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公开(公告)号：US07459827B2
公开(公告)日：2008-12-02
申请号：US11115107
申请日：2005-04-27
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US20080164237A1
公开(公告)日：2008-07-10
申请号：US12038568
申请日：2008-02-27
IPC分类号： H01L41/22
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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公开(公告)号：US20080074005A1
公开(公告)日：2008-03-27
申请号：US11946913
申请日：2007-11-29
申请人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya SANO , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H01L41/047
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
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公开(公告)号：US20080042521A1
公开(公告)日：2008-02-21
申请号：US11687707
申请日：2007-03-19
IPC分类号： H01L41/047
CPC分类号： H01H57/00 , H01G5/16 , H01H2057/006
摘要： It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.
摘要翻译： 无论残留应变是大还是小，并且具有优异的再现性和可靠性的机构，可以提供具有作用端和固定电极之间的距离的压电驱动的MEMS器件。 两个具有折叠梁结构的压电驱动致动器平行地并且以线对称的方式布置，并且在动作端附近彼此连接。
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公开(公告)号：US20070252485A1
公开(公告)日：2007-11-01
申请号：US11646684
申请日：2006-12-28
IPC分类号： H01L41/047
CPC分类号： H03H9/171 , H03H9/02228 , H03H9/0519 , H03H9/132 , H03H9/582
摘要： A thin-film piezoelectric resonator has a piezoelectric film which is formed via a space on a substrate and is supported on the substrate at least one location, an upper electrode which has a plurality of electrode layers and a connection part connecting the electrode layers to each other, each of the electrode layers being formed on the piezoelectric film, having the same width and being arranged at the same interval as the width, a lower electrode formed under the piezoelectric film, a first pad which is formed on the substrate and is electrically connected to the upper electrode, and a second pad which is formed on the substrate and is electrically connected to the lower electrode.
摘要翻译： 薄膜压电谐振器具有通过基板上的空间形成的压电膜，并且至少在一个位置上被支撑在基板上，上电极具有多个电极层，以及将电极层连接到每个电极层的连接部 另外，每个电极层形成在压电膜上，具有相同的宽度并且以与宽度相同的间隔布置，形成在压电膜下面的下电极，形成在基板上并且电连接的第一焊盘 连接到上电极，第二焊盘形成在基板上并与下电极电连接。
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公开(公告)号：US20070182520A1
公开(公告)日：2007-08-09
申请号：US11646624
申请日：2006-12-28
IPC分类号： H01F5/00
CPC分类号： H01F21/04 , H01F17/0006 , H01L41/0946 , H02N2/10
摘要： A variable inductor element has a substrate, a first inductor element which is fixedly arranged on the substrate, a second inductor element which is supported by the substrate, is magnetically coupled with the first inductor element and variably control a mutual conductance with the first inductor element, and at least one piezoelectric actuator pair which torsionally drives the second inductor element.
摘要翻译： 可变电感器元件具有衬底，固定地布置在衬底上的第一电感器元件，由衬底支撑的第二电感器元件，与第一电感器元件磁耦合并且可变地控制与第一电感器元件的互导 以及至少一个扭转地驱动第二电感器元件的压电致动器对。
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公开(公告)号：US20060132229A1
公开(公告)日：2006-06-22
申请号：US11299852
申请日：2005-12-12
IPC分类号： H03K9/04
CPC分类号： H03D3/241
摘要： A phase demodulator has a high frequency amplifier which amplifies a received signal modulated by phase, a voltage control oscillator which conducts oscillation operation in tune with the received signal amplified by the high frequency amplifier, a phase comparator which detects a phase difference between an output signal of the voltage control oscillator and a reference oscillation signal, and a demodulator which conducts demodulation process based on the phase difference.
摘要翻译： 相位解调器具有放大由相位调制的接收信号的高频放大器，与由高频放大器放大的接收信号进行振荡操作的压控振荡器;相位比较器，其检测输出信号 的压控振荡器和参考振荡信号，以及基于相位差进行解调处理的解调器。
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公开(公告)号：US20060103561A1
公开(公告)日：2006-05-18
申请号：US11268615
申请日：2005-11-08
IPC分类号： H03M3/00
CPC分类号： H04L27/2276
摘要： A digital demodulator includes a resonator having a resonance frequency same as a carrier frequency to store a charge corresponding to a digital signal modulated by phase shift keying, a capacitor to store the charge of the resonator, an amplifier including an input node and an output node between which the capacitor is connected to convert a stored charge of the capacitor into a voltage signal, and a controller configured to accumulate in the resonator the charge induced by the frequency signal modulated by phase shift keying in a first control mode and configured to transfer the charge of the resonator to the capacitor in a second control mode, to output the voltage signal corresponding to the stored charge of the capacitor from the output node of the amplifier.
摘要翻译： 数字解调器包括具有与载波频率相同的谐振频率的谐振器，以存储与通过相移键控调制的数字信号相对应的电荷，存储谐振器的电荷的电容器，包括输入节点和输出节点的放大器 其间连接有电容器以将存储的电容器的电荷转换成电压信号，以及控制器，被配置为在第一控制模式中在谐振器中累积由相移键控调制的频率信号引起的电荷， 在第二控制模式下将谐振器充电到电容器，以从放大器的输出节点输出与电容器的存储电荷相对应的电压信号。
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59.发明申请Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element 失效配有压电MEMS元件的压电MEMS元件和可调谐滤波器公开(公告)号：US20060067840A1
公开(公告)日：2006-03-30
申请号：US11229694
申请日：2005-09-20
CPC分类号： H03H9/542 , H01G5/16 , H01H57/00 , H01H2057/006 , H03H9/605 , H03H2007/008 , H03H2210/025 , H03H2210/033
摘要： In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.
摘要翻译： 在具有压电驱动机构的MEMS型可变容量中，具有可移动电极的可动头布置在其上，固定电极被定位成面对可动电极，并且压电驱动梁结构接合到可动头部，并且一端固定到 底物。 可动电极和固定电极形成可变容量。 在可变容量中，可变电容和可变电容的固定电极之间的距离和电容可以保持恒定，从而实现再现性和可靠的可控性。
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60.发明申请Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR 失效薄膜体声波谐振器（FBAR），FBAR实现的滤波器和FBAR制造方法公开(公告)号：US20060001508A1
公开(公告)日：2006-01-05
申请号：US11169645
申请日：2005-06-30
申请人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
发明人： Ryoichi Ohara , Naoko Yanase , Kazuhiko Itaya , Kenya Sano , Takaaki Yasumoto , Kazuhide Abe , Toshihiko Nagano , Michihiko Nishigaki , Takashi Kawakubo
IPC分类号： H03H9/56
CPC分类号： H03H9/02094 , H03H3/04 , H03H9/02133 , H03H9/173 , H03H9/174 , H03H9/703 , H03H2003/021 , H03H2003/023
摘要： A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.
摘要翻译： 薄膜体声波谐振器包括具有空腔的基板; 部分地固定在基板上的底部电极，底部电极的一部分机械地悬挂在空腔上方; 设置在底部电极上的压电层; 以及设置在压电体层上的顶电极，其具有沿着压电体层的厚度方向取向的晶轴，所述晶轴的取向分布的半峰全宽小于或等于约6度。
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