SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APPARATUS
    1.
    发明申请
    SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APPARATUS 有权
    形状测量装置,形状测量方法和曝光装置

    公开(公告)号:US20080151258A1

    公开(公告)日:2008-06-26

    申请号:US11942348

    申请日:2007-11-19

    IPC分类号: G01B9/023

    摘要: A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.

    摘要翻译: 用于测量测量对象的表面形状的形状测量方法包括将来自光源的光分成测量光和参考光,测量光倾斜地入射到测量对象的表面上,参考光入射到参考反射镜 将由测量对象反射的测量光和由参考反射镜反射的参考光引入光电转换元件,在移动测量目标的同时检测由光电转换元件测量的光和参考光形成的干涉光,并测量 基于从已经在测量对象的表面上的相同位置反射的测量光获得的干涉信号来测量目标的表面形状。

    Measuring apparatus and exposure device
    2.
    发明授权
    Measuring apparatus and exposure device 有权
    测量装置和曝光装置

    公开(公告)号:US08902430B2

    公开(公告)日:2014-12-02

    申请号:US13007006

    申请日:2011-01-14

    IPC分类号: G01B9/02

    摘要: An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.

    摘要翻译: 一种设备,包括:将从光源发射的光分成参考光和被摄体光的系统,使被摄体光进入物体,并将由物体反射的被摄体光与参考光组合;检测单元, 以检测组合的对象和参考光之间的相干光,设置在参考光或被摄体光的光路内的元件,被配置为改变参考光和被摄体光之间的路径长度差,以及相对于第 参考光和被摄体光在检测单元的光接收表面中;以及位置可变机构,被配置为使得光学元件的位置可变,其中,通过改变元件的位置,光程长度差 并且相对位置被独立调整。

    MEASURING APPARATUS AND EXPOSURE DEVICE
    3.
    发明申请
    MEASURING APPARATUS AND EXPOSURE DEVICE 有权
    测量装置和曝光装置

    公开(公告)号:US20110176139A1

    公开(公告)日:2011-07-21

    申请号:US13007006

    申请日:2011-01-14

    IPC分类号: G01B9/02 G01B11/02

    摘要: An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.

    摘要翻译: 一种设备,包括:将从光源发射的光分成参考光和被摄体光的系统,使被摄体光进入物体,并将由物体反射的被摄体光与参考光组合;检测单元, 以检测组合的对象和参考光之间的相干光,设置在参考光或被摄体光的光路内的元件,被配置为改变参考光和被摄体光之间的路径长度差,以及相对于第 参考光和被摄体光在检测单元的光接收表面中;以及位置可变机构,被配置为使得光学元件的位置可变,其中,通过改变元件的位置,光程长度差 并且相对位置被独立调整。

    Shape measuring apparatus, shape measuring method, and exposure apparatus
    4.
    发明授权
    Shape measuring apparatus, shape measuring method, and exposure apparatus 有权
    形状测量装置,形状测量方法和曝光装置

    公开(公告)号:US07684050B2

    公开(公告)日:2010-03-23

    申请号:US11942348

    申请日:2007-11-19

    IPC分类号: G01B11/02

    摘要: A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.

    摘要翻译: 用于测量测量对象的表面形状的形状测量方法包括将来自光源的光分成测量光和参考光,测量光倾斜地入射到测量对象的表面上,参考光入射到参考反射镜 将由测量对象反射的测量光和由参考反射镜反射的参考光引入光电转换元件,在移动测量目标的同时检测由光电转换元件测量的光和参考光形成的干涉光,并测量 基于从已经在测量对象的表面上的相同位置反射的测量光获得的干涉信号来测量目标的表面形状。

    Light scattering type particle detector using scattered light of surface plasmon resonance photons
    5.
    发明授权
    Light scattering type particle detector using scattered light of surface plasmon resonance photons 有权
    光散射型粒子检测器采用散射光的表面等离子体共振光子

    公开(公告)号:US08717563B2

    公开(公告)日:2014-05-06

    申请号:US13313233

    申请日:2011-12-07

    IPC分类号: G01N21/00

    CPC分类号: G01N21/553

    摘要: A particle detector includes a light source, and a metal layer having an incident/reflective surface and a photoelectric surface opposing the incident/reflective surface. Incident light from the light source reaches the incident/reflective surface to excite near-field surface plasmon resonance photons at the photoelectric surface. A particle deposited on the photoelectric surface of the metal layer changes the near-field surface plasmon resonance photons to far-field scattered light. The particle detector further includes a scattered light detecting unit, provided above the photoelectric surface of the metal layer, for detecting the far-field scattered light.

    摘要翻译: 粒子检测器包括光源和具有入射/反射表面的金属层和与入射/反射表面相对的光电表面。 来自光源的入射光到达入射/反射表面以激发光电表面处的近场表面等离子体共振光子。 沉积在金属层的光电表面上的颗粒将近场表面等离子体共振光子改变为远场散射光。 粒子检测器还包括设置在金属层的光电表面上方的用于检测远场散射光的散射光检测单元。

    Exposure apparatus and device fabrication method
    6.
    发明授权
    Exposure apparatus and device fabrication method 失效
    曝光装置和装置制造方法

    公开(公告)号:US08625074B2

    公开(公告)日:2014-01-07

    申请号:US12577336

    申请日:2009-10-12

    IPC分类号: G03B27/52 G01B11/14 G03F9/00

    摘要: The present invention provides an exposure apparatus including a projection optical system configured to project a pattern of a reticle located on an object plane onto a substrate located on an image plane, a phase shift type mark mounted on a stage which holds the substrate, an image sensor which is set at one of a position of the object plane and a position optically conjugate to the object plane, and is configured to capture an image of the mark via the projection optical system, and a controller configured to control the stage based on an interval between edge images, formed by a pair of edge portions, in the image of the mark captured by the image sensor.

    摘要翻译: 本发明提供一种曝光装置,包括:投影光学系统,被配置为将位于物体平面上的标线片的图案投影到位于图像平面上的基板上;相移型标记,安装在保持基板的台上;图像 传感器,其设置在物体平面的位置和与物体平面光学共轭的位置之一处,并且被配置为经由投影光学系统捕获标记的图像;以及控制器,被配置为基于 由图像传感器捕获的标记的图像中由一对边缘部分形成的边缘图像之间的间隔。

    Light source apparatus having a solid light source element and a phosphor
    7.
    发明授权
    Light source apparatus having a solid light source element and a phosphor 有权
    具有固体光源元件和荧光体的光源装置

    公开(公告)号:US08564186B2

    公开(公告)日:2013-10-22

    申请号:US13232034

    申请日:2011-09-14

    IPC分类号: F21V9/16

    摘要: Provided is a light source apparatus having a phosphor layer which is subjected to a light beam of a predefined wavelength emitted from a solid light source element as an excitation light beam and which generates fluorescent beam by being excited by the incident excitation light beam and emits the fluorescence beam to outside, and a metal layer which is joined to a predefined surface among outer surfaces of the phosphor layer except an incident surface of the excitation light beam and an outgoing surface of the fluorescence beam for converting excitons excited from a section of the phosphor layer close to the predefined surface into a light beam via surface plasmon polaritons. The light beam converted from the excitons via the surface plasmon polaritons is emitted out of the outgoing surface of the phosphor layer together with the fluorescence beam.

    摘要翻译: 提供一种具有荧光体层的光源装置,该荧光体层受到从固体光源元件发射的预定波长的光束作为激发光束,并且通过被入射的激发光束激发而产生荧光束, 荧光束到外部的金属层,以及除了激发光束的入射表面和荧光束的出射表面之外的荧光体层的外表面中接合到预定表面的金属层,用于转换从荧光体的一部分激发的激子 层通过表面等离子体激元极化而接近预定义的表面进入光束。 通过表面等离子体激元从激子转换的光束与荧光束一起从荧光体层的出射表面射出。

    Photocathode apparatus using photoelectric effect of surface plasmon resonance photons
    8.
    发明授权
    Photocathode apparatus using photoelectric effect of surface plasmon resonance photons 有权
    光电阴极设备采用光电效应的表面等离子体共振光子

    公开(公告)号:US08481937B2

    公开(公告)日:2013-07-09

    申请号:US12465734

    申请日:2009-05-14

    IPC分类号: H01L25/00

    CPC分类号: H01J40/06

    摘要: A photocathode apparatus is constructed by a transparent body adapted to receive incident light, and a metal cover layer formed on a surface of the transparent body. The incident light reaches an incident/reflective surface of the metal cover layer through the surface of the transparent body to excite surface plasmon resonance light in the incident/reflective surface of the metal cover layer, thus emitting photoelectrons from a photoelectric surface of the metal cover layer opposite to the incident/reflective surface thereof by the photoelectric effect of one of the surface plasmon resonance photons and its second harmonic generation wave.

    摘要翻译: 光电阴极装置由适于接收入射光的透明体和形成在透明体的表面上的金属覆盖层构成。 入射光通过透明体的表面到达金属覆盖层的入射/反射表面,以激发金属覆盖层的入射/反射表面中的表面等离子体共振光,从而从金属覆盖层的光电表面发射光电子 通过其中一个表面等离子体共振光子及其二次谐波产生波的光电效应与入射/反射表面相对的层。

    Benzoxazepine derivatives and use thereof
    9.
    发明授权
    Benzoxazepine derivatives and use thereof 有权
    苯并西泮衍生物及其用途

    公开(公告)号:US08247403B2

    公开(公告)日:2012-08-21

    申请号:US12449975

    申请日:2008-03-06

    摘要: Compounds represented by the general formula (I): wherein each symbol is as defined in the description [with the proviso that 9-chloro-7-(1,1-dimethylethyl)-2,3,4,5-tetrahydro-1,4-benz-oxazepine and N-[[(5S)-2-oxo-3-(2,3,4,5-tetrahydro-1,4-benz-oxazepin-7-yl)-5-oxazolidinyl]methyl]acetamide are excluded], salts of the same, and prodrugs thereof have selective activation effect on serotonin 5-HT2C receptor and are useful as preventive and therapeutic agents for lower urinary tract diseases, obesity, and/or pelvic organ prolapse.

    摘要翻译: 由通式(I)表示的化合物:其中每个符号如说明书中所定义[条件是9-氯-7-(1,1-二甲基乙基)-2,3,4,5-四氢-1,1- 4-苯并恶唑并吖嗪和N - [[(5S)-2-氧代-3-(2,3,4,5-四氢-1,4-苯并恶唑-7-基)-5-恶唑烷基]甲基] 乙酰胺被排除],其盐和前药对5-羟色胺5-HT 2C受体具有选择性活化作用,并且可用作下尿路疾病,肥胖症和/或盆腔器官脱垂的预防和治疗剂。

    MAINTENANCE AND MANAGEMENT SYSTEM FOR ENDOTRACHEAL TUBE IN INTUBATION
    10.
    发明申请
    MAINTENANCE AND MANAGEMENT SYSTEM FOR ENDOTRACHEAL TUBE IN INTUBATION 审中-公开
    内窥镜管理维护管理系统

    公开(公告)号:US20110265795A1

    公开(公告)日:2011-11-03

    申请号:US12891370

    申请日:2010-09-27

    IPC分类号: A61M16/04

    摘要: A maintenance and management system for tracheal tube in tracheal intubation makes it easier or steadier to identify endotracheal tube placement in the airway, check a tracheal stenosis due to sputum clogging, confirm a breakaway of the tube out of the airway, store and monitor measured data, diagnose automatically the complications, and obtain data for reproducing function of sound in a breath circuit. A ventilator tube is connected to the endotracheal tube and provided therein with a microphone to sense a breath sound transmitted via the endotracheal tube and a pressure sensing element to measure a circuit pressure in the ventilator circuit for the endotracheal tube. The data derived from the sensing elements is processed in a personal computer to be used to measure whether the breath sound and the circuit pressure are within a range of a prescribed value.

    摘要翻译: 气管插管气管导管的维护和管理系统使得更容易或更稳定地识别气管插管在气道中的位置,检查由于痰液堵塞引起的气管狭窄,确认管脱离气道,存储和监测测量数据 ,自动诊断并发症,并获得呼吸电路中声音再现功能的数据。 通气管连接到气管内管并且在其中设置有麦克风以感测通过气管内导管传递的呼吸音和压力感测元件,以测量用于气管插管的通气机回路中的回路压力。 从感测元件导出的数据在个人计算机中进行处理,以用于测量呼吸音和电路压力是否在规定值的范围内。