摘要:
A novel pyrrolopyridine derivative which is a compound represented by the formula wherein Ring A represents an optionally substituted pyridine ring; X represents an electron-attracting group; Y represents an optionally substituted divalent C1-6 chain hydrocarbon group; R1 represents an optionally substituted hydrocarbon group; and R2 and R3 each independently represents hydrogen, an optionally substituted hydrocarbon group or an optionally-substituted heterocyclic group, or R2 and R3 may form an optionally substituted ring in cooperation with the adjacent nitrogen atom, or a salt of the compound. The pyrrolopyridine derivative has vanilloid receptor agonist activity and is useful as medicines such as a preventive/therapeutic agent and analgesic for overactive bladder.
摘要:
The position detection apparatus includes a light projecting optical system which has an optical axis, and which cause two light beams symmetrical about the optical axis to enter a substrate, a light receiving optical system which receives the two light beams which have emerged from the light projecting optical system and are reflected by the substrate, a light receiving unit which is arranged at a position shifted in the optical axis direction, a detection unit which respectively detects the positions of the two light beams which have entered the light receiving unit, and a calculator which calculates the surface position of the substrate in the normal direction based on the positions of the two light beams, which are detected by the detection unit. At least one of the light projecting optical system and the light receiving optical system is shared for the two light beams.
摘要:
Disclosed is a new type of immunostimulating agent including an immunostimulating oligonucleotide complexed with a carrier which is safe and has a high transfection effect. The carrier complexed with the immunostimulating oligonucleotide to form the immunostimulating agent is a polysaccharide having β-1,3-bonds (preferably β-1,3-glucan such as schizophyllan). A preferred example of the immunostimulating oligonucleotide is one containing an unmethylated CpG motif. The polysaccharide for use is preferably modified with nucleic acid-binding functional group and/or cell membrane-affinitive functional group.
摘要:
A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.
摘要:
In a superconducting magnets for MRI configured to generate a homogeneous magnetic field and a gradient magnetic field in a space between a top superconducting magnet and a bottom superconducting magnet, the bottom superconducting magnet is provided with a supporting member that supports a helium vessel, and the supporting member is fixed to a vacuum vessel of the bottom superconducting magnet at one end, and is fixed to the floor surface in the vicinity of the end fixed to the vacuum vessel. A high-quality MR image can be thus obtained by preventing direct transmission of oscillation of the gradient coils to the superconducting magnet and reducing oscillation of the gradient coils while achieving a reduction of the overall superconducting magnet in size.
摘要:
A method for calculating a position of an image of an alignment mark formed on an object to be detected includes the steps of obtaining first information indicative of a center position in the alignment mark based on a detection signal, obtaining a waveform characteristic of the detection signal as second information, and correcting the first information based on the second information that has been obtained, and a measurement error of the center position of the alignment mark, which result from an optical system for detecting the alignment mark.
摘要:
A wavelength selecting method for selecting a wavelength of light, the light being used to detect a position of a target with a signal from an image of an alignment mark covered with resist, includes the steps of obtaining a reflectance of the resist at a position outside the alignment mark by irradiating lights having plural wavelengths to the resist at the position, and selecting one of the lights which one has a wavelength that provides the maximum value of reflectance among the reflectances measured by the measuring step or which one has a wavelength that falls within a predetermined wave range centering on the wavelength that provide the maximum reflectance.
摘要:
A method for detecting disposition of plurality of exposure shot areas of an object that is to be exposed includes a first detection step of detecting the alignment marks on the object, an evaluation step of evaluating randomness of the alignment marks based on the detection result by the first detection step, a determination step of determining a number smaller than the total number of alignment marks on the object based on the evaluation result by the evaluation step, and a second detection step of detecting the disposition of the plurality of exposure shot areas by detecting alignment marks corresponding to the number determined by the determination step.
摘要:
There is provided a method of making a gap between first and second objects have a predetermined value. The method includes steps of introducing light to an entry window on the first object, detecting an intensity of light from an exit window on the first object, the exit window being at such a position that light would enter through the entry window of the first object, reflect on the second object, and then enter the exit window of the first object if the gap has the predetermined value, and positioning the second object, with respect to a direction concerning the gap, based on an intensity of light detected in the detecting step.
摘要:
An exposure apparatus performs AGA measurement by using a predetermined sample shot group formed on a wafer, and decides an alignment parameter. The exposure apparatus executes wafer alignment processing and exposure processing by using the alignment parameter. The exposure apparatus notifies a central processing unit of AGA measurement results and the alignment parameter. An overlay inspection apparatus measures an actual exposure position on the exposed wafer, and notifies the central processing unit of the measurement result. The central processing unit optimizes alignment processing on the basis of the AGA measurement results, alignment parameter, and actually measured exposure position.