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公开(公告)号:US11541653B2
公开(公告)日:2023-01-03
申请号:US16882215
申请日:2020-05-22
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Domenico Giusti , Andrea Nicola Colecchia , Gaetano Santoruvo
IPC: B41J2/03 , H01L27/20 , H01L41/09 , H01L41/314
Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.
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52.
公开(公告)号:US10946653B2
公开(公告)日:2021-03-16
申请号:US16414619
申请日:2019-05-16
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Domenico Giusti , Mauro Cattaneo , Donata Asnaghi
Abstract: The fluid ejection microfluidic device, has a substrate; a buried cavity within the first substrate; a membrane formed by the first substrate and extending between the buried cavity and a first main surface of the substrate; and an access channel extending through the substrate, laterally and externally to the buried cavity and to the membrane and isolated with respect to the buried cavity. A sealed actuation structure extends over the first main surface of the substrate. A containment layer, of polymeric material, extends over the first main surface of the substrate and forms a fluid containment chamber accommodating the sealed actuation structure. A nozzle body of semiconductor material closes the fluid containment chamber at the top and is traversed by an ejection opening, forming, together with the fluid containment chamber and the access channel, a fluidic path.
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公开(公告)号:US10513428B2
公开(公告)日:2019-12-24
申请号:US15867491
申请日:2018-01-10
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Domenico Giusti
Abstract: What is described is a MEMS device comprising a piezoelectric actuator, which includes a film of piezoelectric material. The film is penetrated by a plurality of holes.
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公开(公告)号:US10356531B2
公开(公告)日:2019-07-16
申请号:US15629518
申请日:2017-06-21
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Domenico Giusti , Sebastiano Conti
IPC: H04R17/02 , B81B3/00 , B81C1/00 , H01L41/04 , H01L41/113 , H01L41/312 , H04R31/00 , H04R19/00 , H04R19/04 , G01L9/00
Abstract: A MEMS sensor, in particular a microphone, of a piezoelectric type, formed in a membrane of semiconductor material accommodating a compliant portion, which extends from a first surface to a second surface of the membrane. The compliant portion has a Young's modulus lower than the rest of the membrane. A sensitive region having piezoelectric material extends on the first surface, over the compliant portion and is fixed at its ends to the membrane on opposite sides of the compliant portion. A third area of the membrane, arranged between the compliant portion and the second surface, forms a hinge element.
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公开(公告)号:US10024738B2
公开(公告)日:2018-07-17
申请号:US14539640
申请日:2014-11-12
Applicant: STMicroelectronics S.r.l.
Inventor: Sebastiano Conti , Daniele Prati , Domenico Giusti
IPC: G01L1/14
Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.
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公开(公告)号:US20180052066A1
公开(公告)日:2018-02-22
申请号:US15783894
申请日:2017-10-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Alberto Pagani , Bruno Murari , Marco Ferrera , Domenico Giusti , Daniele Caltabiano
Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.
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57.
公开(公告)号:US09843779B2
公开(公告)日:2017-12-12
申请号:US15162367
申请日:2016-05-23
Applicant: STMicroelectronics S.r.l.
Inventor: Domenico Giusti , Roberto Carminati
CPC classification number: H04N9/3135 , B81B3/0045 , G02B7/1821 , G02B26/0858 , G02B26/101 , G02B26/105 , H04N9/3173
Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
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公开(公告)号:US20150367641A1
公开(公告)日:2015-12-24
申请号:US14310898
申请日:2014-06-20
Applicant: STMicroelectronics S.r.l.
Inventor: Domenico Giusti , Daniele Prati
CPC classification number: B41J2/14064 , B41J2/14056 , B41J2/14072 , B41J2/1412 , B41J2/14129 , B41J2002/14403 , B41J2202/11 , Y10T29/49352
Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.
Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。
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公开(公告)号:US12024422B2
公开(公告)日:2024-07-02
申请号:US17161367
申请日:2021-01-28
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Enri Duqi , Lorenzo Baldo , Domenico Giusti
CPC classification number: B81C1/00238 , B81B7/0051 , B81B7/007 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2203/0118 , B81B2203/0127 , B81B2203/0315 , B81B2207/012 , B81B2207/07 , B81C2201/0133 , B81C2203/032 , B81C2203/035 , B81C2203/0792
Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.
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60.
公开(公告)号:US11810604B2
公开(公告)日:2023-11-07
申请号:US17949712
申请日:2022-09-21
Applicant: STMICROELECTRONICS S.r.l.
Inventor: Domenico Giusti , Marco Ferrera
CPC classification number: G11B5/6058 , G11B5/483 , G11B5/73919 , H10N30/03 , H10N30/2047
Abstract: Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.
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