Charged particle detectors
    57.
    发明授权
    Charged particle detectors 有权
    带电粒子探测器

    公开(公告)号:US09000396B2

    公开(公告)日:2015-04-07

    申请号:US13277658

    申请日:2011-10-20

    IPC分类号: G01K1/08 H01J43/06 H01J37/244

    摘要: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.

    摘要翻译: 公开了包括以下的装置,系统和方法:(a)第一材料层,其位于支撑结构的第一表面上并被配置为响应于撞击第一层的入射带电粒子产生二次电子,第一层 包括被配置为允许所述入射带电粒子的一部分通过所述孔的孔; 和(b)第二材料层,其位于所述支撑结构的第二表面上并且与所述第一层分离0.5cm或更大的距离,所述第二层被配置为响应于穿过所述第一层的带电粒子而产生二次电子 孔并撞击第二层,其中装置是带电粒子检测器。

    CHARGED PARTICLE DETECTORS
    58.
    发明申请
    CHARGED PARTICLE DETECTORS 有权
    充电颗粒检测器

    公开(公告)号:US20120068068A1

    公开(公告)日:2012-03-22

    申请号:US13277658

    申请日:2011-10-20

    IPC分类号: H01J37/26 G01T1/28

    摘要: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.

    摘要翻译: 公开了包括以下的装置,系统和方法:(a)第一材料层,其位于支撑结构的第一表面上并被配置为响应于撞击第一层的入射带电粒子产生二次电子,第一层 包括被配置为允许所述入射带电粒子的一部分通过所述孔的孔; 和(b)第二材料层,其位于所述支撑结构的第二表面上并且与所述第一层分离0.5cm或更大的距离,所述第二层被配置为响应于穿过所述第一层的带电粒子而产生二次电子 孔并撞击第二层,其中装置是带电粒子检测器。