摘要:
A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.
摘要:
An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.
摘要:
An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.
摘要:
A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.
摘要:
A particle detector includes a light source, and a metal layer having an incident/reflective surface and a photoelectric surface opposing the incident/reflective surface. Incident light from the light source reaches the incident/reflective surface to excite near-field surface plasmon resonance photons at the photoelectric surface. A particle deposited on the photoelectric surface of the metal layer changes the near-field surface plasmon resonance photons to far-field scattered light. The particle detector further includes a scattered light detecting unit, provided above the photoelectric surface of the metal layer, for detecting the far-field scattered light.
摘要:
The present invention provides an exposure apparatus including a projection optical system configured to project a pattern of a reticle located on an object plane onto a substrate located on an image plane, a phase shift type mark mounted on a stage which holds the substrate, an image sensor which is set at one of a position of the object plane and a position optically conjugate to the object plane, and is configured to capture an image of the mark via the projection optical system, and a controller configured to control the stage based on an interval between edge images, formed by a pair of edge portions, in the image of the mark captured by the image sensor.
摘要:
Provided is a light source apparatus having a phosphor layer which is subjected to a light beam of a predefined wavelength emitted from a solid light source element as an excitation light beam and which generates fluorescent beam by being excited by the incident excitation light beam and emits the fluorescence beam to outside, and a metal layer which is joined to a predefined surface among outer surfaces of the phosphor layer except an incident surface of the excitation light beam and an outgoing surface of the fluorescence beam for converting excitons excited from a section of the phosphor layer close to the predefined surface into a light beam via surface plasmon polaritons. The light beam converted from the excitons via the surface plasmon polaritons is emitted out of the outgoing surface of the phosphor layer together with the fluorescence beam.
摘要:
A photocathode apparatus is constructed by a transparent body adapted to receive incident light, and a metal cover layer formed on a surface of the transparent body. The incident light reaches an incident/reflective surface of the metal cover layer through the surface of the transparent body to excite surface plasmon resonance light in the incident/reflective surface of the metal cover layer, thus emitting photoelectrons from a photoelectric surface of the metal cover layer opposite to the incident/reflective surface thereof by the photoelectric effect of one of the surface plasmon resonance photons and its second harmonic generation wave.
摘要:
Compounds represented by the general formula (I): wherein each symbol is as defined in the description [with the proviso that 9-chloro-7-(1,1-dimethylethyl)-2,3,4,5-tetrahydro-1,4-benz-oxazepine and N-[[(5S)-2-oxo-3-(2,3,4,5-tetrahydro-1,4-benz-oxazepin-7-yl)-5-oxazolidinyl]methyl]acetamide are excluded], salts of the same, and prodrugs thereof have selective activation effect on serotonin 5-HT2C receptor and are useful as preventive and therapeutic agents for lower urinary tract diseases, obesity, and/or pelvic organ prolapse.
摘要:
A maintenance and management system for tracheal tube in tracheal intubation makes it easier or steadier to identify endotracheal tube placement in the airway, check a tracheal stenosis due to sputum clogging, confirm a breakaway of the tube out of the airway, store and monitor measured data, diagnose automatically the complications, and obtain data for reproducing function of sound in a breath circuit. A ventilator tube is connected to the endotracheal tube and provided therein with a microphone to sense a breath sound transmitted via the endotracheal tube and a pressure sensing element to measure a circuit pressure in the ventilator circuit for the endotracheal tube. The data derived from the sensing elements is processed in a personal computer to be used to measure whether the breath sound and the circuit pressure are within a range of a prescribed value.