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    Arrangement for and method of characterising the polarization properties of an optical system
    53.
    发明授权
    Arrangement for and method of characterising the polarization properties of an optical system 有权
    表征光学系统的偏振特性的方法和方法

    公开(公告)号：US09274440B2

    公开(公告)日：2016-03-01

    申请号：US13560916

    申请日：2012-07-27

    申请人： Uwe Hempelmann ,  Markus Mengel ,  Peter Huber

    发明人： Uwe Hempelmann ,  Markus Mengel ,  Peter Huber

    IPC分类号： G03B27/72 ,  G03F7/20

    CPC分类号： G03F7/7085 ,  G03F7/70566

    摘要： An arrangement for and a method of characterizing the polarization properties of an optical system, in particular an optical system of a microlithographic projection exposure apparatus. The arrangement includes at least one polarization state generator (130, 230, 330) which sets a defined polarization state of radiation incident on the optical system, and a polarization state detector (140, 240, 340) adapted to measure the exit polarization state of radiation issuing from the optical system, wherein the optical system is designed for a working wavelength of less than 15 nm, and wherein the polarization state generator and/or the polarization state detector are so designed that their polarization-optical action on an incident light beam is substantially constant over an angle spectrum of the light beam of at least 10°.

    摘要翻译： 用于表征光学系统的偏振特性的装置和方法，特别是微光刻投影曝光装置的光学系统。 该装置包括至少一个偏振状态发生器（130,230,330），其设置入射在光学系统上的限定的偏振状态，以及偏振态检测器（140,240,340），其适于测量出偏振状态 从光学系统发出的辐射，其中光学系统被设计用于小于15nm的工作波长，并且其中偏振状态发生器和/或偏振态检测器被设计成使得它们对入射光束的偏振光学作用 在至少10°的光束的角度光谱上基本恒定。

    Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same
    55.
    发明授权
    Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same 有权
    用于UV辐射反射的光学元件，其制造方法和包括该光学元件的投影曝光设备

    公开(公告)号：US08488103B2

    公开(公告)日：2013-07-16

    申请号：US12780035

    申请日：2010-05-14

    申请人： Alexandra Pazidis ,  Christoph Zaczek ,  Horst Feldermann ,  Peter Huber

    发明人： Alexandra Pazidis ,  Christoph Zaczek ,  Horst Feldermann ,  Peter Huber

    IPC分类号： G03B27/54 ,  G03B27/42 ,  G02B5/08

    CPC分类号： G02B5/0891 ,  G02B5/0833 ,  G03F7/70316 ,  G03F7/70958

    摘要： An optical element (1a, 1b) for reflecting UV radiation at an operating wavelength below 250 nm, preferably at 193 nm, which has a substrate (2a, 2b), a reflective layer (3a, 3b) made of aluminum superimposed on the substrate (2a, 2b). The reflective aluminum layer (3a, 3b) is not transparent to UV radiation and is (111)-plane oriented. The reflective optical element (1a, 1b) has a reflectivity of more than 85%, preferably of more than 88%, and even more preferably of more than 92%, in a range of incident angles of at least 10°, preferably of at least 15°, at the operating wavelength. Also disclosed is an optical element having a reflective layer made from a material having a melting point higher than that of aluminum, as well as methods for producing such optical elements, and optical arrangements incorporating such optical elements.

    摘要翻译： 一种用于在工作波长低于250nm（优选193nm）下反射UV辐射的光学元件（1a，1b），其具有衬底（2a，2b），叠加在衬底上的由铝制成的反射层（3a，3b） （2a，2b）。 反射铝层（3a，3b）对于紫外线辐射是不透明的，并且是（111）平面取向的。 反射光学元件（1a，1b）在入射角至少为10°的范围内具有大于85％，优选大于88％，甚至更优选大于92％的反射率，优选地为 至少15°，在工作波长。 还公开了具有由熔点高于铝的材料制成的反射层的光学元件，以及用于制造这种光学元件的方法，以及包括这种光学元件的光学装置。

    Sliding pendulum bearing
    56.
    发明授权
    Sliding pendulum bearing 有权
    滑动摆轴承

    公开(公告)号：US08371075B2

    公开(公告)日：2013-02-12

    申请号：US12096532

    申请日：2006-10-17

    申请人： Peter Huber ,  Rainer Roos

    发明人： Peter Huber ,  Rainer Roos

    IPC分类号： E04H9/02 ,  E04B1/98

    CPC分类号： E04H9/023 ,  F16C17/03 ,  F16C23/043 ,  F16C33/201

    摘要： For uncoupling a building structure from the ground a sliding pendulum bearing is suitable for the protection of building structures in the case of movements of the ground, due to earthquakes for example, or as an alternative for conventional deformation bearings. The bearing has a first sliding face with a first concave sliding face and a sliding shoe, which is in sliding contact with the first sliding face of the first sliding plate. A low friction material of a low-friction plastic is entrapped in the sliding shoe which has elastoplastic equilibrium properties. In particular as a low friction material a ultra high molecular weight polyethylene (UHMWPE) or polytetrafluoroethylene (PTFE) is utilized. After a displacement entailed by an external force the sliding shoe returns of its own accord into a stable equilibrium position.

    摘要翻译： 为了将建筑结构从地面上脱开，滑动摆动轴承适合于在地面运动的情况下由于地震而进行的建筑结构的保护，或者作为常规变形轴承的替代方案。 该轴承具有与第一滑动板的第一滑动面滑动接触的第一滑动面和滑动鞋的第一滑动面。 低摩擦塑料的低摩擦材料被夹带在具有弹塑性平衡特性的滑靴中。 特别是作为低摩擦材料，使用超高分子量聚乙烯（UHMWPE）或聚四氟乙烯（PTFE）。 在由外力引起的位移之后，滑靴自身返回到稳定的平衡位置。

    Homogenous Cell Array
    58.
    发明申请
    Homogenous Cell Array 有权
    均匀细胞阵列

    公开(公告)号：US20110049576A1

    公开(公告)日：2011-03-03

    申请号：US12551062

    申请日：2009-08-31

    申请人： Martin Ostermayr ,  Ettore Amirante ,  Peter Huber

    发明人： Martin Ostermayr ,  Ettore Amirante ,  Peter Huber

    IPC分类号： H01L27/11 ,  H01L21/8239

    CPC分类号： H01L27/1104 ,  G11C5/025 ,  H01L27/0207 ,  H01L27/11807

    摘要： A system for terminating a homogenous cell array is disclosed. A preferred embodiment comprises a plurality of homogenous cells arranged in rows and columns to form the homogenous cell array, wherein a first homogenous cell of each column is electrically differently connected than a rest of the homogenous cells of the column.

    摘要翻译： 公开了一种用于终止均匀单元阵列的系统。 优选的实施方案包括以行和列排列以形成均匀的电池阵列的多个均质电池，其中每列的第一均匀电池与所述塔的其余均匀电池电气不同地连接。

    Method of operating a memory cell, memory cell and memory unit
    59.
    发明授权
    Method of operating a memory cell, memory cell and memory unit 有权
    操作存储单元，存储单元和存储单元的方法

    公开(公告)号：US07675799B2

    公开(公告)日：2010-03-09

    申请号：US11710859

    申请日：2007-02-26

    申请人： Peter Huber ,  Martin Ostermayr

    发明人： Peter Huber ,  Martin Ostermayr

    IPC分类号： G11C7/00

    CPC分类号： G11C11/405

    摘要： A memory system and method are described. For example, a memory cell includes a capacitance and an access circuit in association with the capacitance and having an access circuit terminal. The memory cell further includes a voltage control unit to adjust a potential at the access circuit terminal in a retention state such that a retention time of the memory cell is increased. A method of operating a memory cell includes, for example, adjusting a potential at an access circuit terminal of the memory cell to increase a retention time.

    摘要翻译： 描述了存储器系统和方法。 例如，存储单元包括与电容相关联的电容和存取电路，并具有存取电路端子。 存储单元还包括电压控制单元，用于在保持状态下调整存取电路端子处的电位，使得存储单元的保持时间增加。 操作存储单元的方法包括例如调整存储单元的存取电路端子处的电位以增加保持时间。