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公开(公告)号:US20070187621A1
公开(公告)日:2007-08-16
申请号:US11600646
申请日:2006-11-15
申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
IPC分类号: H01J37/08
CPC分类号: H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20070158582A1
公开(公告)日:2007-07-12
申请号:US11599973
申请日:2006-11-15
申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Alexander Groholski , Richard Comunale
发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill , Alexander Groholski , Richard Comunale
IPC分类号: H01J27/00
CPC分类号: H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20070158580A1
公开(公告)日:2007-07-12
申请号:US11599915
申请日:2006-11-15
申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
IPC分类号: H01J27/00
CPC分类号: H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J49/142 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20070158557A1
公开(公告)日:2007-07-12
申请号:US11600515
申请日:2006-11-15
申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
IPC分类号: G21K7/00
CPC分类号: H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20070158556A1
公开(公告)日:2007-07-12
申请号:US11600513
申请日:2006-11-15
申请人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
发明人: Billy Ward , John Notte , Louis Farkas , Randall Percival , Raymond Hill
IPC分类号: G21K7/00
CPC分类号: H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20060255284A1
公开(公告)日:2006-11-16
申请号:US11433048
申请日:2006-05-12
申请人: Raymond Hill , Steve Rosenberg , Daniel Downer
发明人: Raymond Hill , Steve Rosenberg , Daniel Downer
IPC分类号: H01J3/14
CPC分类号: H01J37/1474 , H01J37/1477 , H01J37/28 , H01J37/302 , H01J37/304 , H01J37/3056 , H01J2237/1516 , H01J2237/30461 , H01J2237/30483
摘要: Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
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公开(公告)号:US09000396B2
公开(公告)日:2015-04-07
申请号:US13277658
申请日:2011-10-20
申请人: Raymond Hill , Shawn McVey , John Notte, IV
发明人: Raymond Hill , Shawn McVey , John Notte, IV
IPC分类号: G01K1/08 , H01J43/06 , H01J37/244
CPC分类号: H01J43/06 , H01J37/244 , H01J2237/2444 , H01J2237/24455 , H01J2237/2448 , H01J2237/24495 , H01J2237/24564 , H01J2237/24571 , H01J2237/2802
摘要: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
摘要翻译: 公开了包括以下的装置,系统和方法:(a)第一材料层,其位于支撑结构的第一表面上并被配置为响应于撞击第一层的入射带电粒子产生二次电子,第一层 包括被配置为允许所述入射带电粒子的一部分通过所述孔的孔; 和(b)第二材料层,其位于所述支撑结构的第二表面上并且与所述第一层分离0.5cm或更大的距离,所述第二层被配置为响应于穿过所述第一层的带电粒子而产生二次电子 孔并撞击第二层,其中装置是带电粒子检测器。
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公开(公告)号:US20120068068A1
公开(公告)日:2012-03-22
申请号:US13277658
申请日:2011-10-20
申请人: Raymond Hill , Shawn McVey , John Notte, IV
发明人: Raymond Hill , Shawn McVey , John Notte, IV
CPC分类号: H01J43/06 , H01J37/244 , H01J2237/2444 , H01J2237/24455 , H01J2237/2448 , H01J2237/24495 , H01J2237/24564 , H01J2237/24571 , H01J2237/2802
摘要: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
摘要翻译: 公开了包括以下的装置,系统和方法:(a)第一材料层,其位于支撑结构的第一表面上并被配置为响应于撞击第一层的入射带电粒子产生二次电子,第一层 包括被配置为允许所述入射带电粒子的一部分通过所述孔的孔; 和(b)第二材料层,其位于所述支撑结构的第二表面上并且与所述第一层分离0.5cm或更大的距离,所述第二层被配置为响应于穿过所述第一层的带电粒子而产生二次电子 孔并撞击第二层,其中装置是带电粒子检测器。
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公开(公告)号:US07745801B2
公开(公告)日:2010-06-29
申请号:US11599973
申请日:2006-11-15
申请人: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Alexander Groholski , Richard Comunale
发明人: Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Alexander Groholski , Richard Comunale
摘要: Ion sources, systems and methods are disclosed.
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公开(公告)号:US20090289196A1
公开(公告)日:2009-11-26
申请号:US12533939
申请日:2009-07-31
IPC分类号: H01J3/14
CPC分类号: H01J37/1474 , H01J37/1477 , H01J37/28 , H01J37/302 , H01J37/304 , H01J37/3056 , H01J2237/1516 , H01J2237/30461 , H01J2237/30483
摘要: Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
摘要翻译: 当光束重新定位时通过偏转系统运送的带电粒子没有被接收到正确的偏转力并被误导。 通过将信号独立地应用于偏转系统的多个阶段,减少了像素变化期间的误导粒子的数量。
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