其特征在于，在凹陷形成步骤中，将印刷层12层压在 通过丝网印刷在平面图中以平板状的平板状玻璃基材11的上表面，然后同时烘烤印刷层和玻璃基材以形成凹陷。

公开(公告)号：US07936114B2

公开(公告)日：2011-05-03

申请号：US12853659

申请日：2010-08-10

Applicant: Masashi Numata ,  Kiyoshi Aratake ,  Kazuyoshi Sugama ,  Sumihiko Kurita

Inventor： Masashi Numata ,  Kiyoshi Aratake ,  Kazuyoshi Sugama ,  Sumihiko Kurita

IPC: H01L41/047 ,  H01L41/053

CPC classification number: H01L23/055 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/3011 ,  H03H3/02 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42 ,  H01L2924/00

Abstract: The piezoelectric vibrator of the invention comprises a base substrate, a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate, a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate, an external electrode formed on the lower face of the base substrate, a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity, and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed through hardening of a paste containing a plurality of metal fine particles and a plurality of glass beads.

Abstract translation: 本发明的压电振动器包括：底座基板，形成有凹部的盖基板，并且在与基板相对的凹部的状态下与基板接合;压电振动部件， 基底基板，其被容纳在由基底基板和盖基板之间的凹部形成的空腔中，形成在基底基板的下表面上的外部电极，形成在基底和底部基板的底部的贯通电极 基板，并与外部电极电气连接，同时保持空腔内的气密性;以及布线电极，形成在基底基板的上表面上，以将通孔电连接到接合的压电振动件; 其特征在于，所述贯通电极是通过硬化含有多个金属微粒和多个玻璃珠的糊料形成的。

公开(公告)号：US20110025166A1

公开(公告)日：2011-02-03

申请号：US12845142

申请日：2010-07-28

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/1021 ,  H03H2003/026 ,  H03H2003/0478 ,  H03H2003/0492 ,  H03H2009/02165 ,  Y10T29/42

Abstract: A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material.

Abstract translation: 提供一种能够有效制造的压电振动器及其制造方法。 压电振子包括：音叉型压电振动片，其具有一对振动臂部，形成在振动臂部的基端部的激励电极，以及形成在振动臂部的前端部的重量金属膜 ; 以及其中容纳压电振动片的封装。 在基端部和振动臂部的前端部之间的中间部分形成有形成有激光辐射缺陷的吸气膜。 包含在激发电极中的第一金属膜，使用相同的材​​料形成包含在重量金属膜中的第二金属膜和吸气膜。

公开(公告)号：US20100320872A1

公开(公告)日：2010-12-23

申请号：US12853659

申请日：2010-08-10

Applicant: Masashi NUMATA ,  Kiyoshi Aratake ,  Kazuyoshi Sugama ,  Sumihiko Kurita

Inventor： Masashi NUMATA ,  Kiyoshi Aratake ,  Kazuyoshi Sugama ,  Sumihiko Kurita

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H01L23/055 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/3011 ,  H03H3/02 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42 ,  H01L2924/00

Abstract: The piezoelectric vibrator of the invention comprises a base substrate, a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate, a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate, an external electrode formed on the lower face of the base substrate, a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity, and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed through hardening of a paste containing a plurality of metal fine particles and a plurality of glass beads.

Abstract translation: 本发明的压电振动器包括：底座基板，形成有凹部的盖基板，并且在与基板相对的凹部的状态下与基板接合;压电振动部件， 基底基板，其被容纳在由基底基板和盖基板之间的凹部形成的空腔中，形成在基底基板的下表面上的外部电极，形成在基底和底部基板的底部的贯通电极 基板，并与外部电极电气连接，同时保持空腔内的气密性;以及布线电极，形成在基底基板的上表面上，以将通孔电连接到接合的压电振动件; 其特征在于，所述贯通电极是通过硬化含有多个金属微粒和多个玻璃珠的糊料形成的。

公开(公告)号：US20100308696A1

公开(公告)日：2010-12-09

申请号：US12858171

申请日：2010-08-17

Applicant: Masashi Numata ,  Kiyoshi Aratake

Inventor： Masashi Numata ,  Kiyoshi Aratake

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  H01L23/055 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/3011 ,  H03H9/0519 ,  H03H9/0542 ,  H03H9/1021 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49165 ,  Y10T428/2982 ,  H01L2924/00

Abstract: There is provided a piezoelectric vibrator 1 that includes a base substrate 2, a lid substrate 3, a piezoelectric vibrating reed 4, a pair of external electrodes 38 and 39, a pair of through electrodes 32 and 33, and routing electrodes 36 and 37. The lid substrate 3 includes a recess 3a for a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reed 4 is bonded to the upper surface of the base substrate so as to be received in a cavity that is formed between both the substrates. The pair of external electrodes 38 and 39 is formed on the lower surface of the base substrate. The pair of through electrodes 32 and 33 is formed by hardening paste P, which contains a plurality of metal fine particles and a plurality of metal beads P1, so as to pass through the base substrate, maintains airtightness in the cavity, and is electrically connected to the pair of external electrodes, respectively. The routing electrodes 36 and 37 are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The melting point of the metal bead is higher than the firing temperature of the paste.

Abstract translation: 提供了一种压电振动器1，其包括基底基板2，盖基板3，压电振动片4，一对外部电极38和39，一对贯通电极32和33以及布线电极36和37。 盖基板3包括用于空腔的凹部3a，并且与基底基板接合，使得凹部面向基底。 压电振动片4结合到基底基板的上表面，以便被容纳在形成在两个基片之间的空腔中。 一对外部电极38和39形成在基底基板的下表面上。 一对贯通电极32,33由含有多个金属微粒和多个金属珠P1的硬化浆料P形成，以便通过基底基板，保持空腔中的气密性，并且电连接 分别连接到一对外部电极。 布线电极36和37形成在基底基板的上表面上，并将一对通孔电连接到压电振动片。 金属珠的熔点高于糊料的烧成温度。

公开(公告)号：US20100308694A1

公开(公告)日：2010-12-09

申请号：US12857234

申请日：2010-08-16

Applicant: Masashi NUMATA ,  Kiyoshi Aratake ,  Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

Inventor： Masashi NUMATA ,  Kiyoshi Aratake ,  Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

IPC: H01L41/053 ,  H01L41/22 ,  H01L41/047 ,  B23Q3/00

CPC classification number: H03H3/02 ,  H01L2224/16225 ,  H01L2924/00011 ,  H01L2924/00014 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42 ,  Y10T29/49165 ,  H01L2224/0401

Abstract: The piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate; an external electrode formed on the lower face of the base substrate; a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity; and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed of a cylindrical body, which is formed of a glass material to have two flat ends and a thickness substantially equal to that of the base substrate, and is implanted in the through-hole running through the base substrate; and an electroconductive core member which is formed to have two flat ends and a thickness substantially equal to that of the base substrate and is inserted into the center hole of the cylindrical body; and the through-hole, the cylindrical body and the core member are integrally fixed to each other by firing.

Abstract translation: 压电振子包括基底; 盖基板，其中形成有空腔凹部，并且在凹部面向基底基板的状态下结合到基底基板; 压电振动构件，其被接合到基底基板的上表面，其状态是将其容纳在由基底基板和盖基板之间的凹部形成的空腔中; 形成在所述基底基板的下表面上的外部电极; 形成在基底基板内并通过基底基板的贯通电极，与外部电极电连接，同时保持腔内的气密性; 以及布线电极，形成在所述基底基板的上表面上，以将所述通孔电连接到所述接合的压电振动部件; 其特征在于，所述贯通电极由圆筒体形成，所述圆筒体由玻璃材料形成，具有两个平坦的端部，并且基本上等于所述基底基板的厚度，并且被植入穿过所述基底基板的所述通孔中; 以及导电芯体，其形成为具有两个平坦端部，并且具有基本上等于所述基底基板的厚度并且被插入到所述圆筒体的中心孔中的厚度; 并且通孔，筒体和芯部件通过烧结而彼此一体地固定。

公开(公告)号：US20100237740A1

公开(公告)日：2010-09-23

申请号：US12794180

申请日：2010-06-04

Applicant: Kiyoshi Aratake ,  Yasuo Kawada

Inventor： Kiyoshi Aratake ,  Yasuo Kawada

IPC: H01L41/053 ,  H01L41/04 ,  H01L41/22

CPC classification number: H03H9/1021 ,  H03H9/21 ,  Y10T29/42 ,  Y10T29/49126 ,  Y10T29/49165 ,  Y10T29/49798

Abstract: There is provided a method of manufacturing piezoelectric vibrators 1. The method includes a process for through holes 35 and 36, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the recesses for cavities C; a process for patterning a bonding layer 30, pairs of mounting layers, and pairs of extraction electrode layers 33 and 34 on the upper surface of the base substrate wafer with the same conductive material; and a process for electrically isolating the extraction electrode layers 34 in the middle by irradiating a part (area S2) of the extraction electrode layers 34, which are formed between the bonding layer and openings of through holes 36, with laser light after both the wafers are anodically bonded to each other. The bonding layer 30 surrounds the recesses, the pairs of mounting layers are in the recesses, and the pairs of extraction electrode layers 33 and 34 electrically connect the pairs of mounting layers to the bonding layer.

Abstract translation: 提供了制造压电振动器1的方法。该方法包括通孔35和36的方法，其通过基底晶片，使得通孔的开口朝向空腔C的凹部的外侧开口; 用相同的导电材料在基底晶片的上表面上构图接合层30，成对安装层和成对的引出电极层33和34的工艺; 以及通过在两个晶片之后用激光照射形成在通孔36的接合层和开口之间的引出电极层34的部分（区域S2），使中间的引出电极层34电隔离的工艺 相互阳极结合。 接合层30围绕凹部，这些安装层位于凹部中，并且成对的引出电极层33和34将成对的安装层电连接到接合层。

公开(公告)号：US07589458B2

公开(公告)日：2009-09-15

申请号：US12360409

申请日：2009-01-27

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H01L41/08

CPC classification number: H03H9/1035 ,  H01L2924/0002 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/215 ,  H01L2924/00

Abstract: To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portion between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion and the bonding electrode is disposed on the inner side of the recess portion.

Abstract translation: 为了提供能够防止接合电极被腐蚀并且容易保持接合电极的长时间稳定性的石英晶体振子，振荡器和电子设备，石英振子具有形成的石英振动板 通过围绕石英晶体振动片由框状部分，密封容器，其包括盖构件和板状形状的底座构件，用于在厚度方向插入石英振动板，接合电极设置在盖 构件和石英晶体振动板，并且在基底构件和石英振动板之间并且电连接到内部电极，以及用于保护接合电极的保护膜，设置有凹陷到密封的内侧的凹部 容器从盖构件和石英振动板之间的外边缘部分 以及在所述基座部件和所述石英振动板之间的外缘部，所述保护膜设置在所述凹部，所述接合电极配置在所述凹部的内侧。

公开(公告)号：US20090140611A1

公开(公告)日：2009-06-04

申请号：US12360409

申请日：2009-01-27

Applicant: Kiyoshi Aratake

Inventor： Kiyoshi Aratake

IPC: H01L41/053

CPC classification number: H03H9/1035 ,  H01L2924/0002 ,  H03H9/0542 ,  H03H9/0595 ,  H03H9/215 ,  H01L2924/00

Abstract: To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portion between the base member and the quartz crystal vibrating plate, the protecting film is provided at the recess portion and the bonding electrode is disposed on the inner side of the recess portion.

Abstract translation: 为了提供能够防止接合电极被腐蚀并且容易保持接合电极的长时间稳定性的石英晶体振子，振荡器和电子设备，石英振子具有形成的石英振动板 通过围绕石英晶体振动片由框状部分，密封容器，其包括盖构件和板状形状的底座构件，用于在厚度方向插入石英振动板，接合电极设置在盖 构件和石英晶体振动板，并且在基底构件和石英振动板之间并且电连接到内部电极，以及用于保护接合电极的保护膜，设置有凹陷到密封的内侧的凹部 容器从盖构件和石英振动板之间的外边缘部分 以及在所述基座部件和所述石英振动板之间的外缘部，所述保护膜设置在所述凹部，所述接合电极配置在所述凹部的内侧。